公开(公告)号：US20150062586A1

公开(公告)日：2015-03-05

申请号：US14015529

申请日：2013-08-30

Applicant: AGILENT TECHNOLOGIES, INC.

Inventor： Miao Zhu ,  Adam Kleczewski ,  Robert C. Taber

IPC: G01J3/45

CPC classification number: G01J3/45 ,  G01J3/453 ,  G01J3/4535

Abstract: A system for performing optical spectroscopy measurements includes a light source for generating an input optical beam and an interferometer. The interferometer includes a beam splitter that splits the input optical beam into first and second light beams; a first light path that directs the first light beam through a sample containing an analyte to a first output port; and a second light path that directs the second light beam to the first output port. At least one of the first and second light paths adjusts a relative phase of a corresponding one of the first and second light beams, so that the first and second light beams are out of phase at the first output port, substantially canceling background light and outputting sample light corresponding to a portion of the first light signal absorbed by the sample in the sample cell. A detection system detects the output sample light.

Abstract translation: 用于执行光谱测量的系统包括用于产生输入光束的光源和干涉仪。 干涉仪包括分束器，其将输入光束分成第一和第二光束; 将第一光束通过含有分析物的样品引导到第一输出端口的第一光路; 以及将第二光束引导到第一输出端口的第二光路。 第一和第二光路中的至少一个光路调节第一和第二光束中的相应一个的相对相位，使得第一和第二光束在第一输出端口处异相，基本上消除背景光并输出 对应于样品池中由样品吸收的第一光信号的一部分的样品光。 检测系统检测输出样品光。

公开(公告)号：US08940238B2

公开(公告)日：2015-01-27

申请号：US14095120

申请日：2013-12-03

Applicant: Access Medical Systems, Ltd.

Inventor： Hong Tan ,  Yushan Tan ,  Erhua Cao ,  Ming Xia ,  Robert F. Zuk

IPC: G01N21/00 ,  G01B9/02 ,  G02B6/26 ,  G02B6/36 ,  G01N21/45 ,  G01N21/77 ,  G02B6/00 ,  G01N21/63

CPC classification number: G01N21/7703 ,  G01J3/45 ,  G01N21/45 ,  G01N21/648 ,  G01N21/8507 ,  G01N2021/7779 ,  G01N2201/062 ,  G01N2201/08 ,  G02B6/262 ,  G02B6/30

Abstract: The present invention is directed to an assembly for use in detecting an analyte in a sample based on thin-film spectral interference. The assembly comprises a waveguide, a monolithic substrate optically coupled to the waveguide, and a thin-film layer directly bonded to the sensing side of the monolithic substrate. The refractive index of the monolithic substrate is higher than the refractive index of the transparent material of the thin-film layer. A spectral interference between the light reflected into the waveguide from a first reflecting surface and a second reflecting surface varies as analyte molecules in a sample bind to the analyte binding molecules coated on the thin-film layer.

Abstract translation: 本发明涉及一种用于基于薄膜光谱干涉检测样品中的分析物的组件。 组件包括波导，光耦合到波导的单片基板，以及直接结合到整体式基板的感测侧的薄膜层。 单片基板的折射率高于薄膜层的透明材料的折射率。 当样品中的分析物分子结合到涂覆在薄膜层上的分析物结合分子时，从第一反射表面和第二反射表面反射到波导中的光之间的光谱干涉变化。

公开(公告)号：US20150009504A1

公开(公告)日：2015-01-08

申请号：US14494981

申请日：2014-09-24

Applicant: NOVA MEASURING INSTRUMENTS LTD.

Inventor： Moshe FINAROV ,  Boaz BRILL

IPC: H01L21/66 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01B11/24 ,  G01B9/02087 ,  G01J3/45 ,  G01N21/21 ,  H01L22/12 ,  H01L22/20

Abstract: A method and system are presented for determining a line profile in a patterned structure, aimed at controlling a process of manufacture of the structure. The patterned structure comprises a plurality of different layers, the pattern in the structure being formed by patterned regions and un-patterned regions. At least first and second measurements are carried out, each utilizing illumination of the structure with a broad wavelengths band of incident light directed on the structure at a certain angle of incidence, detection of spectral characteristics of light returned from the structure, and generation of measured data representative thereof. The measured data obtained with the first measurement is analyzed, and at least one parameter of the structure is thereby determined. Then, this determined parameter is utilized, while analyzing the measured data obtained with the second measurements enabling the determination of the profile of the structure

