Substrate processing system, method of confirmation of its state of use, and method of prevention of illicit use
    23.
    发明授权
    Substrate processing system, method of confirmation of its state of use, and method of prevention of illicit use 有权
    基板加工系统,确认其使用状态的方法以及防止非法使用的方法

    公开(公告)号:US08996422B2

    公开(公告)日:2015-03-31

    申请号:US11659878

    申请日:2005-08-10

    摘要: [PROBLEM] To enable confirmation of whether a substrate processing system is being illicitly used and preventing that use when there is the fact of illicit use.[MEANS FOR SOLUTION] A license file LF is a file encrypting license information L including usage terms of a substrate processing system for a specific user. A match confirmation program P2 confirms the match between the content of the license file LF decrypted by a decryption program P1 and device information DI, network information NI, and current time CT obtained from the substrate processing system to confirm the existence of the fact of illicit use. If there is illicit use, the control program P3 stops operation of the substrate processing system until predetermined action is taken based on the information from the match confirmation program P2.

    摘要翻译: [问题]为了确认基板处理系统是否被非法使用,并且在存在非法使用的情况下防止使用。 [解决方案]许可证文件LF是包括用于特定用户的基板处理系统的使用条件的文件加密许可证信息L. 匹配确认程序P2确认由解密程序P1解密的许可证文件LF的内容与设备信息DI,网络信息NI和从基板处理系统获得的当前时间CT之间的匹配,以确认是否存在非法的事实 使用。 如果存在非法使用,则控制程序P3基于来自匹配确认程序P2的信息停止基板处理系统的操作,直到采取预定的动作为止。

    HOLLOW CORE BODY FOR SIGNAL TRANSMISSION CABLE
    24.
    发明申请
    HOLLOW CORE BODY FOR SIGNAL TRANSMISSION CABLE 有权
    用于信号传输电缆的中空体

    公开(公告)号:US20150075840A1

    公开(公告)日:2015-03-19

    申请号:US14345053

    申请日:2011-10-04

    IPC分类号: H01B7/04 H01B11/00

    摘要: A hollow core body for signal transmission cable comprises an inner conductor that employs a compressed bunched conductor formed by bunching and compressing plural strands such that a cross-section of the compressed bunched conductor is substantially circular, and a hollow insulating core that includes an inner annular member, rib members, an outer annular member; and hollow members. Accordingly, as almost no recesses are produced on the circumferential surface of the compressed bunched conductor, weakening of the mechanical strength due to presence of recesses on the circumferential surface of the inner conductor can be suppressed.

    摘要翻译: 用于信号传输电缆的中空芯体包括内导体,其使用通过聚束和压缩多股而形成的压缩聚束导体,使得压缩的聚束导体的横截面基本上为圆形,以及中空绝缘芯,其包括内环形 构件,肋构件,外环形构件; 和中空构件。 因此,由于在压缩的聚束导体的圆周表面上几乎没有产生凹陷,因此可以抑制由于在内导体的圆周表面上存在凹陷而导致的机械强度的弱化。

    Semiconductor device and manufacturing method thereof
    25.
    发明授权
    Semiconductor device and manufacturing method thereof 有权
    半导体装置及其制造方法

    公开(公告)号:US08796143B2

    公开(公告)日:2014-08-05

    申请号:US13295050

    申请日:2011-11-12

    申请人: Tadashi Yamaguchi

    发明人: Tadashi Yamaguchi

    IPC分类号: H01L21/44

    摘要: A semiconductor device in which a metal silicide layer is formed by a salicide process is improved in reliability. By a salicide process according to a partial reaction method, metal silicide layers are formed over respective surfaces of gate electrodes, n+-type semiconductor regions, and p+-type semiconductor regions. In a first heat treatment when the metal silicide layers are formed, a heat-conduction type anneal apparatus is used for the heat treatment of a semiconductor wafer. In a second heat treatment, a microwave anneal apparatus is used for the heat treatment of the semiconductor wafer, thereby reducing the temperature of the second heat treatment and preventing abnormal growth of the metal silicide layers. Thus, a junction leakage current in the metal silicide layers is reduced.

    摘要翻译: 通过自对准硅化物工艺形成金属硅化物层的半导体器件的可靠性提高。 通过根据部分反应方法的自对准硅化物工艺,在栅电极,n +型半导体区域和p +型半导体区域的各个表面上形成金属硅化物层。 在形成金属硅化物层的第一热处理中,使用导热型退火装置进行半导体晶片的热处理。 在第二热处理中,微波退火装置用于半导体晶片的热处理,从而降低第二热处理的温度并防止金属硅化物层的异常生长。 因此,金属硅化物层中的结漏电流减小。

    Manufacturing method of semiconductor device
    26.
    发明授权
    Manufacturing method of semiconductor device 有权
    半导体器件的制造方法

