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    ION PUMP DEVICE
    23.
    发明申请
    ION PUMP DEVICE 有权
    离子泵装置

    公开(公告)号：US20100143159A1

    公开(公告)日：2010-06-10

    申请号：US12527193

    申请日：2008-02-14

    Applicant: Shukichi Tanaka

    Inventor： Shukichi Tanaka

    IPC: H01J41/18

    CPC classification number: H01J41/12

    Abstract: The above-mentioned problem is solved by an ion pump (6) comprising a casing (1), a first electrode (2), a second electrode (3), a plurality of cylindrical magnets (4), and a connection part (5). The first electrode (2) is arranged inside the casing (1). The second electrode (3) is arranged on the outer circumference of the first electrode (2). The first electrode and the second electrode have different polarities. The cylindrical magnets (4) are arranged so as to surround the circumference of the second electrode (3). The plurality of cylindrical magnets (4) are arranged so as to surround the circumference of the second electrode (3). The plurality of cylindrical magnets (4) are arranged at intervals in the center axis direction of the casing (1).

    Abstract translation: 上述问题由离子泵（6）解决，离子泵（6）包括壳体（1），第一电极（2），第二电极（3），多个圆柱形磁体（4）和连接部分 ）。 第一电极（2）布置在壳体（1）的内部。 第二电极（3）设置在第一电极（2）的外周。 第一电极和第二电极具有不同的极性。 圆柱形磁体（4）被布置成围绕第二电极（3）的周边。 多个圆柱形磁体（4）被布置成围绕第二电极（3）的周边。 多个圆柱形磁体（4）在壳体（1）的中心轴线方向间隔设置。

    Magnetic field immersion type electron gun
    25.
    发明授权
    Magnetic field immersion type electron gun 失效
    磁场浸入式电子枪

    公开(公告)号：US5548183A

    公开(公告)日：1996-08-20

    申请号：US364747

    申请日：1994-12-27

    Applicant: Motosuke Miyoshi ,  Katsuya Okumura ,  Yuichiro Yamazaki

    Inventor： Motosuke Miyoshi ,  Katsuya Okumura ,  Yuichiro Yamazaki

    IPC: H01J37/143 ,  H01J37/06 ,  H01J37/065 ,  H01J37/073 ,  H01J37/18 ,  H01J41/12 ,  H01J41/18 ,  H01J3/20

    CPC classification number: H01J37/065 ,  H01J37/18 ,  H01J41/18

    Abstract: In a magnetic field immersion type electron gun for controlling an electron beam emitted by an electron gun (51) with the use of an electric lens (56) and a magnetic field lens formed by permanent magnets (57, 58) of a coaxial ion pump (53), the ion pump magnets are a pair of cylindrical permanent magnets (57, 58) disposed coaxially with an optical axis (52) of the electron gun (51) in such a way as to sandwich a cylindrical ion pump anode (61) of the coaxial ion pump; the two permanent magnets are magnetized in a mutually opposing direction; a hollow cylindrical yoke (60) is disposed also coaxially with the optical axis (52) in such a way as to enclose the two permanent magnets (57, 58) within a hollow portion thereof; and the yoke (60) is formed with an annular yoke gap (63) in a radially inner circumferential surface of the yoke (60) to leak out a magnetic flux flowing through the yoke toward the optical axis. In the above-mentioned construction, the magnetic field lens can be formed efficiently with the use of the magnetic field generated by the permanent magnets for constituting the coaxial ion pump, and further the formed magnetic field lens can be superimposed upon the electron gun. Therefore, an electric field immersion type electron gun of high performance can be obtained, and further the electron gun chamber can be efficiently evacuated in the vicinity of the cathode tip of the electron gun.

    Abstract translation: 在使用电镜（56）和同轴离子泵的永磁体（57,58）形成的磁场透镜的电磁枪（51）发射的电子束的磁场浸渍型电子枪中， （53）中，离子泵磁体是与电子枪（51）的光轴（52）同轴配置的一对筒状的永久磁铁（57,58），夹着圆筒状离子泵阳极 ）的同轴离子泵; 两个永磁体在相互相反的方向被磁化; 中空圆柱形磁轭（60）还与光轴（52）同轴设置，以便将两个永磁体（57,58）包围在其中空部分内; 并且轭（60）在轭（60）的径向内周面上形成有环形磁轭间隙（63），以使流过磁轭的磁通向光轴泄漏。 在上述结构中，可以通过使用由用于构成同轴离子泵的永久磁铁产生的磁场来有效地形成磁场透镜，并且还可以将形成的磁场透镜叠加在电子枪上。 因此，可以获得高性能的电场浸没型电子枪，并且可以在电子枪的阴极尖端附近有效地排出电子枪室。

    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus
    26.
    发明授权
    Exhaust apparatus and vacuum pumping unit including the exhaust apparatus 失效
    排气装置和真空泵单元包括排气装置

    公开(公告)号：US5480286A

    公开(公告)日：1996-01-02

    申请号：US217699

    申请日：1994-03-25

    Applicant: Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    Inventor： Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    IPC: H01J41/14 ,  H01J41/18 ,  F04B37/02 ,  F04F11/00

    CPC classification number: H01J41/14 ,  H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including such high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted and, further, in the high vacuum pumping unit, those gas molecules diffused back or desorbed from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括这种高真空装置和辅助真空泵的排气装置和高真空泵送装置，其中在真空容器中实现高真空，使得真空容器内的气体分子被离子化并加速而被排出， 此外，在高真空泵送单元中，从真空泵向后扩散或解吸的那些气体分子被离子化并加速以返回到真空泵。

    Exhaust apparatus with vacuum pump
    27.
    发明授权
    Exhaust apparatus with vacuum pump 失效
    排气装置带真空泵

    公开(公告)号：US5326227A

    公开(公告)日：1994-07-05

    申请号：US11783

    申请日：1993-02-01

    Applicant: Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    Inventor： Kazutoshi Nagai ,  Tohru Satake ,  Hideaki Hayashi ,  Takanari Yasui

    IPC: H01J41/14 ,  H01J41/18

    CPC classification number: H01J41/14 ,  H01J41/18

    Abstract: An exhaust apparatus and a high vacuum pumping unit including a high vacuum device and an auxiliary vacuum pump are disclosed, wherein a high vacuum is achieved in a vacuum vessel such that the gas molecules within the vacuum vessel are ionized and accelerated to be exhausted. In the high vacuum pumping unit, those gas molecules are diffused back or released from the vacuum pump are ionized and accelerated to be returned to the vacuum pump.

    Abstract translation: 公开了一种包括高真空装置和辅助真空泵的排气装置和高真空泵装置，其中在真空容器中实现高真空，使得真空容器内的气体分子被离子化并加速而被排出。 在高真空泵送单元中，这些气体分子被扩散回或从真空泵中释放出来被离子化并加速回到真空泵中。

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