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公开(公告)号：US06683683B2
公开(公告)日：2004-01-27
申请号：US10084059
申请日：2002-02-28
申请人： Koji Tomita , Muneo Maeshima , Shigeru Matsui , Yoshitaka Kodama , Hitoshi Komuro , Kazuo Takeda
发明人： Koji Tomita , Muneo Maeshima , Shigeru Matsui , Yoshitaka Kodama , Hitoshi Komuro , Kazuo Takeda
IPC分类号： G01N2188
CPC分类号： G01N21/9505 , G01N21/9501
摘要： A defect inspection apparatus for detecting defects existing on a surface of a semiconductor sample and/or inside the sample based on light information from the sample obtained by irradiating a light beam onto the sample is provided, which comprises a detecting means for detecting positions in the depth direction where the defects exist and distribution of the defects based on the light information; a setting means for setting a position in the depth direction where defects exist; and a means for displaying the distribution of the defects obtained by the detecting means, the displaying means displaying the distribution of the defects corresponding to the position in the depth direction set by the setting means.
摘要翻译： 提供了一种用于根据从将样本照射光束获得的样本的光信息检测存在于半导体样品表面和/或样品内部的缺陷的缺陷检查装置，其包括检测装置， 存在缺陷的深度方向和基于光信息的缺陷分布; 用于设置存在缺陷的深度方向上的位置的设定装置; 以及用于显示由检测装置获得的缺陷的分布的装置，显示装置显示与由设置装置设置的深度方向上的位置相对应的缺陷的分布。
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公开(公告)号：US5554863A
公开(公告)日：1996-09-10
申请号：US260331
申请日：1994-06-15
IPC分类号： H01L29/74 , H01L29/08 , H01L29/744 , H01L31/111
CPC分类号： H01L29/744 , H01L29/0834
摘要： A gate turn-off thyristor including: an n-type emitter semiconductor layer divided into a plurality of n-type areas; a p-type base semiconductor layer which cooperates with the n-type emitter semiconductor layer to form a first main circular surface; an n-type base semiconductor layer; and a p-type emitter semiconductor layer cooperating with the n-type base semiconductor layer to form a second main circular surface. An outer diameter of the p-type emitter semiconductor layer is smaller than that of the n-type emitter semiconductor layer. A first main electrode put in low resistance contact with the n-type emitter semiconductor layer is formed on the first main surface. A second main electrode put in low resistance contact with the p-type emitter layer and the n-type base semiconductor layer is formed on the second main surface. A control electrode is formed in the p-type base semiconductor on the first main surface. A first electrode plate larger in diameter than the n-type emitter semiconductor layer is connected electrically with the first main electrode. A second electrode plate larger in diameter than the n-type emitter semiconductor layer is connected electrically with the second main electrode.
摘要翻译： 一种栅极截止晶闸管，包括：分为多个n型区域的n型发射极半导体层; p型基极半导体层，与n型发射极半导体层配合形成第一主圆面; n型基极半导体层; 以及与n型基底半导体层配合形成第二主圆形表面的p型发射极半导体层。 p型发射极半导体层的外径小于n型发射极半导体层的外径。 在第一主表面上形成与n型发射极半导体层低电阻接触的第一主电极。 在第二主表面上形成与p型发射极层和n型基极半导体层低电阻接触的第二主电极。 控制电极形成在第一主表面上的p型基极半导体中。 直径大于n型发射极半导体层的第一电极板与第一主电极电连接。 直径大于n型发射极半导体层的第二电极板与第二主电极电连接。
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公开(公告)号：US20090062934A1
公开(公告)日：2009-03-05
申请号：US12181764
申请日：2008-07-29
CPC分类号： G01B15/00 , G05B2219/31215
摘要： There is provided a recipe generation apparatus and method for reducing the time required to reflect an optimal value and changed value in an input file by automatically reflecting a value obtained by optimizing an input file for recipe generation in the input file for recipe generation. This invention eliminates the inconvenience of manually reflecting changes in an input file for recipe generation by automatically reflecting changed values in the input file for recipe generation after editing a provisionally generated off-line recipe and achieves a reduction in processing time. This invention also provides a method for automatically generating an off-line recipe and a file for recipe generation from a recipe of a scanning electron microscope (see FIG. 3).
