Abstract:
A method of aligning sets of cylindrical electrodes in the geometry of a miniature quadrupole electrostatic lens, which can act as a mass filter in a quadrupole mass spectrometer is provided. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. Complete segmentation of the conducting parts provides low capacitative coupling between co-planar cylindrical electrodes, and allows incorporation of a Brubaker prefilter to improve sensitivity at a given mass resolution. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers. The spacers are continued around the electrodes to provide a conducting screen.
Abstract:
This invention provides a method of aligning a nanospray capillary needle, a set of electrodes, and a capillary input to a mass spectrometer. The electrode system is formed using microengineering technologies, as an assembly of two separate chips. Each chip is formed on an insulating plastic substrate. The first chip carries mechanical alignment features for the capillary electrospray needle and the API mass spectrometer input, together with a set of partial electrodes. The second chip carries a set of partial electrodes. The complete electrode system is formed when the chips are assembled in a stacked configuration, and consists of an einzel lens capable of initiating a Taylor cone and separating ions from neutrals by focusing.
Abstract:
This invention describes the combination of an electrostatically operated valve and an electrically heated desorber, comprising a movable flap carrying a chemically adsorbing coating, suspended by an elastic element above an orifice in an insulated substrate. The device is constructed by planar processing. The flap can be deflected towards the substrate to block the flow of gas through the orifice by applying a voltage between the substrate and the flap. The coating provides an adsorbing surface for a volatile organic compound. The coating may be heated electrically, by applying an alternating voltage between the substrate and the flap, thermally desorbing any adsorbed chemical species. When combined with other similar valves in a stacked assembly, the device may be using in a chemical pre-concentrator with very low dead volume.
Abstract:
This invention provides a method of accurately aligned, multilevel micro-contact-printing without the need for dedicated inking, alignment and stamping equipment. Die-sized micro-contact-printing engines are constructed from micromachined parts, which combine precision alignment features with stamper blocks supported on elastic suspensions. The stampers carry raised patterns, the alignment features mate with corresponding features on etched inkwells and substrates, and the pattern is transferred using a microactuator.
Abstract:
An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states.
Abstract:
A planar component for interfacing an atmospheric pressure ionizer to a vacuum system is described. The component combines electrostatic optics and skimmers with an internal chamber that can be filled with a gas at a prescribed pressure and is fabricated by lithography, etching and bonding of silicon.
Abstract:
This invention provides a pre-concentrator device including an electrostatically operated valve and an electrically heated desorber, the electrostatically operated valve comprising a movable flap or membrane carrying a chemically adsorbing coating, suspended by an elastic element above an orifice in an insulated substrate. The device is constructed by planer processing. The flap or membrane can be deflected towards the substrate to block the flow of gas through the orifice by applying a voltage between the substrate and the membrane. The coating provides an adsorbing surface for a volatile organic compound. The coating may be heated electrically, by applying an alternating voltage between the substrate and the flap, thermally desorbing any adsorbed chemical species. When combined with other similar valves in a stacked assembly, the device may be used in a chemical pre-concentrator with very low dead volume.
Abstract:
This invention provides a method of aligning a nanospray capillary needle, a set of electrodes, and a capillary input to a mass spectrometer. The electrode system is formed using microengineering technologies, as an assembly of two separate chips. Each chip is formed on an insulating plastic substrate. The first chip carries mechanical alignment features for the capillary electrospray needle and the API mass spectrometer input, together with a set of partial electrodes. The second chip carries a set of partial electrodes. The complete electrode system is formed when the chips are assembled in a stacked configuration, and consists of an einzel lens capable of initiating a Taylor cone and separating ions from neutrals by focusing.
Abstract:
This invention provides a method of mounting cylindrical electrodes in the geometry of a miniature electrostatic quadrupole, which can act as a quadrupole mass filter or a quadrupole ion guide, or be used in a linear quadrupole ion trap. The electrodes are mounted in pairs on microfabricated supports, which are formed from conducting parts on an insulating substrate. The supports include a suspended flexure system to relieve strains caused by mismatch between the thermal expansion coefficients of the electrodes and the substrate. A complete quadrupole is constructed from two such supports, which are spaced apart by further conducting spacers.
Abstract:
An accelerometer or a seismometer using an in-plane suspension geometry having a suspension plate and at least one fixed capacitive plate. The suspension plate is formed from a single piece and includes an external frame, a pair of flexural elements, and an integrated proof mass between the flexures. The flexural elements allow the proof mass to move in the sensitive direction in the plane of suspension while restricting movement in all off-axis directions. Off-axis motion of the proof mass is minimized by the use of intermediate frames disbursed within and between the flexural elements. Intermediate frames can include motion stops to prevent further relative motion during overload conditions. The device can also include a dampening structure, such as a spring or gas structure that includes a trapezoidal piston and corresponding cylinder, to provide damping during non-powered states.