    公开(公告)号:US08541297B2

    公开(公告)日:2013-09-24

    申请号:US13046761

    申请日:2011-03-13

    IPC分类号: H01L21/3205 H01L21/4763

    摘要: The present invention improves the performance of a semiconductor device wherein a metal silicide layer is formed through a salicide process. A metal silicide layer is formed over the surfaces of first and second gate electrodes, n+-type semiconductor regions, and p+-type semiconductor regions through a salicide process of a partial reaction type without the use of a salicide process of a whole reaction type. In a heat treatment for forming the metal silicide layer, by heat-treating a semiconductor wafer not with an annealing apparatus using lamps or lasers but with a thermal conductive annealing apparatus using carbon heaters, a thin metal silicide layer is formed with a small thermal budget and a high degree of accuracy and microcrystals of NiSi are formed in the metal silicide layer through a first heat treatment.

    摘要翻译: 本发明改进了通过自对准硅化物工艺形成金属硅化物层的半导体器件的性能。 通过部分反应型的自对准硅化物工艺,在不使用整个反应类型的自对准硅化物工艺的情况下,在第一和第二栅电极,n +型半导体区域和p +型半导体区域的表面上形成金属硅化物层。 在用于形成金属硅化物层的热处理中,通过不使用灯或激光器的退火设备对半导体晶片进行热处理,但是使用具有碳加热器的导热退火装置,以小的热预算形成薄金属硅化物层 并且通过第一热处理在金属硅化物层中形成高精度的NiSi微晶。

    Semiconductor device and manufacturing method of the same
    27.
    发明授权
    Semiconductor device and manufacturing method of the same 有权
    半导体器件及其制造方法相同

    公开(公告)号:US08343827B2

    公开(公告)日:2013-01-01

    申请号:US13182750

    申请日:2011-07-14

    IPC分类号: H01L21/8238

    摘要: In a CMIS device, to improve the operating characteristics of an n-channel electric field transistor that is formed by using a strained silicon technique, without degrading the operating characteristics of a p-channel field effect transistor. After forming a source/drain (an n-type extension region and an n-type diffusion region) of an nMIS and a source/drain (a p-type extension region and a p-type diffusion region) of a pMIS, the each source/drain having a desired concentration profile and resistance, a Si:C layer having a desired amount of strain is formed in the n-type diffusion region, and thus the optimum parasitic resistance and the optimum amount of strain in the Si:C layer are obtained in the source/drain of the nMIS. Moreover, by performing a heat treatment in forming the Si:C layer in a short time equal to or shorter than 1 millisecond, a change in the concentration profile of the respective p-type impurities of the already-formed p-type extension region and p-type diffusion region is suppressed.

    摘要翻译: 在CMIS器件中,为了改善通过使用应变硅技术形成的n沟道电场晶体管的工作特性,而不降低p沟道场效应晶体管的工作特性。 在形成pISIS的nMIS和源极/漏极(p型延伸区域和p型扩散区域)的源极/漏极(n型延伸区域和n型扩散区域)之后, 源极/漏极具有所需的浓度分布和电阻,在n型扩散区域中形成具有所需量的应变的Si:C层,因此Si:C层中的最佳寄生电阻和最佳应变量 在nMIS的源/漏中获得。 此外,通过在等于或短于1毫秒的短时间内形成Si:C层进行热处理,已经形成的p型延伸区域的各个p型杂质的浓度分布的变化和 p型扩散区被抑制。

    IMAGING DEVICE, IMAGE PROCESSING METHOD, AND COMPUTER PROGRAM
    28.
    发明申请
    IMAGING DEVICE, IMAGE PROCESSING METHOD, AND COMPUTER PROGRAM 有权
    成像设备,图像处理方法和计算机程序

    公开(公告)号:US20120133787A1

    公开(公告)日:2012-05-31

    申请号:US13267112

    申请日:2011-10-06

    申请人: Tadashi Yamaguchi

    发明人: Tadashi Yamaguchi

    IPC分类号: H04N5/228 H04N5/217

    摘要: An imaging device includes: a first imaging unit which does not include a phase difference detecting pixel on an imaging element; a second imaging unit which includes a phase difference detecting pixel on an imaging element; a pixel comparing unit which compares first obtained image obtained by the first imaging unit with a second obtained image obtained by the second imaging unit; a correcting unit which corrects phase difference information obtained by the second imaging unit based on a comparison result by the image comparing unit; a phase difference applying unit which applies the phase difference information corrected by the correcting unit to the first obtained image; and a recording unit which records image information.

    摘要翻译: 一种成像装置包括:第一成像单元,其不包括成像元件上的相位差检测像素; 第二成像单元,其包括成像元件上的相位差检测像素; 像素比较单元,其将由第一成像单元获得的第一获得图像与由第二成像单元获得的第二获得图像进行比较; 校正单元,其基于图像比较单元的比较结果校正由第二成像单元获得的相位差信息; 相位差施加单元,将由校正单元校正的相位差信息应用于第一获得图像; 以及记录图像信息的记录单元。