公开(公告)号：US08598527B2

公开(公告)日：2013-12-03

申请号：US13303121

申请日：2011-11-22

申请人： Christopher Su-Yan Own ,  William Andregg ,  Michael Lee Andregg

发明人： Christopher Su-Yan Own ,  William Andregg ,  Michael Lee Andregg

IPC分类号： H01J37/26 ,  G01N23/02 ,  G01N13/12

CPC分类号： H01J37/261 ,  C12Q1/6869 ,  H01J2237/248 ,  H01J2237/2802 ,  Y10S430/143 ,  C12Q2565/601 ,  C12Q2565/607

摘要： A scanning transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam to a probe, such as for example a longitudinally stretched probe. A stage is provided to hold a specimen in the path of the electron beam. The specimen may include one or more elongated objects, such as for example polymers to be sequenced. A beam scanner scans the electron beam across the specimen. A controller may define one or more scanning areas corresponding to the locations of the elongated objects, and control one or more of the beam scanner and stage to selectively scan the electron beam probe in the scanning areas. The controller may also tune the beam optics during imaging. One or more detectors are provided to detect electrons transmitted through the specimen to generate an image for each of the scanning areas. The controller may also analyze the one or more images to determine information regarding the specimen, such as for example to sequence a polymer.

摘要翻译： 扫描透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以将电子束会聚到探针，例如纵向延伸的探针。 提供了一个台架以将样本保持在电子束的路径中。 样品可以包括一个或多个细长物体，例如要测序的聚合物。 光束扫描器扫描穿过样品的电子束。 控制器可以定义对应于细长物体的位置的一个或多个扫描区域，并且控制束扫描器和台中的一个或多个以选择性地扫描扫描区域中的电子束探针。 控制器还可以在成像期间调整光束光学元件。 提供一个或多个检测器以检测通过样本传输的电子，以产生每个扫描区域的图像。 控制器还可以分析一个或多个图像以确定关于样本的信息，例如对聚合物进行排序。

公开(公告)号：US07649172B2

公开(公告)日：2010-01-19

申请号：US11798770

申请日：2007-05-16

申请人： Masaru Ozawa ,  Hiromi Inada ,  Daisuke Terauchi ,  Hiroyuki Tanaka

发明人： Masaru Ozawa ,  Hiromi Inada ,  Daisuke Terauchi ,  Hiroyuki Tanaka

IPC分类号： H01J37/26 ,  G01N13/12

CPC分类号： H01J37/28 ,  G06T5/006 ,  G06T2207/10056 ,  G06T2207/20008 ,  G06T2207/20056 ,  H01J37/22 ,  H01J37/265 ,  H01J2237/223 ,  H01J2237/282

摘要： Charged particle beam equipment enables the simultaneous measurement and correction of magnification errors in both X and Y directions in one measurement without requiring the elimination of displacement, if any, in rotation direction between the direction of a periodic structure pattern of a sample having a known periodic structure and the X or Y direction on an electron image of the sample. The charged particle beam equipment of the invention enables the simultaneous measurement of magnification errors in the X and Y directions by FFT transformation and coordinate transformation of an electron image, even when there is a displacement in rotation direction between the direction of the periodic structural pattern and the X or Y direction on the electron image of the sample.

摘要翻译： 带电粒子束设备能够在一次测量中同时测量和校正X和Y方向上的倍率误差，而不需要消除具有已知周期性的样品的周期性结构图案的方向之间的旋转方向上的位移（如果有的话） 结构和样品的电子图像上的X或Y方向。 本发明的带电粒子束设备能够通过FFT转换和电子图像的坐标变换来同时测量X和Y方向的倍率误差，即使在周期性结构图案的方向和 样品的电子图像上的X或Y方向。

公开(公告)号：US07485857B2

公开(公告)日：2009-02-03

申请号：US11519212

申请日：2006-09-11

申请人： Robert H. Blick

发明人： Robert H. Blick

IPC分类号： G12B21/02 ,  G12B21/04 ,  G12B21/08 ,  G01N13/10 ,  G01N13/12 ,  G01N13/16

CPC分类号： G01Q70/10 ,  G01N23/00 ,  G01Q60/04 ,  G01Q60/16 ,  G01Q60/30 ,  G01Q70/14 ,  Y10S977/875 ,  Y10S977/878 ,  Y10S977/879

摘要： The present invention provides microcoaxial probes fabricated from semiconductor heterostructures that include strained semiconductor bilayers. The microcoaxial probes are well suited for use as scanning probes in scanning probe microscopy, including scanning tunneling microscopy (STM), atomic force microscopy (AFM), scanning microwave microscopy, or a combination thereof.

