公开(公告)号：US06173604B1

公开(公告)日：2001-01-16

申请号：US09158037

申请日：1998-09-22

Applicant: Xiao-Dong Xiang ,  Chen Gao

Inventor： Xiao-Dong Xiang ,  Chen Gao

IPC: G01B734

CPC classification number: G01Q60/22 ,  Y10S977/86 ,  Y10S977/864 ,  Y10S977/865 ,  Y10S977/869

Abstract: A novel scanning microscope is described that uses near-field evanescent electromagnetic waves to probe sample properties. The novel microscope is capable of high resolution imaging and quantitative measurements of the electrical properties of the sample. The inventive scanning evanescent wave electromagnetic microscope (SEMM) can map dielectric constant, tangent loss, conductivity, complex electrical impedance, and other electrical parameters of materials. The quantitative map corresponds to the imaged detail. The novel microscope can be used to measure electrical properties of both dielectric and electrically conducting materials.

Abstract translation: 描述了一种新颖的扫描显微镜，其使用近场渐逝电磁波来探测样品特性。 该新型显微镜能够对样品的电性能进行高分辨率成像和定量测量。 本发明的扫描瞬逝波电磁显微镜（SEMM）可以绘制材料的介电常数，切线损耗，电导率，复电阻抗等电参数。 定量图对应于成像细节。 新型显微镜可用于测量电介质和导电材料的电学性能。

公开(公告)号：US6121611A

公开(公告)日：2000-09-19

申请号：US82095

申请日：1998-05-20

Applicant: Stuart M. Lindsay ,  Tianwei Jing

Inventor： Stuart M. Lindsay ,  Tianwei Jing

IPC: G01B7/34 ,  G01B5/28 ,  G01B7/00 ,  G01N27/00 ,  G01Q60/40 ,  G01Q70/14

CPC classification number: G01Q60/40 ,  B82Y35/00 ,  G01Q70/14 ,  Y10S977/865 ,  Y10S977/873

Abstract: Force sensing probes for use in scanning probe microscopes and a method for coating such probes with a film comprising a magnetostrictive material are provided. The probes may be magnetized by placing them in a magnetic field which can be oriented in any direction with respect to the probes. The magnetostrictive effect leads to a compression or expansion of the magnetic film, altering its length by the strength of the applied field. This in turn causes the probe, which in a preferred embodiment is in the form of a cantilever, and the applied magnetic film, to deflect or bend. The consequent motion of the probe is much greater than that obtained by direct application of a magnetic force and the effect is not sensitive to the direction of the applied field.

Abstract translation: 提供用于扫描探针显微镜的力传感探针和用包含磁致伸缩材料的膜涂覆这种探针的方法。 可以通过将探针放置在可以相对于探针的任何方向定向的磁场中来磁化探针。 磁致伸缩效应导致磁膜的压缩或膨胀，通过施加磁场的强度改变其长度。 这又导致在优选实施例中是悬臂形式的探针和所施加的磁性膜偏转或弯曲。 探头的随后的运动远远大于通过直接施加磁力获得的运动，并且该效果对所施加的磁场的方向不敏感。

公开(公告)号：US6081113A

公开(公告)日：2000-06-27

申请号：US200820

申请日：1994-02-23

Applicant: Eisuke Tomita ,  Naoto Moriya

Inventor： Eisuke Tomita ,  Naoto Moriya

IPC: G01R33/02 ,  G01Q60/08 ,  G01Q60/40 ,  G01Q60/54 ,  G01Q60/56 ,  G01R33/038 ,  G01R33/10 ,  G01R33/12 ,  G11B5/00 ,  G11B11/105 ,  G11B19/02 ,  H01F10/16 ,  H01J37/28

CPC classification number: G01Q60/56 ,  B82Y35/00 ,  G01R33/0385 ,  B82Y25/00 ,  G11B11/10502 ,  G11B11/10582 ,  G11B19/02 ,  G11B2005/0002 ,  Y10S977/865

Abstract: A magnetic force sensor for detecting a magnetic force of a magnetic sample having a given magnetization direction comprises a magnetic probe having a tip portion. The tip portion is coated with a film of hard-magnetic material effective to maintain the magnetization direction of the probe constant and parallel to the given magnetization direction of the sample. A biasing member has the magnetic probe attached thereto at a free end thereof and is resiliently deflectable in response to the magnetic force between the magnetic probe and the magnetic sample. When the magnetic probe is scanned across the magnetic sample, the distribution of the magnetic force on the magnetic sample is effectively detected.

