公开(公告)号：US6074518A

公开(公告)日：2000-06-13

申请号：US225010

申请日：1999-01-04

申请人： Kosuke Imafuku ,  Shosuke Endo ,  Kazuhiro Tahara ,  Hiroshi Tsuchiya ,  Masayuki Tomoyasu ,  Yukio Naito ,  Kazuya Nagaseki ,  Ryo Nonaka ,  Keizo Hirose ,  Yoshio Fukasawa ,  Akira Koshiishi ,  Isao Kobayashi

发明人： Kosuke Imafuku ,  Shosuke Endo ,  Kazuhiro Tahara ,  Hiroshi Tsuchiya ,  Masayuki Tomoyasu ,  Yukio Naito ,  Kazuya Nagaseki ,  Ryo Nonaka ,  Keizo Hirose ,  Yoshio Fukasawa ,  Akira Koshiishi ,  Isao Kobayashi

IPC分类号： H01J37/32 ,  C23F1/02 ,  C23C16/00

CPC分类号： H01J37/32623

摘要： A plasma processing apparatus comprises a chamber, and an upper electrode and a lower electrode, parallelly provided in the chamber to oppose each other at a predetermined interval, for defining a plasma generation region between the electrodes. An object to be processed is mounted on the lower electrode. RF powers are supplied to the electrodes, so that a plasma generates between the electrodes, thereby performing a plasma process with respect to the object to be processed. A cylindrical ground electrode is provided around the plasma generation region in the chamber, for enclosing the plasma in the plasma generation region, and has a plurality of through holes for passing a process gas.

摘要翻译： 等离子体处理装置包括室，以及上部电极和下部电极，其平行地设置在腔室中以预定间隔彼此相对，用于限定电极之间的等离子体产生区域。 被处理物体安装在下电极上。 向电极提供RF功率，使得在电极之间产生等离子体，从而对被处理物进行等离子体处理。 在室内的等离子体产生区域周围设置圆柱形接地电极，用于将等离子体封装在等离子体产生区域中，并具有用于通过处理气体的多个通孔。

公开(公告)号：US5698062A

公开(公告)日：1997-12-16

申请号：US533383

申请日：1995-09-25

申请人： Takao Sakamoto ,  Kazuhiro Tahara ,  Kenji Momose ,  Kosuke Imafuku ,  Shosuke Endo ,  Yukio Naito ,  Kazuya Nagaseki ,  Keizo Hirose

发明人： Takao Sakamoto ,  Kazuhiro Tahara ,  Kenji Momose ,  Kosuke Imafuku ,  Shosuke Endo ,  Yukio Naito ,  Kazuya Nagaseki ,  Keizo Hirose

IPC分类号： C23C16/44 ,  C23C16/448 ,  C23C16/455 ,  C23C16/509 ,  C23C16/517 ,  H01J37/32 ,  C23F1/02 ,  C23C14/34 ,  C23C16/00

CPC分类号： C23C16/45565 ,  C23C16/4405 ,  C23C16/4407 ,  C23C16/4483 ,  C23C16/4485 ,  C23C16/4557 ,  C23C16/5096 ,  C23C16/517 ,  H01J37/32082 ,  H01J37/32155 ,  H01J37/32165 ,  H01J37/3244

摘要： A plasma treatment apparatus comprising a chamber earthed, a vacuum pump for exhausting the chamber, a suscepter on which a wafer is mounted, a shower electrode arranged in the chamber, opposing to the suscepter, a unit for supplying plasma generating gas to the wafer on the suscepter through the shower electrode, a first radio frequency power source for adding radio frequency voltage, which has a first frequency f.sub.1, to both of the suscepter and the shower electrode, a second radio frequency power source for adding radio frequency voltage, which has a second frequency f.sub.2 higher than the first frequency f.sub.1, at least to one of the suscepter and the shower electrode, a transformer whose primary side is connected to the first radio frequency power source and whose secondary side to first and second electrodes, and a low pass filter arranged in a circuit on the secondary side of the transformer, and serving to allow radio frequency voltage, which has the first frequency f.sub.1, to pass through it but to cut off radio frequency voltage, which has the second frequency f.sub.2, while plasma is being generated.

