公开(公告)号：US06449043B2

公开(公告)日：2002-09-10

申请号：US09944831

申请日：2001-08-31

Applicant: David E. Aspnes ,  Jon Opsal

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01J400

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135° to 225°, and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

Abstract translation: 用于使用宽波长范围分析样品的椭偏仪的椭偏仪和椭偏仪的方法包括用于产生具有用于与样品相互作用的光波长范围的多色光束的光源。 在光束与样品相互作用之前，偏振器使光束偏振。 旋转补偿器引起光束的偏振状态的相位延迟，其中选择波长范围和补偿器，使得至少引入第一相位延迟值，该第一相位延迟值在大致135°至225°的有效延迟的主要范围内 °，并且引起超出初级范围的至少第二相位延迟值。 在光束与样品相互作用后，分析仪与光束相互作用。 检测器测量与分析仪相互作用后的光强度，作为补偿器角度和波长的函数，优选同时在所有波长处。 处理器确定当光束从由检测器测量的光强度撞击分析仪时的偏振状态。

公开(公告)号：US6080983A

公开(公告)日：2000-06-27

申请号：US125564

申请日：1998-12-21

Applicant: Augustyn Waczynski ,  Mark L. Hendrickson ,  David J. Hartwick

Inventor： Augustyn Waczynski ,  Mark L. Hendrickson ,  David J. Hartwick

IPC: G01J1/04 ,  G01J1/42 ,  G01J1/44 ,  G01J5/28 ,  G01J5/30 ,  G01D5/34

CPC classification number: G01J5/28 ,  G01J1/04 ,  G01J1/044 ,  G01J1/44 ,  G01J5/30 ,  G01J1/0266 ,  G01J2001/4242 ,  G01J3/0232 ,  G01J3/0289

Abstract: Disclosed is a radiation detector which includes at least one photoconductive detector and a modulator, which modulates in an on-off manner radiation passing to the photoconductive detector from a radiation source. A bias source is connected to one terminal of the photoconductive detector. A first amplifier is connected to the other terminal of the photoconductive detector, and a second amplifier receives an output of the first amplifier. A first phase detector detects the phase of modulation of the radiation source by the modulator and generates a reference signal relating thereto. A switch in the second amplifier changes, in response to the reference signal generated by the first phase detector, the second amplifier between an inverting state and a non-inverting state as the modulator changes the phase of modulation of the radiation.

Abstract translation: PCT No.PCT / US97 / 02637第 371 1998年12月21日第 102（e）日期1998年12月21日PCT提交1997年2月21日PCT公布。 出版物WO97 / 31245 日期1997年8月28日公开是一种辐射检测器，其包括至少一个光电导检测器和调制器，其调制从辐射源通过光电导检测器的开关方式的辐射。 偏置源连接到光电检测器的一个端子。 第一放大器连接到光电导检测器的另一个端子，第二放大器接收第一放大器的输出。 第一相位检测器通过调制器检测辐射源的调制相位并产生与其相关的参考信号。 响应于由第一相位检测器产生的参考信号，第二放大器随着调制器改变辐射的调制相位而在反相状态和非反相状态之间改变开关。

公开(公告)号：US5877859A

公开(公告)日：1999-03-02

申请号：US685606

申请日：1996-07-24

Applicant: David E. Aspnes ,  Jon Opsal

Inventor： David E. Aspnes ,  Jon Opsal

IPC: G01N21/21 ,  G01B11/06 ,  G01J3/02 ,  G01J3/447 ,  G01J4/00 ,  G01J4/04 ,  G02F1/01

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01N21/211 ,  G01N2021/213

Abstract: An ellipsometer, and a method of ellipsometry, for analyzing a sample using a broad range of wavelengths, includes a light source for generating a beam of polychromatic light having a range of wavelengths of light for interacting with the sample. A polarizer polarizes the light beam before the light beam interacts with the sample. A rotating compensator induces phase retardations of a polarization state of the light beam wherein the range of wavelengths and the compensator are selected such that at least a first phase retardation value is induced that is within a primary range of effective retardations of substantially 135.degree. to 225.degree., and at least a second phase retardation value is induced that is outside of the primary range. An analyzer interacts with the light beam after the light beam interacts with the sample. A detector measures the intensity of light after interacting with the analyzer as a function of compensator angle and of wavelength, preferably at all wavelengths simultaneously. A processor determines the polarization state of the beam as it impinges the analyzer from the light intensities measured by the detector.