摘要翻译： 提供了一种食谱生成装置和方法，用于通过自动反映通过优化用于配方生成的输入文件中的食谱生成的输入文件获得的值来减少反映输入文件中的最佳值和变化值所需的时间。 本发明通过在编辑临时生成的离线配方之后自动反映用于配方生成的输入文件中的改变值，并且实现了处理时间的缩短，从而消除了手动反映输入文件中用于配方生成的变化的不便。 本发明还提供了一种用于根据扫描电子显微镜的配方（参见图3）自动生成离线配方和用于配方生成的文件的方法。
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公开(公告)号：US07133634B2
公开(公告)日：2006-11-07
申请号：US10782816
申请日：2004-02-23
IPC分类号： G03G15/20
CPC分类号： G03G15/2057 , G03G2215/2009
摘要： A circulating body driven with its surface being circulated along a fixed route and having a base material provided with a tubular outside peripheral surface and a surface layer covering the outside peripheral surface of the base material, the surface static friction coefficient of the surface layer is designed to be 0.06 or less with common paper at 100° C.
摘要翻译： 沿着固定路径使其表面驱动的循环体，具有设置有管状外周面的基材和覆盖基材外周面的表面层，设计表层的表面静摩擦系数 在普通纸在100℃下为0.06以下
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公开(公告)号：US20060216077A1
公开(公告)日：2006-09-28
申请号：US11189735
申请日：2005-07-27
申请人： Hitoshi Komuro
发明人： Hitoshi Komuro
IPC分类号： G03G15/20
CPC分类号： G03G15/206 , G03G2215/2009 , G03G2215/2016 , G03G2215/2022
摘要： The present invention provides a fixing device that has a planer member including a heat conduction layer. The heat conduction layer has a predetermined thickness and relatively pressed against a rotary member being rotated so that the device fixes an unfixed toner image born by a recording sheet onto the recording sheet by causing the sheet bearing the unfixed toner image to pass between the planer member and the rotary member and applying heat and pressure to the unfixed toner image. The device includes a heater that applies heat to the unfixed toner image born by the sheet passing between the planer member and rotary member. The heat conduction layer includes a heat conduction anisotropic material whose heat conduction coefficient showing the degree of easiness of heat conduction in a surface direction in which the heat conduction layer extends is larger than that in a thickness direction.
摘要翻译： 本发明提供一种具有包括导热层的平面构件的固定装置。 导热层具有预定的厚度并且相对地压靠旋转的旋转构件，使得该装置将由记录片材承载的未定影调色剂图像定影到记录片材上，方法是使承载未定影调色剂图像的片材在平面构件 和旋转构件，并且对未定影的调色剂图像施加热和压力。 该装置包括加热器，该加热器对由片材在平面构件和旋转构件之间通过的片材所承载的未定影调色剂图像施加热量。 导热层包括导热各向异性材料，其导热系数表示在导热层延伸的表面方向上的热传导的容易程度大于厚度方向上的热传导系数。
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公开(公告)号：US06978041B2
公开(公告)日：2005-12-20
申请号：US10096917
申请日：2002-03-14
申请人： Seiji Isogai , Hitoshi Komuro , Hideo Wada , Katsuharu Shoda
发明人： Seiji Isogai , Hitoshi Komuro , Hideo Wada , Katsuharu Shoda
IPC分类号： G01N21/956 , G01N23/225 , G03F1/00 , G03F7/20 , G06T1/00 , G06T7/00 , H01L21/66 , G06K9/00
CPC分类号： G03F7/7065 , G03F1/84 , G06T7/0002 , G06T7/0004 , G06T2207/30148 , Y10T29/49131
摘要： An object of the present invention is to increase efficiency in review work by appropriately narrowing down review work that verifies shapes of visual defects relating to an enormous amount of defects detected by a visual inspecting apparatus with high sensitivity. In order to appropriately extract defect information from an inspecting apparatus, a filter function and a sampling function are prepared by unitizing the functions. As a result, defects as review targets are narrowed down and extracted automatically using the filter function and the sampling function in combination. In addition, sequencing the filter conditions and the sampling conditions and registering the sequence enables automatic filtering and sampling on the basis of information on a wafer as a review target, and thereby only defect information on the review target is extracted.
摘要翻译： 本发明的目的是通过适当地缩小检查工作，从而通过适当地缩小与视觉检查装置检测到的大量缺陷相关的视觉缺陷的形状的高灵敏度来提高审查工作的效率。 为了从检查装置适当地提取缺陷信息，通过功能的组合来准备滤波器功能和采样功能。 结果，使用过滤功能和采样功能组合，将检查对象的缺陷缩小并自动提取。 此外，对过滤条件和采样条件进行排序并注册序列可以根据晶片上的信息作为审查目标进行自动过滤和采样，从而仅提取审查目标的缺陷信息。
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公开(公告)号：US6157444A
公开(公告)日：2000-12-05
申请号：US198644
申请日：1998-11-24
申请人： Koji Tomita , Muneo Maeshima , Shigeru Matsui , Hitoshi Komuro , Kazuo Takeda
发明人： Koji Tomita , Muneo Maeshima , Shigeru Matsui , Hitoshi Komuro , Kazuo Takeda
CPC分类号： G01N21/9505 , G01N21/9501
摘要： In order to easily evaluate defects of the silicon wafer affecting the characteristic of a device, the present invention provides a defect inspection apparatus for detecting defects existing on a surface of a sample and/or inside the sample, which comprises a display apparatus for displaying a distribution of the defects on a graph having coordinate axes of distance from a central position of the sample and the depth where the defect exists based on the depth information and the positional information obtained by a detecting means.
