Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
    21.
    发明授权
    Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter 有权
    光谱纯度滤光片,光刻设备和制造光谱纯度滤光片的方法

    公开(公告)号:US08817237B2

    公开(公告)日:2014-08-26

    申请号:US13392434

    申请日:2010-07-21

    摘要: A method of forming a spectral purity filter having a plurality of apertures configured to transmit extreme ultraviolet radiation and suppress transmission of a second type of radiation, in which trenches are formed in a base material in a pattern corresponding to the walls to be formed between the apertures. The trenches are filled with a grid material to form walls of the grid material, and the base material is selectively removed until the grid material is exposed and forms the spaces between the walls of the grid material for the apertures.

    摘要翻译: 一种形成光谱纯度滤光片的方法,该光谱纯度滤光器具有多个孔,其被配置为透射极紫外辐射并抑制第二类型辐射的透射,其中沟槽以对应于待形成的壁之间的壁的图案形成在基材中 孔。 沟槽填充有栅格材料以形成栅格材料的壁,并且选择性地去除基底材料,直到栅格材料暴露并且在孔的栅格材料的壁之间形成空间。

    CARDIOMYOCYTE CONTAINING DEVICE, MANUFACTURING METHOD AND MEASURING METHOD
    22.
    发明申请
    CARDIOMYOCYTE CONTAINING DEVICE, MANUFACTURING METHOD AND MEASURING METHOD 审中-公开
    含有骨髓细胞的装置,制造方法和测量方法

    公开(公告)号:US20130137132A1

    公开(公告)日:2013-05-30

    申请号:US13813970

    申请日:2011-07-13

    IPC分类号: C12Q1/02

    CPC分类号: G01N33/5061 D06F75/22

    摘要: Disclosed is a device (100) for cardiac electrophysiology screening comprising a substrate (10) comprising a cavity (42), said substrate carrying a deformable layer (32) extending over said cavity (42), wherein a portion of said deformable layer (32) covers said cavity and acts as a membrane over said cavity (32), said portion having a surface comprising a pattern of grooves (44) and carrying a multi-electrode structure (110, 110′); and a plurality of cardiomyocytes (130) assembled in at least some of said grooves (44). A method of manufacturing such a device (100) is also disclosed.

    摘要翻译: 公开了一种用于心脏电生理筛选的装置(100),包括:衬底(10),包括空腔(42),所述衬底承载在所述空腔(42)上延伸的可变形层(32),其中所述可变形层 )覆盖所述空腔并用作所述空腔(32)上的膜,所述部分具有包括凹槽图案(44)并且承载多电极结构(110,110')的表面; 以及组装在至少一些所述凹槽(44)中的多个心肌细胞(130)。 还公开了制造这种装置(100)的方法。

    MEMS ELEMENT
    25.
    发明申请
    MEMS ELEMENT 有权
    MEMS元件

    公开(公告)号:US20120122314A1

    公开(公告)日:2012-05-17

    申请号:US13321116

    申请日:2010-05-26

    IPC分类号: H01L21/304

    摘要: A method of manufacturing an electronic device that comprises a microelectromechanical (MEMS) element, the method comprising the steps of: providing a material layer (34) on a first side of a substrate (32); providing a trench (40) in the material later (34); etching material from the trench (40) such as to also etch the substrate (32) from the first side of the substrate (32); grinding the substrate (32) from a second side of the substrate to expose the trench (40); and using the exposed trench (40) as an etch hole. The exposed trench (40) is used as an etch hole for releasing a portion of the material layer (34), for example a beam resonator (12), from the substrate (32). An input electrode (6), an output electrode (8), and a top electrode (10) are provided.

    摘要翻译: 一种制造包括微机电元件的电子器件的方法,所述方法包括以下步骤:在衬底(32)的第一侧上提供材料层(34); 在后面的材料(34)中提供沟槽(40); 从沟槽(40)蚀刻材料,以便也从衬底(32)的第一侧蚀刻衬底(32); 从衬底的第二侧研磨衬底(32)以露出沟槽(40); 并使用暴露的沟槽(40)作为蚀刻孔。 暴露的沟槽(40)用作用于从衬底(32)释放材料层(34)的一部分(例如光束谐振器(12))的蚀刻孔。 设置有输入电极(6),输出电极(8)和顶部电极(10)。

    Scanning Laser Projector
    26.
    发明申请
    Scanning Laser Projector 有权
    扫描激光投影机

    公开(公告)号:US20120105812A1

    公开(公告)日:2012-05-03

    申请号:US13289422

    申请日:2011-11-04

    IPC分类号: G03B21/14

    摘要: A scanning projector for projecting an image comprising multiple wavelength signals is disclosed. Embodiments of the present invention include a beam combiner comprising a planar lightwave circuit having a plurality of surface waveguides arranged to define a plurality of input ports, a mixing region, and an output port. Each input port receives a different wavelength signal and provides it to the mixing region. The mixing region combines the plurality of wavelength signals into a single composite output beam that is scanned over a region to create an image in a region.In some embodiments, the projector (1) interrogates image points in the region using a first wavelength signal to determine a measurand and (2) projects an image over the image points of the region using a second wavelength signal, wherein each image point is illuminated with the second wavelength signal based on a measurand at that image point.

    摘要翻译: 公开了一种用于投影包括多个波长信号的图像的扫描投影仪。 本发明的实施例包括一种光束组合器,其包括具有布置成限定多个输入端口的多个表面波导的平面光波电路,混合区域和输出端口。 每个输入端口接收不同的波长信号并将其提供给混合区域。 混合区域将多个波长信号组合成单个复合输出光束,该单个复合输出光束在区域上扫描以在区域中产生图像。 在一些实施例中,投影仪(1)使用第一波长信号询问该区域中的图像点以确定被测量,并且(2)使用第二波长信号在图像点上投影图像,其中每个图像点被照亮 基于在该图像点处的被测量的第二波长信号。