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公开(公告)号：US20140291545A1
公开(公告)日：2014-10-02
申请号：US14305681
申请日：2014-06-16
Inventor： GLENN E. LANE
IPC: H01J27/00
Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments of the subject method and apparatus are described including a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.
Abstract translation: 一种封闭的等离子体通道（“CPC”）超导体，其在第一实施例中由细长的近端真空导管组成，其包括具有纵向轴线并且限定用于容纳蒸汽等离子体的电离气体的透射空间的圆柱形壁 以下称为“等离子体部件”），响应于在传输空间内产生的静态磁场，等离子体部件基本上分离成与纵向轴线平行的区域化通道。 每个通道沿传输空间的整个长度建立。 至少建立了一个通道，主要由自由电子组成，其提供通过其传输能量的最小电阻的路径。 通过适当波长的光源的光电效应建立和维持电离以产生最导电的电传输介质。 描述了本发明方法和装置的各种实施例，其包括用于传输交流电的混合系统，或者通过圆柱形壁的多极EM场，以及通过分层通道的直流或带电粒子。
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公开(公告)号：US08754383B2
公开(公告)日：2014-06-17
申请号：US13759379
申请日：2013-02-05
Applicant: Glenn E. Lane
Inventor： Glenn E. Lane
Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments of the subject method and apparatus are described including a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.
Abstract translation: 一种封闭的等离子体通道（“CPC”）超导体，其在第一实施例中由细长的近端真空导管组成，其包括具有纵向轴线的圆柱形壁，并且限定用于容纳蒸汽等离子体的电离气体的透射空间 以下称为“等离子体部件”），响应于在传输空间内产生的静态磁场，等离子体部件基本上分离成与纵向轴线平行的区域化通道。 每个通道沿传输空间的整个长度建立。 至少建立了一个通道，主要由自由电子组成，其提供通过其传输能量的最小电阻的路径。 通过适当波长的光源的光电效应建立和维持电离以产生最导电的电传输介质。 描述了本发明方法和装置的各种实施例，其包括用于传输交流电的混合系统，或者通过圆柱形壁的多极EM场，以及通过分层通道的直流或带电粒子。
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公开(公告)号：US5049753A
公开(公告)日：1991-09-17
申请号：US549885
申请日：1990-06-28
Applicant: Larry D. Flesner
Inventor： Larry D. Flesner
IPC: H01J3/02 , H01J27/00 , H01J37/073 , H01J37/248 , H02J17/00 , H05H5/00
CPC classification number: H02J17/00 , H01J27/00 , H01J3/021 , H01J37/073 , H01J37/248 , H05H5/00 , H01J2201/342
Abstract: A charged particle control apparatus provides very high voltage particle beams. One or more photocell arrays provide bias voltages for beam accelerating stages. The arrays are made from a number of microfabricated photocells connected in series to produce a voltage output that is the sum of the voltages from the individual cells. Arrays of each stage are connected in series to produce a cumulative stage voltage that is applied to an accelerating electrode made part of the stage.These accelerating stages are disposed within a transparent vacuum chamber and are spaced from a charged particle source stage disposed near one end of the chamber. This charged particle source stage includes an emission source such as a photocathode. The photo arrays of the accelerating stages are connected in series to produce a potential that is applied to the particle source stage.Optical power illuminates the stages to generate desired voltage biases to the accelerating electrodes. A light source is used to excite the photocathode when this emission source is used. Electrons from the emission source are accelerated by the accelerating electrodes and are emitted from the chamber which is typically conjoined with other apparatus.By utilizing photocell arrays to generate beam current and accelerating biases, as well as a photocathode for providing a source of electrons, the apparatus of the invention is completely optically isolated thereby requiring no direct electrical connections to the apparatus even though multiple accelerating stages are used to facilitate the achievement of very high voltage particle beams.