公开(公告)号：US5565983A

公开(公告)日：1996-10-15

申请号：US451351

申请日：1995-05-26

Applicant: Thomas W. Barnard

Inventor： Thomas W. Barnard

IPC: G01J1/04 ,  G01J3/02 ,  G01J3/18 ,  G01J3/24 ,  G01J3/26 ,  G01J3/32 ,  G01J3/42 ,  G02B5/18

CPC classification number: G02B27/4244 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/0232 ,  G01J3/18 ,  G01J3/24 ,  G01J3/32 ,  G02B5/1814

Abstract: A spectrometer includes a pair of crossed reflective gratings to effect a spectrally dispersed beam that is focussed to an array detector. The second grating is a plural grating with a surface formed of a first portion and a second portion. The first portion has a groove density for effecting ultraviolet in the dispersed beam. The second portion has a groove density for effecting visible radiation in the dispersed beam. A shutter blocks or exposes the second portion of the grating surface so as to select the first spectral range or the second spectral range for detection. The plural grating surface preferably may be contoured to compensate for aberrations in focussing of the beam to the detector. A computer may be used for selecting spectral lines for analysis, particularly selecting such lines in the second range that are not interfered with by the first range.

Abstract translation: 光谱仪包括一对交叉反射光栅，以实现聚焦于阵列检测器的光谱分散光束。 第二光栅是具有由第一部分和第二部分形成的表面的多个光栅。 第一部分具有用于在分散光束中实现紫外线的凹槽密度。 第二部分具有用于在分散光束中实现可见辐射的凹槽密度。 A快门阻挡或暴露光栅表面的第二部分，以便选择用于检测的第一光谱范围或第二光谱范围。 多个光栅表面优选地可以被轮廓化以补偿光束到检测器的聚焦中的像差。 可以使用计算机来选择用于分析的谱线，特别是在不受第一范围干扰的第二范围内选择这样的线。

公开(公告)号：US5552880A

公开(公告)日：1996-09-03

申请号：US472470

申请日：1995-06-07

Applicant: Vincent F. Shapanus ,  Kevin J. Phipps

Inventor： Vincent F. Shapanus ,  Kevin J. Phipps

IPC: G01J1/04 ,  G01J1/42 ,  G01J3/02 ,  G01R31/06 ,  G01R31/12 ,  G01R31/34 ,  G01T1/20 ,  G02B6/42 ,  G01N21/00 ,  G02B6/00

CPC classification number: G01J3/02 ,  G01J1/04 ,  G01J1/0425 ,  G01J1/4228 ,  G01J3/0202 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0235 ,  G01R31/1218 ,  G01R31/346 ,  G01T1/20 ,  G02B6/4298 ,  H02K11/20 ,  H02K11/25 ,  G01R31/343

Abstract: An optical probe for simultaneously detecting radiation emitted from a plurality of different areas of a device. The probe includes a plurality of optical signal acquisition devices. Each of the optical acquisition devices is formed from at least one optical fiber strand having a terminal end portion. The probe includes a hollow longitudinal member with an outer surface having a length and a perimeter perpendicular to the length. The outer surface has a plurality of openings disposed at intervals about the perimeter of the outer surface. Each of the plurality of openings has a different one of the terminal end portions from one of the optical acquisition devices disposed therein. Each of the optical acquisition devices has a different optical field of view corresponding to one of the plurality of different areas of the device.

Abstract translation: 一种用于同时检测从装置的多个不同区域发射的辐射的光学探头。 探头包括多个光信号采集装置。 每个光学获取装置由具有终端部分的至少一根光纤线束形成。 探针包括中空纵向构件，其外表面具有与长度相垂直的长度和周长。 外表面具有围绕外表面的周边间隔设置的多个开口。 多个开口中的每一个具有与设置在其中的光学采集装置中的一个不同的终端部分。 每个光学获取装置具有与装置的多个不同区域之一相对应的不同的光学视场。

公开(公告)号：US5550629A

公开(公告)日：1996-08-27

申请号：US487956

申请日：1995-06-07

Applicant: Vincent F. Shapanus ,  Kevin J. Phipps

Inventor： Vincent F. Shapanus ,  Kevin J. Phipps

IPC: G01J1/04 ,  G01J3/02 ,  G01R31/06 ,  G01R31/12 ,  G01R31/34 ,  G01N21/00 ,  G01J3/00

CPC classification number: G01J1/04 ,  G01J1/0425 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0218 ,  G01J3/0232 ,  G01J3/0235 ,  G01R31/1218 ,  G01R31/346 ,  H02K11/20 ,  H02K11/25 ,  G01R31/343 ,  H02H1/0023

Abstract: A method and apparatus for monitoring the condition of an electrical generator formed of a stator core punching assembly having a plurality of winding slots for receiving a plurality of generator windings. The plurality of winding core slots lie along an interior cylindrical surface of the stator core punching assembly, and the stator core punching assembly has an outer cylindrical surface opposite the interior cylindrical surface. The stator core punching assembly also has a plurality of internal vent openings extending from the outer cylindrical surface toward the inner cylindrical surface. A first optical probe is disposed outside of the stator core punching assembly and is formed of a plurality of optical acquisition devices each of which is formed from at least one optical fiber strand. Each of the optical acquisition devices is disposed to acquire light generated at one of the winding slots and passing through one of the internal vent openings.

