Oxidizing method and oxidizing unit for object to be processed
    21.
    发明授权
    Oxidizing method and oxidizing unit for object to be processed 有权
    用于处理物体的氧化方法和氧化装置

    公开(公告)号:US07304003B2

    公开(公告)日:2007-12-04

    申请号:US11086671

    申请日:2005-03-23

    IPC分类号: H01L21/31

    摘要: An oxidizing method for an object to be processed according to the present invention includes: an arranging step of arranging a plurality of objects to be processed in a processing container whose inside can be vacuumed, the processing container having a predetermined length, a main supplying unit of an oxidative gas and a supplying unit of a reducing gas being provided at one end of the processing container, a sub supplying unit of the oxidative gas being provided on a way in a longitudinal direction of the processing container; an atmosphere forming step of supplying the oxidative gas and the reducing gas into the processing container in order to form an atmosphere having active oxygen species and active hydroxyl species in the processing container; and an oxidizing step of oxidizing surfaces of the plurality of objects to be processed in the atmosphere. In the atmosphere forming step, the oxidative gas is adapted to be supplied from the main supplying unit of the oxidative gas and the sub supplying unit of the oxidative gas.

    摘要翻译: 根据本发明的被处理物的氧化方法包括:排列步骤,将待处理的多个物体排列在可以被抽真空的处理容器内,处理容器具有预定长度,主供应单元 在所述处理容器的一端设置有氧化性气体和还原气体供给单元,所述氧化性气体的副供给单元设置在所述处理容器的长度方向上; 将氧化性气体和还原性气体供给到处理容器中以在处理容器中形成具有活性氧和活性羟基的气氛的气氛形成工序; 以及在大气中氧化多个待处理物体的表面的氧化步骤。 在气氛形成工序中,氧化气体适于从氧化气体的主供给单元和氧化气体的副供给单元供给。

    Fuel cell system, and failure diagnosing apparatus of the same
    22.
    发明申请
    Fuel cell system, and failure diagnosing apparatus of the same 审中-公开
    燃料电池系统及其故障诊断装置

    公开(公告)号:US20060073363A1

    公开(公告)日:2006-04-06

    申请号:US11235104

    申请日:2005-09-27

    IPC分类号: H01M8/00 H01M10/48

    摘要: A fuel cell system includes: 1) a fuel gas circulating system; 2) a first pressure sensor for sensing a fuel cell inlet sensed pressure; 3) a second pressure sensor for sensing a fuel gas circulating system inlet sensed pressure; 4) a fuel gas circulating system inlet target pressure operator for operating a fuel gas circulating system inlet target pressure, based on the following: i) the fuel cell inlet sensed pressure sensed with the first pressure sensor, and ii) a fuel cell inlet target pressure; and 5) a fuel gas circulating system inlet pressure controller for controlling the pressure of the fuel gas supplied to the fuel cell, by so regulating the pressure regulator valve that the fuel gas circulating system inlet sensed pressure sensed with the second pressure sensor becomes the fuel gas circulating system inlet target pressure operated by the fuel gas circulating system inlet target pressure operator.

    摘要翻译: 燃料电池系统包括:1)燃料气体循环系统; 2)用于感测燃料电池入口感测压力的第一压力传感器; 3)用于感测燃料气体循环系统入口感测压力的第二压力传感器; 4)一种用于操作燃料气体循环系统入口目标压力的燃料气体循环系统入口目标压力操作器,其基于以下步骤:i)燃料电池入口感测到用第一压力传感器感测到的压力,以及ii)燃料电池入口目标 压力; 以及5)燃料气体循环系统入口压力控制器,用于通过调节燃料气体循环系统入口感测到的与第二压力传感器感测到的压力成为燃料的压力调节阀来控制供应到燃料电池的燃料气体的压力 燃气循环系统进气目标压力由燃气循环系统进气目标压力操作器操作。