摘要翻译： 为了容易地评估影响器件特性的硅晶片的缺陷，本发明提供了一种用于检测存在于样品表面和/或样品内部的缺陷的缺陷检查装置，其包括显示装置 基于由检测装置获得的深度信息和位置信息，在具有距离样本的中心位置的距离的坐标轴和存在缺陷的深度的图形上的缺陷的分布。
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公开(公告)号：US08189040B2
公开(公告)日：2012-05-29
申请号：US12181764
申请日：2008-07-29
CPC分类号： G01B15/00 , G05B2219/31215
摘要： There is provided a recipe generation apparatus and method for reducing the time required to reflect an optimal value and changed value in an input file by automatically reflecting a value obtained by optimizing an input file for recipe generation in the input file for recipe generation. This invention eliminates the inconvenience of manually reflecting changes in an input file for recipe generation by automatically reflecting changed values in the input file for recipe generation after editing a provisionally generated off-line recipe and achieves a reduction in processing time. This invention also provides a method for automatically generating an off-line recipe and a file for recipe generation from a recipe of a scanning electron microscope (see FIG. 3).
摘要翻译： 提供了一种食谱生成装置和方法，用于通过自动反映通过优化用于配方生成的输入文件中的食谱生成的输入文件而获得的值来减少反映输入文件中的最佳值和变化值所需的时间。 本发明通过在编辑临时生成的离线配方之后自动反映用于配方生成的输入文件中的改变值，并且实现了处理时间的缩短，从而消除了手动反映输入文件中用于配方生成的变化的不便。 本发明还提供了一种用于根据扫描电子显微镜的配方（参见图3）自动生成离线配方和用于配方生成的文件的方法。
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公开(公告)号：US06968079B2
公开(公告)日：2005-11-22
申请号：US09886976
申请日：2001-06-25
CPC分类号： G06T7/001 , G06T7/0002 , G06T7/60 , G06T2200/24 , G06T2207/30148
摘要： The present invention relates to an inspection device and inspection method of a specimen, particularly to the inspection device and inspection method of defects of semiconductor wafers, and the object is to cope with the increase of inspection images and provide an inspection device and inspection method which is capable of classification by sub class, meeting the user needs, in addition to the automatic classification by an inspection device.To achieve the afore-mentioned object, the present invention provides an inspection device, comprising a storage means for storing the images obtained and a display means equipped with the first display area for displaying multiple images stored in the storage means and the second display area for displaying the images which are classified according to the characteristics of the displayed images (called the classified images), wherein the display means displays the class of the specimen, displays the sub class which is set manually for each class, and also displays the images selected by the sub class as a mass of the classified images for each sub class.
摘要翻译： 本发明涉及一种试样的检查装置和检查方法，特别涉及检查装置和半导体晶片的缺陷检查方法，其目的是应对检查图像的增加，并提供检查装置和检查方法， 能够通过子类进行分类，满足用户需求，除了通过检查设备进行自动分类。 为了实现上述目的，本发明提供了一种检查装置，包括：存储装置，用于存储所获得的图像;以及显示装置，配备有用于显示存储在存储装置中的多个图像的第一显示区域和第二显示区域， 显示根据显示图像的特性（称为分类图像）分类的图像，其中显示装置显示样本的类别，显示为每个类别手动设置的子类，并且还显示所选择的图像 通过子类作为每个子类的分类图像的质量。
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公开(公告)号：US20050013639A1
公开(公告)日：2005-01-20
申请号：US10782816
申请日：2004-02-23
CPC分类号： G03G15/2057 , G03G2215/2009
摘要： In a circulating body driven with its surface being circulated along a fixed route and comprising a base material having a tubular outside peripheral surface and a surface layer covering the outside peripheral surface of the base material, the surface static friction coefficient of the surface layer is designed to be 0.06 or less with common paper at 100° C.
摘要翻译： 在其表面沿着固定路线循环驱动的循环体中，包括具有管状外周面的基材和覆盖基材外周面的表层，表面层的表面静摩擦系数被设计 在普通纸在100℃下为0.06以下
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