公开(公告)号：US06824343B2

公开(公告)日：2004-11-30

申请号：US10084762

申请日：2002-02-22

申请人： Shinichi Kurita ,  Wendell T. Blonigan ,  Suhail Anwar ,  Toshio Kiyotake ,  Hung T. Nguyen

发明人： Shinichi Kurita ,  Wendell T. Blonigan ,  Suhail Anwar ,  Toshio Kiyotake ,  Hung T. Nguyen

IPC分类号： B65G4724

CPC分类号： H01L21/68 ,  H01L21/68728 ,  H01L21/68778 ,  H01L21/68792 ,  Y10S414/136 ,  Y10S414/139 ,  Y10S414/141

摘要： A method and apparatus for supporting a substrate is generally provided. In one aspect, an apparatus for supporting a substrate includes a support plate having a first body disposed proximate thereto. A first pushing member is radially coupled to the first body and adapted to urge the substrate in a first direction parallel to the support plate when the first body rotates. In another aspect, a load lock chamber having a substrate support that supports a substrate placed thereon includes a cooling plate that is moved to actuate at least one alignment mechanism. The alignment mechanism includes a pushing member that urges the substrate in a first direction towards a center of the support. The pushing member may additionally rotate about an axis perpendicular to the first direction.

摘要翻译： 通常提供用于支撑衬底的方法和装置。 在一个方面，一种用于支撑衬底的装置包括具有靠近其设置的第一主体的支撑板。 第一推动构件径向耦合到第一主体并且适于在第一主体旋转时沿平行于支撑板的第一方向推动基板。 在另一方面，具有支撑其上放置的基板的基板支撑件的装载锁定室包括移动以致动至少一个对准机构的冷却板。 对准机构包括推动构件，其沿朝向支撑件的中心的第一方向推动基板。 推动构件可以另外围绕垂直于第一方向的轴旋转。

公开(公告)号：US20040217545A1

公开(公告)日：2004-11-04

申请号：US10782507

申请日：2004-02-19

申请人： APPLIED MATERIALS, INC.

发明人： Shinichi Kurita ,  Emanuel Beer

IPC分类号： B65H007/02

CPC分类号： H01L21/68728 ,  G03F7/70666 ,  G03F7/707 ,  G03F7/70716 ,  G03F7/70775 ,  G03F7/70791 ,  G03F7/70825 ,  G03F9/7011 ,  H01L21/67265 ,  H01L21/68778 ,  Y10S414/135 ,  Y10S414/136 ,  Y10S414/141

摘要： In a first aspect, a substrate positioning system includes a plurality of pushers arranged in a spaced relation about a stage adapted to support a substrate. Each pusher is adapted to assume a retracted position so as to permit the substrate to be loaded onto and unloaded from the stage, extend toward an edge of the substrate that is supported by the stage, contact the edge of the substrate, and continue extending so as to cause the substrate to move relative to the stage until the substrate is calibrated to the stage. Numerous other aspects are provided.

摘要翻译： 在第一方面，一种基板定位系统包括围绕适于支撑基板的台阶间隔设置的多个推动器。 每个推动器适于采取缩回位置，以便允许将基板装载到载物台上并从载物台上卸载，朝向由载物台支撑的基板的边缘延伸，接触基板的边缘，并且继续延伸 以使基板相对于载物台移动，直到基板被校准到载物台。 提供了许多其他方面。

公开(公告)号：US20040115959A1

公开(公告)日：2004-06-17

申请号：US10324643

申请日：2002-12-17

申请人： ASM Technology Singapore Pte Ltd

发明人： Boon June Yeap ,  Jie Wei Hu ,  Rong Duan ,  Ka Shing Kenny Kwan

IPC分类号： H01L021/50 ,  H01L021/48 ,  H01L021/44 ,  H01L021/00

CPC分类号： H01L21/68721 ,  H01L21/67138 ,  H01L21/67706 ,  H01L21/6776 ,  H01L21/68 ,  H01L21/68778 ,  Y10T29/5136 ,  Y10T29/5137 ,  Y10T29/5196 ,  Y10T29/5313

摘要： An apparatus to prevent oxidation of an electronic device, such as a semiconductor substrate during a semiconductor packaging process, comprises a substantially-enclosed conduit having at least one movable support defining a path through which the electronic device may travel and a plurality of gas outlets to introduce a relatively inert gas into the conduit. Conveying means adapted to engage and move the electronic device along the conduit is provided, and an opening along a portion of the conduit allows engagement between the conveying means and the electronic device. Actuating means are adapted to shift the movable support whereby the size of the path is adjustable to suit different electronic devices.

