公开(公告)号：US20170285064A1

公开(公告)日：2017-10-05

申请号：US15265111

申请日：2016-09-14

Applicant: STMicroelectronics S.R.L.

Inventor： Alessandro Tocchio ,  Gabriele Gattere

IPC: G01P15/125 ,  B81B3/00

Abstract: A MEMS accelerometric sensor includes a bearing structure and a suspended region that is made of semiconductor material, mobile with respect to the bearing structure. At least one modulation electrode is fixed to the bearing structure and is biased with an electrical modulation signal including at least one periodic component having a first frequency. At least one variable capacitor is formed by the suspended region and by the modulation electrode in such a way that the suspended region is subjected to an electrostatic force that depends upon the electrical modulation signal. A sensing assembly generates, when the accelerometric sensor is subjected to an acceleration, an electrical sensing signal indicating the position of the suspended region with respect to the bearing structure and includes a frequency-modulated component that is a function of the acceleration and of the first frequency.

公开(公告)号：US12209008B2

公开(公告)日：2025-01-28

申请号：US17752016

申请日：2022-05-24

Applicant: STMicroelectronics S.r.l.

Inventor： Nicolo' Boni ,  Gabriele Gattere ,  Manuel Riani ,  Roberto Carminati

IPC: B81B3/00

Abstract: A MEMS actuator includes a mobile mass suspended over a substrate in a first direction and extending in a plane that defines a second direction and a third direction perpendicular thereto. Elastic elements arranged between the substrate and the mobile mass have a first compliance in a direction parallel to the first direction that is lower than a second compliance in a direction parallel to the second direction. Piezoelectric actuation structures have a portion fixed with respect to the substrate and a portion that deforms in the first direction in response to an actuation voltage. Movement-transformation structures coupled to the piezoelectric actuation structures include an elastic movement-conversion structure arranged between the piezoelectric actuation structures and the mobile mass. The elastic movement-conversion structure is compliant in a plane formed by the first and second directions and has first and second principal axes of inertia transverse to the first and second directions.

公开(公告)号：US12117464B2

公开(公告)日：2024-10-15

申请号：US18147629

申请日：2022-12-28

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Francesco Rizzini ,  Alessandro Tocchio

IPC: G01P15/125 ,  B81C1/00 ,  G01P15/08

CPC classification number: G01P15/125 ,  B81C1/00968 ,  G01P2015/0874

Abstract: An inertial structure is elastically coupled through a first elastic structure to a supporting structure so as to move along a sensing axis as a function of a quantity to be detected. The inertial structure includes first and second inertial masses which are elastically coupled together by a second elastic structure to enable movement of the second inertial mass along the sensing axis. The first elastic structure has a lower elastic constant than the second elastic structure so that, in presence of the quantity to be detected, the inertial structure moves in a sensing direction until the first inertial mass stops against a stop structure and the second elastic mass can move further in the sensing direction. Once the quantity to be detected ends, the second inertial mass moves in a direction opposite to the sensing direction and detaches the first inertial mass from the stop structure.

公开(公告)号：US12038454B2

公开(公告)日：2024-07-16

申请号：US18056203

申请日：2022-11-16

Applicant: STMicroelectronics S.r.l.

Inventor： Francesco Rizzini ,  Gabriele Gattere ,  Sarah Zerbini

IPC: G01P15/03 ,  B81B3/00 ,  G01C19/5733 ,  G01P15/08 ,  G01P15/125 ,  G01P15/18

CPC classification number: G01P15/032 ,  B81B3/0018 ,  B81B3/0051 ,  G01C19/5733 ,  G01P15/0802 ,  G01P15/125 ,  G01P15/18 ,  B81B2201/0235

Abstract: A MEMS inertial sensor includes a supporting structure and an inertial structure. The inertial structure includes at least one inertial mass, an elastic structure, and a stopper structure. The elastic structure is mechanically coupled to the inertial mass and to the supporting structure so as to enable a movement of the inertial mass in a direction parallel to a first direction, when the supporting structure is subjected to an acceleration parallel to the first direction. The stopper structure is fixed with respect to the supporting structure and includes at least one primary stopper element and one secondary stopper element. If the acceleration exceeds a first threshold value, the inertial mass abuts against the primary stopper element and subsequently rotates about an axis of rotation defined by the primary stopper element. If the acceleration exceeds a second threshold value, rotation of the inertial mass terminates when the inertial mass abuts against the secondary stopper element.

公开(公告)号：US11810732B2

公开(公告)日：2023-11-07

申请号：US17690869

申请日：2022-03-09

Applicant: STMICROELECTRONICS S.r.l.

