Interdigitated electrode for electronic device and electronic device using the same
    21.
    发明授权
    Interdigitated electrode for electronic device and electronic device using the same 有权
    用于电子装置的交叉电极和使用它的电子装置

    公开(公告)号:US07520173B2

    公开(公告)日:2009-04-21

    申请号:US11865427

    申请日:2007-10-01

    IPC分类号: G01L9/00

    摘要: Provided are an interdigitated electrode (IDE) for an electronic device, which includes a plurality of anodes and a plurality of cathodes arranged radially in an alternating fashion for electrical insulation from one another, and an electronic device using the same. The IDE in which the anodes and the cathodes are arranged radially in an alternating fashion is fabricated and applied to the electronic device, so that the entire fabrication process can be simplified compared to that of a typical electronic device in which an upper electrode is different from a lower electrode. Also, circular or polygonal IDEs can be applied to systems that are driven or measure values on their central axes, thereby enhancing the performance and efficiency of the systems. Furthermore, the circular or polygonal IDEs can be employed in systems such as acoustic sensors, pressure sensors, micro-speakers, biological sensors, and acceleration sensors, so that the structure and operation of the systems can be simplified.

    摘要翻译: 提供了一种用于电子设备的叉指电极(IDE),其包括多个阳极和以交替方式径向排列的用于彼此电绝缘的多个阴极和使用该阴极的电子设备。 阳极和阴极以交替的方式径向排列的IDE被制造并施加到电子器件,使得与上电极不同于其中的典型电子器件的整个制造工艺相比,可以简化整个制造工艺 下电极。 此外,圆形或多边形IDE可以应用于驱动或测量其中心轴上的值的系统,从而提高系统的性能和效率。 此外,圆形或多边形IDE可用于诸如声学传感器,压力传感器,微型扬声器,生物传感器和加速度传感器的系统中,从而可以简化系统的结构和操作。

    Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same
    22.
    发明授权
    Micro-electromechanical systems (MEMS) microphone and method of manufacturing the same 有权
    微机电系统(MEMS)麦克风及其制造方法相同

    公开(公告)号:US08175300B2

    公开(公告)日:2012-05-08

    申请号:US12509411

    申请日:2009-07-24

    IPC分类号: H04R25/00

    摘要: Provided are a micro-electromechanical systems (MEMS) microphone and a method of manufacturing the same. A manufacturing process is simplified compared to a conventional art using both upper and lower substrate processes. Since defects which may occur during manufacturing are reduced due to the simplified manufacturing process, the manufacturing throughput is improved, and since durability of the MEMS microphone is improved, system stability against the external environment is improved.

    摘要翻译: 提供了一种微机电系统(MEMS)麦克风及其制造方法。 与使用上基板工艺和下基板工艺的常规技术相比,制造工艺简化。 由于制造过程中可能发生的缺陷由于简化的制造过程而降低,所以提高了制造生产能力,并且由于提高了MEMS麦克风的耐久性,提高了对外部环境的系统稳定性。

    Condenser microphone having flexure hinge diaphragm and method of manufacturing the same
    25.
    发明授权
    Condenser microphone having flexure hinge diaphragm and method of manufacturing the same 失效
    具有挠性铰链隔膜的冷凝器麦克风及其制造方法

    公开(公告)号:US08422702B2

    公开(公告)日:2013-04-16

    申请号:US11875996

    申请日:2007-10-22

    IPC分类号: H04R25/00

    摘要: A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer to be used as a back plate on the first insulating layer; forming a plurality of sound holes by patterning the upper silicon layer; forming a second insulating layer on the upper silicon layer; forming a conductive layer on the upper silicon layer having the sound holes, and forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming a plurality of air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap between the diaphragm and the upper silicon layer.Consequently, due to the flexible diaphragm, a manufacturing process using semiconductor MEMS technology may improve the sensitivity of the condenser microphone and reduce the size of the condenser microphone, thereby enabling integration into a portable terminal.

    摘要翻译: 提供具有弯曲铰链形上隔膜和背板的微型电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成用作背板的上硅层; 通过图案化上硅层形成多个声孔; 在所述上硅层上形成第二绝缘层; 在具有所述声孔的所述上硅层上形成导电层,并在所述导电层上形成钝化层; 在钝化层上形成牺牲层; 在所述牺牲层上沉积隔膜,以及形成通过所述隔膜的多个空气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 蚀刻牺牲层,钝化层,导电层,上硅层,第一绝缘层和下硅层,以在隔膜和上硅层之间形成气隙。 因此,由于柔性隔膜,使用半导体MEMS技术的制造工艺可以提高电容式麦克风的灵敏度并减小电容式麦克风的尺寸,从而可以集成到便携式终端中。

    Forced acoustic dipole and forced acoustic multipole array using the same
    27.
    发明授权
    Forced acoustic dipole and forced acoustic multipole array using the same 有权
    强迫声偶极子和强迫声多极阵列使用相同

    公开(公告)号:US08031558B2

    公开(公告)日:2011-10-04

    申请号:US12473214

    申请日:2009-05-27

    IPC分类号: H04B1/02

    CPC分类号: H04R1/403

    摘要: Provided is a forced acoustic dipole capable of regulating phases and acoustic pressures of first and second acoustic signals output from first and second pole speakers to freely steer the direction of an acoustic lobe. In addition, a forced acoustic multipole array is constituted by a plurality of forced acoustic dipoles. When the phases and acoustic pressures of the first and second acoustic signals output from the forced acoustic dipoles are regulated to steer an acoustic lobe in a specific direction, sound can be heard from a desired direction only without disturbing others.

