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30 条记录 (耗时 0.036 秒)

    Polystyrene as a resist for making patterned media
    22.
    发明授权
    Polystyrene as a resist for making patterned media 有权
    聚苯乙烯作为制作图案化介质的抗蚀剂

    公开(公告)号：US06838227B2

    公开(公告)日：2005-01-04

    申请号：US10112214

    申请日：2002-03-29

    申请人： HongYing Wang ,  Neil Deeman ,  Koichi Wago ,  Nobuo Kurataka

    发明人： HongYing Wang ,  Neil Deeman ,  Koichi Wago ,  Nobuo Kurataka

    IPC分类号： G03F7/00 ,  G11B5/74 ,  G11B5/82 ,  G11B5/855 ,  G03C5/00 ,  B05D5/12 ,  B32B13/04

    CPC分类号： B82Y10/00 ,  B82Y40/00 ,  G03F7/0002 ,  G11B5/732 ,  G11B5/74 ,  G11B5/743 ,  G11B5/82 ,  G11B5/855 ,  Y10S428/90 ,  Y10T428/249921 ,  Y10T428/31678

    摘要： A system and method for forming servo patterns on magnetic media is disclosed. A magnetic film coated with a layer of polystyrene is stamped with a nickel stamper reproducing the negative image of the stamped pattern on the polystyrene. Ions are then accelerated towards the surface of the polystyrene, which stopps the ions in the areas where the polystyrene is thick and allows the ions to penetrate through to the magnetic layer in the areas where the polystyrene is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped polystyrene pattern on the magnetic layer. The polystyrene is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic media.

    摘要翻译： 公开了一种用于在磁性介质上形成伺服图案的系统和方法。 涂覆有聚苯乙烯层的磁性薄膜上印有镍压模，其在聚苯乙烯上再现印模图案的负像。 离子然后被加速到聚苯乙烯的表面，聚苯乙烯的表面阻止聚苯乙烯厚的区域中的离子，并允许离子穿透到聚苯乙烯薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用，从而改变了磁层的结构，降低了矫顽力（Hc）和剩余力矩（Mrt）。 这再现了磁性层上的冲压聚苯乙烯图案。 然后通过氧等离子体蚀刻除去聚苯乙烯，留下图案化的磁性介质。

    METHOD AND SYSTEM FOR OPTICAL CALLIBRATION DISCS
    24.
    发明申请
    METHOD AND SYSTEM FOR OPTICAL CALLIBRATION DISCS 审中-公开
    光学识别盘的方法和系统

    公开(公告)号：US20130143002A1

    公开(公告)日：2013-06-06

    申请号：US13311302

    申请日：2011-12-05

    申请人： Nobuo Kurataka ,  Gennady Gauzner ,  Zhaoning Yu

    发明人： Nobuo Kurataka ,  Gennady Gauzner ,  Zhaoning Yu

    IPC分类号： B32B3/10 ,  C23F1/04 ,  B05D3/06 ,  B05D5/00

    CPC分类号： G11B5/855 ,  B32B1/08 ,  B32B3/30 ,  B32B2551/00 ,  G03F7/0002 ,  Y10T428/24612

    摘要： A system and method for optical calibration discs includes dispensing a resist layer on a portion of a substrate. A surface of the substrate and a topographically patterned surface of predetermined objects of a template are contacted together, wherein the contacting causes the resist layer between the portion of the substrate and the template to conform to the topographically patterned surface, and the resist layer includes nano-scale voids. The nano-scale voids are reduced by longer spread time, thinner resist, and removal of the residual resist layer together with the voids by using a descum step. The resist layer is hardened into a negative image of the topographically patterned surface, wherein the negative image includes surfaces that are operable to be individually measured by an optical reader. The substrate and the template are separated, wherein the resist layer adheres to the surface of the substrate.

    摘要翻译： 用于光学校准盘的系统和方法包括在基底的一部分上分配抗蚀剂层。 基板的表面和模板的预定物体的地形图形表面接触在一起，其中所述接触使得所述基板的所述部分与所述模板之间的所述抗蚀剂层与所述地形图形表面一致，并且所述抗蚀剂层包括纳米 规模空白。 通过使用除尘步骤，纳米级空隙通过较长的铺展时间，更薄的抗蚀剂和残余抗蚀剂层与空隙一起去除而减少。 抗蚀剂层被硬化成地形图案化表面的负像，其中负像包括可操作以由光学读取器单独测量的表面。 分离基板和模板，其中抗蚀剂层粘附到基板的表面。

    Styrene-acrylonitrile as a resist for making patterned media
    26.
    发明授权
    Styrene-acrylonitrile as a resist for making patterned media 有权
    苯乙烯 - 丙烯腈作为制造图案化介质的抗蚀剂

