公开(公告)号：US20050232328A1

公开(公告)日：2005-10-20

申请号：US11090174

申请日：2005-03-28

申请人： Junichi Nishimae ,  Tetsuo Kojima

发明人： Junichi Nishimae ,  Tetsuo Kojima

IPC分类号： H01S3/08 ,  G02B27/09 ,  H01S3/00 ,  H01S3/06 ,  H01S3/07 ,  H01S3/081 ,  H01S3/091 ,  H01S3/10 ,  H01S3/16 ,  H01S3/23

CPC分类号： H01S3/0602 ,  H01S3/005 ,  H01S3/07 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/0815 ,  H01S3/091 ,  H01S3/2316

摘要： A simple and high-reliability constitution provides a solid-state laser system that allows a high-output, long-pulse-width laser beam to be obtained. A solid-state laser system that includes a solid-state laser medium 1, a light source 2 for pumping the solid-state laser medium 1, two reflecting mirrors 3 and 4 for flanking the solid-state laser medium 1, thereby constituting a laser resonator, is constituted in such a manner that a virtual-mirror plane 5 is defined in the space between the solid-state laser medium 1 and the reflecting mirror 4; a lens 6 is provided between the virtual-mirror plane 5 and the reflecting mirror 4; and, by means of the forward and backward paths along the route from the virtual-mirror plane to the reflecting mirror by way of the lens, the virtual-mirror plane in the forward path and the virtual-mirror plane in the backward path are made in an optically conjugated relationship with each other.

摘要翻译： 简单且高可靠性的结构提供了一种能够获得高输出，长脉冲宽度的激光束的固态激光系统。 一种固态激光系统，包括固体激光介质1，用于泵浦固态激光介质1的光源2，用于固定固体激光介质1侧面的两个反射镜3和4，从而构成激光 谐振器构成为在固体激光介质1和反射镜4之间的空间中限定虚拟镜面5; 在虚拟镜面5和反射镜4之间设置透镜6; 借助于通过镜头从虚拟镜面到反射镜的路径的前进和后退路径，使前向路径中的虚拟镜面和后向路径中的虚拟镜面成为 彼此具有光学共轭关系。

公开(公告)号：US06884699B1

公开(公告)日：2005-04-26

申请号：US10148562

申请日：2000-10-06

申请人： Tetsuya Ogawa ,  Hidetada Tokioka ,  Junichi Nishimae ,  Tatsuki Okamoto ,  Yukio Sato ,  Mitsuo Inoue ,  Mitsutoshi Miyasaka ,  Hiroaki Jiroku

发明人： Tetsuya Ogawa ,  Hidetada Tokioka ,  Junichi Nishimae ,  Tatsuki Okamoto ,  Yukio Sato ,  Mitsuo Inoue ,  Mitsutoshi Miyasaka ,  Hiroaki Jiroku

IPC分类号： C23C14/58 ,  H01L21/20 ,  H01L21/336 ,  H01L21/00 ,  H01L21/331 ,  H01L21/26

CPC分类号： C23C14/5813 ,  B23K26/0604 ,  B23K26/0738 ,  B23K26/0838 ,  B23K26/352 ,  B23K2101/40 ,  B23K2103/52 ,  H01L21/02532 ,  H01L21/02678 ,  H01L21/02691 ,  H01L29/66757 ,  Y10S438/969

摘要： A process for making a polycrystalline silicon film includes forming, on a glass substrate, an amorphous silicon film having a first region and a second region that contacts the first region, forming a first polycrystalline portion by irradiating the first region of the amorphous silicon film with laser light having a wavelength not less than 390 nm and not more than 640 nm and forming a second polycrystalline portion that contacts the first polycrystalline portion by irradiating the second region and the portion of the region of the first polycrystalline portion that contacts the second region of the amorphous silicon film with the laser light.

