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    Actuator and liquid discharge head, and method for manufacturing liquid discharge head
    21.
    发明授权
    Actuator and liquid discharge head, and method for manufacturing liquid discharge head 有权
    执行器和排液头，以及液体排出头的制造方法

    公开(公告)号：US07045935B2

    公开(公告)日：2006-05-16

    申请号：US10632913

    申请日：2003-08-04

    申请人： Takanori Matsuda ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Kiyotaka Wasa

    发明人： Takanori Matsuda ,  Kenichi Takeda ,  Toshihiro Ifuku ,  Kiyotaka Wasa

    IPC分类号： H01L41/047

    CPC分类号： B41J2/161 ,  B41J2/1628 ,  B41J2/1629 ,  B41J2/1642 ,  B41J2/1645 ,  B41J2/1646 ,  B41J2202/03 ,  B41J2202/11 ,  H01L41/0478 ,  H01L41/0973 ,  H01L41/1875 ,  H01L41/314

    摘要： An actuator comprises a laminated structure having a vibration plate, a lower electrode, a piezoelectric element, and an upper electrode laminated sequentially on a basic element, and then, at least the lower electrode of the two electrodes is a thin oxide film doped with La of single orientated crystal or monocrystal that contains Sr and Ti. Thus, it is made possible to materialize the micro miniaturized actuator having a strong structure of lamination with high adhesion, which is capable of obtaining large displacement with sufficient durability without spoiling the piezo-electrostrictive property thereof even with the small thickness of the piezoelectric element. With the micro miniaturized actuator thus structured, it is made possible to make a liquid discharge head more precisely.

    摘要翻译： 致动器包括具有振动板，下电极，压电元件和上电极的层压结构，其顺序层压在基本元件上，然后至少两个电极的下电极是掺杂有La的薄氧化膜 的单取向晶体或含有Sr和Ti的单晶。 因此，可以实现具有高粘合性的具有强的层叠结构的微小型致动器，其能够以足够的耐久性获得大的位移，而不会破坏其压电元件的较小厚度的压电电致伸缩性能。 通过这样构造的微小型致动器，可以更精确地制造液体排出头。

    Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element
    22.
    发明授权
    Piezoelectric member, piezoelectric element, and liquid discharge head and liquid discharge apparatus utilizing piezoelectric element 有权
    压电元件，压电元件，以及利用压电元件的液体排出头和液体排出装置

    公开(公告)号：US07622852B2

    公开(公告)日：2009-11-24

    申请号：US12031176

    申请日：2008-02-14

    申请人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

    发明人： Toshihiro Ifuku ,  Tetsuro Fukui ,  Kenichi Takeda ,  Hiroshi Funakubo ,  Hiroshi Nakaki ,  Rikyu Ikariyama ,  Osami Sakata

    IPC分类号： H01L41/04 ,  H01L41/187

    CPC分类号： B41J2/14233 ,  B41J2202/03 ,  H01L41/0805 ,  H01L41/1875 ,  H01L41/1876 ,  H01L41/316

    摘要： The invention provides a piezoelectric film having a large piezoelectric property, and a piezoelectric element, a liquid discharge head and a liquid discharge apparatus utilizing the same. The piezoelectric film is formed by an epitaxial oxide of orientation having at least a tetragonal crystal structure, in which the oxide is a perovskite type composite oxide represented by a general formula ABO3 and contains at least domains C, D and E of [100] orientation having mutual deviation in crystal direction, where the angular deviation between [100] directions in domains C and D, in domains D and E, in domains C and E and in domains D and E are respectively 5° or less, 5° or less, 0.3° or less, and 0.3° or more, and the angular deviation between [001] directions in domains C and E and in domains D and E are respectively 1.0° or more, and 1.0° or more.

    摘要翻译： 本发明提供一种压电性能大的压电膜，以及压电元件，液体排出头和利用该压电元件的液体排出装置。 压电膜由具有至少四方晶系结构的<100>取向的外延氧化物形成，其中氧化物是由通式ABO 3表示的钙钛矿型复合氧化物，并且至少含有C，D和E的畴， 100]取向在晶体方向上具有相互偏离，其中区域C和D中的结构域C和D中的结构域D和E中的区域C和E以及区域D和E中的角度偏差分别为5°或更小，5 °或更小，0.3°以下，0.3°以上，域C，E以及区域D，E的[001]方向的角度偏差分别为1.0°以上1.0°以上。