摘要翻译： 本发明提供由包括应变半导体双层的半导体异质结构制造的微轴向探针。 微扫描探针非常适合用作扫描探针显微镜中的扫描探针，包括扫描隧道显微镜（STM），原子力显微镜（AFM），扫描微波显微镜或其组合。

公开(公告)号：US07302832B2

公开(公告)日：2007-12-04

申请号：US10748526

申请日：2003-12-29

申请人： Andrew Berlin ,  Narayanan Sundararajan ,  Mineo Yamakawa ,  Valluri R. Rao

发明人： Andrew Berlin ,  Narayanan Sundararajan ,  Mineo Yamakawa ,  Valluri R. Rao

IPC分类号： G01N13/12 ,  G01N13/16

CPC分类号： G01Q60/04 ,  G01Q70/06 ,  G01Q70/12 ,  G01Q70/18

摘要： A surface analysis device is disclosed for identifying molecules by simultaneously scanning nanocodes on a surface of a substrate. The device includes a scanning array that is capable of simultaneously scanning the nanocodes on the surface of the substrate and an analyzer that is coupled with the scanning array. The analyzer is capable of receiving simultaneously scanned information from the scanning array and identifying molecules associated with the nanocodes.

摘要翻译： 公开了通过同时扫描基底表面上的纳代码来识别分子的表面分析装置。 该器件包括能够同时扫描衬底表面上的纳代码的扫描阵列和与扫描阵列耦合的分析器。 分析仪能够同时接收来自扫描阵列的扫描信息并识别与纳代码相关的分子。

公开(公告)号：US06875981B2

公开(公告)日：2005-04-05

申请号：US10333318

申请日：2002-03-22

申请人： Osamu Nishikawa

发明人： Osamu Nishikawa

IPC分类号： G01Q30/02 ,  G01Q60/00 ,  G01Q70/10 ,  H01J37/256 ,  H01J37/285 ,  H01J49/06 ,  H01J49/40 ,  G12B21/04 ,  G01N13/12

CPC分类号： G01Q30/02 ,  H01J37/256 ,  H01J37/285 ,  H01J49/06 ,  H01J49/40 ,  H01J2237/2443 ,  H01J2237/2446 ,  H01J2237/2818 ,  Y10S977/852

摘要： In a scanning atom probe (100), a surface topography of a specimen (3) is firstly analyzed by a surface topography analyzing unit (20). In the next place, an extraction electrode (5) is aligned to a desired area to be analyzed of a specimen surface. In case of analyzing electronic state of the area to be analyzed, negative bias voltage is impressed onto the specimen (3) from a direct current high voltage supply (2) and field emitted electrons are detected by a screen (9). In case of analyzing atomic arrangement and composition of the area to be analyzed, positive voltage is impressed onto the specimen (3) from the direct current high voltage supply (2) and a pulse generator (1) and positive ions generated by field evaporation are detected by a position sensitive ion detector (11) or a relfectron type mass analyzer (13).

摘要翻译： 在扫描原子探针（100）中，首先通过表面形貌分析单元（20）分析样品（3）的表面形貌。 接下来，将取出电极（5）与要分析的试样表面的所需区域对准。 在分析要分析的区域的电子状态的情况下，从直流高压电源（2）将负偏压施加到样品（3）上，并且通过屏幕（9）检测场发射的电子。 在分析待分析区域的原子排列和组成的情况下，从直流高压电源（2）和脉冲发生器（1）向样品（3）施加正电压，通过场蒸发产生的正离子为 通过位置敏感离子检测器（11）或再生型质量分析仪（13）检测。

公开(公告)号：US6118121A

公开(公告)日：2000-09-12

申请号：US286793

申请日：1999-04-06

申请人： Toshio Ando ,  Yoshiaki Hayashi

发明人： Toshio Ando ,  Yoshiaki Hayashi

IPC分类号： G01B21/30 ,  G01N37/00 ,  G01Q10/00 ,  G01Q10/04 ,  G01Q60/24 ,  G01Q70/02 ,  G01Q90/00 ,  H01J37/20 ,  H01J37/28 ,  G01N13/12

CPC分类号： G01Q10/04 ,  B82Y35/00 ,  Y10S977/87 ,  Y10S977/872

摘要： A cantilever is attached to a moving block by means of a holder. Three sapphire plates are provided at a corner of the moving block so that their respective planes extend at right angles to one another. Three piezo-actuators are displaceable in directions intersecting at right angles to one another, and fixed with their one ends to stationary tables, respectively. Sapphire plates are attached individually to the respective other ends of the piezo-actuators. Each sapphire plate faces its corresponding sapphire plate on the moving block with ruby spheres between them. Two attracting magnets are attached individually to the respective sapphire plates at the center. The magnets face each other with a narrow enough space of, e.g., several micrometers between them.

