Microfluidic interconnects
    23.
    发明授权
    Microfluidic interconnects 失效
    微流控互连

    公开(公告)号:US06273478B1

    公开(公告)日:2001-08-14

    申请号:US09281345

    申请日:1999-03-30

    IPC分类号: F16L2103

    摘要: A miniature connector for introducing microliter quantities of solutions into microfabricated fluidic devices, and which incorporates a molded ring or seal set into a ferrule cartridge, with or without a compression screw. The fluidic connector, for example, joins standard high pressure liquid chromatography (HPLC) tubing to 1 mm diameter holes in silicon or glass, enabling ml-sized volumes of sample solutions to be merged with &mgr;l-sized devices. The connector has many features, including ease of connect and disconnect; a small footprint which enables numerous connectors to be located in a small area; low dead volume; helium leak-tight; and tubing does not twist during connection. Thus the connector enables easy and effective change of microfluidic devices and introduction of different solutions in the devices.

    摘要翻译: 一种微型连接器,用于将微量的溶液引入微细加工的流体装置中,并且将带有或不带有压缩螺杆的模制环或密封件组合到套圈盒中。 例如,流体连接器将标准高压液相色谱(HPLC)管道连接到硅或玻璃中的1mm直径的孔中,使得能够将大小体积的样品溶液与多种尺寸的装置合并。 连接器具有许多功能,包括易于连接和断开连接; 小的占地面积,使许多连接器位于一个小区域; 死亡体积小 氦密封; 并且管道在连接期间不扭曲。 因此,连接器能够简单有效地改变微流体装置并在装置中引入不同的解决方案。

    Microfluidic interconnects
    24.
    发明授权
    Microfluidic interconnects 失效
    微流控互连

    公开(公告)号:US06209928B1

    公开(公告)日:2001-04-03

    申请号:US09090769

    申请日:1998-06-04

    IPC分类号: F16L3900

    CPC分类号: F16L37/025

    摘要: A miniature connector for introducing microliter quantities of solutions into microfabricated fluidic devices. The fluidic connector, for example, joins standard high pressure liquid chromatography (HPLC) tubing to 1 mm diameter holes in silicon or glass, enabling ml-sized volumes of sample solutions to be merged with &mgr;l-sized devices. The connector has many features, including ease of connect and disconnect; a small footprint which enables numerous connectors to be located in a small area; low dead volume; helium leak-tight; and tubing does not twist during connection. Thus the connector enables easy and effective change of microfluidic devices and introduction of different solutions in the devices.

    摘要翻译: 用于将微量数量的溶液引入微制造流体装置的微型连接器。 例如,流体连接器将标准高压液相色谱(HPLC)管道连接到硅或玻璃中的1mm直径的孔中,使得能够将大小体积的样品溶液与多种尺寸的装置合并。 连接器具有许多功能,包括易于连接和断开连接; 小的占地面积,使许多连接器位于一个小区域; 死亡体积小 氦密封; 并且管道在连接期间不扭曲。 因此,连接器能够简单有效地改变微流体装置并在装置中引入不同的解决方案。

    Micromachined electrostatic vertical actuator
    29.
    发明授权
    Micromachined electrostatic vertical actuator 失效
    微机械静电垂直执行器

    公开(公告)号:US5969848A

    公开(公告)日:1999-10-19

    申请号:US888000

    申请日:1997-07-03

    IPC分类号: G01Q60/00 G02B26/06 G02B26/08

    CPC分类号: G02B26/06

    摘要: A micromachined vertical actuator utilizing a levitational force, such as in electrostatic comb drives, provides vertical actuation that is relatively linear in actuation for control, and can be readily combined with parallel plate capacitive position sensing for position control. The micromachined electrostatic vertical actuator provides accurate movement in the sub-micron to micron ranges which is desirable in the phase modulation instrument, such as optical phase shifting. For example, compact, inexpensive, and position controllable micromirrors utilizing an electrostatic vertical actuator can replace the large, expensive, and difficult-to-maintain piezoelectric actuators. A thirty pound piezoelectric actuator with corner cube reflectors, as utilized in a phase shifting diffraction interferometer can be replaced with a micromirror and a lens. For any very precise and small amplitudes of motion` micromachined electrostatic actuation may be used because it is the most compact in size, with low power consumption and has more straightforward sensing and control options.

    摘要翻译: 利用悬浮力的微机械垂直致动器,例如在静电梳状驱动器中,提供垂直致动,其在用于控制的致动中相对线性,并且可以容易地与用于位置控制的平行板电容位置感测组合。 微机械静电垂直致动器在相位调制仪器中所需的亚微米到微米范围内的精确移动,例如光学相移。 例如,使用静电垂直致动器的紧凑的,便宜的和位置可控的微镜可取代大型,昂贵且难以维持的压电致动器。 如在相移衍射干涉仪中使用的具有角立方反射器的三十磅压电致动器可以用微镜和透镜代替。 对于任何非常精确和小幅度的运动,可以使用微加工静电致动,因为它是尺寸最小,功耗最小,并且具有更直接的感测和控制选项。