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公开(公告)号:US10586886B2
公开(公告)日:2020-03-10
申请号:US16071451
申请日:2016-01-20
Applicant: Goertek Inc.
Inventor: Quanbo Zou
IPC: H01L33/00 , H01L33/48 , H01L25/075 , H01L23/00
Abstract: A micro-LED (3r) transfer method and a manufacturing method are disclosed. The micro-LED (3r) transfer method comprises: forming a sacrificial post (4) on a micro-LED (3r) to be picked-up on a carrier substrate (1); bonding the micro-LED (3r) to be picked-up with a pickup substrate (5) via the sacrificial post (4); lifting-off the micro-LED (3r) to be picked-up from the carrier substrate (1); bonding the micro-LED (3r) on the pickup substrate (5) with a receiving substrate (12); and lifting-off the micro-LED (3r) from the pickup substrate (5). A complicated pickup head is not necessary, and the technical solution is relatively simple.
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公开(公告)号:US20190386454A1
公开(公告)日:2019-12-19
申请号:US16465745
申请日:2016-12-05
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Zhe Wang
Abstract: A micro laser diode transfer method and a manufacturing method comprise: forming a bonding layer (515) on a receiving substrate (513), wherein first type electrodes (514) are connected to the bonding layer (515); bringing a first side of the micro laser diodes (500r) on a carrier substrate (520) into contact with the bonding layer (515), wherein the carrier substrate (520) is laser-transparent; and irradiating selected micro laser diodes (500r) with laser from the side of the carrier substrate (520) to lift-off the selected micro laser diodes (500r) from the carrier substrate (520). This method may improve yield.
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公开(公告)号:US10319697B2
公开(公告)日:2019-06-11
申请号:US15535683
申请日:2015-05-21
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Zhe Wang
IPC: H01L23/00 , H01L33/00 , H01L25/075 , H01L33/62
Abstract: A transferring method, a manufacturing method, a device and an electronic apparatus of micro-LED. The method for transferring micro-LED, comprises: forming micro-LEDs (202) on a laser-transparent original substrate (201), providing an anisotropic conductive layer (203) on a receiving substrate (204), bringing the micro-LEDs (202) into contact with the anisotropic conductive layer (203) on the receiving substrate (204), irradiating the original substrate (201) with laser from the original substrate side to lift-off the micro-LEDs (202) from the original substrate (201), and processing the anisotropic conductive layer (203), to electrically connect the micro-LEDs (202) with the pads (205′) on the receiving substrate (204).
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公开(公告)号:US10141287B2
公开(公告)日:2018-11-27
申请号:US15531194
申请日:2015-07-14
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Zhe Wang
IPC: H01L25/075 , H01L33/00 , H01L33/52 , H01L33/62 , H01L33/20
Abstract: The present invention discloses a transferring method, a manufacturing method, a device and an electronic apparatus of micro-LED. The method for transferring micro-LED comprises: forming micro-LEDs on a laser-transparent original substrate, wherein the micro-LEDs are lateral micro-LEDs whose P electrodes and N electrodes are located on one side; bringing the P electrodes and N electrodes of the lateral micro-LEDs into contact with pads preset on a receiving substrate; and irradiating the original substrate with laser from the original substrate side to lift-off the lateral micro-LEDs from the original substrate. A technical effect of using lateral micro-LEDs lies in that the processing for N metal electrode after the micro-LED transfer can be omitted.
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公开(公告)号:US20170330867A1
公开(公告)日:2017-11-16
申请号:US15531194
申请日:2015-07-14
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Zhe Wang
IPC: H01L25/075 , H01L33/52 , H01L33/00 , H01L33/62
CPC classification number: H01L25/0753 , H01L33/0079 , H01L33/0095 , H01L33/20 , H01L33/52 , H01L33/62 , H01L2224/16225 , H01L2224/83192 , H01L2933/005 , H01L2933/0066
Abstract: The present invention discloses a transferring method, a manufacturing method, a device and an electronic apparatus of micro-LED. The method for transferring micro-LED comprises: forming micro-LEDs on a laser-transparent original substrate, wherein the micro-LEDs are lateral micro-LEDs whose P electrodes and N electrodes are located on one side; bringing the P electrodes and N electrodes of the lateral micro-LEDs into contact with pads preset on a receiving substrate; and irradiating the original substrate with laser from the original substrate side to lift-off the lateral micro-LEDs from the original substrate. A technical effect of using lateral micro-LEDs lies in that the processing for N metal electrode after the micro-LED transfer can be omitted.
