Filter and duplexer
    22.
    发明申请
    Filter and duplexer 有权
    过滤器和双工器

    公开(公告)号:US20070252662A1

    公开(公告)日:2007-11-01

    申请号:US11790530

    申请日:2007-04-26

    IPC分类号: H03H9/70 H03H9/58

    CPC分类号: H03H9/564 H03H9/568

    摘要: A filter includes piezoelectric thin-film resonators having a substrate, a lower electrode supported by the substrate, a piezoelectric film provided on the lower electrode, and an upper electrode provided on the piezoelectric film. At least one of the piezoelectric thin-film resonators has a portion in which the upper electrode overlaps the lower electrode across the piezoelectric film. The above portion has a shape different from shapes of corresponding portions of other piezoelectric thin-film resonators, so that a spurious component in the above at least one of the piezoelectric thin-film resonators occur at a frequency different from frequencies of spurious components that occur in the other piezoelectric thin-film resonators.

    摘要翻译: 滤波器包括具有基板,由基板支撑的下电极,设置在下电极上的压电膜和设置在压电膜上的上电极的压电薄膜谐振器。 压电薄膜谐振器中的至少一个具有上电极跨越压电膜与下电极重叠的部分。 上述部分具有与其它压电薄膜谐振器的相应部分的形状不同的形状,使得上述至少一个压电薄膜谐振器中的杂散分量以与发生的杂散分量的频率不同的频率出现 在其他压电薄膜谐振器中。

    FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATION MODULE AND COMMUNICATION APPARATUS
    29.
    发明申请
    FILM BULK ACOUSTIC RESONATOR, FILTER, COMMUNICATION MODULE AND COMMUNICATION APPARATUS 有权
    电影大容量声学谐振器,滤波器,通信模块和通信设备

    公开(公告)号:US20110006860A1

    公开(公告)日:2011-01-13

    申请号:US12921150

    申请日:2008-03-04

    IPC分类号: H03H9/17 H01L41/053

    摘要: A piezoelectric thin film resonator of the present has a substrate 1, an intermediate layer 7 disposed on the substrate 1 and is formed of an insulator, a lower electrode 3 disposed on the intermediate layer 7, a piezoelectric film 4 disposed on the lower electrode 3, and an upper electrode 5 disposed on a position facing the lower electrode 3 with the piezoelectric film 4 interposed therebetween, in which, in a resonant region 8 where the lower electrode 3 and the upper electrode 5 face each other, a space 6 is formed in the substrate 1 and the intermediate layer 7 or between the lower electrode 3 and the intermediate layer 7 and the region of the space 6 is included in the resonant region 8. With the structure, the dissipation of the vibrational energy to the substrate from the resonance portion can be suppressed, thereby improving the quality factor.

    摘要翻译: 本发明的压电薄膜谐振器具有基板1,设置在基板1上并由绝缘体形成的中间层7,设置在中间层7上的下部电极3,设置在下部电极3上的压电膜4 以及设置在面向下电极3的位置上的上电极5,其间插入压电膜4,其中在下电极3和上电极5彼此面对的谐振区域8中形成有空间6 在基板1和中间层7中,或在下部电极3和中间层7之间,并且空间6的区域包含在谐振区域8中。通过这种结构,振动能量从基板 可以抑制共振部分,从而提高质量因素。

    FILTER, DUPLEXER AND COMMUNICATION APPARATUS
    30.
    发明申请
    FILTER, DUPLEXER AND COMMUNICATION APPARATUS 有权
    过滤器,双工器和通信设备

    公开(公告)号:US20100060384A1

    公开(公告)日:2010-03-11

    申请号:US12494990

    申请日:2009-06-30

    IPC分类号: H03H9/205 H01L41/04

    摘要: A filter has a plurality of piezoelectric thin film resonators formed by sandwiching a piezoelectric film with a lower electrode disposed on a substrate and an upper electrode. Each of the piezoelectric thin film resonators has an electrode region formed with the upper electrode and the lower electrode overlapping each other, whose outline includes a curve. Among the plural piezoelectric thin film resonators, the piezoelectric thin film resonators in the opposing electrode regions of the adjacent piezoelectric thin film resonators are shaped to have outlines complementary to each other. With the filter, influences caused by transverse mode undesired wave of the piezoelectric thin film resonators can be suppressed. Therefore, miniaturization can be achieved without sacrificing the mechanical strength of electrodes having hollow structures.

    摘要翻译: 滤波器具有多个压电薄膜谐振器,其通过将设置在基板上的下电极和上电极夹在压电薄膜上而形成。 每个压电薄膜谐振器具有由上电极和下电极形成的电极区域彼此重叠,其轮廓包括曲线。 在多个压电薄膜谐振器中,相邻的压电薄膜谐振器的相对电极区域中的压电薄膜谐振器被成形为具有彼此互补的轮廓。 利用滤波器​​,可以抑制由压电薄膜谐振器的横向不需要的波形引起的影响。 因此,可以在不牺牲具有中空结构的电极的机械强度的情况下实现小型化。