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21.发明申请公开(公告)号：US20120200817A1
公开(公告)日：2012-08-09
申请号：US13449370
申请日：2012-04-18
IPC分类号： G02F1/1343 , H01B13/00 , B82Y40/00
CPC分类号： G02F1/133553 , G02F1/19 , G02F2201/124 , G02F2203/10
摘要： A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.
摘要翻译： 提供了形成反射等离子体显示器的方法。 该方法提供衬底并沉积底部电介质层。 沉积覆盖在底部介电层上的导电膜。 形成具有覆盖导电膜的纳米尺寸开口的硬掩模。 导电膜通过硬掩模中的纳米尺寸开口进行等离子体蚀刻，停留在电介质层。 在去除硬掩模之后，导电膜留下具有到介电层的纳米尺寸的开口。 金属沉积在纳米尺寸的开口中，形成覆盖在介电层上的金属纳米颗粒图案。 然后，去除导电膜。 硬掩模可以通过共形沉积覆盖在导电膜上的Al膜并阳极氧化Al膜，形成多孔阳极氧化Al氧化物（AAO）膜的硬掩模来形成。 多孔AAO膜可以形成短程六边形和长程随机顺序孔图案。
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公开(公告)号：US20110075245A1
公开(公告)日：2011-03-31
申请号：US12568522
申请日：2009-09-28
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.
摘要翻译： 提供全色范围的模拟控制干涉式调制装置。 该器件包括透明衬底和具有覆盖衬底的底表面的透明固定位置导电电极。 透明间隔物覆盖固定位置电极，诱导吸收体覆盖在间隔物上。 光反射导电的可移动膜覆盖在诱导的吸收体上。 在诱导的吸收体和具有小于间隔物厚度的最大气隙尺寸的可移动膜之间形成空腔。 在一个方面，从固定位置电极的顶表面到腔下表面的距离至少是腔最大气隙尺寸的两倍。 另一方面，在基板和固定位置电极之间插入至少一个抗反射涂层（ARC）层，并且在固定位置电极和间隔物之间插入至少一个ARC层。
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23.发明授权公开(公告)号：US08896907B2
公开(公告)日：2014-11-25
申请号：US13449370
申请日：2012-04-18
IPC分类号： G02B26/00 , G02F1/1335
CPC分类号： G02F1/133553 , G02F1/19 , G02F2201/124 , G02F2203/10
摘要： A method is provided for forming a reflective plasmonic display. The method provides a substrate and deposits a bottom dielectric layer. A conductive film is deposited overlying the bottom dielectric layer. A hard mask is formed with nano-size openings overlying the conductive film. The conductive film is plasma etched via nano-size openings in the hard mask, stopping at the dielectric layer. After removing the hard mask, a conductive film is left with nano-size openings to the dielectric layer. Metal is deposited in the nano-size openings, creating a pattern of metallic nanoparticles overlying the dielectric layer. Then, the conductive film is removed. The hard mask may be formed by conformally depositing an Al film overlying the conductive film and anodizing the Al film, creating a hard mask of porous anodized Al oxide (AAO) film. The porous AAO film may form a short-range hexagonal, and long-range random order hole patterns.
摘要翻译： 提供了形成反射等离子体显示器的方法。 该方法提供衬底并沉积底部电介质层。 沉积覆盖在底部介电层上的导电膜。 形成具有覆盖导电膜的纳米尺寸开口的硬掩模。 导电膜通过硬掩模中的纳米尺寸开口进行等离子体蚀刻，停留在电介质层。 在去除硬掩模之后，导电膜留下具有到介电层的纳米尺寸的开口。 金属沉积在纳米尺寸的开口中，形成覆盖在介电层上的金属纳米颗粒图案。 然后，去除导电膜。 硬掩模可以通过共形沉积覆盖在导电膜上的Al膜并阳极氧化Al膜，形成多孔阳极氧化Al氧化物（AAO）膜的硬掩模来形成。 多孔AAO膜可以形成短程六边形和长程随机顺序孔图案。
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24.发明申请Air Stable, Color Tunable Plasmonic Structures for Ultraviolet (UV) and Visible Wavelength Applications 有权空气稳定，紫外（UV）和可见波长应用的颜色可调谐等离子体结构公开(公告)号：US20140168742A1
公开(公告)日：2014-06-19
申请号：US13714073
申请日：2012-12-13
CPC分类号： G02F1/0018 , B82Y20/00 , G02B5/008 , G02F1/133553 , G02F1/1393 , G02F2202/36 , G02F2203/055 , G02F2203/10 , Y10S977/773 , Y10S977/834
摘要： A plasmonic optical device is provided operating in near ultra violet (UV) and visible wavelengths of light. The optical device is made from a substrate and nanoparticles. The nanoparticles have a core with a negative real value relative permittivity of absolute value greater than 10 in a first range of wavelengths including near UV and visible wavelengths of light, and a shell with an imaginary relative permittivity of less than 5 in the first range of wavelengths. A dielectric overlies the substrate, and is embedded with the nanoparticles. If the substrate is reflective, a reflective optical filter is formed. If the substrate is transparent, the filter is transmissive. In one aspect, the dielectric is a tunable medium (e.g., liquid crystal) having an index of refraction responsive to an electric field. The tunable medium is interposed between a first electrode and a second electrode.
