Piston device for the controlled rotatable movement of doors, shutters or like members
    24.
    发明申请
    Piston device for the controlled rotatable movement of doors, shutters or like members 有权
    用于门,百叶窗或类似构件的受控旋转运动的活塞装置

    公开(公告)号:US20140075718A1

    公开(公告)日:2014-03-20

    申请号:US14115868

    申请日:2012-05-18

    Abstract: A piston device for the controlled rotatable movement of a closing element anchored to a stationary support structure includes a tubular body removably insertable into at least one seat of a hinge device, an actuating head external to the tubular body, a plunger member slidably movable unitarily with the actuating head between a retracted end position and an extended end position, an elastic contrast member acting on the plunger member for the returning thereof from the retracted end position to the extended end position, and a working fluid acting on the plunger member to hydraulically counteract the action thereof. A hinge device, in which a piston device according to the invention is removably insertable.

    Abstract translation: 用于被固定到固定支撑结构上的闭合元件的受控可旋转运动的活塞装置包括可拆卸地插入铰链装置的至少一个座中的管状体,管状体外部的致动头,可滑动地与 致动头在缩回端位置和延伸端位置之间,弹性对比构件作用在柱塞构件上,用于使其从缩回端位置延伸到延伸端位置;以及工作流体作用在柱塞构件上以液压抵消 其作用。 铰链装置,其中根据本发明的活塞装置可拆卸地插入。

    VARIABLE SEAL PRESSURE SLIT VALVE DOORS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT
    26.
    发明申请
    VARIABLE SEAL PRESSURE SLIT VALVE DOORS FOR SEMICONDUCTOR MANUFACTURING EQUIPMENT 审中-公开
    用于半导体制造设备的可变密封式压力阀门

    公开(公告)号:US20110120017A1

    公开(公告)日:2011-05-26

    申请号:US12949231

    申请日:2010-11-18

    Abstract: Techniques for a door system for sealing an opening between two chambers in a semiconductor processing system are described. A sealing member seals the opening when a door is in a closed position. To selectively open and close the opening, an actuator moves the door. A valve actuator switch provides a first or second pressure to the actuator depending on the pressure inside a first chamber. In one embodiment, a sensor monitors the pressure inside the first chamber.

    Abstract translation: 描述了用于密封半导体处理系统中的两个室之间的开口的门系统的技术。 当门处于关闭位置时,密封构件密封开口。 为了选择性地打开和关闭开口,执行器移动门。 阀致动器开关根据第一室内的压力向致动器提供第一或第二压力。 在一个实施例中,传感器监测第一室内的压力。

    HINGE DEVICE
    27.
    发明申请
    HINGE DEVICE 失效
    铰链装置

    公开(公告)号:US20100205774A1

    公开(公告)日:2010-08-19

    申请号:US12681129

    申请日:2008-10-06

    Inventor: Masahiro Yoshida

    Abstract: A hinge device prevents breakage of a structuring part from an increase in an internal pressure during overload. In the hinge device, first and second members are rotatable relative to each other. A case is fixed to either the first or second member, and a shaft body capable of rotating relative to the case is fixed to the other. A first chamber and a second chamber formed between the case and the shaft body are filled with viscous fluid. An orifice between the first and second chambers narrows a flow path for the viscous fluid moving from the first to second chamber, resisting rotation of the shaft body. A space region is provided in the shaft body, with a valve body movably placed therein. When pressure of the first chamber reaches a predetermined level, the valve body moves in the space region to increase the volume of the first chamber.

    Abstract translation: 铰链装置防止结构部件在过载期间内部压力的增加而破裂。 在铰链装置中,第一和第二构件可相对于彼此旋转。 壳体固定到第一或第二构件上,并且能够相对于壳体旋转的轴体固定到另一个。 形成在壳体和轴体之间的第一腔室和第二腔室填充有粘性流体。 第一和第二腔室之间的孔口使粘性流体从第一腔室移动到第二腔室的流动路径变窄,从而抵抗轴体的旋转。 空间区域设置在轴体中,阀体可移动地放置在其中。 当第一室的压力达到预定水平时,阀体在空间区域中移动以增加第一室的体积。

    Locking device for securing objects which are movable relatively to one
another
    29.
    发明授权
    Locking device for securing objects which are movable relatively to one another 失效
    用于固定相对于彼此移动的物体的锁定装置

    公开(公告)号:US5450933A

    公开(公告)日:1995-09-19

    申请号:US213692

    申请日:1994-03-15

    Inventor: Oliver Schuttler

    Abstract: A locking device for selectively securing two movable objects in desired positions relative to each other includes a cylinder and a piston movable within the cylinder and defining first and second working chambers of variable volumes. A fluid exchange connection provided on the piston includes a flow chamber having openings that communicate with the working chambers. A valve body slidably received on the piston in sealed relation is biased by a spring into a position closing the opening from the flow chamber to first working chamber. When the fluid pressure in the second working chamber exceeds a predetermined amount and acts on the valve body, the valve body is moved against the spring bias and opens to allow fluid to flow through the fluid exchange connection. In the open position, a larger area of the valve body is exposed to the pressure in the second chamber. A restriction in the flow path between the flow chamber and the first chamber produces a pressure drop between the flow chamber and the first chamber and allows the fluid exchange connection to remain open with a reduced pressure in the second chamber. The device thus provides for a large holding force when the valve body closes the opening and a small resistance to movement after the valve body is moved from closed. By providing two spring-biassed valve bodies acting in opposed directions, control of movements of objects in opposite directions is obtained.

    Abstract translation: 用于将两个可移动物体相对于彼此选择性地固定在期望位置的锁定装置包括可在气缸内移动并限定可变体积的第一和第二工作室的气缸和活塞。 设置在活塞上的流体交换连接件包括具有与工作室连通的开口的流动室。 以密封的关系可滑动地容纳在活塞上的阀体被弹簧偏压到从流动室将开口关闭到第一工作室的位置。 当第二工作室中的流体压力超过预定量并作用于阀体时,阀体抵抗弹簧偏压运动并打开以允许流体流过流体交换连接。 在打开位置,阀体的较大面积暴露于第二室中的压力。 在流动室和第一室之间的流动路径中的限制在流动室和第一室之间产生压降,并允许流体交换连接在第二室中以减小的压力保持打开。 因此,当阀体关闭开口时,该装置提供大的夹持力,并且在阀体从关闭状态移动之后具有较小的阻力。 通过提供两个在相反方向上作用的弹簧偏压阀体,可以获得相反方向上物体运动的控制。

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