Inventor： Enri Duqi ,  Gabriele Gattere ,  Carlo Valzasina

IPC: H01H13/14 ,  B81B3/00 ,  G01L1/16 ,  H01H13/06 ,  H10N30/30

CPC classification number: H01H13/14 ,  B81B3/0021 ,  G01L1/162 ,  H01H13/06 ,  H10N30/302 ,  B81B2201/018

Abstract: A button device includes a fixed support structure; a movable structure, laterally surrounded by the support structure and configured to deform at least in part under the action of an external force; and a fluid-tight protection cap. The movable structure includes a piston element, deformable elements having piezoelectric transducers arranged thereon, and anchor elements that couple the piston element to the deformable elements. When an external force acts on the piston element, the anchor elements transfer this force to the deformable elements and to the piezoelectric transducers, so as to sense the extent of this force.

公开(公告)号：US11277112B2

公开(公告)日：2022-03-15

申请号：US16991820

申请日：2020-08-12

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Lorenzo Corso ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

Abstract: A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.

公开(公告)号：US20200373904A1

公开(公告)日：2020-11-26

申请号：US16991820

申请日：2020-08-12

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Lorenzo Corso ,  Alessandro Tocchio ,  Carlo Valzasina

IPC: H03H9/02 ,  H03H9/24 ,  H03H3/007

Abstract: A microelectromechanical device having a mobile structure including mobile arms formed from a composite material and having a fixed structure including fixed arms capacitively coupled to the mobile arms. The composite material includes core regions of insulating material and a silicon coating.

公开(公告)号：US10775171B2

公开(公告)日：2020-09-15

申请号：US15956446

申请日：2018-04-18

Applicant: STMicroelectronics S.r.l.

Inventor： Gabriele Gattere ,  Luca Guerinoni ,  Luca Giuseppe Falorni ,  Damiano Milani ,  Francesco Braghin ,  Ferruccio Resta ,  Mohammad Izadi

IPC: G01C19/5712 ,  G01C19/574 ,  G01C19/5755

Abstract: A MEMS gyroscope is equipped with: at least a first mobile mass suspended from the top of a substrate by means of elastic suspension elements coupled to anchor points rigidly fixed to the substrate, in such a manner as to be actuated in an actuating movement along a first axis of a horizontal plane and to carry out a measurement movement along a vertical axis, transverse to the horizontal plane, in response to a first angular velocity acting about a second axis of the horizontal plane, transverse to the first axis. The elastic suspension elements are configured in such a manner as to internally compensate unwanted displacements out of the horizontal plane along the vertical axis originating from the actuating movement, such that the mobile mass remains in the horizontal plane during the actuating movement.

公开(公告)号：US20170284804A1

公开(公告)日：2017-10-05

申请号：US15273312

申请日：2016-09-22

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Carlo Valzasina ,  Luca Giuseppe Falorni

IPC: G01C19/5747

CPC classification number: G01C19/5747 ,  G01C19/5712

Abstract: A multi-axis MEMS gyroscope includes a micromechanical detection structure having a substrate, a driving-mass arrangement, a driven-mass arrangement with a central window, and a sensing-mass arrangement which undergoes sensing movements in the presence of angular velocities about a first horizontal axis and a second horizontal axis. A sensing-electrode arrangement is fixed with respect to the substrate and is set underneath the sensing-mass arrangement. An anchorage assembly is set within the central window for constraining the driven-mass arrangement to the substrate at anchorage elements. The anchorage assembly includes a rigid structure suspended above the substrate that is elastically coupled to the driven mass by elastic connection elements at a central portion, and is coupled to the anchorage elements by elastic decoupling elements at end portions thereof.

公开(公告)号：US20170261322A1

公开(公告)日：2017-09-14

申请号：US15454907

申请日：2017-03-09

Applicant: STMICROELECTRONICS S.R.L.

Inventor： Gabriele Gattere ,  Luca Giuseppe Falorni ,  Carlo Valzasina

IPC: G01C19/5712

CPC classification number: G01C19/5712

Abstract: A micromechanical detection structure includes a substrate of semiconductor material and a driving-mass arrangement is coupled to a set of driving electrodes and driven in a driving movement following upon biasing of the set of driving electrodes. A first anchorage unit is coupled to the driving-mass arrangement for elastically coupling the driving-mass arrangement to the substrate at first anchorages. A driven-mass arrangement is elastically coupled to the driving-mass arrangement by a coupling unit and designed to be driven by the driving movement. A second anchorage unit is coupled to the driven-mass arrangement for elastically coupling the driven-mass arrangement to the substrate at second anchorages. Following upon the driving movement, the resultant of the forces and of the torques exerted on the substrate at the first and second anchorages is substantially zero.