Polishing composition for a tungsten-containing substrate
    25.
    发明授权
    Polishing composition for a tungsten-containing substrate 有权
    含钨基材的抛光组合物

    公开(公告)号:US07582127B2

    公开(公告)日:2009-09-01

    申请号:US11670137

    申请日:2007-02-01

    CPC classification number: C09G1/02 C09K3/1463 C23F3/06 H01L21/3212

    Abstract: The invention provides a method of chemically-mechanically polishing a substrate comprising tungsten through use of a composition comprising a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom. The invention further provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates.

    Abstract translation: 本发明提供了通过使用包含钨蚀刻剂,钨蚀刻抑制剂和水的组合物对包含钨的基材进行化学机械抛光的方法,其中所述钨抛光抑制剂是聚合物,共聚物或聚合物共混物,其包含在 至少一个包含至少一个含氮杂环或叔或季氮原子的重复基团。 本发明还提供了一种特别适用于抛光含钨衬底的化学机械抛光组合物。

    Method of polishing a tungsten-containing substrate
    26.
    发明申请
    Method of polishing a tungsten-containing substrate 审中-公开
    抛光含钨基材的方法

    公开(公告)号:US20070266641A1

    公开(公告)日:2007-11-22

    申请号:US11881338

    申请日:2007-07-26

    CPC classification number: C09G1/02 C09K3/1463 C23F3/06 H01L21/3212

    Abstract: The invention provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates. The composition comprises a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom.

    Abstract translation: 本发明提供了特别可用于抛光含钨基材的化学机械抛光组合物。 所述组合物包含钨蚀刻剂,钨蚀刻抑制剂和水,其中所述钨抛光抑制剂是包含至少一个包含至少一个含氮杂环或叔或三元杂环的重复基团的聚合物,共聚物或聚合物共混物, 季氮原子。

    Method of polishing a tungsten-containing substrate
    27.
    发明申请
    Method of polishing a tungsten-containing substrate 有权
    抛光含钨基材的方法

    公开(公告)号:US20050282391A1

    公开(公告)日:2005-12-22

    申请号:US10869397

    申请日:2004-06-16

    CPC classification number: C09G1/02 C09K3/1463 C23F3/06 H01L21/3212

    Abstract: The invention provides a method of chemically-mechanically polishing a substrate comprising tungsten through use of a composition comprising a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom. The invention further provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates.

    Abstract translation: 本发明提供了通过使用包含钨蚀刻剂,钨蚀刻抑制剂和水的组合物对包含钨的基材进行化学机械抛光的方法,其中所述钨抛光抑制剂是聚合物,共聚物或聚合物共混物,其包含在 至少一个包含至少一个含氮杂环或叔或季氮原子的重复基团。 本发明还提供了一种特别适用于抛光含钨衬底的化学机械抛光组合物。

    Defect-minimizing, topology-independent planarization of process surfaces in semiconductor devices
    29.
    发明授权
    Defect-minimizing, topology-independent planarization of process surfaces in semiconductor devices 失效
    半导体器件中工艺表面的缺陷最小化,拓扑无关的平面化

    公开(公告)号:US06893968B2

    公开(公告)日:2005-05-17

    申请号:US10268148

    申请日:2002-10-10

    CPC classification number: H01L21/31053 H01L21/76224

    Abstract: A process for planarizing a process layer having structures and has been applied to a working surface of a semiconductor device, includes abrading the process layer down to the working surface using a polishing device. The working surface is planarized, and a defect density in the working surface is minimized and the polishing process is topology-independent.

    Abstract translation: 用于平坦化具有结构并已被应用于半导体器件的工作表面的工艺层的工艺包括使用抛光装置将工艺层研磨到工作表面。 工作面平坦化,工作面的缺陷密度最小化,抛光过程与拓扑无关。

Patent Agency Ranking