Abstract translation: 带电粒子控制装置提供非常高电压的粒子束。 一个或多个光电池阵列为光束加速阶段提供偏置电压。 阵列由多个串联连接的微细胞光电池制成，以产生电压输出，该电压输出是来自各个单元的电压之和。 每个级的阵列串联连接以产生累加级电压，该电压施加到制成该级的一部分的加速电极。 这些加速阶段设置在透明真空室内并与设置在室的一端附近的带电粒子源级间隔开。 该带电粒子源级包括诸如光电阴极的发射源。 加速级的光阵列被串联连接以产生施加到粒子源级的电位。 光功率照亮阶段以产生对加速电极的期望的电压偏压。 当使用该发射源时，使用光源来激发光电阴极。 来自发射源的电子被加速电极加速并且从通常与其他装置结合的室发射。 通过利用光电池阵列产生射束电流和加速偏置，以及用于提供电子源的光电阴极，本发明的装置是完全光学隔离的，因此即使使用多个加速阶段也不需要与设备的直接电连接 有助于实现非常高电压的粒子束。
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公开(公告)号：US3268860A
公开(公告)日：1966-08-23
申请号：US34614664
申请日：1964-02-20
Applicant: EXXON PRODUCTION RESEARCH CO
Inventor： WISCHMEYER CARL R
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公开(公告)号：US09677171B2
公开(公告)日：2017-06-13
申请号：US14298251
申请日：2014-06-06
Inventor： Bon-Woong Koo , Christopher J. Leavitt , John A. Frontiero , Timothy J. Miller , Svetlana B. Radovanov
CPC classification number: C23C14/564 , C23C14/14 , C23C14/48 , H01J27/00 , H01J37/3171 , H01J37/3178 , H01J37/32412
Abstract: A method of processing a workpiece is disclosed, where the plasma chamber is first coated using a conditioning gas and optionally, a co-gas. The conditioning gas, which is disposed within a conditioning gas container may comprise a hydride of the desired dopant species and a filler gas, where the filler gas is a hydride of a Group 4 or Group 5 element. The remainder of the conditioning gas container may comprise hydrogen gas. Following this conditioning process, a feedgas, which comprises fluorine and the desired dopant species, is introduced to the plasma chamber and ionized. Ions are then extracted from the plasma chamber and accelerated toward the workpiece, where they are implanted without being first mass analyzed. In some embodiments, the desired dopant species may be boron.
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Patent Agency Ranking
公开(公告)号：US20160131548A1
公开(公告)日：2016-05-12
申请号：US14536102
申请日：2014-11-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Scott C. Heinbuch
IPC: G01L21/34
CPC classification number: G01L21/34 , G01L21/30 , G01L21/32 , H01J27/00 , H01J27/02 , H01J37/04 , H01J37/08 , H01J41/00 , H01J41/02 , H01J41/06
Abstract: A Long Lifetime Cold Cathode Ionization Vacuum Gauge Design with an extended anode electrode having an axially directed tip, a cathode electrode, and a baffle structure. The axially directed tip of the anode electrode can have a rounded exterior with a diameter at least 10% greater than the diameter of the anode electrode.
Abstract translation: 长寿命冷阴极电离真空计设计具有带有轴向引导尖端的延伸阳极电极，阴极电极和挡板结构。 阳极电极的轴向定向的尖端可以具有圆形的外部，其直径比阳极电极的直径大至少10％。
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公开(公告)号：US20130146782A1
公开(公告)日：2013-06-13
申请号：US13759379
申请日：2013-02-05
Applicant: GLENN E. LANE
Inventor： GLENN E. LANE
IPC: H01J27/00
Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments of the subject method and apparatus are described including a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.
Abstract translation: 一种封闭的等离子体通道（“CPC”）超导体，其在第一实施例中由细长的近端真空导管组成，其包括具有纵向轴线的圆柱形壁，并且限定用于容纳蒸汽等离子体的电离气体的透射空间 以下称为“等离子体部件”），响应于在传输空间内产生的静态磁场，等离子体部件基本上分离成与纵向轴线平行的区域化通道。 每个通道沿传输空间的整个长度建立。 至少建立了一个通道，主要由自由电子组成，其提供通过其传输能量的最小电阻的路径。 通过适当波长的光源的光电效应建立和维持电离以产生最导电的电传输介质。 描述了本发明方法和装置的各种实施例，其包括用于传输交流电的混合系统，或者通过圆柱形壁的多极EM场，以及通过分层通道的直流或带电粒子。
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公开(公告)号：US08368033B2
公开(公告)日：2013-02-05
申请号：US13075138
申请日：2011-03-29
Applicant: Glenn Lane
Inventor： Glenn Lane
IPC: H01J49/00
Abstract: A closed plasma channel (“CPC”) superconductor which, in a first embodiment, is comprised of an elongated, close-ended vacuum conduit comprising a cylindrical wall having a longitudinal axis and defining a transmission space for containing an ionized gas of vapor plasma (hereinafter “plasma components”), the plasma components being substantially separated into regionalized channels parallel to the longitudinal axis in response to a static magnetic field produced within the transmission space. Each channel is established along the entire length of the transmission space. At least one channel is established comprised primarily of free-electrons which provide a path of least resistance for the transmission of energy therethrough. Ionization is established and maintained by the photoelectric effect of a light source of suitable wavelength to produce the most conductive electrical transmission medium. Various embodiments of the subject method and apparatus are described including a hybrid system for the transmission of alternating current or, alternatively, multi-pole EM fields through the cylindrical wall and direct current or charged particles through the stratified channels.