摘要翻译： 防止在半导体封装过程中诸如半导体衬底之类的电子器件的氧化的装置包括基本上封闭的管道，其具有至少一个可移动的支撑件，该可移动支撑件限定电子设备可以行进的路径，以及多个气体出口 在管道中引入相对惰性的气体。 提供适于沿着导管接合和移动电子装置的输送装置，并且沿着导管的一部分的开口允许输送装置和电子装置之间的接合。 驱动装置适于移动可移动支撑件，由此路径的尺寸可调整以适应不同的电子装置。

公开(公告)号：US20040107911A1

公开(公告)日：2004-06-10

申请号：US10725760

申请日：2003-12-01

发明人： Gwang Ho Hur ,  Jun Young Choi ,  Cheol Won Lee

IPC分类号： C23C016/00

CPC分类号： C23C14/50 ,  C23C14/566 ,  C23C16/4586 ,  C23C16/54 ,  H01J9/46 ,  H01J2893/0096 ,  H01L21/67236 ,  H01L21/67748 ,  H01L21/68742 ,  H01L21/68778

摘要： The present invention provides a substrate support member of an FPD manufacturing apparatus comprising: a substrate support plate on which a glass substrate is horizontally put, the substrate support plate having a plurality of vertical through-holes, each of the vertical though-holes having an upper distal portion of a shape of a reverse cone; and a plurality of lift pins being inserted into the respective vertical though-holes, the lift pins 32 being moved up and down so that the substrate 40 is raised from the substrate support plate 36 or put down on the substrate support plate 36, each of the lift pins having an upper distal portion of a shape of a reverse cone to comply with the upper distal portion of the corresponding vertical through-hole. According to the present invention, since the lift pins has a shape of a reverse cone, not a stick, to be closely contacted to the substrate support plate 36, the temperatures and the potentials are equal between the substrate support plate 36 and the each of the lift pins 32. Therefore, it is advantageous that any specks are not generated on the substrate 40, and film-formation and etching can be uniformly made.

摘要翻译： 本发明提供了一种FPD制造装置的基板支撑部件，其特征在于，包括：基板支撑板，其上水平放置玻璃基板，所述基板支撑板具有多个垂直通孔，每个垂直通孔具有 倒锥体形状的上远端部分; 并且将多个提升销插入相应的垂直通孔中，提升销32上下移动，使得基板40从基板支撑板36升高或放下到基板支撑板36上，每个 提升销具有与相应垂直通孔的上部远端部分相符的倒锥形形状的上部远端部分。 根据本发明，由于提升销具有与基板支撑板36紧密接触的反锥体（而不是棒）的形状，所以基板支撑板36和基板支撑板36之间的温度和电位相等 提升销32.因此，有利的是，在基板40上不产生任何斑点，并且可以均匀地进行成膜和蚀刻。

公开(公告)号：US20030162462A1

公开(公告)日：2003-08-28

申请号：US10131292

申请日：2002-04-25

申请人： LG.Philips LCD Co., Ltd.

发明人： Sang Seok Lee ,  Sang Ho Park

IPC分类号： H01J009/00

CPC分类号： H01L21/67748 ,  H01L21/67092 ,  H01L21/68742 ,  H01L21/68778

摘要： An apparatus for manufacturing a liquid crystal display device includes a unitary vacuum processing chamber, upper and lower stages confronting each other at upper and lower spaces inside the vacuum processing chamber to bond a first and second substrates, and a first substrate lifting system formed in the lower stage for lifting the second substrate.

摘要翻译： 一种液晶显示装置的制造装置，其特征在于，包括：一体式真空处理室，在上述真空处理室内的上下空间相互面对的上下层，以结合第一和​​第二基板;以及第一基板提升系统， 提升第二基板的较低阶段。

公开(公告)号：US20020105130A1

公开(公告)日：2002-08-08

申请号：US10071654

申请日：2002-02-07

申请人： KABUSHIKI KAISHA SHINKAWA

发明人： Tatsunari Mii ,  Shigeru Shiozawa ,  Yoshimitsu Terakado

IPC分类号： B25B001/00

CPC分类号： H01L21/68721 ,  H01L21/68778 ,  H01L2224/78703

摘要： A workpiece retainer used in, for instance, a bonding apparatus for holding a workpiece during bonding being provide with plate springs that are driven towards the workpiece. Before the workpiece is pressed by the retainer, the end portions of plate springs protrude further toward the workpiece than the retaining surface of the workpiece retainer. When the workpiece is pressed by the retainer, the plate springs undergo elastic deformation and are pulled in the direction opposite from the workpiece so that the workpiece is pressed against a heat block by the retaining surface of the workpiece retainer; and when the workpiece is conveyed, the workpiece retainer is separated from the workpiece by a predetermined distance so that the plate springs undergo elastic recovery, thus preventing the workpiece from contacting the workpiece retainer.