摘要翻译： 一种等离子体处理装置，包括接地室，用于排出室的真空泵，安装有晶片的可动装置，布置在室中的与电容器相对的喷淋电极，用于向晶片供给等离子体产生气体的单元 通过淋浴电极的检测器，将具有第一频率f1的射频电压的第一射频电源提供给所述吸入器和淋浴电极，所述第二射频电源用于增加射频电压，所述第二射频电源具有 比第一频率f1高的第二频率f2，至少一个至少一个所述电动机和所述淋浴电极，其一次侧连接到所述第一射频电源并且其次级侧连接到所述第一和第二电极的变压器和低 布置在变压器的次级侧的电路中，并且用于使具有第一频率f1的射频电压通过 而是在等离子体产生时切断具有第二频率f2的射频电压。

公开(公告)号：US4981760A

公开(公告)日：1991-01-01

申请号：US378000

申请日：1989-07-11

申请人： Yukio Naito ,  Kohzoh Miyazaki ,  Yuji Gotoh ,  Masashi Hamba ,  Akio Imai ,  Kiyoyuki Sugimori

发明人： Yukio Naito ,  Kohzoh Miyazaki ,  Yuji Gotoh ,  Masashi Hamba ,  Akio Imai ,  Kiyoyuki Sugimori

IPC分类号： B32B27/32 ,  C08F10/00 ,  C08F110/02 ,  C08F210/02 ,  C08F210/16 ,  C08F297/08 ,  C08J5/18 ,  C08L23/00 ,  C08L23/06 ,  C08L23/08

CPC分类号： C08J5/18 ,  C08F210/02 ,  C08F210/16 ,  C08F297/08 ,  C08L23/0815 ,  C08F110/02 ,  C08J2323/08 ,  C08L23/06 ,  Y10T428/31855 ,  Y10T428/31938

摘要： An ethylene-.alpha.-olefin copolymer comprising ethylene and an .alpha.-olefin having from 3 to 10 carbon atoms, the copolymer having an .alpha.-olefin content of from 1.0 to 8.0 mol %, a density of from 0.900 to 0.930 g/cm.sup.3, and a melt flow rate of from 0.1 to 100 g/10 min., the programed-temperature thermogram of said copolymer as determined with a differential scanning calorimeter after being completely melted and then gradually cooled showing an endothermic peak (a) in a range of from 75.degree. to 100.degree. C. and an endothermic peak (b) in a range of from 120.degree. to 140.degree. C., with the ratio of an endotherm at the endothermic peak (b), .DELTA.Hb, to an endotherm at the endothermic peak (a), .DELTA.Ha, i.e., .DELTA.Hb/.DELTA.Ha, being from 0.03 to 2.0. The copolymer provides a film exhibiting excellent physical properties required for packaging film.

公开(公告)号：US4633511A

公开(公告)日：1986-12-30

申请号：US643834

申请日：1984-08-23

申请人： Daisuke Koga ,  Masahide Tamura ,  Yukio Naito

发明人： Daisuke Koga ,  Masahide Tamura ,  Yukio Naito

IPC分类号： H04B1/40 ,  H04B1/50

CPC分类号： H04B1/50 ,  H04B1/408

摘要： A duplex transmission and reception system wherein a local oscillator of the receiver is dispensed with by using the output of a modulated transmission oscillator, with its modulation cancelled, in lieu of a receiver local oscillator. The transmitter modulation signal is adjusted by appropriate level correction and phase inversion. The modulated output of the transmission oscillator is itself applied to a modulator, where it is modulated by the adjusted modulation signal. This results in substantially cancelling out the modulation component of the transmission oscillator output. This modulation-cancelled signal is supplied to the mixer of a superheterodyne receiver as a local oscillator signal.

摘要翻译： 一种双工发送和接收系统，其中通过使用调制的发送振荡器的输出来取消接收机的本地振荡器，其调制被取消，代替接收机本地振荡器。 通过适当的电平校正和相位反转调整发射机调制信号。 传输振荡器的调制输出本身被应用于调制器，在调制器中调制输出被调制后的调制信号调制。 这导致基本上消除了发送振荡器输出的调制分量。 该调制解除信号作为本地振荡器信号提供给超外差接收机的混频器。

公开(公告)号：US4367322A

公开(公告)日：1983-01-04

申请号：US291701

申请日：1981-08-10

申请人： Akinobu Shiga ,  Kiyoshi Matsuyama ,  Masahiro Kakugo ,  Yukio Naito ,  Akira Nunose ,  Masaharu Nishioka