摘要翻译： 提供等离子体激发光学器件，其工作在近紫外（UV）和可见光波长的光。 光学器件由衬底和纳米颗粒制成。 所述纳米颗粒具有在包括近紫外和可见光波长的第一波长范围内具有大于10的绝对值的绝对值相对介电常数的核，并且在第一范围内具有小于5的假想相对介电常数的壳 波长。 电介质覆盖在衬底上，并且嵌入有纳米颗粒。 如果基板是反射的，则形成反射式滤光器。 如果基板是透明的，则滤光器是透射的。 在一个方面，电介质是具有响应于电场的折射率的可调介质（例如，液晶）。 可调介质介于第一电极和第二电极之间。
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公开(公告)号：US20140140054A1
公开(公告)日：2014-05-22
申请号：US13682535
申请日：2012-11-20
CPC分类号： C25D11/045 , B01D67/0065 , B01D67/0069 , B01D67/0072 , B01D71/022 , B01D71/025 , B82Y40/00 , C23C14/046 , C23C16/045 , C25D3/44 , C25D3/665 , C25D5/02 , C25D11/022 , C25D11/12 , C25D11/18 , C25D11/20 , C25D11/24
摘要： Methods are provided for fabricating a multi-structure pore membrane. In one method, an anodized aluminum oxide (AAO) template is formed with an array of pores exposing underlying regions of a conductive layer top surface. A plurality of photoresist layers is patterned to sequentially expose a plurality of AAO template sections. Each exposed AAO template section is sequentially etched to widen pore diameters, so that each AAO template section may be associated with a corresponding unique pore diameter. A target material is deposited in the pores of the AAO template and, as a result, an array of target material structures is formed on the top surface, where the target material structures associated with each AAO template section have a corresponding diameter. Also provided is a multi-structure pixel device formed with subpixels having different structure dimensions.
摘要翻译： 提供了制造多结构孔膜的方法。 在一种方法中，阳极氧化的氧化铝（AAO）模板形成有暴露导电层顶表面的下面区域的孔阵列。 图案化多个光致抗蚀剂层以顺序暴露多个AAO模板部分。 依次蚀刻每个曝光的AAO模板部分以扩大孔径，使得每个AAO模板部分可以与相应的唯一孔径相关联。 目标材料沉积在AAO模板的孔中，结果，在顶表面上形成一组目标材料结构，其中与每个AAO模板部分相关联的目标材料结构具有相应的直径。 还提供了具有不同结构尺寸的子像素形成的多结构像素器件。
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公开(公告)号：US07999995B2
公开(公告)日：2011-08-16
申请号：US12568522
申请日：2009-09-28
IPC分类号： G02B26/00
CPC分类号： G02B26/001
摘要： A full color range analog controlled interferometric modulation device is provided. The device includes a transparent substrate, and a transparent fixed-position electrically conductive electrode with a bottom surface overlying the substrate. A transparent spacer overlies the fixed-position electrode, and an induced absorber overlies the spacer. An optically reflective electrically conductive moveable membrane overlies the induced absorber. A cavity is formed between the induced absorber and the moveable membrane having a maximum air gap dimension less than the spacer thickness. In one aspect, the distance from the top surface of the fixed-position electrode to a cavity lower surface is at least twice as great as the cavity maximum air gap dimension. In another aspect, at least one anti-reflective coating (ARC) layer is interposed between the substrate and the fixed-position electrode, and at least one ARC layer is interposed between the fixed-position electrode and the spacer.
摘要翻译： 提供全彩色范围的模拟控制干涉式调制装置。 该器件包括透明衬底和具有覆盖衬底的底表面的透明固定位置导电电极。 透明间隔物覆盖固定位置电极，诱导吸收体覆盖在间隔物上。 光反射导电的可移动膜覆盖在诱导的吸收体上。 在诱导的吸收体和具有小于间隔物厚度的最大气隙尺寸的可移动膜之间形成空腔。 在一个方面，从固定位置电极的顶表面到腔下表面的距离至少是腔最大气隙尺寸的两倍。 另一方面，在基板和固定位置电极之间插入至少一个抗反射涂层（ARC）层，并且在固定位置电极和间隔物之间插入至少一个ARC层。
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公开(公告)号：US08810897B2
公开(公告)日：2014-08-19
申请号：US13434548
申请日：2012-03-29
申请人： Akinori Hashimura , Liang Tang , David R. Evans
发明人： Akinori Hashimura , Liang Tang , David R. Evans
CPC分类号： G02F1/167 , B05D5/12 , G02F1/1334 , G02F1/13439 , G02F1/23 , G02F2202/36 , G02F2203/10 , G02F2203/34
摘要： A method is provided for improving metallic nanostructure stability. The method provides a substrate, and using a physical vapor deposition (PVD) process for example, deposits metallic nanostructures having a first diameter overlying the substrate. Some examples of metallic nanostructures include Ag, Au, and Al. The metallic nanostructures are annealed in an atmosphere including an inert gas and H2. The annealing temperature is less than the melting temperature the metal material in bulk form. In response to the annealing, stabilized metallic nanostructures are formed. If the stabilized metallic nanostructures are exposed to an ambient air environment the stabilized metallic nanostructure maintain the first diameter. Typically, the metallic nanostructures are initially formed having a rectangular shape with corners. After annealing, the stabilized metallic nanostructures have a dome shape.
