公开(公告)号：US11018147B1

公开(公告)日：2021-05-25

申请号：US16781798

申请日：2020-02-04

Applicant: Silicon Storage Technology, Inc.

Inventor： Jinho Kim ,  Elizabeth Cuevas ,  Parviz Ghazavi ,  Bernard Bertello ,  Gilles Festes ,  Catherine Decobert ,  Yuri Tkachev ,  Bruno Villard ,  Nhan Do

IPC: H01L21/00 ,  H01L27/11534 ,  H01L21/28 ,  H01L21/311 ,  H01L21/02 ,  H01L29/423 ,  H01L29/08 ,  H01L21/027 ,  H01L27/11521 ,  H01L29/788

Abstract: A method of forming a memory device includes forming a floating gate on a memory cell area of a semiconductor substrate, having an upper surface terminating in an edge. An oxide layer is formed having first and second portions extending along the logic and memory cell regions of the substrate surface, respectively, and a third portion extending along the floating gate edge. A non-conformal layer is formed having a first, second and third portions covering the oxide layer first, second and third portions, respectively. An etch removes the non-conformal layer third portion, and thins but does not entirely remove the non-conformal layer first and second portions. An etch reduces the thickness of the oxide layer third portion. After removing the non-conformal layer first and second portions, a control gate is formed on the oxide layer second portion and a logic gate is formed on the oxide layer first portion.

公开(公告)号：US11011240B2

公开(公告)日：2021-05-18

申请号：US16879663

申请日：2020-05-20

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Anh Ly ,  Thuan Vu

IPC: G11C16/34 ,  G11C16/04 ,  G11C16/10 ,  G11C16/08 ,  G11C16/16 ,  G11C16/28

Abstract: The present invention relates to a flash memory cell with only four terminals and a high voltage row decoder for operating an array of such flash memory cells. The invention allows for fewer terminals for each flash memory cell compared to the prior art, which results in a simplification of the decoder circuitry and overall die space required per flash memory cells. The invention also provides for the use of high voltages on one or more of the four terminals to allow for read, erase, and programming operations despite the lower number of terminals compared to prior art flash memory cells.

公开(公告)号：US20210142854A1

公开(公告)日：2021-05-13

申请号：US17125459

申请日：2020-12-17

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Vipin Tiwari ,  Nhan Do ,  Mark Reiten

IPC: G11C16/10 ,  G11C16/16 ,  G06N3/063

Abstract: Numerous embodiments of programming, verifying, and reading systems and methods for use with a vector-by-matrix multiplication (VMM) array in an artificial neural network are disclosed. Selected cells can be programmed and verified with extreme precision to hold one of N different values. During a read operation, the system determines which of the N different values is stored in a selected cell.

公开(公告)号：US20210005724A1

公开(公告)日：2021-01-07

申请号：US16796412

申请日：2020-02-20

Applicant: Silicon Storage Technology, Inc.

Inventor： Chunming Wang ,  Xian Liu ,  Nhan Do ,  Leo Xing ,  Guo Yong Liu ,  Melvin Diao

IPC: H01L21/28 ,  H01L27/11521

Abstract: A method of forming a memory device that includes forming a first polysilicon layer using a first polysilicon deposition over a semiconductor substrate, forming an insulation spacer on the first polysilicon layer, and removing some of the first polysilicon layer to leave a first polysilicon block under the insulation spacer. A source region is formed in the substrate adjacent a first side surface of the first polysilicon block. A second polysilicon layer is formed using a second polysilicon deposition. The second polysilicon layer is partially removed to leave a second polysilicon block over the substrate and adjacent to a second side surface of the first polysilicon block. A third polysilicon layer is formed using a third polysilicon deposition. The third polysilicon layer is partially removed to leave a third polysilicon block over the source region. A drain region is formed in the substrate adjacent to the second polysilicon block.

公开(公告)号：US10861568B2

公开(公告)日：2020-12-08

申请号：US16590798

申请日：2019-10-02

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Vipin Tiwari ,  Nhan Do

IPC: G11C16/34 ,  G11C16/04 ,  G06N3/08 ,  G11C16/30 ,  G11C16/26 ,  G11C11/54

Abstract: Numerous embodiments of a data refresh method and apparatus for use with a vector-by-matrix multiplication (VMM) array in an artificial neural network are disclosed. Various embodiments of a data drift detector suitable for detecting data drift in flash memory cells within the VMM array are disclosed.

