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21.发明申请Fine Metal Structure, Process for Producing the Same, Fine Metal Mold and Device 失效精细金属结构，制造方法，精细金属模具和装置公开(公告)号：US20100310773A1
公开(公告)日：2010-12-09
申请号：US12859802
申请日：2010-08-20
IPC分类号： B05D3/10
CPC分类号： B29C33/3842 , B29C33/424 , B81B2203/0361 , B81C1/00111 , B81C1/00206 , B81C99/0085 , B81C99/009 , B81C2201/034 , B82Y10/00 , B82Y40/00 , C23C18/1608 , C23C18/1651 , C23C18/1653 , C23C18/1657 , C23C18/1689 , C23C18/208 , C23C18/42 , G03F7/0002 , H01J1/304 , H01J9/025 , Y10T428/12389 , Y10T428/12993
摘要： A fine metal structure having its surface furnished with microprojections of high strength, high precision and large aspect ratio; and a process for producing the fine metal structure free of defects. There is provided a fine metal structure having its surface furnished with microprojections, characterized in that the microprojections have a minimum thickness or minimum diameter ranging from 10 nanometers to 10 micrometers and that the ratio between minimum thickness or minimum diameter (D) of microprojections and height of microprojections (H), H/D, is greater than 1. There is further provided a process for producing a fine metal structure, characterized by comprising providing a substrate having a fine rugged pattern on its surface, applying a molecular electroless plating catalyst to the surface, thereafter carrying out electroless plating to thereby form a metal layer having the rugged pattern filled, and detaching the metal layer from the substrate to thereby obtain a fine metal structure furnished with a surface having undergone reversal transfer of the above rugged pattern.
摘要翻译： 精细的金属结构，其表面具有高强度，高精度和大纵横比的微喷射体; 以及没有缺陷的金属微细结构的制造方法。 提供了具有微喷射体的表面的细金属结构，其特征在于，微喷射体具有10纳米至10微米的最小厚度或最小直径，并且微喷射体的最小厚度或最小直径（D）与高度 的微喷射体（H）H / D大于1.还提供了一种制造精细金属结构的方法，其特征在于，在其表面上提供具有细凹凸图案的基板，将分子无电镀催化剂 然后进行无电解电镀，从而形成具有凹凸图案的金属层，并将金属层与基板分离，从而获得配备有经过上述凹凸图案的反转传送的表面的精细金属结构。
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22.发明申请公开(公告)号：US20100155989A1
公开(公告)日：2010-06-24
申请号：US12635730
申请日：2009-12-11
CPC分类号： B29C59/022 , B29C35/02 , B29C35/0888 , B29C2035/0827 , B29C2059/023 , B82Y10/00 , B82Y40/00 , G03F7/0002
摘要： An object of the present invention is to provide a stamper for transferring fine pattern and a method for manufacturing the stamper, the stamper has a fine structure layer to improve a continuous transferring property of the resinous stamper, and to allow accurate and continuous transferring. In order to achieve the above object, the present invention provides a stamper for transferring fine pattern, including: a fine structure layer on a supporting substrate, in which the fine structure layer is a polymer of a resinous compound whose principal component is silsesquioxane derivative having a plurality of polymerizable functional groups.
摘要翻译： 本发明的目的是提供一种用于转印精细图案的压模和用于制造压模的方法，压模具有精细的结构层，以提高树脂压模的连续转印性能，并允许精确和连续的转印。 为了实现上述目的，本发明提供一种用于转印精细图案的压模，包括：支撑基板上的精细结构层，其中精细结构层是主成分为倍半硅氧烷衍生物的树脂化合物的聚合物， 多个聚合性官能团。
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公开(公告)号：US20100098799A1
公开(公告)日：2010-04-22
申请号：US12582732
申请日：2009-10-21
CPC分类号： B29C59/022 , B29C2035/0827 , B29C2059/023
摘要： An imprint apparatus has a head unit with a fine structure. The head unit includes a fine imprint pattern layer including fine concavities and convexities, a resin layer on a face of the fine imprint pattern layer opposite to a face where the concavities and convexities are formed, a first pressurizing base member on a face of the resin layer opposite to a face contacting the fine imprint pattern layer, and a second pressurizing base member on a face of the first pressurizing base member opposite to a face contacting the resin layer. The resin layer has a modulus of elasticity smaller than that of the fine imprint pattern layer, and the first pressurizing base member has a modulus of elasticity smaller than that of the resin layer. A light source or a heat source may be further provided. The head unit may be light permeable. A replacement layer may be further provided for replacement.
