Thin film formation apparatus including engagement members for support during thermal expansion
    21.
    发明授权
    Thin film formation apparatus including engagement members for support during thermal expansion 失效
    薄膜形成装置包括用于在热膨胀期间支撑的接合构件

    公开(公告)号:US07032536B2

    公开(公告)日:2006-04-25

    申请号:US10680213

    申请日:2003-10-08

    IPC分类号: C23C16/50

    摘要: A thin film formation apparatus for forming a thin film on a substrate is provided, which comprises: a reaction chamber; a gas introduction section for introducing a reactant gas into the reaction chamber; an evacuation section for exhausting the reactant gas from the reaction chamber; first and second planar electrodes provided in the reaction chamber; first and second support members which respectively support the first and second electrodes in parallel relation; a high frequency power source for applying high frequency power between the first and second electrodes; and a heating section for heating one of the first and second electrodes; wherein the substrate is placed on the heated electrode, and at least one of the first and second electrodes is supported movably in the direction of thermal expansion by the corresponding support member. With this arrangement, the variation in the spacing between the first electrode (anode electrode) and the second electrode (cathode electrode) can be reduced when the first and second electrodes are heated.

    摘要翻译: 提供一种用于在基板上形成薄膜的薄膜形成装置,其包括:反应室; 用于将反应气体引入反应室的气体导入部, 用于从反应室排出反应气体的排气部; 设置在反应室中的第一和第二平面电极; 第一和第二支撑构件,其分别以平行关系支撑第一和第二电极; 用于在第一和第二电极之间施加高频电力的高频电源; 以及用于加热所述第一和第二电极之一的加热部分; 其中所述基板被放置在所述加热的电极上,并且所述第一和第二电极中的至少一个被所述相应的支撑构件沿热膨胀的方向可移动地支撑。 利用这种布置,当第一和第二电极被加热时,可以减小第一电极(阳极电极)和第二电极(阴极电极)之间的间隔的变化。

    Endoscope apparatus
    22.
    发明授权
    Endoscope apparatus 有权
    内窥镜装置

    公开(公告)号:US06752758B2

    公开(公告)日:2004-06-22

    申请号:US10413694

    申请日:2003-04-15

    IPC分类号: A61B100

    CPC分类号: A61B1/0052 A61B1/0016

    摘要: An operational remote controller integrates a joystick for bending a bending portion of an inserted portion in an endoscope. A bending lever stands on the joystick. For every automatically returning of the bending lever to a neutral position, a CPU of the operational remote controller detects the neutral position and sets an insensitive band within a predetermined range of the neutral position. Thus, the insensitive band can be set within a relatively narrow range irrespective of variation of neutral positions. The CPU supplies positional information of the bending lever to a control circuit for controlling a motor drive circuit. The control circuit controls a motor drive circuit based on the supplied positional information, and the motor drive circuit drives a motor to bend the bending portion of the inserted portion.

    摘要翻译: 操作遥控器集成了用于弯曲插入部分在内窥镜中的弯曲部分的操纵杆。 操纵杆上有弯曲杆。 为了将弯曲杆自动返回到中立位置,操作遥控器的CPU检测中立位置,并将不敏感带设置在中立位置的预定范围内。 因此,不管中性位置的变化,不敏感带可以设定在相对窄的范围内。 CPU将弯曲杆的位置信息提供给用于控制电动机驱动电路的控制电路。 控制电路基于所提供的位置信息来控制电动机驱动电路,并且电动机驱动电路驱动电动机弯曲插入部分的弯曲部分。

    Code reading apparatus
    23.
    发明授权
    Code reading apparatus 失效
    代码阅读器

    公开(公告)号:US06715684B1

    公开(公告)日:2004-04-06

    申请号:US09655379

    申请日:2000-09-05

    IPC分类号: G06K710

    CPC分类号: G06K7/14

    摘要: A reconstituting section obtains block-address information from each of read out blocks. According to the obtained pattern in the block-address information obtained by the reconstituting section, a reproducing section determines a code-scanning state of manual scanning performed along a scanning direction. When scanning is performed in an off-code state and an overspeed state, and when scanning is terminated in an incomplete state, notification is performed in each of modes differing from each other depending on the scanning state.

    摘要翻译: 重构部分从每个读出的块获得块地址信息。 根据由重构部分获得的块地址信息中获得的模式,再现部分确定沿着扫描方向执行的手动扫描的代码扫描状态。 当在脱离码状态和超速状态下执行扫描时,并且当在不完整状态下终止扫描时,根据扫描状态彼此不同地进行各种模式的通知。

    Electronic endoscope
    25.
    发明授权
    Electronic endoscope 有权
    电子内窥镜

    公开(公告)号:US06520908B1

    公开(公告)日:2003-02-18

    申请号:US09671560

    申请日:2000-09-27

    IPC分类号: A61B100

    CPC分类号: A61B1/00121 A61B1/00066

    摘要: An electronic endoscope in accordance with the present invention consists broadly of an operation unit, an elongated insertion unit, and a universal cord. The operation unit has a treatment appliance insertion port and various operation switches and fills the role of a hand-held unit. The insertion unit extends from the lower end of the operation unit in a direction substantially corresponding to the longitudinal direction of the operation unit. The universal cord extends in a direction crossing the longitudinal direction of the operation unit at an acute angle, and accommodates at least a signal cable extending from the top of the operation unit.

