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    Detection method for electroplating process
    21.
    发明授权
    Detection method for electroplating process 有权

    公开(公告)号：US10345254B2

    公开(公告)日：2019-07-09

    申请号：US15689195

    申请日：2017-08-29

    申请人： Taiwan Semiconductor Manufacturing Co., Ltd.

    发明人： Yung-Chang Huang ,  Jui-Mu Cho ,  Chien-Hsun Pan ,  Chun-Chih Lin

    IPC分类号： G01N27/26 ,  C25D13/18 ,  C25D13/02 ,  G01N27/416 ,  C25D21/14 ,  C25D21/18 ,  H01L21/66 ,  C25B11/04 ,  C25D3/38

    摘要： Detection methods for an electroplating process are provided. A detection method includes immersing a substrate into an electrolyte solution to perform an electroplating process. The electrolyte solution includes an additive agent. The detection method also includes immersing a detection device into the electrolyte solution. The detection method further includes applying a first alternating current (AC) voltage or direct current (DC) voltage to the detection device to detect the concentration of the additive agent. In addition, the detection method includes applying a combination of a second AC voltage and a second DC voltage to the detection device to inspect the electrolyte solution. An impurity is detected in the electrolyte solution. The detection method also includes replacing the electrolyte solution containing the impurity with another electrolyte solution.

    Capacitive sensor
    24.
    发明授权
    Capacitive sensor 有权

    公开(公告)号：US10274450B2

    公开(公告)日：2019-04-30

    申请号：US15505068

    申请日：2015-08-13

    申请人： ams International AG

    发明人： Hilco Suy ,  Zoran Zivkovic ,  Franciscus Petrus Widdershoven ,  Nebojsa Nenadovic

    IPC分类号： G01N27/04 ,  G01N27/22 ,  G01N27/26 ,  H01L21/00 ,  H01L21/02 ,  H01L21/20 ,  H01L23/52 ,  G01R27/26 ,  G01N33/00 ,  H01L49/02

    摘要： A capacitive environmental sensor and a method for determining the presence of a target substance (e.g. water) using differential capacitive measurements. The sensor includes a semiconductor substrate having a surface. The sensor also includes a plurality of sensor electrodes located on the surface. The electrodes are laterally separated on the surface by intervening spaces. The sensor further includes a sensor layer covering the electrodes. The sensor layer has a permittivity that is sensitive to the presence of the target substance. The surface of the substrate, in a space separating at least one pair of electrodes, includes a recess. The surface of the substrate, in a space separating at least one pair of electrodes, does not include a recess. The sensor may be provided in a Radio Frequency Identification (RFID) tag. The sensor may be provided in a smart building.

    Electrode for gas sensor, and gas sensor
    25.
    发明授权
    Electrode for gas sensor, and gas sensor 有权

    公开(公告)号：US10247695B2

    公开(公告)日：2019-04-02

    申请号：US15702129

    申请日：2017-09-12

    申请人： NGK SPARK PLUG CO., LTD.

    发明人： Seiji Oya ,  Yuta Oishi

    IPC分类号： G01N27/26 ,  G01N27/00 ,  G01N7/00 ,  G01N27/407 ,  G01N27/41

    摘要： Provided are: an electrode for a gas sensor formed as a porous electrode so as to stably allow reduction in electrode resistance for excellent low-temperature activity; and a gas sensor. The electrode (108, 110) for the gas sensor is adapted for use on a surface of a solid electrolyte body (109), which is predominantly formed of zirconia, and contains particles (2) of a noble metal or an alloy thereof, first ceramic particles (4) of stabilized zirconia or partially stabilized zirconia and second ceramic particles (6) of one or more selected from the group consisting of Al2O3, MgO, La2O3, spinel, zircon, mullite and cordierite, wherein the second ceramic particles are contained in an amount smaller than that of the first ceramic particles.

    GAS-SENSITIVE HALL DEVICE
    26.
    发明申请
    GAS-SENSITIVE HALL DEVICE 审中-公开

    公开(公告)号：US20190025385A1

    公开(公告)日：2019-01-24

    申请号：US16141394

    申请日：2018-09-25

    申请人： Infineon Technologies AG

    发明人： Werner Breuer ,  Markus Eckinger

    IPC分类号： G01R33/07 ,  G01N27/26 ,  G01N27/74 ,  G01N27/12 ,  H05B3/20

    摘要： A chemically sensitive Hall device having a substrate; a chemically sensitive layer arranged on the substrate and configured to operably interact with atoms or molecules of a gaseous or liquid fluid; first electrodes connected to the chemically sensitive layer and configured to feed a sensor current through the chemically sensitive layer along a first direction; and second electrodes connected to the chemically sensitive layer and configured to tap a Hall voltage at the chemically sensitive layer along a second direction.

    Circuit including a switched capacitor bridge and method
    27.
    发明授权
    Circuit including a switched capacitor bridge and method 有权

    公开(公告)号：US10177781B2

    公开(公告)日：2019-01-08

    申请号：US13925781

    申请日：2013-06-24

    申请人： Silicon Laboratories Inc.

    发明人： Louis Nervegna ,  Bruce Del Signore

    IPC分类号： G01R17/10 ,  H03M3/00 ,  G01N27/26 ,  G01R27/26 ,  G01D5/24

    摘要： A method includes selectively coupling first and second input nodes of a capacitive bridge to first and second voltages, respectively, and selectively coupling first and second output nodes of the capacitive bridge to first and second output terminals, respectively, during a first phase of a clock cycle. The method further includes selectively coupling the first and second input nodes to the second and first voltages, respectively, and selectively coupling the first and second output nodes to the second and first output terminals, respectively, during a second phase of the clock cycle.