Method for forming a planarization structure

    公开(公告)号:US10804112B2

    公开(公告)日:2020-10-13

    申请号:US15979147

    申请日:2018-05-14

    Inventor: Loic Gaben

    Abstract: A planarization structure is formed with a planar upper face enclosing a relief projecting from a planar substrate. The process used deposits a layer of a first material over the reliefs and then forms a layer of a second material with a planar upper face. This second material may be etched selectively with respect to the first material. The second layer is processed so that the protuberances of the first material are uncovered. A planarizing is then performed on the first material as far as the layer of the second material by selective chemical-mechanical polishing with respect to the second material.

    Memory cell comprising a phase-change material

    公开(公告)号:US10797234B2

    公开(公告)日:2020-10-06

    申请号:US16182990

    申请日:2018-11-07

    Abstract: A memory cell includes a heating element topped with a phase-change material. Two first silicon oxide regions laterally surround the heating element along a first direction. Two second silicon oxide regions laterally surround the heating element along a second direction orthogonal to the first direction. Top surfaces of the heating element and the two first silicon oxide regions are coplanar such that the heating element and the two first silicon oxide regions have a same thickness.

Patent Agency Ranking