摘要翻译： 一种制造多晶硅膜的方法包括在玻璃基板上形成具有与第一区域接触的第一区域和第二区域的非晶硅膜，通过用非晶硅膜的第一区域照射非晶硅膜形成第一多晶部分， 具有不小于390nm且不大于640nm的波长的激光，并且通过照射第二区域和形成与第一多晶部分接触的第二多晶部分的区域的部分形成第二多晶部分， 具有激光的非晶硅膜。

公开(公告)号：US20050068998A1

公开(公告)日：2005-03-31

申请号：US10940817

申请日：2004-09-15

申请人： Tomotaka Katsura ,  Susumu Konno ,  Tetsuo Kojima ,  Junichi Nishimae

发明人： Tomotaka Katsura ,  Susumu Konno ,  Tetsuo Kojima ,  Junichi Nishimae

IPC分类号： G02F1/37 ,  G02F1/015 ,  G02F2/02 ,  H01L21/02 ,  H01S3/00 ,  H01S3/10 ,  H01S3/109 ,  H01S3/16

CPC分类号： H01S3/109 ,  G02F2001/3503 ,  G02F2001/3505 ,  G02F2001/354 ,  H01S3/005 ,  H01S3/1611 ,  H01S3/1643

摘要： A wavelength conversion apparatus in which output direction of a wavelength-converted laser beam, having a wavelength converted by a nonlinear optical crystal and emitted through an output-window, can be brought close to the direction of optical axis of the laser beam passing through the nonlinear optical crystal. In addition, axial deviation of the wavelength-converted laser beam converted by the nonlinear optical crystal and emitted through an output-window, can be reduced when the position of the nonlinear optical crystal is moved. The output facet of the nonlinear optical crystal is inclined at Brewster's angle with respect to the wavelength-converted laser beam. An output-window of a case containing the nonlinear optical crystal has a prism form in which the distance between a laser beam input facet and a laser beam output facet of the output-window is reduced along a direction in which the wavelength-converted laser beam, emitted from the nonlinear optical crystal, inclines.

摘要翻译： 一种波长转换装置，其中具有由非线性光学晶体转换并通过输出窗口发射的波长的波长转换激光束的输出方向可以靠近通过该激光束的激光束的光轴方向 非线性光学晶体。 此外，当非线性光学晶体的位置移动时，可以减少由非线性光学晶体转换并通过输出窗口发射的波长转换的激光束的轴向偏移。 非线性光学晶体的输出面相对于波长转换的激光束以布鲁斯特角倾斜。 包含非线性光学晶体的壳体的输出窗口具有棱镜形式，其中激光束输入面与输出窗口的激光束输出面之间的距离沿着波长转换激光束 ，从非线性光学晶体发射，倾斜。

公开(公告)号：US06724546B2

公开(公告)日：2004-04-20

申请号：US10267797

申请日：2002-10-10

申请人： Junichi Nishimae ,  Akira Sekiguchi ,  Tomohiro Sasagawa ,  Yoshiyuki Goto ,  Kohei Teramoto ,  Hiroyuki Kawano ,  Tatsuki Okamoto ,  Yukio Satou ,  Atsuhiro Sono

发明人： Junichi Nishimae ,  Akira Sekiguchi ,  Tomohiro Sasagawa ,  Yoshiyuki Goto ,  Kohei Teramoto ,  Hiroyuki Kawano ,  Tatsuki Okamoto ,  Yukio Satou ,  Atsuhiro Sono

IPC分类号： G02B900

CPC分类号： H04N9/3152 ,  G02B26/008 ,  G02B26/0816 ,  H04N5/7458 ,  H04N9/3114

摘要： Lengths of both sides of each end plane of a light-intensity distribution uniformizing element receiving a light flux and having an F-number of 1 are set to ½ of those of a reflecting surface of a reflecting optical-spatial modulator element, position information of uniformed light fluxes output from the light-intensity distribution uniformizing element is Fourier-transformed into diverging angle information indicated by incident light fluxes output from a first group of lenses, a relay deformed diaphragm intercepts an interference component of each incident light flux, which is expected to interfere with an outgoing light flux, to produce asymmetric light fluxes, the asymmetric light fluxes are incident on the reflecting optical-spatial modulator element, a projection lens deformed diaphragm removes stray light from outgoing light fluxes output from the reflecting optical-spatial modulator element, and an image is displayed according to the outgoing light fluxes.