摘要翻译： 提供了一种提高金属纳米结构稳定性的方法。 该方法提供基底，并且例如使用物理气相沉积（PVD）工艺沉积具有覆盖在基底上的第一直径的金属纳米结构。 金属纳米结构的一些实例包括Ag，Au和Al。 金属纳米结构在包括惰性气体和H 2的气氛中退火。 退火温度小于块状形式的金属材料的熔融温度。 响应于退火，形成稳定的金属纳米结构。 如果稳定的金属纳米结构暴露于环境空气环境，则稳定的金属纳米结构保持第一直径。 通常，金属纳米结构最初形成为具有角部的矩形形状。 退火后，稳定的金属纳米结构具有圆顶形状。
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公开(公告)号：US20130077036A1
公开(公告)日：2013-03-28
申请号：US13434548
申请日：2012-03-29
申请人： Akinori Hashimura , Liang Tang , David R. Evans
发明人： Akinori Hashimura , Liang Tang , David R. Evans
IPC分类号： B05D5/12 , G02F1/1343
CPC分类号： G02F1/167 , B05D5/12 , G02F1/1334 , G02F1/13439 , G02F1/23 , G02F2202/36 , G02F2203/10 , G02F2203/34
摘要： A method is provided for improving metallic nanostructure stability. The method provides a substrate, and using a physical vapor deposition (PVD) process for example, deposits metallic nanostructures having a first diameter overlying the substrate. Some examples of metallic nanostructures include Ag, Au, and Al. The metallic nanostructures are annealed in an atmosphere including an inert gas and H2. The annealing temperature is less than the melting temperature the metal material in bulk form. In response to the annealing, stabilized metallic nanostructures are formed. If the stabilized metallic nanostructures are exposed to an ambient air environment the stabilized metallic nanostructure maintain the first diameter. Typically, the metallic nanostructures are initially formed having a rectangular shape with corners. After annealing, the stabilized metallic nanostructures have a dome shape.
摘要翻译： 提供了一种提高金属纳米结构稳定性的方法。 该方法提供基底，并且例如使用物理气相沉积（PVD）工艺沉积具有覆盖在基底上的第一直径的金属纳米结构。 金属纳米结构的一些实例包括Ag，Au和Al。 金属纳米结构在包括惰性气体和H 2的气氛中退火。 退火温度小于块状形式的金属材料的熔融温度。 响应于退火，形成稳定的金属纳米结构。 如果稳定的金属纳米结构暴露于环境空气环境，则稳定的金属纳米结构保持第一直径。 通常，金属纳米结构最初形成为具有角部的矩形形状。 退火后，稳定的金属纳米结构具有圆顶形状。
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公开(公告)号：US20080284544A1
公开(公告)日：2008-11-20
申请号：US11570924
申请日：2005-07-25
申请人： Akinori Hashimura
发明人： Akinori Hashimura
CPC分类号： H03H9/462 , B82Y10/00 , B82Y30/00 , H03H9/2436 , H03H9/505 , H03H2009/0237 , H03H2009/02496 , H03H2009/02503 , H03H2009/02527 , H03H2009/2442 , Y10S977/742 , Y10S977/762 , Y10S977/766
摘要： An object of the invention is to provide a coupling element of an MEMS filter with design flexibility and minimization of mass loading effects. The invention provides a structure wherein the mass loading effects are not reflected on the MEMS filter characteristic by using a nanosize coupling element with a very small mass compared to a microsize MEMS resonator, such as a carbon nanotube (CNT), as a coupling element part.
摘要翻译： 本发明的一个目的是提供具有设计灵活性和最小化质量负载效应的MEMS滤波器的耦合元件。 本发明提供了一种结构，其中通过使用具有非常小的质量的纳米尺度耦合元件，与微型MEMS谐振器（例如碳纳米管（CNT））作为耦合元件部分相比，质量负载效应未反映在MEMS滤波器特性上 。
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公开(公告)号：US07907025B2
公开(公告)日：2011-03-15
申请号：US12017186
申请日：2008-01-21
申请人： Akinori Hashimura
发明人： Akinori Hashimura
IPC分类号： G04C3/10
CPC分类号： B81C1/00142 , B81B2201/0271
摘要： An electromechanical resonator includes a resonator portion which includes a fixed electrode and an oscillator formed separately from the fixed electrode with a gap. The gap has a first gap region and a second gap region which are arranged in a thickness direction of the fixed electrode. The first gap region is different in width from the second gap region.
摘要翻译： 机电谐振器包括谐振器部分，其包括固定电极和与具有间隙的固定电极分开形成的振荡器。 间隙具有沿固定电极的厚度方向排列的第一间隙区域和第二间隙区域。 第一间隙区域的宽度与第二间隙区域不同。
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