    Power generation control system for fuel cell
    23.
    发明申请
    Power generation control system for fuel cell 有权
    燃料电池发电控制系统

    公开(公告)号:US20050244688A1

    公开(公告)日:2005-11-03

    申请号:US10519472

    申请日:2003-12-16

    申请人: Keisuke Suzuki

    发明人: Keisuke Suzuki

    IPC分类号: H01M8/00 B60L11/18 H01M8/04

    摘要: A power generation control system which includes: a fuel cell (201); a target power provider (101) for the fuel cell (201); a operation status monitoring system (102) for monitoring output power from the fuel cell (201), in which the detected output power includes actual output voltage (AV) of the fuel cell (201); and a controller (214). The controller (214) includes: a target current computing unit (104) which calculates a target current (TI) from the target power (TPW) given by the target power provider (101), based on PW-I characteristic obtained from I-V characteristic of the fuel cell (201); and a command output power computing unit (106) which calculates a command output power (CPW) of the fuel cell (201) based on the target current (TI) and the actual output voltage (AV).

    摘要翻译: 一种发电控制系统,包括:燃料电池(201); 用于所述燃料电池的目标电力供应器(101); 用于监视来自燃料电池(201)的输出功率的操作状态监视系统(102),其中所检测的输出功率包括燃料电池(201)的实际输出电压(AV); 和控制器(214)。 控制器(214)包括:目标电流计算单元(104),其基于从IV特性获得的PW-I特性,从目标电力提供者(101)给出的目标功率(TPW)计算目标电流(TI) 的燃料电池(201); 以及基于目标电流(TI)和实际输出电压(AV)计算燃料电池(201)的指令输出功率(CPW)的指令输出功率运算单元(106)。

    Oxidation method for semiconductor process
    25.
    发明申请
    Oxidation method for semiconductor process 失效
    半导体工艺的氧化方法

    公开(公告)号:US20050079699A1

    公开(公告)日:2005-04-14

    申请号:US10924853

    申请日:2004-08-25

    摘要: An oxidation method for a semiconductor process, which oxidizes a surface of a target substrate, includes heating a process container that accommodates the target substrate, and supplying hydrogen gas and oxygen gas into the process container while exhausting the process container. The oxidation method also includes causing the hydrogen gas and the oxygen gas to react with each other in the process container at a process temperature and a process pressure to generate water vapor, and oxidizing the surface of the target substrate by the water vapor. The process pressure is set at 2000 Pa (15 Torr) or more.

    摘要翻译: 用于对目标基板的表面进行氧化的半导体工艺的氧化方法包括加热容纳目标基板的处理容器,并且在排出处理容器的同时将氢气和氧气供给到处理容器中。 氧化方法还包括使氢气和氧气在处理容器中在处理温度和工艺压力下彼此反应以产生水蒸汽,并通过水蒸汽氧化目标基底的表面。 工艺压力设定为2000Pa(15Torr)以上。

    Automatic maximum theoretical yield calculating apparatus and computer-readable recording medium storing programs for automatic maximum theoretical yield calculation with a computer
    26.
    发明授权
    Automatic maximum theoretical yield calculating apparatus and computer-readable recording medium storing programs for automatic maximum theoretical yield calculation with a computer 失效
    自动最大理论产量计算装置和计算机可读记录介质,存储用计算机自动最大理论产量计算的程序

    公开(公告)号:US06314548B1

    公开(公告)日:2001-11-06

    申请号:US09275783

    申请日:1999-03-25

    申请人: Keisuke Suzuki

    发明人: Keisuke Suzuki

    IPC分类号: G06P1750

    CPC分类号: H01L22/20

    摘要: This apparatus can automatically calculate the specification of an exposing device which can automatically calculate the maximum theoretical yield of chips and realize chip manufacture with the minimum number of times of exposure by obtaining the chip layout producing the maximum number of chips from a wafer in the process to manufacture the chips from the wafer. This apparatus comprises initial data means, virtual chip layout calculating means, virtual chip layout storing means, maximum theoretical yield layout determining means, virtual exposure layout calculating means, virtual exposure layout storing means, minimum exposure layout determining means and determined layout displaying means. As explained above, it has been expected to provide an automatic maximum theoretical yield calculating apparatus to realize the maximum theoretical yield with the minimum number of times of exposure.

