Abstract:
A spectral image input device has an image forming optical system for forming an image of image light on an image forming surface and a phase difference generating unit disposed anterior to the image forming surface in the direction of image light travel. The phase difference generating unit constitutes, sequentially in the direction of image light travel, a polarizer for transmitting only polarized light in a specific direction, an optical element formed of a solid material having a birefringence, and arranged such that the principal refraction index axis is inclined 45null relative to the polarization angle of the analyzer, the optical element generating a phase difference in accordance with the wavelength of the image light based on the difference in the physical thickness of the optical element in the direction of image light travel and an analyzer for transmitting only the image light of a polarization angle of 90null relative to the direction of the polarized light of the polarizer.
Abstract:
The present invention provides a wavemeter for an ultraviolet laser capable of long life beam quality monitoring in a pulsed ultraviolet laser system at pulse rates greater than 2000 Hz at pulse energies at 5 mJ or greater. In a preferred embodiment an enhanced illumination configuration reduces per pulse illumination of an etalon by a factor of 28 compared to a popular prior art configuration. Optics are provided in this embodiment which reduce light entering the etalon to only that amount needed to illuminate a linear photo diode array positioned to measure interference patterns produced by the etalon. In this preferred embodiment two sample beams produced by reflections from two surfaces of a beam splitter are diffused by a defractive diffuser and the output of the defractive diffuser is focused on two separate secondary diffusers effectively combining both beams in two separate spectrally equivalent diffuse beams. One beam is used for wavelength and bandwidth measurement and the other beam is used for calibration. In preferred embodiments an etalon chamber contains nitrogen with an oxygen concentration of between 1.6 and 2.4 percent.
Abstract:
An optical spectrum analyzer involves a swept local oscillator signal that is depolarized before the swept local oscillator signal is combined with an input signal. An embodiment of a system for optical spectrum analysis includes a depolarizer, an optical coupler, and a heterodyne receiver. The depolarizer has an input to receive a swept local oscillator signal and an output for outputting a depolarized swept local oscillator signal. The optical coupler has a first input and a second input, the first input receiving an input signal, the second input being optically connected to the depolarizer to receive the depolarized swept local oscillator signal. The optical coupler also has an output for outputting a combined optical signal that includes the input signal and the depolarized swept local oscillator signal. The heterodyne receiver has an input for receiving the combined optical signal from the optical coupler and an output for outputting an electrical signal representative of the combined optical signal. In an embodiment, the swept local oscillator signal is depolarized such that the average polarization state of the swept local oscillator signal contains no preferential polarization state.
Abstract:
A stage apparatus on which a laser interferometer is mounted includes a reticle stage (1) movable in three, X-, Y-, and null-axes, laser heads (8a-8d) each for generating a laser beam, interferometers (9a-9d) each of which is mounted on the stage (1) and splits the laser beam into reference and measurement beams, bar mirrors (11a-11c) each of which is arranged outside the stage (1) and reflects the measurement beam, and detectors (10a-10c) each for detecting the interference beam of the reference and measurement beams.