公开(公告)号：US10444014B1

公开(公告)日：2019-10-15

申请号：US15253694

申请日：2016-08-31

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C19/5726 ,  G01C19/5755

Abstract: An angular sensor. The angular sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first pair of normal modes including a first normal mode and a second normal mode and a second pair of normal modes including a third normal mode and a fourth normal mode. The angular sensor further includes a coarse readout circuit configured to drive the first pair of modes, measure the motion of the first pair of modes, and derive from the measured motion of the first pair of modes a coarse measurement of an angular rate of the resonator. The angular sensor further includes and a fine readout circuit configured to derive a measurement of the difference between the true angular rate of the resonator and the coarse measurement.

公开(公告)号：US10281277B1

公开(公告)日：2019-05-07

申请号：US15347748

申请日：2016-11-09

Applicant: HRL Laboratories, LLC

Inventor： Raviv Perahia ,  Logan D. Sorenson ,  Lian X. Huang ,  Hung Nguyen ,  David T. Chang ,  Deborah J. Kirby

IPC: G01C19/58 ,  G01C19/64 ,  G01C19/5698 ,  G10K11/20

Abstract: A phononic travelling wave gyroscope. The gyroscope includes a phononic waveguide including at least one loop. The phase change incurred by phonons propagating around the loop is compared to a reference phase, and utilized to form an estimate of the rotational rate of the gyroscope.

公开(公告)号：US10175307B1

公开(公告)日：2019-01-08

申请号：US14997203

申请日：2016-01-15

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Hung Nguyen ,  Raviv Perahia ,  David T. Chang ,  L. X. Coco Huang ,  Joshua A. Erbland

IPC: G01R33/028 ,  G01R33/00

Abstract: A magnetometer system has a magnetometer, an interface circuit and an electronic demodulator, the interface circuit being coupled to sense electrodes disposed on the magnetometer and the demodulator being coupled to the interface circuit. Preferably, the magnetometer has a loop electrode which follows an outline of the shape of an active portion of the magnetometer and wherein the electronic demodulator has an output for driving the loop electrode of the magnetometer. Preferably, the magnetometer includes a quartz plate with flexural and thickness shear vibratory modes and wherein the flexural vibratory mode is driven, in use, into vibration by the electronic demodulator and wherein the thickness shear vibratory mode is driven, in use, into vibration by the interface circuit.

公开(公告)号：US09404748B2

公开(公告)日：2016-08-02

申请号：US13930769

申请日：2013-06-28

Applicant: HRL LABORATORIES, LLC

Inventor： Raviv Perahia ,  Hung Nguyen ,  Deborah J. Kirby ,  Srikanth S. Iyer ,  David T. Chang

IPC: G01C19/56 ,  G01C19/5755 ,  G01P15/125 ,  G01C19/5726

CPC classification number: G01C19/5755 ,  G01C19/5726 ,  G01P15/125

Abstract: An apparatus for driving and sensing motion in a gyroscope including a dielectric mass, an anchor, a spring coupled between the anchor and the dielectric mass, a substrate adjacent the dielectric mass, an insulator layer on the substrate, and a first electrode and a second electrode on the insulator layer. When an alternating current voltage is applied between the first and second electrodes, an electric field gradient is generated in the dielectric mass and causes the dielectric mass to move relative to the anchor. When the dielectric mass has motion relative to the anchor and a voltage is applied between the first and second electrodes, the movement of the dielectric mass generates a current at the first and second electrodes proportional to the motion.

Abstract translation: 一种用于在陀螺仪中驱动和感测运动的装置，包括介电质量块，锚固体，耦合在锚固体和电介质块之间的弹簧，与介电质量块相邻的衬底，衬底上的绝缘体层，以及第一电极和第二电极 绝缘体层上的电极。 当在第一和第二电极之间施加交流电压时，在电介质中产生电场梯度，并使介质质量相对于锚移动。 当介电质量具有相对于锚的运动并且在第一和第二电极之间施加电压时，电介质的运动在第一和第二电极处产生与运动成比例的电流。

公开(公告)号：US09046541B1

公开(公告)日：2015-06-02

申请号：US13648041

申请日：2012-10-09

Applicant: HRL LABORATORIES LLC ,  The Boeing Company

Inventor： Randall L. Kubena ,  David T. Chang ,  Robert L. Larson

IPC: H04R31/00 ,  G01P1/00

CPC classification number: G01P1/00 ,  G01C19/5684 ,  H03H3/0072 ,  H03H9/02244 ,  H03H9/0552 ,  H03H9/1057 ,  H03H9/2436 ,  H03H2009/02283 ,  H03H2009/02496

Abstract: A method for producing a disk resonator gyroscope includes providing a base substrate and a handle wafer with a release hole, bonding a release wafer to the handle wafer, bonding a resonator wafer to the release wafer, etching the resonator wafer to form a disk resonator with a central pillar, and sense and drive electrodes, selectively applying a conductive film onto the disk resonator on a side of the disk resonator opposite the release wafer, on the outer edge of the disk resonator, and on the surfaces of the sense and drive electrodes facing the outer edge of the disk resonator, bonding the sense and drive electrodes and the central pillar of the disk resonator to the base substrate, and releasing the handle wafer by introducing a dry release agent into the release hole to undercut the release wafer.

