摘要:
An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a main supplying unit of an oxidative gas and a supplying unit of a reducing gas being provided at one end of the processing container, a sub supplying unit of the oxidative gas being provided on a way in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. In the atmosphere forming step, the oxidative gas is adapted to be supplied from the main supplying unit of the oxidative gas and the sub supplying unit of the oxidative gas.
摘要:
A fuel cell system includes: 1) a fuel gas circulating system; 2) a first pressure sensor for sensing a fuel cell inlet sensed pressure; 3) a second pressure sensor for sensing a fuel gas circulating system inlet sensed pressure; 4) a fuel gas circulating system inlet target pressure operator for operating a fuel gas circulating system inlet target pressure, based on the following: i) the fuel cell inlet sensed pressure sensed with the first pressure sensor, and ii) a fuel cell inlet target pressure; and 5) a fuel gas circulating system inlet pressure controller for controlling the pressure of the fuel gas supplied to the fuel cell, by so regulating the pressure regulator valve that the fuel gas circulating system inlet sensed pressure sensed with the second pressure sensor becomes the fuel gas circulating system inlet target pressure operated by the fuel gas circulating system inlet target pressure operator.
摘要:
A power generation control system which includes: a fuel cell (201); a target power provider (101) for the fuel cell (201); a operation status monitoring system (102) for monitoring output power from the fuel cell (201), in which the detected output power includes actual output voltage (AV) of the fuel cell (201); and a controller (214). The controller (214) includes: a target current computing unit (104) which calculates a target current (TI) from the target power (TPW) given by the target power provider (101), based on PW-I characteristic obtained from I-V characteristic of the fuel cell (201); and a command output power computing unit (106) which calculates a command output power (CPW) of the fuel cell (201) based on the target current (TI) and the actual output voltage (AV).
摘要:
A method for forming a silicon oxide film includes disposing a silicon oxide film on a surface of a target substrate, and performing a reformation process on the silicon oxide film. The reformation process is performed by annealing the silicon oxide film while exposing the silicon oxide film to oxygen radicals and hydroxyl group radicals.
摘要:
An oxidation method for a semiconductor process, which oxidizes a surface of a target substrate, includes heating a process container that accommodates the target substrate, and supplying hydrogen gas and oxygen gas into the process container while exhausting the process container. The oxidation method also includes causing the hydrogen gas and the oxygen gas to react with each other in the process container at a process temperature and a process pressure to generate water vapor, and oxidizing the surface of the target substrate by the water vapor. The process pressure is set at 2000 Pa (15 Torr) or more.
摘要:
This apparatus can automatically calculate the specification of an exposing device which can automatically calculate the maximum theoretical yield of chips and realize chip manufacture with the minimum number of times of exposure by obtaining the chip layout producing the maximum number of chips from a wafer in the process to manufacture the chips from the wafer. This apparatus comprises initial data means, virtual chip layout calculating means, virtual chip layout storing means, maximum theoretical yield layout determining means, virtual exposure layout calculating means, virtual exposure layout storing means, minimum exposure layout determining means and determined layout displaying means. As explained above, it has been expected to provide an automatic maximum theoretical yield calculating apparatus to realize the maximum theoretical yield with the minimum number of times of exposure.
摘要:
A polyester resin comprising a polyester resin chip (A) and a polyester resin fine particle (B) which has the same composition as the (A) and which passes through a 10.5 mesh screen in a proportion of 0.1-300 ppm, wherein a cyclic trimer increases in a proportion of not more than 0.30 wt % upon melting at a temperature of 290.degree. C. for 60 minutes; a polyester resin characterized in that a cyclic trimer increases in a proportion of not more than 0.30 wt % upon melting at a temperature of 290.degree. C. for 60 minutes, and the contents of Na, Ca, Mg and/or Si in the polyeser resin is 0.001-5 ppm and the total of these contents is not more than 10 ppm; and production methods thereof. According to the polyester resin of the present invention, mold such as stretch blow mold, heat setting mold, vacuum forming mold and the like are less stained in sheet forming, bottle forming and the like, so that forming can be continued for a long time to easily produce a multitude of formed articles with superior transparency. As a result, hollow articles having superior transparency and heat resistance of the finish part can be obtained.
摘要:
A centrifuge microscope includes a disk which is rotatable around a rotation axis and which is provided with a sample chamber for accommodating a sample. An observation optical system is provided which includes an objective lens which is positioned such that the sample chamber crosses an optical axis of the objective lens as the disk rotates. A pulsed laser source is provided for emitting a pulsed laser to the sample at a timing at which the sample chamber crosses the optical axis of the objective lens. And a delay time adjusting section is provided for adjusting a delay time of an emission timing of the pulsed laser in accordance with a rotational speed of the disk.
摘要:
An apparatus for controlling an engine operation such as EGR rate for an internal combustion engine is disclosed with an air/fuel mixture ratio control. In the control apparatus, a variable representing a characteristic of a combustion state in the engine is detected and a difference of the combustion state variable, a target value is averaged for each rich/lean period T determined from the variation of a feedback correction coefficient so that a basic EGR (Exhaust Gas Recirculation) rate determined according to the engine operating condition is corrected on the basis of the average value to derive a final EGR rate. Thus, the variation in the EGR rate cannot be amplified or incremented even when the variation in the combustion state variable occurs due to the influence of the variation in the air/fuel mixture ratio.
摘要:
A method of preparing optically active ketones having the general formula ##STR1## wherein R.sup.2 and R.sup.3 indicate hydrocarbon groups having 1 to 20 carbon atoms characterized by submitting an optically active sulfonyloxy alcohol having the general formula ##STR2## wherein R.sup.1, R.sup.2 and R.sup.3 indicate hydrocarbon groups having carbon atoms of 1 to 20 and which optionally contain N, O, P and S. The symbol * indicates asymmetric carbon atoms to rearrangement in a solvent and in the presence of organoaluminum compounds given by the general formula R.sub.3-n.sup.4 AlX.sub.n, (wherein R.sup.4 indicates an alkyl group having carbon atoms of 1 to 20 and X indicates a halogen atom, an alkoxy group or a CN group. n is 1, 1.5 or 2).