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47 条记录 (耗时 0.047 秒)

    BIAS ENHANCED NUCLEATION OF DIAMOND FILMS IN A CHEMICAL VAPOR DEPOSITION PROCESS
    24.
    发明申请
    BIAS ENHANCED NUCLEATION OF DIAMOND FILMS IN A CHEMICAL VAPOR DEPOSITION PROCESS 审中-公开
    化学气相沉积工艺中增强金刚石膜的成核

    公开(公告)号：US20100221453A1

    公开(公告)日：2010-09-02

    申请号：US12758635

    申请日：2010-05-20

    申请人： Jeremy E. Dahl ,  Robert M. Carlson ,  Shenggao Liu ,  Waqar R. Queshi ,  Wasiq Bokhari

    发明人： Jeremy E. Dahl ,  Robert M. Carlson ,  Shenggao Liu ,  Waqar R. Queshi ,  Wasiq Bokhari

    IPC分类号： C23C16/00

    CPC分类号： C23C16/272 ,  C23C16/0272

    摘要： Diamonds are used to nucleate diamond and diamond-like carbon films in a chemical vapor deposition process using bias enhancement. A negative bias is applied to the substrate, such that a cationic form of the diamond is accelerated toward the substrate during the nucleation phase of the deposition. In this manner, the diamondoid may be embedded or partially embedded in the substrate and/or growing film, increasing the adhesion of the film to the substrate. According to the present embodiments, it is not necessary to mechanically pre-seed the substrate for nucleation purposes.

    摘要翻译： 在使用偏压增强的化学气相沉积工艺中，使用金刚石将金刚石和类金刚石碳膜成核。 对衬底施加负偏压，使得金刚石的阳离子形式在沉积的成核阶段期间朝向衬底加速。 以这种方式，金刚石可以嵌入或部分地嵌入在基底和/或生长膜中，增加膜对基底的粘附。 根据本实施例，不需要将基板机械预接种成核目的。

    Photoresist compositions comprising diamondoid derivatives
    26.
    发明授权
    Photoresist compositions comprising diamondoid derivatives 失效
    包含金刚石衍生物的光致抗蚀剂组合物

    公开(公告)号：US07488565B2

    公开(公告)日：2009-02-10

    申请号：US10764407

    申请日：2004-01-23

    申请人： Shenggao Liu ,  Jeremy E. Dahl ,  Robert M. Carlson

    发明人： Shenggao Liu ,  Jeremy E. Dahl ,  Robert M. Carlson

    IPC分类号： G03F7/039 ,  C08F20/28

    CPC分类号： C07C69/54 ,  C07C35/44 ,  C07C2603/86 ,  C07C2603/90 ,  G03F7/0397 ,  Y10S430/111

    摘要： Novel positive-working photoresist compositions are disclosed. The monomers of the base resin of the resist contain diamondoid-containing pendant groups higher than adamantane in the polymantane series; for example, diamantane, triamantane, tetramantane, pentamantane, hexamantane, etc. The diamondoid-containing pendant group may have hydrophilic-enhancing substituents such as a hydroxyl group, and may contain a lactone group. Advantages of the present compositions include enhanced resolution, sensitivity, and adhesion to the substrate.

    摘要翻译： 公开了新型正性光致抗蚀剂组合物。 抗蚀剂的基体树脂的单体在聚曼烷系列中含有高于金刚烷的含金刚石的侧基; 例如，金刚烷，四金刚烷，五金刚烷，六
    金刚等。含金刚石的侧基可以具有亲水性增强取代基，例如羟基，可含有内酯基。 本发明组合物的优点包括提高分辨率，灵敏度和对基材的粘合性。

    Heteroatom-containing diamondoid transistors
    27.
    发明授权
    Heteroatom-containing diamondoid transistors 失效
    含杂原子的金刚石晶体管

    公开(公告)号：US07402835B2

    公开(公告)日：2008-07-22

    申请号：US10622046

    申请日：2003-07-16

    申请人： Shenggao Liu ,  Jeremy E. Dahl ,  Robert M. Carlson

    发明人： Shenggao Liu ,  Jeremy E. Dahl ,  Robert M. Carlson

    IPC分类号： H01L51/00

    CPC分类号： C07D451/14 ,  C07D471/22 ,  C07F5/027 ,  H01L21/041 ,  H01L29/66037 ,  H01L51/005 ,  H01L51/0508

    摘要： These heterodiamondoids are diamondoids that include heteroatoms in the diamond lattice structure. The heteroatoms may be either electron donating, such that an n-type heterodiamondoid is created, or electron withdrawing, such that a p-type heterodiamondoid is made. Bulk materials may be fabricated from these heterodiamondoids, and the techniques involved include chemical vapor deposition, polymerization, and crystal aggregation. Junctions may be made from the p-type and n-type heterodiamondoid based materials, and microelectronic devices may be made that utilize these junctions. The devices include diodes, bipolar junction transistors, and field effect transistors.

    摘要翻译： 这些异二金刚石是包括金刚石晶格结构中的杂原子的金刚石。 杂原子可以是给电子体，使得产生n型异二珠体，或者吸电子，使得形成p型异二聚体。 散装材料可以由这些异二亚类构成，所涉及的技术包括化学气相沉积，聚合和晶体聚集。 可以由p型和n型异类金刚石基材料制成结，并且可以制造利用这些结的微电子器件。 器件包括二极管，双极结型晶体管和场效应晶体管。

    Heterodiamondoids
    28.
    发明授权
    Heterodiamondoids 失效
    异种类

    公开(公告)号：US07049374B2

    公开(公告)日：2006-05-23

    申请号：US10622130

    申请日：2003-07-16

    申请人： Shenggao Liu ,  Robert M. Carlson ,  Jeremy E. Dahl

    发明人： Shenggao Liu ,  Robert M. Carlson ,  Jeremy E. Dahl

    IPC分类号： C08F20/00

    CPC分类号： C07C49/617 ,  C07C23/20 ,  C07C49/423 ,  C07C49/613 ,  C07C61/29 ,  C07D221/22 ,  C07D311/96 ,  C07D313/06 ,  C07D335/04 ,  C07D471/10 ,  C07F9/65683

    摘要： This invention is related to heteroatom containing diamondoids (i.e., “heterodiamondoids”) which are compounds having a diamondoid nucleus in which one or more of the diamondoid nucleus carbons has been substitutionally replaced with a noncarbon atom. These heteroatom substituents impart desirable properties to the diamondoid. In addition, the heterodiamondoids are functionalized affording compounds carrying one or more functional groups covalently pendant therefrom. This invention is further related to polymerizable functionalized heterodiamondoids. In a preferred aspect of this invention the diamondoid nuclei are triamantane and higher diamondoid nuclei. In another preferred aspect, the heteroatoms are selected to give rise to diamondoid materials which can serve as n- and p-type materials in electronic devices can serve as optically active materials.

    摘要翻译： 本发明涉及含杂原子的类金刚石（即“异二亚类”），它们是具有金刚石核的化合物，其中一个或多个金刚石核碳原子被替代为非碳原子。 这些杂原子取代基赋予金刚石所需的性质。 此外，异二亚甲基二羧酸被官能化，得到带有一个或多个共价悬挂的官能团的化合物。 本发明进一步涉及可聚合的官能化异二聚体。 在本发明的优选方面，金刚石核是三金刚烷和更高的金刚石核。 在另一个优选的方面，选择这些杂原子以产生可用作电子器件中的n-型和p-型材料的类金刚石材料，可用作光学活性材料。