公开(公告)号：US11087980B2

公开(公告)日：2021-08-10

申请号：US15466330

申请日：2017-03-22

Applicant: SAMSUNG DISPLAY CO., LTD.

Inventor： Byung Soo So ,  Mee Jae Kang ,  Ho Seok Lee ,  Jae Gyun Lim ,  Sang Ho Jeon ,  Yeon Hee Jeon

IPC: H01L21/02 ,  H01S3/034 ,  H01L21/67 ,  H01L27/12 ,  H01S3/00 ,  H01S3/03 ,  H01S3/038 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/04 ,  H01S3/041

Abstract: A laser crystallization method includes exciting gas medium in an airtight container to generate laser beams; amplifying the laser beams by reflecting the laser beams between a high reflection mirror and a low reflection mirror respectively disposed facing opposite end portions of the airtight container, wherein a first transparent window and a second transparent window are fixed to respective end portions of the airtight container, and outputting the amplified laser beams; and disposing a cleaning mirror in a path of the laser beams that have propagated through the second transparent window.

公开(公告)号：US20210167568A1

公开(公告)日：2021-06-03

申请号：US17153513

申请日：2021-01-20

Applicant: Gigaphoton Inc.

Inventor： Hiroshi UMEDA ,  Osamu WAKABAYASHI

IPC: H01S3/097 ,  H01S3/0971 ,  H01S3/225 ,  H01S3/036 ,  H01S3/134 ,  H01S3/0975 ,  H01S3/104

Abstract: A discharge excitation gas laser device includes: first and second discharge electrodes disposed to face each other; a plurality of peaking capacitors connected to the first discharge electrode; a charger; a plurality of pulse power modules, each one of the pulse power modules including a charging capacitor to which a charged voltage is applied from the charger, a pulse compression circuit that pulse-compresses and outputs electrical energy stored in the charging capacitor as an output pulse to a corresponding peaking capacitor, and a switch disposed between the charging capacitor and the pulse compression circuit; a plurality of output pulse sensors, each one of the output pulse sensors detecting an output pulse output by a corresponding pulse power module; and a control unit configured to control, based on a detection result of each of the output pulse sensor, a timing of a switch signal to be input to a corresponding switch.

公开(公告)号：US10965087B2

公开(公告)日：2021-03-30

申请号：US16266279

申请日：2019-02-04

Applicant: Gigaphoton Inc.

Inventor： Hirotaka Miyamoto ,  Osamu Wakabayashi

IPC: H01S3/08 ,  H01S3/03 ,  H01S3/225 ,  H01S3/0971 ,  H01S3/106

Abstract: Provided is a laser device that includes a laser chamber in which a pair of discharge electrodes are disposed; a line narrowing optical system including a grating disposed in a position outside the laser chamber; a beam expander optical system that increases a diameter of a light beam, outputted from the laser chamber and traveling toward the grating, in a first direction parallel to a discharge direction between the discharge electrodes and in a second direction orthogonal to the discharge direction; and a holding platform that is formed as a component separate from the laser chamber and the grating, holds the beam expander optical system, and forms along with the beam expander optical system a beam expander unit.

公开(公告)号：US10862260B2

公开(公告)日：2020-12-08

申请号：US15853363

申请日：2017-12-22

Applicant: INNOVEN ENERGY LLC

Inventor： Robert O. Hunter, Jr.

IPC: H01S3/00 ,  G21B1/23 ,  G02B27/28 ,  H01S3/23 ,  G21B1/03 ,  H01S3/225 ,  H01S3/30

Abstract: A system and method for integrating a direct compressor with a primary laser source and fast compressor while also reducing the number of mechanical elements and gas interfaces. A nonlinear scattering aperture combiner does not need to be optically multiplexed in order to drive a direct compressor stage, but by producing a large temporal compression ratio it will then pump the fast compressor. In order to accomplish this, a technique for transversely segmenting by color and/or polarization of the optical extraction beams of the direct compressor is utilized.

公开(公告)号：US20200340965A1

公开(公告)日：2020-10-29

申请号：US16646201

申请日：2018-09-10

Applicant: Cymer, LLC

Inventor： Joshua Jon Thornes ,  Rahul Ahlawat ,  Edward Siqi Luo ,  Gamaralalage G. Padmabandu

IPC: G01N33/00 ,  H01S3/036 ,  H01S3/225

Abstract: An apparatus includes: a gas maintenance system having a gas supply system fluidly connected to one or more gas discharge chambers; a detection apparatus fluidly connected to each gas discharge chamber; and a control system connected to the gas maintenance system and the detection apparatus. The detection apparatus includes: a vessel defining a reaction cavity that houses a metal oxide and is fluidly connected to the gas discharge chamber for receiving mixed gas including fluorine from the gas discharge chamber in the reaction cavity, the vessel enabling a reaction between the fluorine of the received mixed gas and the metal oxide to form a new gas mixture including oxygen; and an oxygen sensor fluidly connected to the new gas mixture to sense an amount of oxygen within the new gas mixture. The control system is configured to estimate a concentration of fluorine in the received mixed gas.