Abstract translation: 一种封闭的等离子体通道（CPC）超导体，其在第一实施例中由细长的近端真空导管组成，其包括具有纵向轴线的圆柱形壁，并且限定用于容纳蒸气等离子体的电离气体的传播空间（以下称为等离子体 部件），响应于在传动空间内产生的静态磁场，等离子体部件基本上分开成平行于纵向轴线的区域化通道。 每个通道沿传输空间的整个长度建立。 至少建立了一个通道，主要由自由电子组成，其提供通过其传输能量的最小电阻的路径。 通过适当波长的光源的光电效应建立和维持电离以产生最导电的电传输介质。 描述了本发明方法和装置的各种实施例，其包括用于传输交流电的混合系统，或者通过圆柱形壁的多极EM场，以及通过分层通道的直流或带电粒子。
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公开(公告)号：US20020130039A1
公开(公告)日：2002-09-19
申请号：US10091539
申请日：2002-03-07
Applicant: VACUUM PRODUCTS CORPORATION
Inventor： Hisao Hojoh , Masatoshi Ono , Morinobu Endo , Tetsuo Uchiyama
IPC: C25C007/00 , C25F007/00
CPC classification number: H01J37/08 , H01J27/00 , H01J37/065 , H01J37/073 , H01J37/3056 , H01J2237/006 , H01J2237/061 , H01J2237/06316 , H01J2237/0807
Abstract: A charged particle generating method in which mode is changeable between an ion generation mode and an electron generation mode. In the ion generation mode, a raw material is supplied to a tip end of a charged particle generating electrode through a raw-material passage formed in the charged particle generating electrode. A first electric field, in which the charged particle generating electrode is positive and the charged particle extract electrode is negative, is generated to emit ions from the raw material at the charged particle generating electrode. In the electron generation mode, supplying the raw material from the raw-material supply section is stopped. A second electric field, in which the charged particle generating electrode is negative and the charged particle extract electrode is positive, is generated to emit electrons from the raw material at the charged particle generating electrode.
Abstract translation: 一种带电粒子产生方法，其中模式可在离子产生模式和电子生成模式之间变化。 在离子产生模式中，通过形成在带电粒子产生电极中的原料通道将原料供给到带电粒子产生电极的末端。 产生其中带电粒子产生电极为正的并且带电粒子提取电极为负的第一电场，以从带电粒子产生电极的原料发射离子。 在电子生成模式中，停止从原料供给部供给原料。 产生其中带电粒子产生电极为负并且带电粒子提取电极为正的第二电场，以从带电粒子产生电极的原料发射电子。
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公开(公告)号：US4439684A
公开(公告)日：1984-03-27
申请号：US263929
申请日：1981-05-15
Applicant: Johann Hemmerich , Peter Kupschus , Helmut Frankle
Inventor： Johann Hemmerich , Peter Kupschus , Helmut Frankle
Abstract: An accelerating grid particularly for an ion beam, consisting of at least e orifice plate which is fastened along an elastic outer rim thereof to a support. The orifice plate or plates includes a plurality of through-holes with mutually oriented central axes, preferably directed towards a common focusing point. A plurality of slots in the elastic outer rim maintain the alignment of the orifice plate center relative to the focus point during heat-induced expansion of the plate.
Abstract translation: 特别是用于离子束的加速格栅，由至少一个孔板组成，该孔板沿其弹性外边缘固定到支撑件上。 孔板包括多个具有相互取向的中心轴的通孔，优选地朝向公共聚焦点。 弹性外缘中的多个槽在板的热引起的膨胀期间保持孔板中心相对于焦点的对准。
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