    摘要翻译: 提供了一种能够调节从第一和第二极扬声器输出的第一和第二声信号的相位和声压以自由地引导声波瓣的方向的强制声偶极子。 此外,强制声音多极阵列由多个强制声学偶极子构成。 当从强制声学偶极子输出的第一和第二声信号的相位和声压被调节以在特定方向上引导声波波瓣时,只能从期望的方向听到声音,而不会扰乱其它声音。

    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME
    29.
    发明申请
    CONDENSER MICROPHONE HAVING FLEXURE HINGE DIAPHRAGM AND METHOD OF MANUFACTURING THE SAME 失效
    具有挠性铰链膜片的冷凝器麦克风及其制造方法

    公开(公告)号:US20080137884A1

    公开(公告)日:2008-06-12

    申请号:US11875996

    申请日:2007-10-22

    IPC分类号: H04R25/00 H01L21/64

    摘要: A micromini condenser microphone having a flexure hinge-shaped upper diaphragm and a back plate, and a method of manufacturing the same are provided.The method includes the steps of: forming a lower silicon layer and a first insulating layer; forming an upper silicon layer to be used as a back plate on the first insulating layer; forming a plurality of sound holes by patterning the upper silicon layer; forming a second insulating layer on the upper silicon layer; forming a conductive layer on the upper silicon layer having the sound holes, and forming a passivation layer on the conductive layer; forming a sacrificial layer on the passivation layer; depositing a diaphragm on the sacrificial layer, and forming a plurality of air holes passing through the diaphragm; forming electrode pads on the passivation layer and a region of the diaphragm; and etching the sacrificial layer, the passivation layer, the conductive layer, the upper silicon layer, the first insulating layer and the lower silicon layer to form an air gap between the diaphragm and the upper silicon layer.Consequently, due to the flexible diaphragm, a manufacturing process using semiconductor MEMS technology may improve the sensitivity of the condenser microphone and reduce the size of the condenser microphone, thereby enabling integration into a portable terminal.

    摘要翻译: 提供具有弯曲铰链形上隔膜和背板的微型电容麦克风及其制造方法。 该方法包括以下步骤:形成下硅层和第一绝缘层; 在所述第一绝缘层上形成用作背板的上硅层; 通过图案化上硅层形成多个声孔; 在所述上硅层上形成第二绝缘层; 在具有所述声孔的所述上硅层上形成导电层,并在所述导电层上形成钝化层; 在钝化层上形成牺牲层; 在所述牺牲层上沉积隔膜,以及形成通过所述隔膜的多个空气孔; 在所述钝化层上形成电极焊盘和所述隔膜的区域; 蚀刻牺牲层,钝化层,导电层,上硅层,第一绝缘层和下硅层,以在隔膜和上硅层之间形成气隙。 因此,由于柔性隔膜,使用半导体MEMS技术的制造工艺可以提高电容式麦克风的灵敏度并减小电容式麦克风的尺寸,从而可以集成到便携式终端中。

    METHOD FOR PREPARING POLYMER ACTUATORS WITH HIGH STABILITY AND POLYMER ACTUATORS PREPARED BY THE METHOD
    30.
    发明申请
    METHOD FOR PREPARING POLYMER ACTUATORS WITH HIGH STABILITY AND POLYMER ACTUATORS PREPARED BY THE METHOD 审中-公开
    制备具有高稳定性的聚合物致动器的方法和由该方法制备的聚合物致动器

    公开(公告)号:US20080107906A1

    公开(公告)日:2008-05-08

    申请号:US11856484

    申请日:2007-09-17

    IPC分类号: B32B27/06 B05D5/12 B32B15/08

    摘要: Provided are a method for preparing polymer actuators with high stability and polymer actuators prepared by the method, and more specifically, to a method for preparing polymer actuators with high stability that use low power, are extremely thin, and can be substituted in a motor of a camera module, and polymer actuators prepared by the method. The method includes the steps of: preparing an Ionic Polymer Metal Composite (IPMC) in which metal electrodes are plated on both surfaces of a ionic polymer film; removing water from the ionic polymer film of the IPMC; and expanding the IPMC in a polar solvent that has a higher boiling point and a lower freezing point than water.

    摘要翻译: 提供一种制备具有高稳定性的聚合物致动器和通过该方法制备的聚合物致动器的方法,更具体地说,涉及一种制备具有高功率,非常薄的高稳定性的聚合物致动器的方法,并且可以在 相机模块和通过该方法制备的聚合物致动器。 该方法包括以下步骤:制备在离子聚合物膜的两个表面上镀金属电极的离子聚合物金属复合物(IPMC); 从IPMC的离子聚合物膜中除去水分; 并在具有比水更高的沸点和更低的凝固点的极性溶剂中扩展IPMC。