Abstract translation: 用于检测具有给定磁化方向的磁性样品的磁力的磁力传感器包括具有尖端部分的磁性探头。 尖端部分涂覆有有效保持探针的磁化方向恒定并平行于样品的给定磁化方向的硬磁材料膜。 偏置构件在其自由端附接有磁性探针，并且响应于磁性探针和磁性样本之间的磁力而弹性地偏转。 当磁性探头跨过磁性样品进行扫描时，有效地检测磁力对磁性样品的分布。

公开(公告)号：US6011664A

公开(公告)日：2000-01-04

申请号：US521972

申请日：1995-08-31

Applicant: Mark Howard Kryder ,  Stanley H. Charap

Inventor： Mark Howard Kryder ,  Stanley H. Charap

IPC: G11B5/00 ,  G11B5/024 ,  G11B5/127 ,  G11B5/49 ,  G11B5/54 ,  G11B5/02 ,  G01N27/82 ,  G01R33/00 ,  G11B9/00

CPC classification number: G11B5/4969 ,  G11B5/00 ,  G11B5/127 ,  G11B5/54 ,  G11B2005/0005 ,  G11B2005/0021 ,  G11B5/024 ,  G11B5/4984 ,  Y10S977/865 ,  Y10S977/947

Abstract: Techniques for ultrahigh density writing on an erasable magnetic medium include using a micromachined mechanism having two probes for writing to the medium. Use of the two probe embodiment eliminates the need to change the magnetic orientation of the probe. In another embodiment, a single probe is provided which is heated to the vicinity of its Curie temperature to enable the magnetic orientation of the probe to be switched. The probe may be heated to its Curie temperature through the use of a heating element or a focused laser. In another embodiment of the present invention, either the magnetic orientation of the probe or the magnetic orientation of the medium may be switched through the combination of a static magnetic field, a radio frequency magnetic field and, under certain circumstances, the magnetic field of the probe. In all cases, the writing techniques enable information to be written to a magnetic medium in a manner which enables the information to be erased and the medium rewritten.

Abstract translation: 用于在可擦除磁性介质上超高密度写入的技术包括使用具有两个探针的微加工机构来写入介质。 使用两个探针实施例消除了改变探针的磁性取向的需要。 在另一个实施例中，提供单个探针，其被加热到其居里温度附近，以使得能够切换探针的磁性取向。 可以通过使用加热元件或聚焦激光将探针加热到其居里温度。 在本发明的另一个实施例中，可以通过静态磁场，射频磁场的组合来切换探针的磁性取向或介质的磁性取向，并且在某些情况下， 探测。 在所有情况下，写入技术使得能够以使得能够擦除信息并且介质被重写的方式将信息写入磁性介质。

公开(公告)号：US5753814A

公开(公告)日：1998-05-19

申请号：US722344

申请日：1996-09-27

Applicant: Wenhai Han ,  Stuart M. Lindsay ,  Steven K. Harbaugh ,  Tianwei Jing

Inventor： Wenhai Han ,  Stuart M. Lindsay ,  Steven K. Harbaugh ,  Tianwei Jing

IPC: B81B3/00 ,  G01Q10/06 ,  G01Q30/14 ,  G01Q60/24 ,  G01Q60/32 ,  G01Q70/06 ,  G01B5/28

CPC classification number: G01Q10/06 ,  B82Y35/00 ,  G01Q30/14 ,  G01Q60/38 ,  Y10S977/865 ,  Y10S977/872