摘要翻译： 接收光束并且F数为1的光强度分布均匀化元件的每个端面的两侧的长度被设置为反射光学 - 空间调制器元件的反射表面的一半的位置信息 从光强分布均匀化元件输出的均匀光束被傅立叶变换为由第一组透镜输出的入射光束所指示的发散角度信息，继电器变形光阑拦截每个入射光通量的干涉分量，这是预期的 为了产生不对称光束，产生不对称光束，不对称光束入射到反射光空间调制元件上，投影透镜变形光阑从反射光空间调制元件输出的出射光束中去除杂散光 ，并根据出射光束显示图像。

公开(公告)号：US5373528A

公开(公告)日：1994-12-13

申请号：US7231

申请日：1993-01-21

申请人： Masaki Kuzumoto ,  Yushi Takenaka ,  Junichi Nishimae ,  Kenji Yoshizawa ,  Takashi Yamamoto

发明人： Masaki Kuzumoto ,  Yushi Takenaka ,  Junichi Nishimae ,  Kenji Yoshizawa ,  Takashi Yamamoto

IPC分类号： H01S3/03 ,  H01S3/038 ,  H01S3/041 ,  H01S3/06 ,  H01S3/07 ,  H01S3/0975 ,  H01S3/16 ,  H01S3/097

CPC分类号： H01S3/0975 ,  H01S3/0315 ,  H01S3/041 ,  H01S3/0602 ,  H01S3/07 ,  H01S3/076

摘要： According to the present invention there is provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein discharge is obliquely generated within the rectangular section of a discharge space. There is also provided a laser apparatus with a pair of preliminary discharge excitation electrodes which can readily initiate discharge. There is further provided a laser apparatus capable of efficient oscillation with an excitation power source with comparatively low frequency, wherein provided is a pair of discharge excitation electrodes located in the major side direction of discharge space whose length is more than three times as long as that of minor side direction thereof. There is further provided a laser apparatus with a pair of discharge excitation electrodes whose dimension is smaller than that of a pair of dielectric plates, which apparatus can prevent undesirable discharge. There is also provided a laser apparatus with more than three discharge spaces at least one of which is given a lower electric field having the apparatus oscillate efficiently. There is further provided a laser apparatus with an improved oscillation efficiency wherein furnished are dielectric double pipes creating a substantially large discharge space.

摘要翻译： 根据本发明，提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，在放电空间的矩形截面内倾斜地产生放电。 还提供了具有一对可以容易地启动放电的初步放电激励电极的激光装置。 另外，还提供一种能够以较低频率的激励电源进行有效振荡的激光装置，其特征在于，设置有放电空间的长边方向的长度大于所述放电空间长度的三倍以上的一对放电激励电极 的小方向。 还提供一种具有一对放电激励电极的激光装置，其尺寸小于一对电介质板的尺寸，该装置可以防止不期望的放电。 还提供了具有三个以上放电空间的激光装置，其中至少一个放电空间被给予具有该装置有效振荡的较低电场。 还提供了具有改善的振荡效率的激光装置，其中所述的激光装置被设置为产生基本上大的放电空间的电介质双管。

公开(公告)号：US5359177A

公开(公告)日：1994-10-25

申请号：US778569

申请日：1991-10-17

申请人： Masakazu Taki ,  Kenji Yoshizawa ,  Junichi Nishimae ,  Keisuke Namba

发明人： Masakazu Taki ,  Kenji Yoshizawa ,  Junichi Nishimae ,  Keisuke Namba

IPC分类号： H01J37/32 ,  B23K9/00 ,  H05H1/46

CPC分类号： H01J37/32229 ,  H01J37/32192

摘要： A microwave plasma apparatus comprises a discharge chamber for generating a plasma. A dielectric plate is placed on a surface of the discharge chamber. A microwave circuit surrounds the longitudinal side surface of the dielectric plate and the microwave circuit is adapted to couple the signal propagating therein to the dielectric plate, whereby a microwave electric field is formed within the discharge chamber to generate a plasma therein. The microwave circuit may comprise a rectangular waveguide, and a part of a wall surface of the rectangular waveguide is utilized as a terminal portion.