    公开(公告)号：US06617012B1

    公开(公告)日：2003-09-09

    申请号：US10112192

    申请日：2002-03-29

    申请人： HongYing Wang ,  Koichi Wago ,  Neil Deeman ,  Nobuo Kurataka

    发明人： HongYing Wang ,  Koichi Wago ,  Neil Deeman ,  Nobuo Kurataka

    IPC分类号： B32B702

    CPC分类号： G11B5/855 ,  B32B27/06 ,  G11B5/59633 ,  G11B5/74 ,  G11B5/82 ,  Y10S428/90 ,  Y10S977/712 ,  Y10S977/838 ,  Y10S977/887 ,  Y10T428/249921 ,  Y10T428/31678

    摘要： A system and method for forming servo patterns on magnetic medium is disclosed. A magnetic film coated with a layer of styrene-acrylonitrile is stamped with a nickel stamper reproducing the negative image of the stamper pattern on the styrene-acrylonitrile. Ions are then accelerated towards the surface of the styrene-acrylonitrile, which stops the ions in the areas where the styrene-acrylonitrile is thick and allows the ions to penetrate through to the magnetic layer in the areas where the styrene-acrylonitrile is thin. The ions, which penetrate through to the magnetic layer, interact with the magnetic layer altering the magnetic layer's structure reducing its coercivity (Hc) and remnant moment (Mrt). This reproduces the stamped styrene-acrylonitrile pattern on the magnetic layer. The styrene-acrylonitrile is then removed by oxygen plasma etching the surface leaving behind a patterned magnetic medium.

    摘要翻译： 公开了一种用于在磁介质上形成伺服图案的系统和方法。 用苯乙烯 - 丙烯腈层涂覆的磁性薄膜印有镍压模，其在苯乙烯 - 丙烯腈上再现压模图案的负像。 离子然后被加速到苯乙烯 - 丙烯腈的表面，这阻止了苯乙烯 - 丙烯腈厚的区域中的离子，并允许离子穿透到苯乙烯 - 丙烯腈薄的区域中的磁性层。 穿透到磁性层的离子与磁性层相互作用，从而改变了磁层的结构，降低了矫顽力（Hc）和剩余力矩（Mrt）。 这就在磁性层上再现了印模的苯乙烯 - 丙烯腈图案。 然后通过氧等离子体蚀刻表面留下图案化的磁性介质来除去苯乙烯 - 丙烯腈。

    ANALYSIS OF PATTERN FEATURES
    27.
    发明申请
    ANALYSIS OF PATTERN FEATURES 审中-公开
    模式特征分析

    公开(公告)号：US20140014621A1

    公开(公告)日：2014-01-16

    申请号：US13798130

    申请日：2013-03-13

    申请人： Zhaoning Yu ,  Nobuo Kurataka ,  Gennady Gauzner

    发明人： Zhaoning Yu ,  Nobuo Kurataka ,  Gennady Gauzner

    IPC分类号： B05C21/00

    CPC分类号： G03F7/0002 ,  C09K13/00 ,  G03F7/40 ,  G11B5/746 ,  G11B5/855

    摘要： The embodiments disclose a method for an electron curing reverse-tone process, including depositing an etch-resistant layer onto a patterned imprinted resist layer fabricated onto a hard mask layer deposited onto a substrate, curing the etch-resistant layer using an electron beam dose during etching processes of imprinted pattern features into the hard mask and into the substrate and using analytical processes to quantify reduced pattern feature placement drift errors and to quantify increased pattern feature size uniformity of imprinted pattern features etched.

    摘要翻译： 实施方案公开了一种用于电子固化反相色调工艺的方法，包括将沉积抗蚀刻层的图案印刷的抗蚀剂层沉积在沉积在基底上的硬掩模层上，使用电子束剂量固化耐蚀刻层 将印刷图案特征蚀刻到硬掩模中并进入基底，并使用分析过程来量化减少的图案特征位移漂移误差并量化蚀刻的印记图案特征的增加的图案特征尺寸均匀性。

    Method for fabricating patterned magnetic recording media
    28.
    发明申请
    Method for fabricating patterned magnetic recording media 失效
    图案化磁记录介质的制造方法

    公开(公告)号：US20050271819A1

    公开(公告)日：2005-12-08

    申请号：US10859202

    申请日：2004-06-03

    申请人： Koichi Wago ,  Hong Wang ,  Nobuo Kurataka ,  Gennady Gauzner ,  Neil Deeman

    发明人： Koichi Wago ,  Hong Wang ,  Nobuo Kurataka ,  Gennady Gauzner ,  Neil Deeman

    IPC分类号： B05D1/32 ,  B05D1/36 ,  B05D5/12 ,  G11B5/706 ,  G11B5/855

    CPC分类号： G11B5/855 ,  Y10T428/24802

    摘要： A method of fabricating a patterned magnetic layer comprises sequential steps of: (a) providing a workpiece comprising a non-magnetic substrate, a layer of magnetic material overlying a surface of the substrate, and a layer of a non-magnetic material overlying the layer of magnetic material; (b) forming a layer of a mask material on the layer of non-magnetic material; (c) forming a topographical pattern comprising a plurality of recesses in the layer of mask material; (d) selectively removing portions of the layer of non-magnetic material proximate lower portions of the recesses, thereby exposing selected portions of the layer of magnetic material; (e) treating the exposed portions of the layer of magnetic material with a liquid for reducing the magnetic properties thereof; and (f) removing the topographically patterned layer of mask material.

