Wiring layout to reduce magnetic field

    公开(公告)号:US10067201B2

    公开(公告)日:2018-09-04

    申请号:US15099561

    申请日:2016-04-14

    Abstract: A magnetic sensor has a circuit segment with a quadrupole region. The quadrupole region includes a supply line, a first return line and a second return line, all in a conductor layer. The first supply line is laterally adjacent to the supply line on a first side, and the second return line is laterally adjacent to the supply line on a second, opposite side. A space between the supply line and the first return line is free of the conductor layer; similarly, a space between the supply line and the second return line is free of the conductor layer. The first return line and the second return line are electrically coupled to the supply line at a terminus of the circuit segment.

    EXTENDED SIGNAL PATHS IN MICROFABRICATED SENSORS

    公开(公告)号:US20180128885A1

    公开(公告)日:2018-05-10

    申请号:US15348966

    申请日:2016-11-10

    CPC classification number: G01R33/032 G01R33/0052 G04F5/14

    Abstract: A microfabricated sensor includes a first reflector and a second reflector in a sensor cell, separated by a cavity path segment through a sensor cavity in the sensor cell. A signal window is part of the sensor cell. A signal emitter and a signal detector are disposed outside of the sensor cavity. The signal emitter is separated from the first reflector by an emitter path segment which extends through the signal window. The second reflector is separated from the second reflector by a detector path segment which extends through the signal window.

    CONCAVE CAVITY FOR INTEGRATED MICROFABRICATED SENSOR

    公开(公告)号:US20200333406A1

    公开(公告)日:2020-10-22

    申请号:US16918098

    申请日:2020-07-01

    Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

    Extended signal paths in microfabricated sensors

    公开(公告)号:US10393826B2

    公开(公告)日:2019-08-27

    申请号:US15348966

    申请日:2016-11-10

    Abstract: A microfabricated sensor includes a first reflector and a second reflector in a sensor cell, separated by a cavity path segment through a sensor cavity in the sensor cell. A signal window is part of the sensor cell. A signal emitter and a signal detector are disposed outside of the sensor cavity. The signal emitter is separated from the first reflector by an emitter path segment which extends through the signal window. The second reflector is separated from the second reflector by a detector path segment which extends through the signal window.

    CONCAVE CAVITY FOR INTEGRATED MICROFABRICATED SENSOR

    公开(公告)号:US20180259596A1

    公开(公告)日:2018-09-13

    申请号:US15457669

    申请日:2017-03-13

    Abstract: An integrated microfabricated sensor includes a sensor cell having a cell body, a first window attached to the cell body, and a second window attached to the cell body. The cell body laterally surrounds a cavity, so that both windows are exposed to the cavity. The sensor cell contains a sensor fluid material in the cavity. The cavity has concave profiles at cell body walls, so that the cavity is wider in a central region, approximately midway between the first window and the second window, than at the first surface and at the second surface. The cell body walls of the cell body have acute interior angles at both windows. The cell body is formed using an etch process that removes material from the cell body concurrently at the first surface and the second surface, forming the acute interior angles at both the first surface and the second surface.

    SENSOR FLUID RESERVOIRS FOR MICROFABRICATED SENSOR CELLS

    公开(公告)号:US20170199138A1

    公开(公告)日:2017-07-13

    申请号:US14993073

    申请日:2016-01-11

    CPC classification number: G01N25/02 G04F5/14 H03L7/26

    Abstract: A sensor cell has a chamber that defines an internal sensor volume for a sensor fluid in a vapor phase. A signal path extends into the internal sensor volume. The sensor cell includes a condensation reservoir for a condensed phase of the sensor fluid, in fluid communication with the internal sensor volume. The signal path is spatially separate from the condensation reservoir. During operation of the sensor cell, some of the sensor fluid may be converted to a vapor phase in the internal sensor volume. During such operation, sensor fluid in the condensed phase is disposed in the condensation reservoir, advantageously out of the signal path, leaving the signal path desirably free of the condensed phase sensor fluid. During periods of non-operation, a significant portion of the sensor fluid may condense from the vapor phase to the condensed phase in the condensation reservoir, advantageously out of the signal path.

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