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公开(公告)号：US20160209288A1
公开(公告)日：2016-07-21
申请号：US14994969
申请日：2016-01-13
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
CPC classification number: G01L21/34 , B29C45/14065 , B29K2023/12 , B29K2069/00 , B29K2071/00 , B29L2031/752 , G01L19/0084 , G01L21/30
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
Abstract translation: 具有由聚合物材料形成的壳体和设置在壳体中的一个或多个电馈通销的量规。 电馈通引脚可以基本上彼此垂直定向并且具有复杂的形状。
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公开(公告)号：US09040907B2
公开(公告)日：2015-05-26
申请号：US14354227
申请日：2012-10-30
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , G. Jeffery Rathbone , Brian J. Horvath , Timothy C. Swinney , Stephen C. Blouch , Jeffrey G. McCarthy , Timothy R. Piwonka-Corle
CPC classification number: H01J49/4245 , H01J27/205 , H01J49/0009 , H01J49/0031 , H01J49/147
Abstract: An apparatus includes an electrostatic ion trap and electronics configured to measure parameters of the ion trap and configured to adjust ion trap settings based on the measured parameters. A method of tuning the electrostatic ion trap includes, under automatic electronic control, measuring parameters of the ion trap and adjusting ion trap settings based on the measured parameters.
Abstract translation: 一种装置包括静电离子阱和被配置为测量离子阱的参数并被配置为基于测量的参数来调整离子阱设置的电子器件。 调整静电离子阱的方法包括在自动电子控制下，基于测量参数测量离子阱的参数和调整离子阱设置。
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公开(公告)号：US20250085180A1
公开(公告)日：2025-03-13
申请号：US18954093
申请日：2024-11-20
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US20230366763A1
公开(公告)日：2023-11-16
申请号：US18303222
申请日：2023-04-19
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
CPC classification number: G01L9/025 , G01L9/0002 , G01L21/14 , G01L9/00 , G01L21/10
Abstract: A thermal conductivity gauge measures gas pressure within a chamber. A sensor wire and a resistor form a circuit coupled between a power input and ground, where the sensor wire extends into the chamber and connects to the resistor via a terminal. A controller adjusts the power input, as a function of a voltage at the terminal and a voltage at the power input, to bring the sensor wire to a target temperature. Based on the adjusted power input, the controller can determine a measure of the gas pressure within the chamber.
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公开(公告)号：US10969290B2
公开(公告)日：2021-04-06
申请号：US15834625
申请日：2017-12-07
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney
Abstract: A cold cathode ionization gauge (CCIG) includes an extended anode, a cathode surrounding the anode along a length of the anode, and a feedthrough insulator supporting the anode. The cathode forms a discharge space around the anode to enable formation of a plasma between the anode and the cathode and a resultant ion current flow into the cathode. The CCIG further includes a magnet applying a magnetic field through the discharge space to lengthen free electron paths to sustain the plasma. A shield is electrically isolated from the insulator and shields the insulator from electrons of the plasma. The shield may be mounted to the cathode and surrounds and is spaced from the anode. An electric controller applies voltage between the anode and the cathode to create ionization with plasma discharge between the anode and the cathode, the controller determining pressure based on measured ion current flow to the cathode.
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Patent Agency Ranking
公开(公告)号：US10948456B1
公开(公告)日：2021-03-16
申请号：US16698178
申请日：2019-11-27
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Clinton L. Percy
IPC: H01J49/00 , G01N27/622 , H01J37/317
Abstract: A gas analyzer system uses an ionization source, which can be a hot cathode ionization source. A magnet assembly is positioned to define a magnetic field, which permits separation of ion components based on their mass to charge ratio. An ion beam deflector is used, such as a pair of deflector plates, which can scan ion components across a detector. The ion beam deflector defines a deflection electric field across the magnetic field and across a direction of travel of the ions emitted from the ionization source.
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公开(公告)号：US20190271607A1
公开(公告)日：2019-09-05
申请号：US16415313
申请日：2019-05-17
Applicant: MKS Instruments, Inc.
Inventor： Brandon J. Kelly , Clinton L. Percy , Scott C. Heinbuch , Gerardo A. Brucker , Timothy C. Swinney , Timothy R. Piwonka-Corle
Abstract: A gauge having a housing formed of a polymer material and one or more electrical feedthrough pins disposed in the housing. The electrical feedthrough pins can be oriented substantially perpendicular to each other and have complex shapes.
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公开(公告)号：US10352811B2
公开(公告)日：2019-07-16
申请号：US15712916
申请日：2017-09-22
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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公开(公告)号：US10337940B2
公开(公告)日：2019-07-02
申请号：US15499064
申请日：2017-04-27
Applicant: MKS Instruments, Inc.
Inventor： Timothy C. Swinney , Clinton L. Percy , Duane W. Marion , Brandon J. Kelly
Abstract: A cold cathode ionization gauge includes multiple cathodes providing different spacings between the cathodes and an anode. The multiple cathodes allow for pressure measurements over wider ranges of pressure. A first cathode with a larger spacing may provide current based on Townsend discharge; whereas, a second cathode having a smaller spacing may provide current based on both Townsend discharge at higher pressures and on Paschen's Law discharge at still higher pressures. A feature on the second cathode may support Paschen's Law discharge. Large resistances between the cathodes and a return to power supply enable control of output profiles to extend the pressure ranges with accurate responses and avoid output minima. Pressure measurements may be made based on currents from respective cathodes dependent on the outputs of the cathodes through the wide pressure range of measurement. The multiple cathodes may also provide measurements that avoid the discontinuities found in current outputs of the respective cathodes.
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公开(公告)号：US20180010977A1
公开(公告)日：2018-01-11
申请号：US15712916
申请日：2017-09-22
Applicant: MKS Instruments, Inc.
Inventor： Gerardo A. Brucker , Timothy C. Swinney , Brandon J. Kelly , Alfred A. Funari , Michael N. Schott , Kristian S. Schartau
CPC classification number: G01L21/34 , G01L19/06 , H01J9/50 , H01J41/06 , Y02W30/828 , Y10T29/49007
Abstract: A cold cathode ionization vacuum gauge includes an extended anode electrode and a cathode electrode surrounding the anode electrode along its length and forming a discharge space between the anode electrode and the cathode electrode. The vacuum gauge further includes an electrically conductive guard ring electrode interposed between the cathode electrode and the anode electrode about a base of the anode electrode to collect leakage electrical current, and a discharge starter device disposed over and electrically connected with the guard ring electrode, the starter device having a plurality of tips directed toward the anode and forming a gap between the tips and the anode.
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