    摘要翻译: 根据本发明的电子内窥镜广泛地包括操作单元,细长插入单元和通用线。 操作单元具有处理器具插入口和各种操作开关,并充满了手持单元的作用。 插入单元从与操作单元的纵向基本对应的方向从操作单元的下端延伸。 通用线在与操作单元的纵向方向成锐角的方向上延伸,并且至少容纳从操作单元的顶部延伸的信号电缆。

    Coded data output apparatus
    26.
    发明授权

    公开(公告)号:US06297890B1

    公开(公告)日:2001-10-02

    申请号:US09662233

    申请日:2000-09-14

    IPC分类号: G06K1502

    CPC分类号: H04N1/40068

    摘要: A coded data output apparatus comprises an image data input or generation section, a resolution parameter specifying section, a resolution parameter modifying section and an image data output section. The image data input or generation section inputs or generates data for a dot code image to be printed. The resolution parameter specifying section specifies parameter data relating to the resolution of the image data input or generated by the image data input or generation section. The resolution parameter modifying section modifies the parameter data relating to the resolution specified by the resolution parameter specifying section according to the characteristic specific to the applied plate making apparatus. The image data output section outputs the input or generated image data according to the parameter data relating to the resolution and modified by the resolution parameter modifying section.

    Preparation of analytical samples, analysis of impurities, preparation of highly purified phosphoric acid and production of semiconductor devices
    27.
    发明授权
    Preparation of analytical samples, analysis of impurities, preparation of highly purified phosphoric acid and production of semiconductor devices 有权
    制备分析样品,分析杂质,制备高纯度磷酸和生产半导体器件

    公开(公告)号:US06228651B1

    公开(公告)日:2001-05-08

    申请号:US09223279

    申请日:1998-12-30

    IPC分类号: G01N3320

    摘要: A process for the preparation of an analytical sample characterized by depositing and separating solely the impurity to be analyzed from phosphoric acid; a process for analysis of the impurity characterized by depositing and separating solely the impurity from phosphoric acid and applying the separated material to analysis; a process for preparation of high grade phosphoric acid characterized by depositing and separating solely the impurity from phosphoric acid to be purified; a process for the fabrication of a semiconductor device characterized by using phosphoric acid, the impurity content of which is not more than 10−3 Bq/mL, defined by the concentration of a contained radioactive element selected from the group consisting of Pb, Bi and Po, as a processing solution.

    摘要翻译: 一种用于制备分析样品的方法,其特征在于仅从磷酸中分离和分离待分析的杂质; 一种用于分析杂质的方法,其特征在于仅将杂质从磷酸沉积和分离,并将分离的材料应用于分析; 一种制备高级磷酸的方法,其特征在于仅将杂质从需要纯化的磷酸中沉淀和分离; 一种用于制造半导体器件的方法,其特征在于使用杂质含量不超过10-3Bq / mL的磷酸,其由选自Pb,Bi和 宝,作为处理方案。

    Orifice for pressure type flow rate control unit and process for
manufacturing orifice
    28.
    发明授权
    Orifice for pressure type flow rate control unit and process for manufacturing orifice 有权
    用于压力式流量控制单元的孔口和用于制造孔口的工艺

    公开(公告)号:US06158679A

    公开(公告)日:2000-12-12

    申请号:US284372

    申请日:1999-06-16

    IPC分类号: G01F1/40 G05D7/01 A62C31/02

    CPC分类号: G01F1/40 G05D7/0186

    摘要: An orifice for a pressure-type flow rate controller, which can be produced by a simple method at a low cost, that provides a linearity--between the pressure P1 on the upstream side of the orifice and the flow rate--over a wide range of the pressure ratio P2/P1 of the pressure P2 on the downstream side of the orifice to the upstream pressure P1 and that permits adjustment with ease of flow characteristics among a plurality of orifices. The orifice comprises an inlet taper 1 in the shape of a bugle and a short narrowed straight section 2 adjoining the inlet taper 1, both formed by cutting one opening end of a preliminary hole 6 made in an orifice plate D, and further comprises a short inner taper 3 and an enlarged straight section 4 connecting with the taper 3 which are formed by enlarging the preliminary hole 6 at the other opening end, the short inner taper 3 adjoining the narrowed straight section 2 on one side and neighboring the enlarged straight section 4 on the other side.

    摘要翻译: PCT No.PCT / JP98 / 03621 Sec。 371日期1999年6月16日第 102(e)1999年6月16日PCT PCT 1998年8月13日PCT公布。 出版物WO99 /​​ 09324 日期1999年2月25日,一种用于压力式流量控制器的孔口,其可以通过简单的方法以低成本生产,其在孔口上游侧的压力P1和流量 - 在孔的下游侧的压力P2的压力比P2 / P1的宽范围到上游压力P1,并且允许在多个孔中容易地调节流动特性。 孔口包括一个具有插针形状的入口锥形1和邻近入口锥形1的短缩窄直线部分2,两者都是通过切割在孔板D中制成的预备孔6的一个开口端而形成的,还包括一个短 内圆锥体3和与锥体3连接的扩大的直线部分4,其通过在另一个开口端扩大预备孔6而形成,短内锥形件3在一侧邻接变窄的直线部分2并且与扩大的直线部分4相邻 另一方面。