    摘要翻译: 该装置可以自动计算曝光装置的规格,该曝光装置可以自动计算芯片的最大理论产量,并通过获得在该过程中从晶片产生最大数量的芯片布局的芯片布局,以最小曝光次数实现芯片制造 从晶片制造芯片。 该装置包括初始数据装置,虚拟芯片布局计算装置,虚拟芯片布局存储装置,最大理论产量布局确定装置,虚拟曝光布局计算装置,虚拟曝光布局存储装置,最小曝光布局确定装置和确定布局显示装置。 如上所述,期望提供一种自动最大理论产量计算装置,以最小曝光次数实现最大理论产量。

    Polyester resin and production method thereof
    27.
    发明授权
    Polyester resin and production method thereof 失效
    聚酯树脂及其制备方法

    公开(公告)号:US6129961A

    公开(公告)日:2000-10-10

    申请号:US385672

    申请日:1999-08-27

    摘要: A polyester resin comprising a polyester resin chip (A) and a polyester resin fine particle (B) which has the same composition as the (A) and which passes through a 10.5 mesh screen in a proportion of 0.1-300 ppm, wherein a cyclic trimer increases in a proportion of not more than 0.30 wt % upon melting at a temperature of 290.degree. C. for 60 minutes; a polyester resin characterized in that a cyclic trimer increases in a proportion of not more than 0.30 wt % upon melting at a temperature of 290.degree. C. for 60 minutes, and the contents of Na, Ca, Mg and/or Si in the polyeser resin is 0.001-5 ppm and the total of these contents is not more than 10 ppm; and production methods thereof. According to the polyester resin of the present invention, mold such as stretch blow mold, heat setting mold, vacuum forming mold and the like are less stained in sheet forming, bottle forming and the like, so that forming can be continued for a long time to easily produce a multitude of formed articles with superior transparency. As a result, hollow articles having superior transparency and heat resistance of the finish part can be obtained.

    摘要翻译: 一种聚酯树脂,其包含与(A)成分相同的聚酯树脂片(A)和聚酯树脂微粒(B),并且以0.1-300ppm的比例通过10.5目筛,其中环状 在290℃温度下熔融60分钟时,三聚体的比例不超过0.30重量%; 聚酯树脂,其特征在于在290℃温度下熔融60分钟时,环状三聚体的比例不超过0.30重量%,聚醚类中的Na,Ca,Mg和/或Si的含量 树脂为0.001-5ppm,总含量不超过10ppm; 及其制造方法。 根据本发明的聚酯树脂,拉伸吹塑模具,热定形模具,真空成型模具等模具在片材成型,瓶形成等方面的染色较少,从而能够长时间地进行成型 容易地生产出具有优异透明度的大量成形制品。 结果,可以获得具有优异的精加工部件的透明性和耐热性的中空制品。

    Centrifuge microscope capable of realizing polarized light observation
    28.
    发明授权
    Centrifuge microscope capable of realizing polarized light observation 失效
    能够实现偏振光观察的离心显微镜

    公开(公告)号:US5982535A

    公开(公告)日:1999-11-09

    申请号:US908220

    申请日:1997-08-07

    IPC分类号: G02B21/00 G02B21/06 G02B21/26

    CPC分类号: G02B21/26 G02B21/06

    摘要: A centrifuge microscope includes a disk which is rotatable around a rotation axis and which is provided with a sample chamber for accommodating a sample. An observation optical system is provided which includes an objective lens which is positioned such that the sample chamber crosses an optical axis of the objective lens as the disk rotates. A pulsed laser source is provided for emitting a pulsed laser to the sample at a timing at which the sample chamber crosses the optical axis of the objective lens. And a delay time adjusting section is provided for adjusting a delay time of an emission timing of the pulsed laser in accordance with a rotational speed of the disk.