摘要翻译： 用于例如用于在接合期间保持工件的接合装置的工件保持器提供朝向工件被驱动的板簧。 在通过保持器按压工件之前，板簧的端部比工件保持器的保持面更向前突出。 当工件被保持器按压时，板簧发生弹性变形并且沿与工件相反的方向被拉动，使得工件被工件保持器的保持面压在加热块上; 并且当工件被输送时，工件保持器与工件分离预定距离，使得板簧经历弹性恢复，从而防止工件接触工件保持器。

公开(公告)号：US20020086248A1

公开(公告)日：2002-07-04

申请号：US09990791

申请日：2001-11-16

申请人： Dupont Photomasks, Inc., a Delaware corporation

发明人： Michael David Webster

IPC分类号： G03F007/00 ,  H01L021/31 ,  H01L021/469 ,  H01L021/26 ,  H05B003/68

CPC分类号： H01L21/68707 ,  H01L21/67109 ,  H01L21/68728 ,  H01L21/68735 ,  H01L21/68778 ,  H01L21/68785

摘要： A system, method and apparatus are described for improving critical dimension uniformity in baked substrates. The system, method and apparatus provide for varying the distance between a substrate to be baked and the surface of a hot plate such that an approximately uniform temperature is obtained in the substrate during baking. In one embodiment, the substrate is positioned on a hot plate having a recess generally centered on its top side. The differences in distance between the edges of the substrates contacting the hot plate and the distance between the center region of the substrate and the bottom of the recess enable a generally uniform temperature to be obtained in the substrate.

摘要翻译： 描述了一种系统，方法和装置，用于改善焙烧基材中的临界尺寸均匀性。 该系统，方法和装置提供了改变要烘烤的基材和热板的表面之间的距离，使得在烘烤期间在基材中获得大致均匀的温度。 在一个实施例中，基板定位在热板上，该热板具有通常以其顶侧为中心的凹槽。 接触热板的基板的边缘与基板的中心区域与凹部的底部之间的距离的差异使得能够在基板中获得大致均匀的温度。

公开(公告)号：US6003863A

公开(公告)日：1999-12-21

申请号：US814385

申请日：1997-03-11

申请人： Wayne Albert Barringer ,  Alfred Stanley Decker

发明人： Wayne Albert Barringer ,  Alfred Stanley Decker

IPC分类号： B25B5/08 ,  B65H5/04 ,  H01L21/677 ,  H01L21/687 ,  B65H5/12 ,  B65G59/02 ,  B65H5/00

CPC分类号： H01L21/68728 ,  B25B5/08 ,  B65H5/04 ,  H01L21/67778 ,  H01L21/68707 ,  H01L21/68778

摘要： A flexible sheet to which manufacturing processes are to be applied is tensioned within a carrying fixture having tacky surfaces to which the flexible sheet is fastened. One version of the fixture includes an "L"-shaped attachment surface on a frame member and two tensioning members deflected toward the frame member in mutually perpendicular directions. When the flexible sheet has been fastened to the carrying fixture, the tensioning members are allowed to return toward their undeflected positions while applying tensioning forces to the flexible sheet. Another version of the fixture includes "L"-shaped attachment surfaces on both a frame member and a tensioning member. A loading station includes a stack of unprocessed flexible sheets, a fixture for deflecting tensioning member(s) within the carrying fixture, and a robot arm moving a transport fixture capable of carrying a flexible sheet and a carrying fixture. An unloading station includes a stack to processed flexible sheets, a fixture at which processed flexible sheets are separated from the carrying fixtures, and a similar robot arm with a similar transport fixture. A lower conveyor carries loaded fixtures from the loading station to the unloading station. An upper conveyor carries empty fixtures from the unloading station to the loading station.