Abstract translation: 一种用于监测由具有多个用于容纳多个发电机绕组的绕组槽的定子铁心冲孔组件形成的发电机状态的方法和装置。 多个卷绕芯槽沿着定子芯冲孔组件的内圆柱表面，并且定子芯冲孔组件具有与内圆柱表面相对的外圆柱形表面。 定子芯冲孔组件还具有从外圆柱形表面向内圆柱形表面延伸的多个内部通气口。 第一光学探针设置在定子芯冲孔组件的外部，并且由多个光学采集装置形成，每个光学采集装置由至少一根光纤线形成。 每个光学获取装置被设置成获取在一个卷绕槽处产生的光并且穿过其中一个内部通风口。

公开(公告)号：US5369481A

公开(公告)日：1994-11-29

申请号：US880807

申请日：1992-05-08

Applicant: Bernard J. Berg ,  Thomas J. Boes ,  Mark A. Cargill ,  Patrick S. Rood

Inventor： Bernard J. Berg ,  Thomas J. Boes ,  Mark A. Cargill ,  Patrick S. Rood

IPC: G01J3/00 ,  G01J3/02 ,  G01J3/50 ,  G01N21/47 ,  G01N21/55 ,  G01J3/42

CPC classification number: G01J3/51 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0251 ,  G01J3/10 ,  G01J3/513 ,  G01N21/474 ,  G01N21/55 ,  G01N2021/556 ,  G01N2201/065

Abstract: A portable spectrophotometer includes a small-diameter optical sphere as well as optical detectors and signal processing and display circuitry which allows the instrument to be taken to an object to be measured and which provides a readout of color values at the portable instrument. The instrument is capable of providing specular-included and specular-excluded color readings simultaneously. The interior of the integrating sphere is coated with a highly reflective, color-absorbing material, and light from an incandescent lamp is diffused within the sphere prior to reaching the object to be measured. The sphere is provided with a first aperture which receives spectrally-included light and which is positioned to absorb a spectral component of the diffused source light. A second aperture positioned at a corresponding angular position with respect to the object measures specular-excluded light, excluding the specular component absorbed by the first aperture. Light detected from the first aperture is analyzed at a plurality of wavelengths obtained by the use of interference filters, and the light obtained from the second aperture is analyzed at one of the plurality of wavelengths. By appropriately combining the specular-included and specular-excluded at one wavelength, a value for the specular component is derived. Since this value is a theoretical constant, it is used to derive a specular-excluded reading from each of the specular-included readings at the different wavelengths.

Abstract translation: 便携式分光光度计包括小直径光学球以及光学检测器和信号处理和显示电路，其允许将仪器带到要测量的对象，并且在便携式仪器上提供彩色值的读出。 该仪器能够同时提供镜面包含和镜面排除的色彩读数。 积分球的内部涂覆有高反射性的彩色吸收材料，并且来自白炽灯的光在到达待测量物体之前在球体内扩散。 该球体设置有第一孔，其接收光谱包围的光，并被定位成吸收漫射源光的光谱分量。 位于相对于物体的相应角度位置的第二孔测量除了由第一孔吸收的镜面反射分量之外的镜面排除光。 以通过使用干涉滤光器获得的多个波长来分析从第一孔径检测到的光，并且从多个波长中的一个分析从第二孔径获得的光。 通过适当地组合在一个波长处的镜面包含和镜面排除，导出镜面反射分量的值。 由于该值是一个理论常数，它用于从不同波长的每个镜面包含的读数中导出镜面排除的读数。

公开(公告)号：US5245176A

公开(公告)日：1993-09-14

申请号：US896579

申请日：1992-06-10

Applicant: Douglas G. Haugen

Inventor： Douglas G. Haugen

IPC: G01J1/42 ,  G01J1/44 ,  G01J3/02 ,  G01J3/28 ,  G01J3/36 ,  G01N21/17 ,  G01N21/25 ,  G02B26/02 ,  G02B26/10

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0232 ,  G01N21/253 ,  G02B26/10

Abstract: A method for electronically scanning a photodiode array that is sequentially illuminated by individual light beams by way of a shutter mechanism that has opening and closing transition times during which each light beam is only partially projected onto the array. An integrating light projected on the respective photodiodes of the photodiode array by each light beam over a predetermined period of time beginning after the opening transition time when the shutter mechanism is fully open and ending prior to initiation of the closing transition time while the shutter mechanism is still fully open and producing electrical signals corresponding to the light integrated by the respective photodiodes over the predetermined period of time and storing the electrical signals for subsequent use.

