Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer
    24.
    发明授权
    Multi-functional cyclic silicate compound, siloxane-based polymer prepared from the compound and process of producing insulating film using the polymer 有权
    多功能环状硅酸盐化合物,由该化合物制备的硅氧烷基聚合物和使用聚合物制备绝缘膜的方法

    公开(公告)号:US07491785B2

    公开(公告)日:2009-02-17

    申请号:US10841553

    申请日:2004-05-10

    Abstract: A multi-functional cyclic silicate compound, a siloxane-based polymer prepared from the silicate compound and a process of producing an insulating film using the siloxane-based polymer. The silicate compound of the present invention is highly compatible with conventional pore-generating substances and hardly hygroscopic, so it is useful for the preparation of a siloxane-based polymer suitable to a SOG process. Furthermore, a film produced by the use of such siloxane-based polymer is excellent in mechanical properties, thermal stability and crack resistance and enhanced in insulating properties by virtue of its low hygroscopicity. Therefore, in the field of semiconductor production, this film is of great use as an insulating film.

    Abstract translation: 多官能环状硅酸盐化合物,由硅酸盐化合物制备的硅氧烷类聚合物和使用硅氧烷类聚合物制造绝缘膜的方法。 本发明的硅酸盐化合物与常规的孔产生物质高度相容,几乎不吸湿,因此可用于制备适用于SOG工艺的硅氧烷类聚合物。 此外,通过使用这种硅氧烷基聚合物制成的膜由于其低吸湿性而具有优异的机械性能,热稳定性和抗裂纹性以及增强的绝缘性能。 因此,在半导体制造领域中,该膜作为绝缘膜具有很大的用途。

    METHOD OF MODIFYING CARBON NANOTUBE USING RADICAL INITIATOR, AND DISPERSION LIQUID AND ELECTRODE COMPRISING THE CARBON NANOTUBE MODIFIED BY USING THE METHOD
    26.
    发明申请
    METHOD OF MODIFYING CARBON NANOTUBE USING RADICAL INITIATOR, AND DISPERSION LIQUID AND ELECTRODE COMPRISING THE CARBON NANOTUBE MODIFIED BY USING THE METHOD 有权
    使用放射性发光体修饰碳纳米管的方法和包含使用该方法改性的碳纳米管的分散液和电极

    公开(公告)号:US20080296539A1

    公开(公告)日:2008-12-04

    申请号:US12026081

    申请日:2008-02-05

    Abstract: Provided is a method of modifying carbon nanotubes, the method including: preparing a mixed solution in which a radical initiator and a carbon nanotube are dispersed; applying energy to the mixed solution to decompose the radical initiator into a radical; and reacting the decomposed radical with a surface of the carbon nanotube, wherein the radical which has reacted with the carbon nanotube is detached from the carbon nanotube after the reaction with the carbon nanotube. In the method of modifying carbon nanotube, a radical is reacted with a carbon nanotube and then separated from the carbon nanotube to thus modify the surface of the carbon nanotube without chemical bonding. Accordingly, the conductivity of the carbon nanotube can be increased.

    Abstract translation: 提供一种碳纳米管的改性方法,该方法包括:制备分散自由基引发剂和碳纳米管的混合溶液; 向混合溶液施加能量以将自由基引发剂分解成自由基; 并使分解的自由基与碳纳米管的表面反应,其中与碳纳米管反应后与碳纳米管反应的基团与碳纳米管分离。 在碳纳米管的改性方法中,使自由基与碳纳米管反应,然后与碳纳米管分离,从而改变碳纳米管的表面,而无需化学键合。 因此,能够提高碳纳米管的导电性。

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