摘要翻译： 将要施加制造工艺的柔性片材张紧在具有粘性表面的运送夹具中，柔性片材被固定到该带状物上。 固定装置的一个版本包括在框架构件上的“L”形附接表面和两个在相互垂直的方向上朝向框架构件偏转的张紧构件。 当柔性片已被紧固到承载固定件上时，允许张紧构件向其未偏转位置返回，同时向柔性片施加张紧力。 夹具的另一种形式包括框架构件和张紧构件上的“L”形附接表面。 装载站包括一堆未加工的柔性片材，用于偏转承载夹具内的张紧构件的夹具，以及一个移动能够承载柔性片材和承载夹具的运输固定装置的机器人手臂。 卸载站包括堆叠到经处理的柔性片材，处理的柔性片材与承载固定装置分离的固定装置，以及具有相似的运输固定装置的类似机器人手臂。 下部输送机将装载的装置从装载站运送到卸载站。 上部输送机将卸载站的空夹具装载到装载站。

公开(公告)号：US5753133A

公开(公告)日：1998-05-19

申请号：US273382

申请日：1994-07-11

申请人： Jerry Wong ,  Masato M. Toshima ,  Kam S. Law ,  Dan Maydan ,  Norman L. Turner

发明人： Jerry Wong ,  Masato M. Toshima ,  Kam S. Law ,  Dan Maydan ,  Norman L. Turner

IPC分类号： H01L21/302 ,  H01L21/3065 ,  H01L21/67 ,  H01L21/683 ,  H01L21/687 ,  H05H1/00

CPC分类号： H01L21/68742 ,  H01L21/68778 ,  Y10S414/136 ,  Y10S414/139 ,  Y10S414/141

摘要： A chamber for processing substrates includes a support member therein which is suspended from a sidewall of the chamber. The support member includes multiple planar faces for receiving substrates thereon, and is rotatable about a horizontal axis to position the multiple planar faces in a horizontal position to place the substrates on the planar faces or remove the substrates from the planar faces, and a second position to place the substrates in a non-horizontal position for processing. A clamping and lifting apparatus is provided on the support member. The clamping and lifting apparatus is positionable, with respect to the support member, in an extended position to permit a substrate to be positioned between the clamping and lifting assembly and the support member, and in a retracted position to clamp the substrate to the support member. A clamp actuator is disposed on the chamber wall to move the clamping and lifting assembly between the extended and retracted positions.

摘要翻译： 用于处理衬底的室包括其中从室的侧壁悬挂的支撑构件。 支撑构件包括用于在其上接收衬底的多个平面，并且可围绕水平轴线旋转，以将多个平面位置定位在水平位置，以将衬底放置在平面上或从平面上移除衬底，并且第二位置 以将基板放置在非水平位置进行处理。 夹持和提升装置设置在支撑构件上。 夹紧和提升装置相对于支撑构件可定位在延伸位置，以允许基板定位在夹紧和提升组件和支撑构件之间，并且在缩回位置将基板夹持到支撑构件 。 夹紧致动器设置在室壁上以使夹紧和提升组件在延伸位置和缩回位置之间移动。

公开(公告)号：US5391231A

公开(公告)日：1995-02-21

申请号：US43179

申请日：1993-04-06

申请人： Roman Schertler

发明人： Roman Schertler

IPC分类号： B25B5/00 ,  B25B11/00 ,  C23C14/50 ,  C23C16/44 ,  C23C16/458 ,  G11B7/26 ,  H01L21/683 ,  H01L21/687 ,  C23C16/00 ,  B25B1/00

CPC分类号： H01L21/68721 ,  B25B11/00 ,  B25B5/00 ,  C23C14/50 ,  G11B7/26 ,  H01L21/68728 ,  H01L21/68764 ,  H01L21/68771 ,  H01L21/68778

摘要： A holder and carrier for a plurality of holders is constructed to engage the band-like edge of a thin disk-shaped workpiece. The holder comprises a plurality of spring bars which are connected at corners to form a polygon which engages the outer edge of the workpiece. Each corner is held within a slot shaped receptacle which in turn is defined in a frame for holding the workpiece with minimum shadowing and minimum danger of scratches, warping of other disadvantageous effects.

摘要翻译： 用于多个保持器的保持器和托架被构造成接合薄盘状工件的带状边缘。 保持器包括多个弹簧杆，所述多个弹簧杆在拐角处连接以形成与工件的外边缘接合的多边形。 每个角落都保持在一个槽形容器中，该容器又被限定在框架中，用于以最小的遮蔽和最小的划伤危险来保持工件，并且扭曲其它不利影响。