发明人： Akinobu Shiga ,  Kiyoshi Matsuyama ,  Masahiro Kakugo ,  Yukio Naito ,  Akira Nunose ,  Masaharu Nishioka

IPC分类号： C08F4/64 ,  C08F210/06

CPC分类号： C08F210/06 ,  Y10S526/916

摘要： In a process for producing propylene copolymer containing about 80 to 99 mol % propylene and about 1 to 20 mol % ethylene and/or an .alpha.-olefin having 4 to 18 carbon atoms using a Ziegler-Natta catalyst, the improvement which comprises said Ziegler-Natta catalyst comprising:(A) titanium trichloride prepared by reducing titanium tetrachloride with an organoaluminum compound and activating the product; and(B) an organoaluminum compound;with the molar ratio of (B)/(A) being about 20 to 100.

摘要翻译： 在使用齐格勒 - 纳塔催化剂的丙烯共聚物的制备方法中，所述丙烯共聚物含有约80-99摩尔％的丙烯和约1-20摩尔％的乙烯和/或具有4-18个碳原子的α-烯烃，其改进包括所述齐格勒 - 纳塔催化剂，其包含：（A）通过用有机铝化合物还原四氯化钛制备的三氯化钛并活化该产物; 和（B）有机铝化合物; （B）/（A）的摩尔比为约20至100。

公开(公告)号：US4355144A

公开(公告)日：1982-10-19

申请号：US257431

申请日：1981-04-24

申请人： Akinobu Shiga ,  Kiyoshi Matsuyama ,  Masahiro Kakugo ,  Yukio Naito ,  Seiichiro Ima ,  Katsuyoshi Yamashita

发明人： Akinobu Shiga ,  Kiyoshi Matsuyama ,  Masahiro Kakugo ,  Yukio Naito ,  Seiichiro Ima ,  Katsuyoshi Yamashita

IPC分类号： C08F4/00 ,  C08F2/00 ,  C08F4/60 ,  C08F4/64 ,  C08F10/00 ,  C08F10/06 ,  C08F210/00 ,  C08F210/06 ,  C08F210/16

CPC分类号： C08F210/06

摘要： In a process for producing polypropylene comprising polymerizing propylene in the presence of hydrogen and a catalyst system comprising (A) titanium trichloride obtained by reducing titanium tetrachloride with an organoaluminum compound and reacting the reduced solid with an ether represented by the formula:R.sup.1 -O-R.sup.2wherein R.sup.1 and R.sup.2 are defined hereinbefore, and a halogen compound selected from the group consisting of (i) halogen or interhalogen compounds of the formula, X.sup.1 X.sup.2.sub.a (wherein X.sup.1, X.sup.2 and a are defined hereinbefore), (ii) titanium halides, and (iii) organic halogen compounds, simultaneously or successively and (B) an organoaluminum compound, the improvement which comprises supplying ethylene together with propylene to the polymerization system such that the ethylene concentration in the vapor phase of the system based on the total amount of propylene, ethylene and hydrogen in the vapor phase of the system is 0.15 to 1.5 mol % to obtain a propylene-ethylene copolymer having an ethylene content of from 0.1 to 1.0 wt % is disclosed. The propylene-ethylene copolymer is improved in stretchability.

摘要翻译： 在制备聚丙烯的方法中，包括在氢气存在下聚合丙烯和催化剂体系，所述催化剂体系包含（A）通过用有机铝化合物还原四氯化钛获得的三氯化钛，并将还原的固体与由下式表示的醚反应：R1-O- 其中R 1和R 2如上定义，卤素化合物选自（ⅰ）卤素或下式的卤代化合物：X1X2a（其中X1，X2和a定义如前），（ⅱ）卤化钛和 （iii）有机卤素化合物，同时或相继和（B）有机铝化合物，其改进包括将乙烯与丙烯一起供应到聚合体系中，使得基于丙烯总量的体系的气相中的乙烯浓度 ，系统的气相中的乙烯和氢为0.15〜1.5摩尔％，得到丙烯 - 乙烯共聚物 公开了乙烯含量为0.1〜1.0重量％。 丙烯 - 乙烯共聚物的拉伸性提高。