Abstract: In accordance with a first aspect of the present invention, the sensitivity of a magnetically modulated AC-AFM is substantially improved by the use of a ferrite-core solenoid for modulating the magnetic cantilever of the ACAFM. In accordance with a second aspect of the present invention, the detection system for a magnetically modulated AC-AFM incorporates AC coupling of the signal from the position sensitive detector/beam deflection detector in order to remove the DC component of the signal, resulting in significantly improved dynamic range over systems utilizing DC coupling. High frequency modulation signals are detected through the use of fast analog multipliers which, after active filtering, give a low frequency signal which may be processed by digital electronics. In accordance with a third aspect of the present invention, operation of the microscope at small amplitudes of oscillation leaves small asperities on the tip intact and results in dramatic improvement in resolution.

Abstract translation: 根据本发明的第一方面，通过使用用于调制ACAFM的磁悬臂的铁氧体磁芯螺线管，实质上改进了磁调制的AC-AFM的灵敏度。 根据本发明的第二方面，用于磁调制AC-AFM的检测系统结合来自位置敏感检测器/光束偏转检测器的信号的AC耦合，以便去除信号的DC分量，导致明显的 改善使用直流耦合的系统的动态范围。 通过使用快速模拟乘法器来检测高频调制信号，其在有源滤波之后给出可由数字电子器件处理的低频信号。 根据本发明的第三方面，显微镜在小振幅振幅下的操作使尖端的粗糙度不变，导致分辨率的显着提高。

公开(公告)号：US5717630A

公开(公告)日：1998-02-10

申请号：US630993

申请日：1996-04-12

Applicant: Takao Koshikawa ,  Yukinori Ikegawa ,  Hiroshi Maeda ,  Yoshinori Ohtsuka ,  Takahiro Imamura ,  Yoshifumi Mizoshita

Inventor： Takao Koshikawa ,  Yukinori Ikegawa ,  Hiroshi Maeda ,  Yoshinori Ohtsuka ,  Takahiro Imamura ,  Yoshifumi Mizoshita

IPC: G01R33/09 ,  G01Q60/10 ,  G01Q80/00 ,  G01R33/07 ,  G01R33/10 ,  G11B5/00 ,  G11B5/127 ,  G11B5/33 ,  G11B5/35 ,  G11B5/37 ,  G11B5/39 ,  G11B5/48 ,  G11B5/54 ,  G11B9/00 ,  H01L43/08

CPC classification number: G11B5/00 ,  G11B5/1278 ,  G11B5/332 ,  G11B5/3903 ,  G11B5/3925 ,  G11B5/3967 ,  G11B5/398 ,  G11B5/48 ,  G11B5/54 ,  B82Y10/00 ,  G11B9/1436 ,  Y10S977/865

Abstract: A magnetic memory device comprises: a vertically magnetic recording medium; a probe formed of an electrically conductive as well as soft-magnetic material, a pointed end of the probe faces the magnetically recording medium across a gap; a magnetic flux detecting element for detecting a magnetic flux caught by the probe, where the magnetic flux is from a data recorded on the magnetically recording medium; a vertical controller for keeping the gap constant by the use of a tunnel current flowing via said gap into the probe while a voltage is applied across the gap; and a scan mechanism for scanning the probe along the magnetically recording medium. The magnetic memory device may further comprises an exciting coil for magnetizing the probe so as to write a data in the magnetically recording medium. The probe may be recessed from the scanning position when the probe is not in operation.

