Substrate treatment method and substrate treatment apparatus

    公开(公告)号:US10985040B2

    公开(公告)日:2021-04-20

    申请号:US16132218

    申请日:2018-09-14

    申请人: AP SYSTEMS INC.

    摘要: A substrate treatment method in accordance with an exemplary embodiment includes: heating a substrate, for a substrate treatment process, so that a temperature of the substrate reaches a target temperature; calculating the temperature of the substrate using a sensor located facing the substrate while heating the substrate; and controlling an operation of a heating part configured to heat the substrate according to the temperature calculated from the calculating the temperature, wherein the calculating the temperature comprises: measuring a total radiant energy (Et) radiated from the substrate using the sensor; calculating a corrected total emissivity (εt0) by applying a correction value for correcting the total emissivity (εt) which is the emissivity of the radiant energy (Et); and calculating the temperature (Ts) of the substrate using the total radiant energy (Et) and the corrected total emissivity (εt0).

    Non-destructive, in-situ evaluation of water presence using thermal contrast and cooled detector

    公开(公告)号:US10962417B2

    公开(公告)日:2021-03-30

    申请号:US16004196

    申请日:2018-06-08

    发明人: Mihail Bora

    摘要: Exemplary systems for detecting water include: a light source positioned to transmit thermal radiation through a sample; a lens assembly positioned to: receive the thermal radiation transmitted through the sample; and focus the transmitted thermal radiation onto a filter positioned between the lens assembly and a detector; and a cooling subsystem for cooling the filter and the detector to a temperature below that of the sample. The filter (1) selectively transmits first portions of the thermal radiation received from the lens assembly and characterized by a wavelength at least partially overlapping a predefined water absorption band and/or a predefined water absorption line; and (2) selectively blocks second portions of the thermal radiation received from the lens assembly and characterized by a wavelength outside the predefined water absorption band and/or the predefined water absorption line. Methods for detecting presence of water in a sample are also disclosed.

    Sensor device and a method of current modulation switching using a two-wire current interface

    公开(公告)号:US10852164B2

    公开(公告)日:2020-12-01

    申请号:US16904157

    申请日:2020-06-17

    IPC分类号: G01D5/244 G01K1/00

    摘要: A sensor device includes a two-pin current interface including an input pin configured to draw an input current and an output pin configured to output an output current, a sensor configured to generate a measurement signal, and a current modulator configured to generate a current pulse as the output current such that the output current toggles between at least two main current states based on the measurement signal. The current modulator is configured to modulate the output current such that the output current is increased, to a first current level greater than the at least two main current states, at an initial phase of the current pulse for a first duration, and to modulate the output current such that the output current is decreased, to a second level less than the at least two main current states, at a terminal phase of the current pulse for a second duration.

    Thermocouple for measuring cookware temperature

    公开(公告)号:US10799065B2

    公开(公告)日:2020-10-13

    申请号:US16128618

    申请日:2018-09-12

    摘要: A cooking appliance having a thermocouple for measuring the temperature of an electrically conducting cooking utensil is provided. The cooking appliance includes a first probe formed of a first electrically conducting material and a second probe formed of a dissimilar second electrically conducting material. The first probe and second probe are spaced from one another. When the cooking utensil is placed on a heating assembly and heat is applied thereto, the first probe and the second probe electrically contact the cooking utensil. The cooking utensil acts as an intermediate material and completes the thermocouple circuit thereby allowing current to flow between the probes. Consequently, a voltage differential is produced. The voltage differential is measured, and as the voltage differential is indicative of the temperature of the cooking utensil, the temperature of the cooking utensil may be determined.

    Spintronic temperature sensor
    27.
    发明授权

    公开(公告)号:US10794774B2

    公开(公告)日:2020-10-06

    申请号:US15828976

    申请日:2017-12-01

    摘要: This disclosure describes various examples of spintronic temperature sensors. The example temperature sensors may be discrete or used to adaptively control operation of a component such as an integrated circuit (IC). In one example, an electronic device comprises a spintronic component configured such that the conductance of the spintronic component is based on sensed temperature. In one example, circuitry coupled to the spintronic component is configured to generate an electrical signal indicative of the sensed temperature based on the conductance of the spintronic component.

    Apparatus using cryo-fluid cooled heat sink to determine thermal conductivity of materials

    公开(公告)号:US10753896B1

    公开(公告)日:2020-08-25

    申请号:US16783549

    申请日:2020-02-06

    申请人: Peter Gaal

    发明人: Peter Gaal

    摘要: The invention relates to equipment for measuring the thermal conductivity of solid materials in the −50 C to 350 C temperature range, using an improved form of the Guarded Heat Flow Meter Method. The unknown material specimen is subjected to the temperature gradient which is induced by electrically heating from one end and cooling the other end. In intimated contact with the unknown on either ends are pieces of a well characterized material which are clamped together by an electromechanical actuator via a calibrated compression spring, with the extent of the compression indicated by a linear displacement transducer. The heat sink is formed with an internal cavity into which liquid carbon dioxide is injected through a capillary in a controlled fashion. This allows operating the heat sink in the entire temperature range without interruptions and the need for thermal spacers.