摘要翻译： 微波等离子体装置包括用于产生等离子体的放电室。 电介质板放置在放电室的表面上。 微波电路围绕电介质板的纵向侧表面，并且微波电路适于将在其中传播的信号耦合到电介质板，由此在放电室内形成微波电场以在其中产生等离子体。 微波电路可以包括矩形波导，矩形波导的壁表面的一部分用作端子部分。

公开(公告)号：US09289850B2

公开(公告)日：2016-03-22

申请号：US14003678

申请日：2012-03-13

申请人： Tatsuya Yamamoto ,  Junichi Nishimae ,  Shuichi Fujikawa

发明人： Tatsuya Yamamoto ,  Junichi Nishimae ,  Shuichi Fujikawa

IPC分类号： B23K26/046 ,  B23K26/064 ,  B23K26/70 ,  B23K26/00 ,  B23K26/04 ,  B23K26/06

CPC分类号： B23K26/00 ,  B23K26/046 ,  B23K26/0643 ,  B23K26/0665 ,  B23K26/707

摘要： A laser machining apparatus, including: a laser light source; a transparent member that is set on an optical path of a laser beam and transmits the laser beam; a contact type temperature difference sensor, set on a surface of the transparent member outside an irradiation range of the laser beam, for detecting a temperature difference between a surface of the transparent member, which is spaced apart from a center of the transparent member by a first distance, and another surface of the transparent member, which is spaced apart from the center of the transparent member by a second distance larger than the first distance; and a controller correcting a focal position based on the temperature difference detected by the contact type temperature difference sensor to stabilize a beam diameter of the laser beam condensed onto a machining object.

摘要翻译： 一种激光加工装置，包括：激光光源; 透明构件，其被设置在激光束的光路上并透射激光束; 接触式温度差传感器，设置在所述透明构件的表面上，位于所述激光束的照射范围之外，用于检测所述透明构件的与所述透明构件的中心间隔开的表面之间的温度差 第一距离和透明构件的另一个表面，其与透明构件的中心距离大于第一距离的第二距离; 以及控制器，基于由接触型温度差传感器检测的温度差校正焦点位置，以稳定在加工对象物上聚光的激光束的光束直径。

公开(公告)号：US08958453B2

公开(公告)日：2015-02-17

申请号：US13496892

申请日：2010-09-17

申请人： Shuichi Fujikawa ,  Junichi Nishimae ,  Tatsuya Yamamoto ,  Yoichi Tanino

发明人： Shuichi Fujikawa ,  Junichi Nishimae ,  Tatsuya Yamamoto ,  Yoichi Tanino

IPC分类号： H01S3/22 ,  H01S3/08 ,  H01S3/038 ,  H01S3/081

CPC分类号： H01S3/0385 ,  H01S3/08036 ,  H01S3/08054 ,  H01S3/081

摘要： A laser oscillator includes: a optical resonator having an orthogonal mirror and a partial reflection mirror; a laser gas acting as a laser medium; and a 90-degree folding mirror acting as a polarization selecting element. The orthogonal mirror has two reflecting surfaces orthogonal to each other. The 90-degree folding mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the reference axis set in a plane perpendicular to an optical axis of the optical resonator. The orthogonal mirror is arranged such that the polarization direction of the laser oscillated light is parallel to the valley line of the orthogonal mirror. This configuration can compensate anisotropy of optical characteristics in a laser medium, and stably generate linearly polarized laser light having excellent isotropy in a simple manner.