公开(公告)号：US20200303889A1

公开(公告)日：2020-09-24

申请号：US16796587

申请日：2020-02-20

Applicant: Coherent LaserSystems GMBH & Co. KG

Inventor： Igor BRAGIN ,  Timur MISYURYAEV ,  Paul VAN DER WILT

IPC: H01S3/034 ,  H01S3/225 ,  H01S3/08

Abstract: Fine-structure in the transverse mode of an excimer laser beam is minimized by having a plurality of resonator mirrors located at each end of a linear excimer laser. At one end, a highly-reflective end mirror and a partially-reflective end mirror are inclined at small angle with respect to each other. At the other end, two output-coupling mirrors are inclined at a small angle with respect to each other. This arrangement of resonator mirrors generates a composite laser beam that blurs any fine structure.

公开(公告)号：US10727642B2

公开(公告)日：2020-07-28

申请号：US15700754

申请日：2017-09-11

Applicant: Cymer, LLC ,  ASML NETHERLANDS B.V.

Inventor： Joshua Jon Thornes ,  Tanuj Aggarwal ,  Kevin Michael O'Brien ,  Frank Everts ,  Herman Philip Godfried ,  Russell Allen Burdt

IPC: G03F7/20 ,  H01S3/13 ,  H01S3/036 ,  H01S3/23 ,  H01S3/097 ,  H01S3/038 ,  H01S3/137 ,  G01J1/02 ,  H01S3/225 ,  H01S3/1055 ,  G01J1/42

Abstract: Online calibration of laser performance as a function of the repetition rate at which the laser is operated is disclosed. The calibration can be periodic and carried out during a scheduled during a non-exposure period. Various criteria can be used to automatically select the repetition rates that result in reliable in-spec performance. The reliable values of repetition rates are then made available to the scanner as allowed values and the laser/scanner system is then permitted to use those allowed repetition rates.

公开(公告)号：US20200209760A1

公开(公告)日：2020-07-02

申请号：US16812784

申请日：2020-03-09

Applicant: Gigaphoton Inc.

Inventor： Koji KAKIZAKI ,  Masakazu KOBAYASHI ,  Akira SUWA ,  Osamu WAKABAYASHI

IPC: G03F7/20 ,  H01S3/225 ,  H01S3/11

Abstract: A laser processing method of performing laser processing on a transparent material that is transparent to ultraviolet light by using a laser processing system includes: performing relative positioning of a transfer position of a transfer image and the transparent material in an optical axis direction of a pulse laser beam so that the transfer position is set at a position inside the transparent material at a predetermined depth ΔZsf from a surface of the transparent material in the optical axis direction; and irradiating the transparent material with the pulse laser beam having a pulse width of 1 ns to 100 ns inclusive and a beam diameter of 10 μm to 150 μm inclusive at the transfer position.

公开(公告)号：US20200049665A1

公开(公告)日：2020-02-13

申请号：US16102575

申请日：2018-08-13

Applicant: The Boeing Company

Inventor： Morteza Safai

IPC: G01N29/24 ,  H01S3/00 ,  H01S3/083 ,  H01S3/067 ,  H01S3/225 ,  H01S3/16 ,  H01S3/17 ,  G01N29/04

Abstract: An example laser system includes a laser, a plurality of pulse stretchers coupled together in series, a pulse amplifier, a feedback module, and a lens assembly. The plurality of pulse stretchers is configured to stretch pulse widths of the laser pulses and output stretched laser pulses. The pulse amplifier is positioned between a first pulse stretcher and a second pulse stretch of the plurality of pulse stretchers, and is configured to amplify the laser pulses. The feedback module includes a pulse delay comparator configured to compare a first laser pulse of the laser pulses to a corresponding first stretched laser pulse of the stretched laser pulses. The feedback module also includes a computing device configured to determine an adjustment to a pulse stretcher of the plurality of pulse stretchers, and apply the adjustment to the pulse stretcher so as to modify a shape of a second stretched laser pulse.

公开(公告)号：US20190364655A1

公开(公告)日：2019-11-28

申请号：US15986201

申请日：2018-05-22

Applicant: The Boeing Company

Inventor： James A. Grossnickle ,  Dejan Nikic

IPC: H05H1/06 ,  H05H1/48 ,  H01S3/097 ,  H01S3/225 ,  H01S3/036 ,  H01S3/032

Abstract: Laser amplification utilizing plasma confinement of a gas laser gain media is described. The gas laser gain media is compressed into plasma utilizing a self-reinforcing magnetic field referred to a plasma pinch (e.g., a flow stabilized z-pinch). In the plasma pinch, the gas laser gain media is compressed to a high density, which improves the gain of the media. An optical resonator partially surrounds the plasma pinch and utilizes the laser gain media compressed within the plasma pinch to generate an output of coherent light.