摘要翻译： 压印装置具有精细结构的头单元。 头单元包括精细的凹凸图案，在与形成凹凸面的面相反的微细图案层的表面上的树脂层，树脂的表面上的第一加压基材 在与第一加压基体的与接触树脂层的面相反的表面上的第二加压基底部件与接触精细压印图案层的面相反。 树脂层的弹性模量小于精细印刷图案层的弹性模量，第一加压基材的弹性模量小于树脂层的弹性模量。 可以进一步提供光源或热源。 头单元可以是透光的。 还可以提供更换层以进行更换。
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公开(公告)号：US07341441B2
公开(公告)日：2008-03-11
申请号：US10804101
申请日：2004-03-19
IPC分类号： B29C59/04
CPC分类号： B29C59/002 , B29C59/022 , B29C59/026 , B29C2035/0827 , B29C2059/023 , B29K2033/12 , Y10S977/887
摘要： Provided is a nanoprint apparatus in which a substrate and a mold formed on its surface with fine concavities and convexities are heated and pressed with each other through the intermediary of a buffer member interposed therebetwen, including a mechanism for successively replacing the buffer member with new one at each time which the mold and the substate are heated and pressed, thereby it is possible to form a fine structure on the substrate.
摘要翻译： 本发明提供一种纳米打印装置，其中在其表面上形成有细小凹凸的基板和模具通过介于其间的缓冲构件相互加热和相互压制，包括用于将新的缓冲构件连续更换的机构 在模具和基底被加热和压制的每一次，从而可以在基底上形成精细的结构。
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公开(公告)号：US20060286193A1
公开(公告)日：2006-12-21
申请号：US11438336
申请日：2006-05-23
IPC分类号： B28B11/08
CPC分类号： G03F7/0002 , B82Y10/00 , B82Y40/00 , G03F9/703 , G03F9/7088
摘要： In an imprint device and a microstructure transfer method, a fluid is ejected at the back of at least either a stamper or a transfer target body during pressurization of the stamper and the transfer target body. The fluid is ejected through plural holes formed in a stage disposed at the back of at least either the stamper or the transfer target body. The plural holes are connected to independent pressure regulating mechanisms, which can individually control the amount of fluid ejection, the timing of start of ejection, and so on. When the stamper is peeled from the transfer target body, the plural holes are evacuated to fix the stamper or the transfer target body to the stage by suction so as to peel the stamper. The present invention enables to apply uniform pressure to the stamper against the surface of the target substrate, to control the in-plane pressure distribution according to the surface profile or external appearance of the stamper or the target substrate, and to peel the stamper from the target substrate immediately after pressurization.
摘要翻译： 在压印装置和微结构转印方法中，在压模和转印体的加压期间，在至少压模或转印体的至少一个的背面喷射流体。 流体通过形成在设置在压模或转印体中的至少一个的背面的台中的多个孔喷出。 多个孔连接到独立的压力调节机构，其可以单独控制流体喷射的量，喷射开始的时间等。 当压模从转印体上剥离时，将多个孔抽真空，通过抽吸将压模或转印目标体固定在平台上，从而剥离压模。 本发明能够对压模施加均匀的压力以抵抗目标基板的表面，以根据压模或目标基板的表面轮廓或外观来控制平面内的压力分布，并且将压模从 加压后立即进行目标基材。
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26.发明申请Electrolyte membrane for fuel cells, its production and fuel cell using the same 有权用于燃料电池的电解质膜，其生产和燃料电池使用相同公开(公告)号：US20060057448A1
公开(公告)日：2006-03-16
申请号：US10929370
申请日：2004-08-31
申请人： Akihiro Miyauchi , Kenichi Souma , Shuichi Suzuki , Yoshiyuki Takamori , Masahiko Ogino , Takashi Ando , Hidetoshi Honbo
发明人： Akihiro Miyauchi , Kenichi Souma , Shuichi Suzuki , Yoshiyuki Takamori , Masahiko Ogino , Takashi Ando , Hidetoshi Honbo
CPC分类号： H01M8/1004 , H01M8/1065 , H01M8/1067 , H01M8/1093 , Y02P70/56
摘要： The present invention provides an electrolyte membrane for a fuel cell that has a minute projection cluster on one side or both sides of a polymer electrolyte membrane. Further, the present invention provides a production method of an electrolyte membrane for a fuel cell, wherein a mold comprising convex portions having a fixed planar pattern is pressed on one side or both sides of a polymer electrolyte membrane, then while concave portions of the polymer electrolyte membrane formed in the concave portions are being stretched, the mold is removed from the polymer electrolyte membrane for forming a minute projection cluster.
摘要翻译： 本发明提供一种用于燃料电池的电解质膜，其在聚合物电解质膜的一侧或两侧具有微小的突起簇。 此外，本发明提供一种燃料电池用电解质膜的制造方法，其特征在于，在聚合物电解质膜的一侧或两侧压入具有固定平面图案的凸部的模具，然后在聚合物的凹部 在凹部中形成的电解质膜被拉伸，从用于形成微小突起簇的聚合物电解质膜中除去模具。
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公开(公告)号：US08770965B2
公开(公告)日：2014-07-08
申请号：US13370413
申请日：2012-02-10
IPC分类号： B29C35/08
CPC分类号： G03F7/0002 , B29C33/3878 , B82Y10/00 , B82Y40/00
摘要： A microstructure transferring device is characterized in that the device comprises a stamper made from a first photo-curable resin composition cured with light with a first wavelength, and a light source emitting light with a second wavelength longer than the first wavelength. The microstructure is transferred to an impression receptor supplied with a second photo-curable resin composition, which is curable with light with the second wavelength emitted by the light source.
