摘要:
A liquid chemical for forming a water repellent protecting film on a wafer having at its surface an uneven pattern and containing at least one kind of element selected from the group consisting of titanium, tungsten, aluminum, copper, tin, tantalum and ruthenium at surfaces of recessed portions of the uneven pattern, the water repellent protecting film being formed at least on the surfaces of the recessed portions. The liquid chemical is characterized by including: a water repellent protecting film forming agent; and water, and characterized in that the water repellent protecting film forming agent is at least one selected from compounds represented by the following general formula [1] and salt compounds thereof and that the concentration of the water relative to the total quantity of a solvent contained in the liquid chemical is not smaller than 50 mass %.
摘要:
A compound of Formula 1 Rf-A-OP(O)(O−M+)(OROH) Formula 1 wherein Rf is a C2 to C6 linear or branched perfluoroalkyl optionally interrupted by one, two or three ether oxygen atoms; A is (CH2CF2)m(CH2)n—, (CH2)oSO2N(CH3)(CH2)p—, O(CF2)q(CH2)r—, or OCHFCF2OE-; m is 0 to 4; n, o, p, and r are each independently 2 to 20; q is 2; E is a C2 to C20 linear or branched alkyl group optionally interrupted by oxygen, sulfur, or nitrogen atoms; a cyclic alkyl group, or a C6 to C10 aryl group; M is H or a Group I metal or an ammonium cation (NHxR2y)+ wherein R2 is a C1 to C4 alkyl, x is 0 to 4, y is 0 to 4 and x+y is 4; and R is a C2 to C60 linear or branched alkyl group optionally interrupted by hetero atoms selected from the group consisting of an oxygen, sulfur, or nitrogen atom; a cyclic alkyl; or a C6 to C10 aryl; provided that when R is greater than 8 carbons, the ratio of hetero atoms to carbon atoms is at least 1:2.
摘要:
A compound of Formula 1 Rf-A-OP(O)(O−M+)(OROH) Formula 1 wherein Rf is a C2 to C6 linear or branched perfluoroalkyl optionally interrupted by one, two or three ether oxygen atoms; A is (CH2CF2)m(CH2)n—, (CH2)oSO2N(CH3)(CH2)p—, O(CF2)q(CH2)r—, or OCHFCF2OE-; m is 0 to 4; n, o, p, and r are each independently 2 to 20; q is 2; E is a C2 to C20 linear or branched alkyl group optionally interrupted by oxygen, sulfur, or nitrogen atoms; a cyclic alkyl group, or a C6 to C10 aryl group; M is H or a Group I metal or an ammonium cation (NHxR2y)+ wherein R2 is a C1 to C4 alkyl, x is 0 to 4, y is 0 to 4 and x+y is 4; and R is a C2 to C60 linear or branched alkyl group optionally interrupted by hetero atoms selected from the group consisting of an oxygen, sulfur, or nitrogen atom; a cyclic alkyl; or a C6 to C10 aryl; provided that when R is greater than 8 carbons, the ratio of hetero atoms to carbon atoms is at least 1:2.
摘要:
A method of removing water from a composition of matter comprises contacting a first composition of matter comprising water with a second composition of matter comprising: (1) at least one surfactant comprising at least one phosphate group and (2) a solvent comprising carbon dioxide, wherein at least a portion of the surfactant is soluble in the solvent, such that the at least one surfactant removes at least a portion of the water from the first composition
摘要:
A cleaning composition, having a neutral pH, and capable of removing soils, particularly greasy and oily soils without re-deposition, from both hard surfaces and fabrics is disclosed. The composition comprises a mixture of specifically-defined alcohol ethoxylate nonionic surfactants, specifically-defined fluorophosphate surfactants, and detergency builders, particularly phosphate builders, such as SAPP and TKPP. The compositions provide outstanding removal of soils, particularly greasy and oilly soils, under ambient conditions. The method of cleaning hard surfaces and fabrics using these compositions is also disclosed. Finally, an apparatus for utilizing these cleaning compositions in an ultrasonic cleaning process, for example, for metal parts, is also disclosed.
摘要:
Aqueous cleaning and surface treatment compositions for imparting oil and water repellency to treated surfaces which comprise:(a) fluoroaliphatic radical-containing poly(oxyalkylene) compound;(b) anti-resoiling composition;(c) anionic surfactant compound, preferably one or more selected from alkyl sulfates, alkyl benzene sulfates, and alkane sulfonates as well as salts thereof;(d) organic solvent;(e) citric acid salts, preferably one or more anhydrous and dihydrous sodium citrates(f) waterwherein the are at a neutral or alkaline pH, especially from about 8 to about 10. The compositions are particularly shelf stable, and exhibit excellent shelf stability in pressurized aerosol containers.
摘要:
A dish washing method includes a process for applying a sticking inhibitor to the surface of dishes in order to make it easy to remove food from the surface of the dishes. The sticking inhibitor is a compound having hydrophilic and hydrophobic groups. The compound is absorbed to the surfaces of the dishes by the hydrophilic groups, and is absorbed to food surfaces by the hydrophobic groups. The compound is a compound containing a fluoroalkyl group. Also, a dish washer has a reservoir for storing therein the sticking inhibitor and a passageway for joining the sticking inhibitor with a detergent.
摘要:
Phosphoric esters of polyfluorinated alcohols are disclosed comprising at least one isomer of phosphorous esters of polyfluorinated alcohols, or one of the derivatives thereof, said esters and derivatives thereof corresponding to the general formula: ##STR1## said two isomers corresponding to formulae (II) and (III): ##STR2## wherein C.sub.n F.sub.2n.sub.+1 is a perfluorinated aliphatic chain, n is an integer from 2 to 18, X and Y are the same or different and are each a halogen atom, a hydroxy radical, the group OM in which M is a metallic equivalent, or an alkoxy, chloroalkoxy, hydroxypolyalkylenoxy, aryloxy, or --NZZ' group in which Z and Z' are the same or different and are each a hydrogen atom or an alkyl, cycloalkyl or aryl group.The preparation of phosphoric esters having the general formula (I) and mixtures of the isomers (II) and (III) thereof are also disclosed.
摘要:
Polyfluorocycloalkyl phosphate compounds, the method of preparing these polyfluorocycloalkyl phosphate compounds, and the use of these polyfluorocycloalkyl phosphate compounds as grease and oil resistant sizes are disclosed.
摘要:
A liquid chemical for forming a water repellent protecting film on a wafer having at its surface an uneven pattern and containing at least one kind of element selected from the group consisting of titanium, tungsten, aluminum, copper, tin, tantalum and ruthenium at surfaces of recessed portions of the uneven pattern, the water repellent protecting film being formed at least on the surfaces of the recessed portions. The liquid chemical is characterized by including: a water repellent protecting film forming agent; and water, and characterized in that the water repellent protecting film forming agent is at least one selected from compounds represented by the following general formula [1] and salt compounds thereof and that the concentration of the water relative to the total quantity of a solvent contained in the liquid chemical is not smaller than 50 mass %.