    摘要翻译： 制造图案化磁性层的方法包括以下顺序的步骤：（a）提供包括非磁性衬底的工件，覆盖在衬底的表面上的磁性材料层和覆盖层的非磁性材料层 的磁性材料; （b）在非磁性材料层上形成掩模材料层; （c）在所述掩模材料层中形成包括多个凹部的形貌图案; （d）选择性地去除所述凹陷的下部附近的非磁性材料层的部分，从而暴露所述磁性材料层的选定部分; （e）用液体处理磁性材料层的暴露部分以降低其磁特性; 和（f）去除掩模材料的地形图案层。

    Detection of defects embedded in servo pattern on stamper by using scattered light
    29.
    发明授权
    Detection of defects embedded in servo pattern on stamper by using scattered light 失效
    通过使用散射光检测在压模上嵌入的伺服图案中的缺陷

    公开(公告)号：US06903888B2

    公开(公告)日：2005-06-07

    申请号：US10346504

    申请日：2003-01-15

    申请人： Joseph Leigh ,  Nobuo Kurataka

    发明人： Joseph Leigh ,  Nobuo Kurataka

    IPC分类号： G11B5/82 ,  G11B27/36 ,  G11B20/18

    CPC分类号： B82Y10/00 ,  G11B5/743 ,  G11B5/82 ,  G11B27/36 ,  G11B2220/20

    摘要： Defects of a hard disk drive servo pattern stamper are detected by comparing a scattered light beam pattern against the known servo pattern. A magnetic field is applied to stamper and the beam is linearly polarized. Variations in the physical offset of the beam, its scatter, are indicative of physical defects. Variations in the Kerr rotation of scattered beam are indicative of magnetic defects.

    摘要翻译： 通过将散射光束图案与已知的伺服模式进行比较来检测硬盘驱动器伺服模式压模的缺陷。 磁场被施加到压模，并且光束是线偏振的。 光束的物理偏移的变化及其散射表示物理缺陷。 散射光束的克尔旋转的变化表示磁性缺陷。

    Dry passivation process for stamper/imprinter family making for patterned recording media
    30.
    发明申请
    Dry passivation process for stamper/imprinter family making for patterned recording media 有权
    干式钝化工艺用于压模/印刷机家族制作图案化记录介质

    公开(公告)号：US20050082700A1

    公开(公告)日：2005-04-21

    申请号：US10685462

    申请日：2003-10-16

    申请人： Neil Deeman ,  Hong Wang ,  Gennady Gauzner ,  Nobuo Kurataka

    发明人： Neil Deeman ,  Hong Wang ,  Gennady Gauzner ,  Nobuo Kurataka

    IPC分类号： B29D11/00 ,  C25D1/00 ,  C25D1/20

    CPC分类号： C25D1/20 ,  C25D1/00 ,  C25D1/10

    摘要： A method of manufacturing a stamper/imprinter for use in patterning of a recording medium comprises sequential steps of: (a) providing a substrate/workpiece comprising a topographically patterned surface including a plurality of projections and depressions corresponding to a pattern to be formed in a surface of the recording medium; (b) forming a thin release layer in conformal contact with the topographically patterned surface by means of a dry process; (c) forming a thicker layer of a material in conformal contact with the thin passivation layer on the topographically patterned surface; and (d) separating the thicker layer of material from the topographically patterned surface to form therefrom a stamper/imprinter including an imprinting surface having a negative image replica of the topographically patterned surface, separation of the thicker layer of material from the topographically patterned surface being facilitated by the thin release layer formed by the dry process.

    摘要翻译： 一种制造用于记录介质图形化的压模/打印机的方法包括以下步骤：（a）提供基板/工件，该基板/工件包括地形图形表面，其包括对应于待形成的图案的多个凸起和凹陷 记录介质的表面; （b）通过干法形成与地形图形表面保形接触的薄释放层; （c）在地形图形表面上形成与薄钝化层保形接触的材料的较厚层; 以及（d）将厚层材料与地形图案化的表面分离以形成压模/打印机，其包括具有地形图形表面的负图像复制品的压印表面，较厚的材料层与地形图形表面的分离是 由通过干法形成的薄释放层促进。