摘要翻译： 通过支架将悬臂连接到移动块。 在移动块的角部设置三个蓝宝石板，使得它们各自的平面彼此成直角延伸。 三个压电致动器可以在彼此成直角相交的方向上移位，并分别固定在固定台上。 蓝宝石板分别连接到压电致动器的相应另一端。 每个蓝宝石板在移动块上面对相应的蓝宝石板，并在它们之间具有红宝石球。 两个吸引磁铁分别连接到中心的相应蓝宝石板。 磁体彼此面对，其间具有例如几微米的足够窄的空间。

公开(公告)号：US09093250B2

公开(公告)日：2015-07-28

申请号：US14483522

申请日：2014-09-11

申请人： FUJITSU LIMITED

发明人： Takashi Yamazaki ,  Yasutoshi Kotaka

IPC分类号： H01J37/28 ,  H01J37/244 ,  G01N23/04 ,  G01N13/12 ,  H01J37/22

CPC分类号： H01J37/222 ,  H01J37/28 ,  H01J2237/225 ,  H01J2237/24495 ,  H01J2237/2802

摘要： A scanning transmission electron microscope system includes: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum.

摘要翻译： 扫描透射电子显微镜系统包括：环状暗场检测器; 电子能量损失光谱仪，被配置为从环状暗场检测器获取第一电子束的电子能量损失光谱谱; 以及图像处理装置，被配置为基于来自所述环形暗场检测器的输出信号生成第一STEM图像，并且基于所述电子能量损失光谱谱的积分值生成第二STEM图像。

公开(公告)号：US08569694B2

公开(公告)日：2013-10-29

申请号：US13657843

申请日：2012-10-22

申请人： Mochii, Inc.

发明人： Christopher Su-Yan Own ,  Andrew Bleloch ,  Paul John Dabrowski

IPC分类号： G01N23/00 ,  G01N23/02 ,  G01N13/12 ,  H01J37/26

CPC分类号： H01J37/153 ,  H01J37/26 ,  H01J2237/2614 ,  H01J2237/262

摘要： A transmission electron microscope includes an electron beam source to generate an electron beam. Beam optics are provided to converge the electron beam. An aberration corrector comprising either a foil or a set of concentric elements corrects the electron beam for at least a spherical aberration. A specimen holder is provided to hold a specimen in the path of the electron beam. A detector is used to detect the electron beam transmitted through the specimen. The transmission electron microscope may be configured to operate in a dark-field mode in which a zero beam of the electron beam is not detected. The microscope may also be capable of operating in an incoherent illumination mode.

摘要翻译： 透射电子显微镜包括用于产生电子束的电子束源。 光束被提供以会聚电子束。 包括箔或一组同心元件的像差校正器校正至少球面像差的电子束。 提供试样保持器以将样品保持在电子束的路径中。 检测器用于检测透过样品的电子束。 透射电子显微镜可以被配置为在没有检测到电子束的零光束的暗场模式下操作。 显微镜也可能能够以非相干照明模式操作。

公开(公告)号：US08250667B2

公开(公告)日：2012-08-21

申请号：US12744587

申请日：2008-12-01

申请人： Krister Svensson ,  Paul Bengtsson ,  Simon J. Altenburg

发明人： Krister Svensson ,  Paul Bengtsson ,  Simon J. Altenburg

IPC分类号： G01N13/12

CPC分类号： G01Q10/065 ,  G01Q30/04

摘要： A method, system, device, and software for automatically determining PI feedback parameters in a scanning probe microscopy application setup using an iterative feedback tuning process.

摘要翻译： 用于使用迭代反馈调谐过程在扫描探针显微镜应用程序设置中自动确定PI反馈参数的方法，系统，设备和软件。

公开(公告)号：US07573047B2

公开(公告)日：2009-08-11

申请号：US11712011

申请日：2007-02-28

申请人： Hiroyuki Suzuki

发明人： Hiroyuki Suzuki

IPC分类号： G21K5/08 ,  G01N13/12

CPC分类号： H01L21/68728 ,  H01L21/67213 ,  H01L21/67748

摘要： A wafer holder includes: a frame-shaped holder main body which has an opening at its center and carries a wafer on its upper surface; guide members which contact the outer periphery of the wafer placed on the holder main body and position the wafer on the holder main body; and cross section sample holding members which are disposed on an outer circumference of the holder main body and holds a cross section sample produced from the wafer. Each of the cross section sample holding members includes plate-shaped sample stands to which the cross section sample is fixed, and fixing stands each of which is detachably attached to the holder main body and pinches the sample stand such that the sample stand is attachable to and detachable from the fixing stand.

摘要翻译： 晶片保持器包括：框架保持器主体，其中心具有开口并在其上表面承载晶片; 引导构件，其与放置在保持器主体上的晶片的外周接触并将晶片定位在保持器主体上; 以及横截面样品保持构件，其设置在保持器主体的外周上并且保持从晶片产生的横截面样本。 每个横截面样品保持构件包括固定有横截面样本的板状样品台，以及固定架，每个固定架可拆卸地安装在保持器主体上，并夹住样品台，使得样品台可附接到 并可从固定台拆下。