摘要翻译： 激光振荡器包括：具有正交反射镜和部分反射镜的光学谐振器; 作为激光介质的激光气体; 以及用作偏振选择元件的90度折叠镜。 正交反射镜具有彼此正交的两个反射表面。 90度折射镜被配置为使得激光振荡光的偏振方向平行于垂直于光学谐振器的光轴的平面中的参考轴。 正交反射镜被布置成使得激光振荡的光的偏振方向平行于正交反射镜的谷线。 这种构造可以补偿激光介质中的光学特性的各向异性，并且以简单的方式稳定地产生具有优异各向同性的线偏振激光。

公开(公告)号：US20090080475A1

公开(公告)日：2009-03-26

申请号：US12233174

申请日：2008-09-18

申请人： Masashi YOSHIMURA ,  Takatomo Sasaki ,  Yusuke Mori ,  Muneyuki Nishioka ,  Tomotaka Katsura ,  Tetsuo Kojima ,  Junichi Nishimae

发明人： Masashi YOSHIMURA ,  Takatomo Sasaki ,  Yusuke Mori ,  Muneyuki Nishioka ,  Tomotaka Katsura ,  Tetsuo Kojima ,  Junichi Nishimae

IPC分类号： H01S3/10 ,  G02F1/35 ,  C01B35/10

CPC分类号： G02F1/37 ,  G02F1/3551 ,  G02F2001/3505 ,  G02F2001/354

摘要： An optical wavelength conversion element includes a cesium-lithium-borate crystal processed into a 10-mm long optical element cut in an orientation that allows a fourth harmonic of a Nd:YAG laser to be generated. A transmittance (Ta) at 3589 cm−1 in an infrared transmission spectrum of the optical element is used as an index that indicates a content of water impurities in the crystal and is independent of a polarization direction. An actual measurement of the transmittance Ta is at least 1%, without taking into account loss at an optically polished surface of the crystal. A wavelength conversion device, a ultraviolet laser irradiation apparatus, a laser processing system, and a method of manufacturing an optical wavelength conversion element are also described.

摘要翻译： 光波长转换元件包括加工成允许产生Nd：YAG激光器的四次谐波的取向切割的10mm长的光学元件的铯 - 硼酸锂晶体。 光学元件的红外透射光谱中的3589cm -1处的透射率（Ta）被用作指示晶体中的水杂质含量并且与偏振方向无关的指标。 透射率Ta的实际测量值至少为1％，而不考虑在晶体的光学抛光表面处的损耗。 还描述了波长转换装置，紫外激光照射装置，激光加工系统和制造光波长转换元件的方法。

公开(公告)号：US07336690B2

公开(公告)日：2008-02-26

申请号：US11090174

申请日：2005-03-28

申请人： Junichi Nishimae ,  Tetsuo Kojima

发明人： Junichi Nishimae ,  Tetsuo Kojima

IPC分类号： H01S3/08

CPC分类号： H01S3/0602 ,  H01S3/005 ,  H01S3/07 ,  H01S3/08 ,  H01S3/08072 ,  H01S3/0815 ,  H01S3/091 ,  H01S3/2316

摘要： A simple and high-reliability constitution provides a solid-state laser system that allows a high-output, long-pulse-width laser beam to be obtained.A solid-state laser system that includes a solid-state laser medium 1, a light source 2 for pumping the solid-state laser medium 1, two reflecting mirrors 3 and 4 for flanking the solid-state laser medium 1, thereby constituting a laser resonator, is constituted in such a manner that a virtual-mirror plane 5 is defined in the space between the solid-state laser medium 1 and the reflecting mirror 4; a lens 6 is provided between the virtual-mirror plane 5 and the reflecting mirror 4; and, by means of the forward and backward paths along the route from the virtual-mirror plane to the reflecting mirror by way of the lens, the virtual-mirror plane in the forward path and the virtual-mirror plane in the backward path are made in an optically conjugated relationship with each other.

摘要翻译： 简单且高可靠性的结构提供了一种能够获得高输出，长脉冲宽度的激光束的固态激光系统。 一种固体激光系统，包括固体激光介质1，用于泵浦固态激光介质1的光源2，用于固定固体激光介质1侧面的两个反射镜3和4，从而构成激光 谐振器构成为在固体激光介质1和反射镜4之间的空间中限定虚拟镜面5; 在虚拟镜面5和反射镜4之间设置透镜6; 借助于通过镜头从虚拟镜面到反射镜的路径的前进和后退路径，使前向路径中的虚拟镜面和后向路径中的虚拟镜面成为 彼此具有光学共轭关系。