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公开(公告)号：US08756777B2
公开(公告)日：2014-06-24
申请号：US12647794
申请日：2009-12-28
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： H04R17/00 , H03H9/205 , H03H9/56 , H03H9/64 , H03H9/15 , H03H9/17 , H03H9/54 , H03H9/60 , H03H3/00 , H03H3/007
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A method of manufacturing a ladder filter including first and second resonators includes: forming a piezoelectric film on an entire surface of a substrate that has respective lower electrodes of the first and second resonator formed thereon, an conductive film on the piezoelectric film, and a second film on the conductive film; forming a pattern of the second film in a prescribed region in the second area; forming a first film on an entire surface of the substrate; etching the first film, forming a pattern of the first film, the second film and the conductive film in the second area, and forming a pattern of the first film and the conductive film in the first area, to form respective upper electrodes from the conductor film; and thereafter, etching the piezoelectric film to form respective patterns of the piezoelectric film in the first and second areas, respectively.
摘要翻译： 一种制造包括第一和第二谐振器的梯形滤波器的方法包括：在其上形成有第一和第二谐振器的各个下电极的基板的整个表面上形成压电膜，在压电膜上形成导电膜， 导电膜上的膜; 在所述第二区域中的规定区域中形成所述第二膜的图案; 在所述基板的整个表面上形成第一膜; 蚀刻第一膜，在第二区域中形成第一膜，第二膜和导电膜的图案，并且在第一区域中形成第一膜和导电膜的图案，以从导体形成相应的上电极 电影; 然后蚀刻压电膜，分别在第一和第二区域形成压电膜的各自图案。
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公开(公告)号：US20100096358A1
公开(公告)日：2010-04-22
申请号：US12647794
申请日：2009-12-28
申请人： Shinji TANIGUCHI , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji TANIGUCHI , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： C23F1/00
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.
摘要翻译： 梯形滤波器包括串联谐振器，其具有第一膜层叠体，其中上电极和下电极在压电膜上彼此面对，第一膜设置在第一膜层叠体上，并且具有第二膜层叠体， 类似于第一膜层压体的结构，设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。
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公开(公告)号：US20080129417A1
公开(公告)日：2008-06-05
申请号：US11907704
申请日：2007-10-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Go Endo , Yasuyuki Saitou , Hisanori Ehara , Masanori Ueda
IPC分类号： H03H9/56
CPC分类号： H03H9/205 , H03H3/00 , H03H3/0073 , H03H3/04 , H03H9/0211 , H03H9/02118 , H03H9/02133 , H03H9/02149 , H03H9/131 , H03H9/132 , H03H9/15 , H03H9/173 , H03H9/174 , H03H9/178 , H03H9/54 , H03H9/568 , H03H9/587 , H03H9/588 , H03H9/605 , H03H9/6483 , H03H2003/021 , H03H2003/023 , H03H2003/0414 , H03H2003/0471 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/49124 , Y10T29/49208 , Y10T29/49224
摘要： A ladder filter includes a series resonator having a first film laminate in which an upper electrode and a lower electrode face each other across a piezoelectric film, and a first film provided on the first film laminate, and a parallel resonator having a second film laminate having a structure similar to that of the first film laminate, a second film provided on the second film laminate, and another first film identical to the first film.
摘要翻译： 梯形滤波器包括串联谐振器，其具有第一膜层叠体，其中上电极和下电极在压电膜上彼此面对，第一膜设置在第一膜层叠体上，并且具有第二膜层叠体， 类似于第一膜层压体的结构，设置在第二膜层压体上的第二膜和与第一膜相同的另一第一膜。
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公开(公告)号：US07737806B2
公开(公告)日：2010-06-15
申请号：US12122246
申请日：2008-05-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
CPC分类号： H03H9/174 , H03H9/0211 , H03H9/02133 , H03H9/132 , H03H9/173
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.
摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在基板和下电极上的压电膜; 形成在所述压电膜上的上部电极，所述压电膜的一部分介于所述下部电极和所述上部电极对置之间; 以及附加膜，其在下电极和上电极彼此面对的部分处在下电极的外周的至少一部分上形成在基板上，附加膜沿着下电极放置。
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公开(公告)号：US20080284543A1
公开(公告)日：2008-11-20
申请号：US12122246
申请日：2008-05-16
申请人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
发明人： Shinji Taniguchi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Masafumi Iwaki , Motoaki Hara , Go Endo , Yasuyuki Saitou , Masanori Ueda
IPC分类号： H03H9/54 , H01L41/047
CPC分类号： H03H9/174 , H03H9/0211 , H03H9/02133 , H03H9/132 , H03H9/173
摘要： A piezoelectric thin-film resonator includes: a lower electrode that is formed on a substrate; a piezoelectric film that is formed on the substrate and the lower electrode; an upper electrode that is formed on the piezoelectric film, with a portion of the piezoelectric film being interposed between the lower electrode and the upper electrode facing each other; and an additional film that is formed on the substrate on at least a part of the outer periphery of the lower electrode at the portion at which the lower electrode and the upper electrode face each other, with the additional film being laid along the lower electrode.