摘要翻译： 微结构转印装置的特征在于，该装置包括由用第一波长的光固化的第一光固化树脂组合物制成的压模和发射长于第一波长的第二波长的光的光源。 将微结构转移到提供有第二光固化树脂组合物的印模受体中，该第二光固化树脂组合物可用由光源发出的第二波长的光固化。
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28.发明授权Fine metal structure, process for producing the same, fine metal mold and device 失效精细金属结构，制造方法，精细金属模具及装置公开(公告)号：US08741380B2
公开(公告)日：2014-06-03
申请号：US12859802
申请日：2010-08-20
CPC分类号： B29C33/3842 , B29C33/424 , B81B2203/0361 , B81C1/00111 , B81C1/00206 , B81C99/0085 , B81C99/009 , B81C2201/034 , B82Y10/00 , B82Y40/00 , C23C18/1608 , C23C18/1651 , C23C18/1653 , C23C18/1657 , C23C18/1689 , C23C18/208 , C23C18/42 , G03F7/0002 , H01J1/304 , H01J9/025 , Y10T428/12389 , Y10T428/12993
摘要： A fine metal structure having its surface furnished with microprojections of high strength, high precision and large aspect ratio; and a process for producing the fine metal structure free of defects. There is provided a fine metal structure having its surface furnished with microprojections, characterized in that the microprojections have a minimum thickness or minimum diameter ranging from 10 nanometers to 10 micrometers and that the ratio between minimum thickness or minimum diameter (D) of microprojections and height of microprojections (H), H/D, is greater than 1. There is further provided a process for producing a fine metal structure, characterized by comprising providing a substrate having a fine rugged pattern on its surface, applying a molecular electroless plating catalyst to the surface, thereafter carrying out electroless plating to thereby form a metal layer having the rugged pattern filled, and detaching the metal layer from the substrate to thereby obtain a fine metal structure furnished with a surface having undergone reversal transfer of the above rugged pattern.
摘要翻译： 精细的金属结构，其表面具有高强度，高精度和大纵横比的微喷射体; 以及没有缺陷的金属微细结构的制造方法。 提供了具有微喷射体的表面的细金属结构，其特征在于，微喷射体具有10纳米至10微米的最小厚度或最小直径，并且微喷射体的最小厚度或最小直径（D）与高度 的微喷射体（H）H / D大于1.还提供了一种制造精细金属结构的方法，其特征在于，在其表面上提供具有细凹凸图案的基板，将分子无电镀催化剂 然后进行无电解电镀，从而形成具有凹凸图案的金属层，并将金属层与基板分离，从而获得配备有经过上述凹凸图案的反转传送的表面的精细金属结构。
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29.发明授权公开(公告)号：US08690559B2
公开(公告)日：2014-04-08
申请号：US13193666
申请日：2011-07-29
IPC分类号： B29C43/56
CPC分类号： B29C33/3857 , B82Y10/00 , B82Y40/00 , G03F7/0002 , G03F7/0017 , G03F7/038 , G03F7/0757
摘要： The present invention provides a nano-imprinting resin stamper including a micro structure layer on a transmissive support basal material, the micro structure layer being formed of a polymer of a resin composition that contains a silsesquioxane derivative as a major constituent having a plurality of polymerizable functional groups, another polymerizable resin component having a plurality of polymerizable functional groups and different from the silsesquioxane derivative, and a photopolymerizable initiator, in which the content percentage of the photopolymerizable initiator is equal to or more than 0.3 mass % and equal to or less than 3 mass % relative to a total mass of the silsesquioxane derivative and the polymerizable resin component, and the micro structure layer permits equal to or more than 80% of light to pass therethrough at a wavelength of 365 nm.
摘要翻译： 本发明提供了一种纳米压印树脂压模，其包括在透射支撑基底材料上的微结构层，该微结构层由含有倍半硅氧烷衍生物作为主要成分的树脂组合物的聚合物形成，该主体组分具有多个聚合性官能团 基团，具有多个可聚合官能团且不同于倍半硅氧烷衍生物的可聚合树脂组分和可光聚合引发剂，其中可光聚合引发剂的含量百分比等于或大于0.3质量％且等于或小于3 相对于倍半硅氧烷衍生物和可聚合树脂组分的总质量的质量％，并且微结构层允许等于或大于80％的光在365nm的波长下通过。
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公开(公告)号：US08632714B2
公开(公告)日：2014-01-21
申请号：US13526708
申请日：2012-06-19
CPC分类号： B81C1/0046
摘要： A mold and a pattern transfer method using the same for a nanoprinting technology. The mold can be released from a substrate accurately and easily. The mold, which is used for forming a fine pattern on a substrate using a press machine, comprises a release mechanism.
摘要翻译： 用于纳米印刷技术的模具和图案转印方法。 模具可以准确而容易地从基材上脱模。 使用压制机在基板上形成精细图案的模具包括释放机构。
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