Abstract:
The present application provides for a wet gas compressor system. The wet gas compressor system may include a wet gas compressor with an inlet section. A variable cross-section nozzle may be positioned about the inlet section.
Abstract:
The present application provides a wind turbine system. The wind turbine system may include a number of blades, a number of wind speed sensors positioned on the blades, a controller in communication with the wind speed sensors, and one or more performance adjustment, mechanisms in communication with the controller. The controller activates the performance adjustment mechanisms in response to the wind speed sensors.
Abstract:
The present application provides a wind turbine system. The wind turbine system may include a number of blades, a number of wind speed sensors positioned on the blades, a controller in communication with the wind speed sensors, and one or more performance adjustment, mechanisms in communication with the controller. The controller activates the performance adjustment mechanisms in response to the wind speed sensors.
Abstract:
The invention provides a method of chemically-mechanically polishing a substrate comprising tungsten through use of a composition comprising a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom. The invention further provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates.
Abstract:
The invention provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates. The composition comprises a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom.
Abstract:
The invention provides a method of chemically-mechanically polishing a substrate comprising tungsten through use of a composition comprising a tungsten etchant, an inhibitor of tungsten etching, and water, wherein the inhibitor of tungsten polishing is a polymer, copolymer, or polymer blend comprising at least one repeating group comprising at least one nitrogen-containing heterocyclic ring or a tertiary or quaternary nitrogen atom. The invention further provides a chemical-mechanical polishing composition particularly useful in polishing tungsten-containing substrates.
Abstract:
A semiconductive wafer having a layer of conductive material formed thereon is polished. The semiconductor wafer is rotated against an abrasive polishing pad. A solution is applied to the semiconductor wafer and to the abrasive polishing pad. The solution includes an etchant of the conductive material.
Abstract:
A process for planarizing a process layer having structures and has been applied to a working surface of a semiconductor device, includes abrading the process layer down to the working surface using a polishing device. The working surface is planarized, and a defect density in the working surface is minimized and the polishing process is topology-independent.
Abstract:
A semiconductive wafer having a layer of conductive material formed thereon is polished. The semiconductor wafer is rotated against an abrasive polishing pad. A solution is applied to the semiconductor wafer and to the abrasive polishing pad. The solution includes an etchant of the conductive material.