FILTER, DUPLEXER AND COMMUNICATION APPARATUS
    21.
    发明申请
    FILTER, DUPLEXER AND COMMUNICATION APPARATUS 有权
    过滤器,双工器和通信设备

    公开(公告)号:US20100060384A1

    公开(公告)日:2010-03-11

    申请号:US12494990

    申请日:2009-06-30

    IPC分类号: H03H9/205 H01L41/04

    摘要: A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

    摘要翻译: 滤波器具有多个压电薄膜谐振器,其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠,其轮廓包括曲线。 在多个压电薄膜谐振器中,相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​,可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此,可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。

    Elastic wave device and method for manufacturing the same
    26.
    发明授权
    Elastic wave device and method for manufacturing the same 有权
    弹性波装置及其制造方法

    公开(公告)号:US08854158B2

    公开(公告)日:2014-10-07

    申请号:US13127215

    申请日:2008-11-28

    摘要: A method of manufacturing an elastic wave device is provided with a lamination step of forming, on a substrate (1), a plurality of elastic wave devices, each of which includes a lower electrode (2), a piezoelectric film (3), and an upper electrode (4); a measuring step for measuring the operation frequency distribution of the elastic wave devices on the substrate (1); and an adjusting step for forming an adjusting region, in which the thickness of the elastic wave device is different from the thicknesses of other portions in a resonance portion of each elastic wave device, corresponding with the distribution of the operation frequencies. The adjusting region is formed so that the size of the area of the adjusting region of the resonator portion of each elastic wave device is different in accordance with the operation frequency distribution that is measured. Thus, the frequency characteristics of the elastic wave devices are easily adjusted by a small number of steps.

    摘要翻译: 一种制造弹性波装置的方法具有层压步骤,在基板(1)上形成多个弹性波装置,每个弹性波装置包括下电极(2),压电薄膜(3)和 上电极(4); 用于测量衬底(1)上的弹性波器件的操作频率分布的测量步骤; 以及用于形成调整区域的调整步骤,其中弹性波器件的厚度与每个弹性波器件的谐振部分中的其它部分的厚度不同,与对应于操作频率的分布相对应。 调整区域被形成为使得每个弹性波装置的谐振器部分的调整区域的面积的大小根据所测量的操作频率分布而不同。 因此,弹性波器件的频率特性可以通过少量的步骤容易地调节。

    Filter, duplexer and communication apparatus
    29.
    发明授权
    Filter, duplexer and communication apparatus 有权
    滤波器,双工器和通信设备

    公开(公告)号:US08093962B2

    公开(公告)日:2012-01-10

    申请号:US12494990

    申请日:2009-06-30

    IPC分类号: H03H9/70 H03H9/54

    摘要: A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

    摘要翻译: 滤波器具有多个压电薄膜谐振器,其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠,其轮廓包括曲线。 在多个压电薄膜谐振器中,相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​,可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此,可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。