Abstract translation: 磁存储器件包括：垂直磁记录介质; 由导电以及软磁材料形成的探针，探针的尖端通过间隙面向磁记录介质; 磁通检测元件，用于检测由所述探针捕获的磁通量，其中所述磁通量来自记录在所述磁记录介质上的数据; 垂直控制器，用于通过在跨过间隙施加电压的情况下通过使用经由所述间隙流入探针的隧道电流来保持间隙恒定; 以及用于沿着磁记录介质扫描探针的扫描机构。 磁存储器件还可以包括用于磁化探针的激励线圈，以便将数据写入磁记录介质。 当探头不工作时，探头可能会从扫描位置凹陷。

公开(公告)号：US5465046A

公开(公告)日：1995-11-07

申请号：US215431

申请日：1994-03-21

Applicant: Ann. N. Campbell ,  Richard E. Anderson ,  Edward I. Cole, Jr.

Inventor： Ann. N. Campbell ,  Richard E. Anderson ,  Edward I. Cole, Jr.

IPC: G01Q60/00 ,  G01R33/038 ,  G01R33/02

CPC classification number: G01Q60/54 ,  B82Y35/00 ,  G01R33/0385 ,  B82Y25/00 ,  Y10S977/865

Abstract: A magnetic force microscopy method and improved magnetic tip for detecting and quantifying internal magnetic fields resulting from current of integrated circuits. Detection of the current is used for failure analysis, design verification, and model validation. The interaction of the current on the integrated chip with a magnetic field can be detected using a cantilevered magnetic tip. Enhanced sensitivity for both ac and dc current and voltage detection is achieved with voltage by an ac coupling or a heterodyne technique. The techniques can be used to extract information from analog circuits.

Abstract translation: 磁力显微镜法和改进的磁头，用于检测和量化集成电路电流产生的内部磁场。 检测电流用于故障分析，设计验证和模型验证。 集成芯片上的电流与磁场的相互作用可以使用悬臂磁头检测。 通过交流耦合或外差技术，通过电压实现对交流和直流电流和电压检测的增强灵敏度。 这些技术可以用于从模拟电路中提取信息。

公开(公告)号：US5264794A

公开(公告)日：1993-11-23

申请号：US947693

申请日：1992-09-21

Applicant: Edward R. Burke ,  Isaak D. Mayergoyz ,  Amr A. Adly ,  Romel D. Gomez

Inventor： Edward R. Burke ,  Isaak D. Mayergoyz ,  Amr A. Adly ,  Romel D. Gomez

IPC: G01Q20/00 ,  G01Q60/00 ,  G01R33/038 ,  G01R33/12 ,  G11B5/00 ,  G01R33/00

CPC classification number: G01Q60/56 ,  B82Y35/00 ,  G01Q60/02 ,  G01Q60/16 ,  G01R33/0385 ,  G01R33/1207 ,  G11B5/00 ,  B82Y25/00 ,  G11B2209/02 ,  Y10S977/84 ,  Y10S977/849 ,  Y10S977/861 ,  Y10S977/865 ,  Y10S977/872 ,  Y10S977/901

Abstract: The present invention discloses a method of measuring magnetic fields on magnetically recorded media. The method entails replacing the metal tip typically used with a scanning tunneling microscope with a flexible thin-film nickel of iron magnetic probe. The present invention describes a mathematical equation that relates probe position to magnetic field strength. In order to establish a tunneling current between the magnetic probe and the magnetically recorded media, any protective layer on the magnetically recorded media is removed. The magnetic probe and the magnetically recorded media may be coated with at least three-hundred angstroms of gold in order to reduce spurious probe deflections due to oxide growths on either the magnetic probe or the magnetically recorded media. The scanning tunneling microscope is designed to maintain a constant tunneling current between the probe and the item being scanned. The present invention uses the scanning tunneling microscope to scan the recording tracks of magnetically recorded media. Any change in the magnetic field of the magnetically recorded media will cause a change in the tunneling current. The microscope will change the position of the probe in order to maintain a constant tunneling current. These changes in position are recorded as an image. A mathematical equation that relates probe position to magnetic field strength is then used to extract the magnetic fields of the magnetically recorded media from the recorded image of probe positions.