Abstract translation: 一种盘式谐振器陀螺仪的制造方法，其特征在于，具备提供基板和带有释放孔的手柄晶片，将释放晶片接合在手柄晶片上，将振荡片贴合到剥离晶片，蚀刻谐振晶片，形成具有 中央支柱，以及感测和驱动电极，在圆盘谐振器的外边缘上，在盘谐振器的与隔离晶片相反的一侧的盘谐振器上选择性地施加导电膜，并且在感测和驱动电极的表面上 面对盘式谐振器的外边缘，将感测和驱动电极以及盘式谐振器的中心支柱粘合到基底基板上，并通过将释放孔引入释放孔中以释放释放晶片来释放手柄晶片。

公开(公告)号：US10571267B1

公开(公告)日：2020-02-25

申请号：US15253704

申请日：2016-08-31

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Raviv Perahia ,  David T. Chang ,  Randall L. Kubena ,  Deborah J. Kirby ,  Hung Nguyen ,  Richard J. Joyce

IPC: G01C25/00 ,  G01C19/5776 ,  G01C19/5684 ,  H03L7/26 ,  H03G3/20

Abstract: An angular rate sensor. The sensor includes a Coriolis vibratory gyroscope (CVG) resonator, configured to oscillate in a first normal mode and in a second normal mode; a frequency reference configured to generate a reference signal; and a first phase control circuit. The first phase control circuit is configured to: measure a first phase difference between: a first phase target, and the difference between: a phase of an oscillation of the first normal mode and a phase of the reference signal. The first phase control circuit is further configured to apply a first phase correction signal to the CVG resonator, to reduce the first phase difference. A second phase control circuit is similarly configured to apply a second phase correction signal to the CVG resonator, to reduce a corresponding, second phase difference.

公开(公告)号：US10514261B2

公开(公告)日：2019-12-24

申请号：US15387435

申请日：2016-12-21

Applicant: HRL Laboratories, LLC

Inventor： Logan D. Sorenson ,  Hung Nguyen ,  Raviv Perahia ,  Deborah J. Kirby ,  Richard J. Joyce ,  David T. Chang

IPC: G01C21/08 ,  G01R33/02 ,  G01V7/00

Abstract: A geopositioning system. The geopositioning system includes an accelerometer including three sensing axes, a gyroscope including three sensing axes, and a magnetometer including three sensing axes, and a processing circuit. The processing circuit is configured to calculate a location of the geopositioning system as a latitude, longitude, and altitude with respect to the Earth.

公开(公告)号：US20190169979A1

公开(公告)日：2019-06-06

申请号：US16208449

申请日：2018-12-03

Applicant: HRL Laboratories, LLC

Inventor： Hung NGUYEN ,  Logan D. Sorenson ,  David L. Walter ,  Adour V. Kabakian ,  Raviv Perahia ,  Shuoqin Wang ,  David W. Shahan ,  Lian X. Huang ,  David T. Chang

IPC: E21B47/09 ,  E21B41/00 ,  G01P15/18 ,  G01P15/14 ,  G01P15/105

Abstract: An instrument package for use during the drilling a wellbore. The instrument package includes a plurality of instruments such as accelerometers, gyroscopes, and magnetometers; a computer is configured to determine the current position of the plurality of instruments from a set of measurements produced by the plurality of instruments; and wherein the plurality of instruments are mechanically isolated from a drill head assembly by one or more multi-degree of freedom vibration isolators. The computer preferably has at least two modes different analytical modes of analyzing the set of measurements produced by the plurality of instruments, including a continuous mode and a survey mode, the continuous mode being operational during times that active drilling is occurring and the survey mode being operational during times that the active drilling is not occurring.

公开(公告)号：US10308505B1

公开(公告)日：2019-06-04

申请号：US14456808

申请日：2014-08-11

Applicant: HRL LABORATORIES LLC

Inventor： Deborah J. Kirby ,  Raviv Perahia ,  Hung Nguyen ,  Frederic P. Stratton ,  David T. Chang

IPC: B81B3/00 ,  B81C1/00 ,  G01C21/18

Abstract: A device preferably for use in an inertial navigation system the device having a single IC wafer; a plurality of sensors bonded to bond regions on said single IC wafer, at least one of said bond regions including an opening therein in gaseous communication with a pressure chamber associated with at least one of the plurality of said sensors; and a plurality of caps encapsulating said plurality of sensors, at least one of said plurality of caps forming at least a portion of said pressure chamber. A method of making the device is also disclosed.

公开(公告)号：US10141906B1

公开(公告)日：2018-11-27

申请号：US15149026

申请日：2016-05-06

Applicant: HRL LABORATORIES LLC

Inventor： David T. Chang ,  Frederic P. Stratton ,  Hung Nguyen ,  Randall L. Kubena

IPC: H03H3/02 ,  H03H9/19 ,  H03H3/007 ,  H03H9/15

Abstract: A method of fabricating a resonator includes providing a first quartz substrate, forming a metallic etch stop on a first surface of the first quartz substrate; attaching, using a temporary adhesive, the first surface of the first quartz substrate to a second quartz substrate, etching an opening for a via in a second surface of the first quartz substrate to the metallic etch stop, forming a metal electrode on the second surface of the first quartz substrate, the metal electrode penetrating the via in the first quartz substrate to make ohmic contact with the metallic etch stop, bonding the metal electrode formed on the second surface of the first quartz substrate to a pad formed on a host substrate; and dissolving the temporary adhesive to release the second quartz substrate from the first quartz substrate, wherein the first quartz substrate and the host substrate each comprise crystalline quartz.