    Dielectric film structure, piezoelectric actuator using dielectric element film structure and ink jet head
    25.
    发明授权
    Dielectric film structure, piezoelectric actuator using dielectric element film structure and ink jet head 有权
    电介质膜结构，使用电介质膜结构的压电致动器和喷墨头

    公开(公告)号：US07938515B2

    公开(公告)日：2011-05-10

    申请号：US12389710

    申请日：2009-02-20

    申请人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

    发明人： Hiroshi Aoto ,  Kenichi Takeda ,  Tetsuro Fukui ,  Toshihiro Ifuku

    IPC分类号： B41J2/045

    CPC分类号： B41J2/14233 ,  H01L41/0973 ,  H01L41/316

    摘要： The present invention provides a dielectric film structure having a substrate and a dielectric film provided on the substrate and in which the dielectric film has (001) face orientation with respect to the substrate, and in which a value u in the following equation (1) regarding the dielectric film is a real number greater than 2: u=(Cc/Ca)×(Wa/Wc)  (1) where, Cc is a count number of a peak of a (001′) face of the dielectric film in an Out-of-plane X ray diffraction measurement (here, 1′ is a natural number selected so that Cc becomes maximum); Ca is a count number of a peak of a (h′00) face of the dielectric film in an In-plane X ray diffraction measurement (here, h′ is a natural number selected so that Cc becomes maximum); Wc is a half-value width of a peak of the (001′) face of the dielectric film in an Out-of-plane rocking curve X ray diffraction measurement; and Wa is a half-value width of a peak of the (h′00) face of the dielectric film in an In-plane rocking curve X ray diffraction measurement.

    摘要翻译： 本发明提供了一种电介质膜结构，其具有设置在基板上的基板和电介质膜，并且其中电介质膜相对于基板具有（001）面取向，并且其中以下等式（1）中的值u， 关于电介质膜是大于2的实数：u =（Cc / Ca）×（Wa / Wc）（1）其中，Cc是介电膜的（001'）面的峰的计数 平面外X射线衍射测量（这里，1'是选择为Cc变为最大的自然数）; Ca是In平面X射线衍射测定中的电介质膜的（h'00）面的峰值的计数数（这里，h'是选择为Cc变为最大的自然数）; Wc是外平面摇摆曲线X射线衍射测定中的电介质膜的（001'）面的峰值的半值宽度; Wa是In平面摇摆曲线X射线衍射测定中的电介质膜的（h'00）面的峰值的半值宽度。

    Piezoelectric material
    30.
    发明授权
    Piezoelectric material 有权
    压电材料

    公开(公告)号：US08480918B2

    公开(公告)日：2013-07-09

    申请号：US12135980

    申请日：2008-06-09

    申请人： Kaoru Miura ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui ,  Hiroshi Funakubo

    发明人： Kaoru Miura ,  Toshihiro Ifuku ,  Kenichi Takeda ,  Tetsuro Fukui ,  Hiroshi Funakubo

    IPC分类号： B06B1/06

    CPC分类号： H01L41/1871 ,  H01L41/43

    摘要： The present invention provides a piezoelectric material which can be applied even to the MEMS technique, exhibits satisfactory piezoelectricity even at high ambient temperatures and is environmentally clean, namely, a piezoelectric material including an oxide obtained by forming a solid solution composed of two perovskite oxides A(1)B(1)O3 and A(2)B(2)O3 different from each other in crystalline phase, the oxide being represented by the following general formula (1): X{A(1)B(1)O3}−(1−X){A(2)B(2)O3}  (1) wherein “A(1)” and “A(2)” are each an element including an alkali earth metal and may be the same or different from each other; “B(1)” and “B(2)” each include two or more metal elements, and either one of “B(1)” and “B(2)” contains Cu in a content of 3 atm % or more; and “X” satisfies the relation 0

    摘要翻译： 本发明提供一种甚至可以应用于MEMS技术的压电材料，即使在高环境温度下也表现出令人满意的压电性，并且是环境清洁的，即包括通过形成由两种钙钛矿氧化物A形成的固溶体获得的氧化物的压电材料 （1）B（1）O 3和A（2）B（2）O 3在结晶相中彼此不同，氧化物由以下通式（1）表示：X {A（1）B（1）O 3 } - （1-X）{A（2）B（2）O3}（1）其中“A（1）”和“A（2）”分别是包含碱土金属的元素， 彼此不同; “B（1）”和“B（2）”各自包含两个或更多个金属元素，“B（1）”和“B（2）”中的任一个含有3atm％以上的Cu; 和“X”满足0