    摘要翻译: 离心机显微镜包括可围绕旋转轴线旋转的盘,并且设置有用于容纳样品的样品室。 提供了一种观察光学系统,其包括物镜,该物镜被定位成使得当盘旋转时样本室与物镜的光轴交叉。 提供脉冲激光源,用于在样品室与物镜的光轴交叉的时刻向样品发射脉冲激光。 并且提供延迟时间调节部分,用于根据盘的旋转速度来调节脉冲激光器的发射定时的延迟时间。

    Combustion state control apparatus for internal combustion engine
    29.
    发明授权
    Combustion state control apparatus for internal combustion engine 失效
    内燃机燃烧状态控制装置

    公开(公告)号:US5361745A

    公开(公告)日:1994-11-08

    申请号:US89345

    申请日:1993-07-12

    摘要: An apparatus for controlling an engine operation such as EGR rate for an internal combustion engine is disclosed with an air/fuel mixture ratio control. In the control apparatus, a variable representing a characteristic of a combustion state in the engine is detected and a difference of the combustion state variable, a target value is averaged for each rich/lean period T determined from the variation of a feedback correction coefficient so that a basic EGR (Exhaust Gas Recirculation) rate determined according to the engine operating condition is corrected on the basis of the average value to derive a final EGR rate. Thus, the variation in the EGR rate cannot be amplified or incremented even when the variation in the combustion state variable occurs due to the influence of the variation in the air/fuel mixture ratio.

    摘要翻译: 公开了一种用于控制内燃机的EGR率的发动机操作的装置,其具有空气/燃料混合比控制。 在控制装置中,根据反馈校正系数的变化确定的每个富/稀期间T,检测表示发动机的燃烧状态的特性的变量,对燃烧状态变化的差,目标值进行平均, 根据发动机工作条件确定的基本EGR(排气再循环)率根据平均值进行校正,得到最终EGR率。 因此,即使当由于空气/燃料混合比的变化的影响而发生燃烧状态变化的变化时,EGR率的变化也不能被放大或增加。

    Method of preparing optically active ketones
    30.
    发明授权
    Method of preparing optically active ketones 失效
    光学活性酮的制备方法

    公开(公告)号:US4604486A

    公开(公告)日:1986-08-05

    申请号:US689007

    申请日:1985-01-04

    摘要: A method of preparing optically active ketones having the general formula ##STR1## wherein R.sup.2 and R.sup.3 indicate hydrocarbon groups having 1 to 20 carbon atoms characterized by submitting an optically active sulfonyloxy alcohol having the general formula ##STR2## wherein R.sup.1, R.sup.2 and R.sup.3 indicate hydrocarbon groups having carbon atoms of 1 to 20 and which optionally contain N, O, P and S. The symbol * indicates asymmetric carbon atoms to rearrangement in a solvent and in the presence of organoaluminum compounds given by the general formula R.sub.3-n.sup.4 AlX.sub.n, (wherein R.sup.4 indicates an alkyl group having carbon atoms of 1 to 20 and X indicates a halogen atom, an alkoxy group or a CN group. n is 1, 1.5 or 2).

    摘要翻译: 一种制备具有通式为“IMAGE”的光学活性酮的方法,其中R2和R3表示具有1至20个碳原子的烃基,其特征在于提交具有通式“IMAGE”的光学活性磺酰氧基醇,其中R1,R2和R3表示烃 具有1至20个碳原子并且任选地含有N,O,P和S的基团。符号*表示在溶剂中和在由通式R3-n4 AlXn给出的有机铝化合物存在下的不对称碳原子,( 其中R4表示碳原子数为1〜20的烷基,X表示卤素原子,烷氧基或CN基,n为1,1.5或2)。