Abstract translation: 一种用于电子扫描光电二极管阵列的方法，该光电二极管阵列通过具有打开和关闭转换时间的快门机构依次照射各个光束，在此期间每个光束仅部分地投射到阵列上。 在光闸机构完全打开的开放过渡时间之后的预定时间段内，由光束阵列的各个光电二极管投射到光电二极管阵列的各个光电二极管上的积分光，并且在快门机构为 仍然完全打开并且在预定时间段内产生对应于由各个光电二极管集成的光的电信号，并且存储用于随后使用的电信号。

公开(公告)号：US5002392A

公开(公告)日：1991-03-26

申请号：US443952

申请日：1989-12-01

Applicant: C. Hermas Swope ,  John G. Link ,  Douglas G. Haugen ,  Joseph G. Karp

Inventor： C. Hermas Swope ,  John G. Link ,  Douglas G. Haugen ,  Joseph G. Karp

IPC: G01J3/42 ,  G01J3/18 ,  G01N21/03 ,  G01N21/13 ,  G01N21/25 ,  G01N21/27 ,  G01N35/04

CPC classification number: G01J3/02 ,  G01J3/0232 ,  G01N21/253 ,  G01J3/1838 ,  G01N2021/0325

Abstract: A multichannel optical monitoring system for monitoring the spectral transmission of a plurality of samples. A plurality of light beams are generated and a plurality of optical monitoring stations are arranged along a pathway, each station having an optical path formed by one of the light beams transverse to the pathway and along which optical characteristics are monitored. A drive mechanism moves a plurality of reaction wells, each containing a reaction volume, along the pathway from station to station so that respective reaction volumes dwell periodically in each optical path for transmitting a respective one of the light beams. A diffraction grating is arranged for diffracting the beams transmitted by respective ones of the reaction volumes. The diffracted beams are focussed and at least one array of photodetectors is positioned for receiving the diffracted and focussed beams for producing electrical signals representing the spectral content of the diffracted beams. An electronic circuit detects the electrical signals of the array, which signals may be stored for further processing and evaluation.

Abstract translation: 一种用于监测多个样本的光谱透射的多通道光学监测系统。 产生多个光束，并且沿着路径布置多个光学监视站，每个站具有由横向于路径的一个光束形成的光路，并且监视光学特性。 驱动机构沿着从站到站的路径移动多个反应孔，每个反应孔包含反应体积，使得相应的反应体积周期性地驻留在每个光路中，以传输相应的一个光束。 衍射光栅被布置用于衍射由相应反应体积传输的光束。 衍射光束被聚焦，并且至少一个光电检测器阵列被定位成用于接收衍射和聚焦光束，以产生表示衍射光束的光谱含量的电信号。 电子电路检测阵列的电信号，哪些信号可以存储用于进一步的处理和评估。

公开(公告)号：US4708477A

公开(公告)日：1987-11-24

申请号：US829273

申请日：1986-02-13

Applicant: Yabusaki Kenji ,  Tozawa Hitoshi ,  Noda Akira ,  Ito Takashi

Inventor： Yabusaki Kenji ,  Tozawa Hitoshi ,  Noda Akira ,  Ito Takashi

IPC: G01J1/08 ,  G01J1/42 ,  G01J1/44

CPC classification number: G01J1/04 ,  G01J1/02 ,  G01J1/0228 ,  G01J1/0455 ,  G01J1/0466 ,  G01J1/08 ,  G01J3/02 ,  G01J3/0232 ,  G01J3/0243 ,  G01J3/0248 ,  G01J3/027 ,  G01J3/1804 ,  G01J3/42 ,  G01J2001/086 ,  G01J2001/4453 ,  G01J2001/446

Abstract: A photometrical apparatus has a first light receiving element, and a second light receiving element less sensitive to temperature and other environmental influences than said first light receiving element whereby a value Pm of measured quantity of light from the subject is calculated from the following formula ##EQU1## Pr designates a quantity of light from a standard light source, Dr and Dm designate outputs of the first light receiving element generated by the light from the standard light source and the subject, Dpo and Dpt designate outputs of the first light receiving element generated by the light from the reference light source and the subject, and Dso and Dst designate outputs of the second light receiving element generated by the light from the reference light source and the subject.

Abstract translation: 光度测量装置具有第一光接收元件和对所述第一光接收元件的温度和其他环境影响不敏感的第二光接收元件，从而根据以下公式计算来自被摄体的测量光量的值Pm Pr表示来自标准光源的光量，Dr和Dm表示由来自标准光源和被摄体的光产生的第一光接收元件的输出，Dpo和Dpt表示由第一光接收元件产生的第一光接收元件的输出， 来自参考光源和被摄体的光，Dso和Dst表示由来自参考光源和被摄体的光产生的第二光接收元件的输出。