摘要翻译： 压电薄膜谐振器包括：形成在基板上的下电极; 形成在基板和下电极上的压电膜; 形成在所述压电膜上的上部电极，所述压电膜的一部分介于所述下部电极和所述上部电极对置之间; 以及附加膜，其在下电极和上电极彼此面对的部分处在下电极的外周的至少一部分上形成在基板上，附加膜沿着下电极放置。
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公开(公告)号：US20070252476A1
公开(公告)日：2007-11-01
申请号：US11790806
申请日：2007-04-27
申请人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
发明人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
IPC分类号： H01L41/00 , H01L41/047
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。
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公开(公告)号：US07567023B2
公开(公告)日：2009-07-28
申请号：US11790806
申请日：2007-04-27
申请人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
发明人： Masafumi Iwaki , Jun Tsutsumi , Tokihiro Nishihara , Tsuyoshi Yokoyama , Takeshi Sakashita , Shinji Taniguchi , Masanori Ueda , Go Endo
IPC分类号： H01L41/08
摘要： A piezoelectric thin-film resonator includes a substrate, a lower electrode provided on the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film so as to have a portion that overlaps the lower electrode across the piezoelectric film. At least a part of an outer end of the piezoelectric film is further in than an outer end of an opposing region in which the upper and lower electrodes overlap each other across the piezoelectric film.
摘要翻译： 压电薄膜谐振器包括基板，设置在基板上的下电极，设置在下电极上的压电薄膜和设置在压电薄膜上的上电极，以便具有与下电极重叠的部分跨越压电 电影。 压电薄膜的外端部的至少一部分进一步位于上下电极跨越压电薄膜的相对区域的外端。
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公开(公告)号：US20100117762A1
公开(公告)日：2010-05-13
申请号：US12547235
申请日：2009-08-25
申请人： Shinji Taniguchi , Tokihiro Nishihara , Masafumi Iwaki , Masanori Ueda , Go Endo , Tsuyoshi Yokoyama , Takeshi Sakashita , Motoaki Hara
发明人： Shinji Taniguchi , Tokihiro Nishihara , Masafumi Iwaki , Masanori Ueda , Go Endo , Tsuyoshi Yokoyama , Takeshi Sakashita , Motoaki Hara
IPC分类号： H03H9/15
摘要： A resonator includes a substrate, a lower electrode, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. The lower electrode includes a first film provided on the substrate, and a second film that is provided on the first film and has a specific gravity greater than that of the first film. The piezoelectric film is provided on the second film. The upper electrode includes a third film provided on the piezoelectric film, and a fourth film provided on the third film, the third film having a specific gravity greater than that of the fourth film. The third film is thicker than the second film.
摘要翻译： 谐振器包括基板，下电极，设置在下电极上的压电膜和设置在压电膜上的上电极。 下电极包括设置在基板上的第一膜和设置在第一膜上并具有比第一膜大的比重的第二膜。 压电薄膜设置在第二薄膜上。 上电极包括设置在压电膜上的第三膜和设置在第三膜上的第四膜，第三膜的比重大于第四膜的比重。 第三个薄膜比第二个薄膜厚。
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9.发明申请PIEZOELECTRIC THIN-FILM RESONATOR, ACOUSTIC WAVE DEVICE AND METHOD FOR FABRICATING THE ACOUSTIC WAVE DEVICE 审中-公开压电薄膜共振器，声波装置和用于制造声波装置的方法公开(公告)号：US20080169885A1
公开(公告)日：2008-07-17
申请号：US11972316
申请日：2008-01-10
申请人： Masanori Ueda , Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Go Endo , Yasuyuki Saitou
发明人： Masanori Ueda , Tokihiro Nishihara , Shinji Taniguchi , Tsuyoshi Yokoyama , Go Endo , Yasuyuki Saitou
CPC分类号： H03H3/04 , H03H9/174 , H03H2003/0428 , Y10T29/42
摘要： A piezoelectric thin-film resonator includes: a lower electrode provided on a substrate; a piezoelectric film provided on the lower electrode; an upper electrode provided on the piezoelectric film so as to face the lower electrode across the piezoelectric film to thus define a resonance portion; and a weight load film provided on the upper electrode, the weight load film being provided in the resonance portion and having an area smaller than that of the resonance portion.
摘要翻译： 压电薄膜谐振器包括：设置在基板上的下电极; 设置在下电极上的压电膜; 设置在所述压电膜上以与所述下电极相对的所述压电膜的上电极，从而限定谐振部; 以及设置在所述上部电极上的重量载荷膜，所述重量载荷膜设置在所述共振部分中并且具有小于所述共振部分的面积的面积。
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公开(公告)号：US07573354B2
公开(公告)日：2009-08-11
申请号：US11500486
申请日：2006-08-08
申请人： Tokihiro Nishihara , Shogo Inoue , Takashi Matsuda , Masanori Ueda , Masafumi Iwaki , Shinji Taniguchi , Go Endo
发明人： Tokihiro Nishihara , Shogo Inoue , Takashi Matsuda , Masanori Ueda , Masafumi Iwaki , Shinji Taniguchi , Go Endo
摘要： A duplexer includes an antenna terminal, a first filter connected to the antenna terminal, and a second filter connected to the antenna terminal. At least one of the first filter and the second filter is a ladder type filter in which a parallel resonator and multiple series resonators are included, one or more first inductors are respectively connected in parallel with one or more series resonators out of the multiple series resonators, and one of the one or more first inductors is connected in parallel with one of the multiple series resonators that is arranged closest to the antenna terminal.
摘要翻译： 双工器包括天线端子，连接到天线端子的第一滤波器和连接到天线端子的第二滤波器。 第一滤波器和第二滤波器中的至少一个是梯形滤波器，其中包括并联谐振器和多个串联谐振器，一个或多个第一电感器分别与多个串联谐振器中的一个或多个串联谐振器并联连接 并且所述一个或多个第一电感器中的一个与最靠近天线端子布置的多个串联谐振器中的一个并联连接。
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