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公开(公告)号:US11417463B2
公开(公告)日:2022-08-16
申请号:US16643361
申请日:2017-09-05
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Zhe Wang , Qinglin Song , Debo Sun
Abstract: Disclosed are a method for manufacturing a coil, a coil, and an electronic device. The method includes: bonding a first side of a metal sheet onto a laser-transmitting substrate by an adhesive layer; cutting a coil pattern on a second side of the metal sheet by the laser to form a coil running through the two sides of the metal sheet on the metal sheet; bonding the second side of the metal sheet onto an adhesive tape; transmitting the laser through the laser-transmitting substrate to act on the adhesive layer to detach the laser-transmitting substrate and the adhesive layer from the first side of the metal sheet; exposing the coil pattern on the first side of the metal sheet; and forming an encapsulation layer on the coil to encapsulate the first side of the coil.
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公开(公告)号:US11388525B2
公开(公告)日:2022-07-12
申请号:US16614984
申请日:2017-05-31
Applicant: GOERTEK, INC.
Inventor: Quanbo Zou
Abstract: A MEMS microphone and a manufacturing method thereof are provided. The MEMS microphone comprises a MEMS microphone chip and a housing with an acoustic port. The MEMS microphone chip is mounted in the housing, and a mesh plug is mounted in the acoustic port and made from a mesh material which has a mesh structure that is suitable for passage of sound.
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公开(公告)号:US11117797B2
公开(公告)日:2021-09-14
申请号:US16339460
申请日:2016-10-08
Applicant: GOERTEK. INC
Inventor: Quanbo Zou , Zhe Wang , You Wang , Xianbin Wang
Abstract: The present invention discloses a MEMS device and an electronics apparatus. The MEMS device comprises: a substrate; a MEMS element placed on the substrate; a cover encapsulating the MEMS element together with the substrate; and a port for the MEMS element to access outside, wherein the port is provided with a filter which has mesh holes and includes electrets to prevent particles from entering into the MEMS element.
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公开(公告)号:US11024611B1
公开(公告)日:2021-06-01
申请号:US16620224
申请日:2017-06-09
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Peixuan Chen , Xiangxu Feng , Tao Gan , Xiaoyang Zhang , Zhe Wang
IPC: H01L27/12 , H01L25/075 , H01L21/67 , H01L21/677 , H01L33/00 , H01L51/00 , H01L21/683 , H01L21/60
Abstract: A micro-LED transfer method, manufacturing method and display device are provided. The micro-LED transfer method comprises: bonding the micro-LED array on a first substrate onto a receiving substrate through micro-bumps, wherein the first substrate is laser transparent; applying underfill into a gap between the first substrate and the receiving substrate; irradiating laser onto the micro-LED array from a side of the first substrate to lift-off the micro-LED array from the first substrate; and removing the underfill.
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公开(公告)号:US10971890B2
公开(公告)日:2021-04-06
申请号:US16465745
申请日:2016-12-05
Applicant: Goertek, Inc.
Inventor: Quanbo Zou , Zhe Wang
Abstract: A micro laser diode transfer method and a manufacturing method comprise: forming a bonding layer (515) on a receiving substrate (513), wherein first type electrodes (514) are connected to the bonding layer (515); bringing a first side of the micro laser diodes (500r) on a carrier substrate (520) into contact with the bonding layer (515), wherein the carrier substrate (520) is laser-transparent; and irradiating selected micro laser diodes (500r) with laser from the side of the carrier substrate (520) to lift-off the selected micro laser diodes (500r) from the carrier substrate (520). This method may improve yield.
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