摘要:
There are provided a capacitor lower electrode formed on an adhesive layer, whose surface roughness is 0.79 nm or less, and having a (111) orientation that is inclined from a perpendicular direction to an upper surface of a substrate by 2.3° or less, a ferroelectric layer having a structure the (111) orientation of which is inclined from the perpendicular direction to the upper surface of the substrate by 3.5° or less, and a capacitor upper electrode.
摘要:
Provided is a novel method for manufacturing a field effect transistor. Prior to forming an amorphous oxide layer on a substrate, ultraviolet rays are irradiated onto the substrate surface in an ozone atmosphere, plasma is irradiated onto the substrate surface, or the substrate surface is cleaned by a chemical solution containing hydrogen peroxide.
摘要:
There are provided a capacitor lower electrode formed on an adhesive layer, whose surface roughness is 0.79 nm or less, and having a (111) orientation that is inclined from a perpendicular direction to an upper surface of a substrate by 2.3° or less, a ferroelectric layer having a structure the (111) orientation of which is inclined from the perpendicular direction to the upper surface of the substrate by 3.5° or less, and a capacitor upper electrode.
摘要:
After a step of fabricating a MOS transistor (14) on a semiconductor substrate (11) and further steps up to bury a W plug (24), an Ir film (25a), an IrOy film (25b), a PZT film (26), and an IrOx film (27) are formed sequentially over the entire surface. The composition of the PZT film (26) is such that the content of Pb exceeds that of Zr and that of Ti. After processing the Ir film (25a), the IrOy film (25b), the PZT film (26) and the IrOx film (27), annealing is effected to remedy the damage to the PZT film (26) that is caused when the IrOx film (27) is formed and to diffuse Ir in the IrOx film (27) into the PZT film (26). As a result, the Ir diffused into the PZT film (26) concentrates at an interface between the IrOx film (27) and the PZT film (26) and at grain boundaries in the PZT film (26), and the Ir concentrations at the interface and boundaries are higher than those in the grains.
摘要:
Additional elements of Ca, Sr, and Ir are added to a single layer lead lanthanum zirconate titanate (PLZT), thereby decreasing a c/a ratio to within a range from 1.00 to 1.008 smaller than a general c/a of a range from about 1.01 to 1.03 generally used in a lead lanthanum zirconate titanate (PLZT) crystal having a crystal structure of a tetragonal system. With this arrangement, a large switching charge Qsw can be obtained without thinning the PLZT layer even when the operation voltage is 3.0 V or less.
摘要:
An object of the present invention is to provide a new light-emitting device with the use of an amorphous oxide. The light-emitting device has a light-emitting layer existing between first and second electrodes and a field effect transistor, of which the active layer is an amorphous.
摘要:
A novel field-effect transistor is provided which employs an amorphous oxide. In an embodiment of the present invention, the transistor comprises an amorphous oxide layer containing electron carrier at a concentration less than 1×10−18/cm3, and the gate-insulating layer is comprised of a first layer being in contact with the amorphous oxide and a second layer different from the first layer.
摘要翻译:提供了一种采用无定形氧化物的新型场效应晶体管。 在本发明的一个实施例中,晶体管包括含有浓度小于1×10 -6 / cm 3的电子载流子的无定形氧化物层,栅极绝缘层 包括与非晶氧化物接触的第一层和不同于第一层的第二层。
摘要:
A noncontacting power transfer apparatus, a noncontacting signal transfer apparatus and a separate machine apparatus that uses these couplers are disclosed. The power coupler is composed of a primary side and a secondary side that are fixed to a static unit and rotatable unit of the machine apparatus, respectively, such that its output does not vary with arbitrary rotation by the rotatable unit. The signal coupler is composed of receiving side portion having a electric-to-light conversion device that converts an electric signal to an optical signal of rotational symmetry relative to the axis of rotation of the rotatable unit and a photoelectric conversion device that converts an optical signal to an electric signal. Accordingly, the rotatable unit can be supplied with power from the static unit even while rotating, and moreover, can communicate with the static unit. Further, the rotatable unit can be easily attached to the static unit and can be removed from the static unit.
摘要:
An improved process for preparation of an optically active N-(3-mercapto-2-D-methylpropanoyl)-L-amino acid represented by formula (I): ##STR1## from an N-(3-chloro-2-D-methylpropanoyl)-L-amino acid represented by formula (II): ##STR2## (Y in (I) and (II): CH.sub.2 or sulfur; Q in (II): hydrogen, Na, K or NH.sub.4),which is characterized by reacting the compound (II) with an alkali trithiocarbonate, of which the molar ratio to the compound (II) is not less than 1.5, in an aqueous medium at a temperature of from about 60.degree. C. to about 90.degree. C., and hydrolyzing the resulting product with an acid.It is preferable to use sodium trithiocarbonate as the alkali trithiocarbonate, mineral acid as the acid, or water or aqueous alcohol as an aqueous medium.
摘要:
A contact detecting apparatus for detecting the contact between a workpiece and a tool in a machine tool which includes a coil mounted on a spindle head and connected to an AC power source for generating an induced current in a looped secondary circuit including the workpiece, a work table, a machine body, a spindle head, a brush, a clamp bar for clamping the tool on a tool spindle, springs interposed between the spindle and the clamp bar, the tool spindle and the tool, when the workpiece and the tool are moved relatively into contact with each other. The brush is kept contact with the clamp bar at the rotational axis of the tool spindle. A detector is connected between the AC power source and the coil for detecting a change in an electric signal caused by the contact between the workpiece and the tool.