Abstract translation: 本发明公开了一种在磁记录介质上测量磁场的方法。 该方法需要用铁磁探头的柔性薄膜镍替代通常用扫描隧道显微镜使用的金属尖端。 本发明描述了一种将探头位置与磁场强度相关联的数学方程。 为了在磁探头和磁记录介质之间建立隧穿电流，磁性记录介质上的任何保护层都被去除。 磁探针和磁记录介质可以涂覆有至少三百埃的金，以便减少由于磁探针或磁记录介质上的氧化物生长引起的假探针偏转。 扫描隧道显微镜被设计成在探头和待扫描的物品之间保持恒定的隧道电流。 本发明使用扫描隧道显微镜扫描磁记录介质的记录轨道。 磁记录介质的磁场的任何变化将导致隧穿电流的变化。 显微镜将改变探头的位置，以保持恒定的隧道电流。 这些位置变化被记录为图像。 然后将探头位置与磁场强度相关联的数学方程用于从记录的探针位置的图像中提取磁记录介质的磁场。

公开(公告)号：US06800913B2

公开(公告)日：2004-10-05

申请号：US10287876

申请日：2002-11-04

Applicant: Mark B. Johnson ,  Michael Miller ,  Brian Bennett

Inventor： Mark B. Johnson ,  Michael Miller ,  Brian Bennett

IPC: H01L2982

CPC classification number: G01R33/07 ,  Y10S977/853 ,  Y10S977/865

Abstract: A modified hybrid Hall effect device is provided which is the combination of a conventional Hall effect device and a second Hall effect device having a Hall plate coupled to a ferromagnetic layer. The hybrid Hall effect device can be used to determine the independent magnetic field vector components comprising a vector magnetic field, such as for determining the {circumflex over (x)} and the {circumflex over (z)} components of a magnetic field, or for measuring the total magnitude of a vector magnetic field of any orientation. The modified Hall Effect device can be adapted for use as a magnetic field sensor for the detection of macroscopic objects that have associated magnetic fields, or for microscopic objects that have been tagged by microscopic magnetic particles. In one specific form, a plurality of hybrid Hall devices are electrically connected together to form an array in which a plurality of rows of hybrid Hall devices are electrically coupled to each other along a current axis, and the array is used for the detection of microscopic objects.

Abstract translation: 提供了一种改进的混合霍尔效应装置，它是常规霍尔效应装置和具有耦合到铁磁层的霍尔板的第二霍尔效应装置的组合。 可以使用混合霍尔效应装置来确定包括矢量磁场的独立磁场矢量分量，例如用于确定磁场的x和z分量，或用于测量任意的矢量磁场的总大小 方向。 修改的霍尔效应装置可以适用于用于检测具有相关磁场的宏观物体的磁场传感器，或用于由微观磁性颗粒标记的微观物体。 在一个具体形式中，多个混合霍尔器件电连接在一起以形成阵列，其中多行混合霍尔器件沿着电流轴彼此电耦合，并且该阵列用于微观检测 对象

公开(公告)号：US06750450B2

公开(公告)日：2004-06-15

申请号：US10092343

申请日：2002-03-05

Applicant: Koichi Mukasa ,  Makoto Sawamura ,  Kazuhisa Sueoka ,  Eiichi Hirota

Inventor： Koichi Mukasa ,  Makoto Sawamura ,  Kazuhisa Sueoka ,  Eiichi Hirota

IPC: G01N2300

CPC classification number: G01Q60/54 ,  G01R33/0385 ,  Y10S977/865

Abstract: A scanning magnetism detector includes a probe made of a solid material formed of a single crystal having spin polarization and electrical conductivity properties. When the probe is brought into proximity with a magnetic substance, a surface condition of the magnetic substance can be detected by measuring tunnel current flow between the probe and the surface of the magnetic substance.

Abstract translation: 扫描磁检测器包括由具有自旋极化和导电性的单晶形成的固体材料制成的探针。 当探针接近磁性物质时，可以通过测量探针与磁性物质表面之间的隧道电流来检测磁性物质的表面状态。