公开(公告)号：US10860918B2

公开(公告)日：2020-12-08

申请号：US16182492

申请日：2018-11-06

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Thuan Vu ,  Stanley Hong ,  Anh Ly

IPC: G06F17/16 ,  G06N3/04 ,  G06N3/063 ,  G11C16/04 ,  G11C16/10 ,  G11C16/34 ,  G11C16/14 ,  G11C16/30 ,  G11C16/08 ,  G06N3/08

Abstract: Numerous embodiments are disclosed for an analog neuromorphic memory system for use in a deep learning neural network. The analog neuromorphic memory system comprises a plurality of vector-by-matrix multiplication arrays and various components shared by those arrays. The shared components include high voltage generation blocks, verify blocks, and testing blocks. The analog neuromorphic memory system optionally is used within a long short term memory system or a gated recurrent unit system.

公开(公告)号：US10818680B2

公开(公告)日：2020-10-27

申请号：US16578104

申请日：2019-09-20

Applicant: Silicon Storage Technology, Inc.

Inventor： Feng Zhou ,  Jinho Kim ,  Xian Liu ,  Serguei Jourba ,  Catherine Decobert ,  Nhan Do

IPC: H01L27/11531 ,  H01L29/423 ,  H01L29/10 ,  H01L29/66 ,  H01L27/11521 ,  H01L29/78 ,  H01L29/788

Abstract: A semiconductor substrate having an upper surface with a plurality of upwardly extending fins. A memory cell formed on a first of the fins and including spaced apart source and drain regions in the first fin, with a channel region extending therebetween along top and side surfaces of the first fin, a floating gate that extends along a first portion of the channel region, a select gate that extends along a second portion of the channel region, a control gate that extends along and is insulated from the floating gate, and an erase gate that extends along and is insulated from the source region. A logic device formed on a second of the fins and including spaced apart logic source and logic drain regions in the second fin, with a logic channel region of the second fin extending therebetween, and a logic gate that extends along the logic channel region.

公开(公告)号：US10804902B1

公开(公告)日：2020-10-13

申请号：US16732047

申请日：2019-12-31

Applicant: Silicon Storage Technology, Inc.

Inventor： Ryan Mei ,  Claire Zhu ,  Xiaozhou Qian

IPC: H03K19/0185 ,  H03K3/356

Abstract: An improved level shifter for use in integrated circuits is disclosed. The level shifter is able to achieve a switching time below 1 ns while still using the core power supply voltages, VDDL and VDDH, used in the prior art. The improved level shifter comprises a coupling stage and a level-switching stage.

公开(公告)号：US10803943B2

公开(公告)日：2020-10-13

申请号：US16382034

申请日：2019-04-11

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Steven Lemke ,  Vipin Tiwari ,  Nhan Do ,  Mark Reiten

IPC: G11C16/04 ,  G11C11/34 ,  G06N3/063 ,  G06N3/08 ,  H01L29/788 ,  H01L27/11521 ,  G06N3/04 ,  H01L27/11517 ,  H01L29/423 ,  H01L27/11524 ,  H01L27/115 ,  G11C11/54

Abstract: A neural network device with synapses having memory cells each having a floating gate and a first gate over first and second portions of a channel region, and second and third gates over the floating gate and over the source region. First lines each electrically connect the first gates in one of the memory cell rows, second lines each electrically connect the second gates in one of the memory cell rows, third lines each electrically connect the third gates in one of the memory cell rows, fourth lines each electrically connect the source regions in one of the memory cell rows, and fifth lines each electrically connect the drain regions in one of the memory cell columns. The synapses receive a first plurality of inputs as electrical voltages on the first, second or third lines, and provide a first plurality of outputs as electrical currents on the fifth lines.

公开(公告)号：US10790022B2

公开(公告)日：2020-09-29

申请号：US16550254

申请日：2019-08-25

Applicant: Silicon Storage Technology, Inc.

Inventor： Hieu Van Tran ,  Thuan Vu ,  Stanley Hong ,  Anh Ly ,  Vipin Tiwari ,  Nhan Do

IPC: G11C16/04 ,  G06N3/08 ,  H01L27/11521 ,  H01L29/788

Abstract: Numerous embodiments are disclosed for a high voltage generation algorithm and system for generating high voltages necessary for a particular programming operation in analog neural memory used in a deep learning artificial neural network. Different calibration algorithms and systems are also disclosed. The system can modify a high voltage signal applied to an array of cells during a programming operation as the number of cells being programmed changes.