Abstract translation: 提出了一种用于确定图案化结构中的线轮廓的方法和系统，其目的在于控制该结构的制造过程。 图案化结构包括多个不同的层，结构中的图案由图案化区域和未图案化区域形成。 进行至少第一次和第二次测量，每次利用具有在一定入射角度指向结构的入射光的宽波长带的结构照明，检测从该结构返回的光的光谱特性，以及产生测量 数据代表。 分析通过第一测量获得的测量数据，从而确定结构的至少一个参数。 然后，利用该确定的参数，同时分析通过第二测量获得的测量数据，使得能够确定结构的轮廓

公开(公告)号：US20150002848A1

公开(公告)日：2015-01-01

申请号：US14372093

申请日：2013-01-15

Applicant: FEMTOLASERS PRODUCTIONS GMBH

Inventor： Gabriel-Florin Tempea

IPC: G01J3/45 ,  G01N21/25

CPC classification number: G01J3/45 ,  E01H5/045 ,  G01J3/4531 ,  G01J2003/283 ,  G01J2003/451 ,  G01J2003/4538 ,  G01M11/005 ,  G01N21/25 ,  G01N21/45 ,  G01N2021/4126 ,  G01N2201/126 ,  G02B1/115 ,  G02B5/0825

Abstract: Method and device for optical inspection of a sample using spectral interferometry, wherein a beam (2″) emitted by a radiation source (1) is directed onto the sample (5) and a reference beam (2′) is directed onto a reference sample (4), and the spectral interference of both beams after being reflected on the samples or after passing the samples is recorded by means of a spectrograph (6); the interferogram I(ω) thus obtained is numerically derived with respect to the angular frequency ω. For the function I′(ω) thus obtained the zeros ωi are calculated numerically as solutions to the equation I′(ω)=0 and the frequency-dependent group delay τ(ω) is then calculated from the zeros ωi according to the equation τ(ωn)=π/(ωi+1−ωi), wherein i=1, 2 . . . and ωn=(ωi+1+ωi)2.

Abstract translation: 用于使用光谱干涉测量法对样品进行光学检查的方法和装置，其中由辐射源（1）发射的光束（2“）被引导到样品（5）上，并且参考光束（2'）被引导到参考样品 （4），并且两个光束在样品上反射之后或在通过样品之后的光谱干涉通过光谱仪（6）记录; 这样获得的干涉图I（ω）相对于角频率ω被数值地导出。 对于由此获得的函数I'（ω），零数值被计算为等式I'（ω）= 0的解，并且然后根据等式从零的ωi计算频率相关组延迟τ（ω） τ（ωn）=＆pgr; /（ωi+ 1-ωi），其中i = 1,2。 。 。 和ωn=（ωi+ 1 +ωi）2。

公开(公告)号：US08922783B2

公开(公告)日：2014-12-30

申请号：US13442574

申请日：2012-04-09

Applicant: Andrew Bodkin

Inventor： Andrew Bodkin

IPC: G01B9/02 ,  G01J3/45 ,  G01J3/453 ,  G01J3/28 ,  G01J3/36 ,  G01J3/02 ,  G01J3/22

CPC classification number: G01J3/45 ,  G01J3/02 ,  G01J3/021 ,  G01J3/22 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/453

Abstract: A multiband spatial heterodyne spectrometer for determining spectra in first and second wavelength bands has a beamsplitter configured to split incident light and to direct the incident light upon a first and a second diffraction grating. The gratings are configured for Littrow reflection of incident light of the first wavelength band at a first order and Littrow reflection of incident light of the second wavelength band at a second order. Light reflected by the first and the second diffraction grating forms diffraction patterns imaged by an electronic camera. A dispersive device separates the imaged interference patterns onto separate groups of pixel sensors corresponding to the wavelength bands. A processing device receives information from the detector and computes spectra therefrom. The second diffraction grating is split spatially or temporally to provide two different responses, so the system can disambiguate spectra. In embodiments, the spectrometer computes hyperspectral images of a target.

Abstract translation: 用于确定第一和第二波长带中的光谱的多频带空间外差光谱仪具有被配置为分离入射光并将入射光引导到第一和第二衍射光栅上的分束器。 光栅被配置为以第一阶次的第一波长带的入射光和第二波长带的入射光的Littrow反射的二次反射。 由第一和第二衍射光栅反射的光形成由电子照相机成像的衍射图案。 分散装置将成像的干涉图案分离成对应于波长带的单独的像素传感器组。 处理装置从检测器接收信息并从其计算光谱。 第二个衍射光栅在空间上或时间上分裂以提供两种不同的响应，因此系统可以消除光谱的歧义。 在实施例中，光谱仪计算目标的高光谱图像。

公开(公告)号：US20140354999A1

公开(公告)日：2014-12-04

申请号：US14253250

申请日：2014-04-15

Applicant: The Trustees of Columbia University In The City of New York

Inventor： Dirk R. Englund ,  Chaitanya Rastogi

IPC: G01J3/45 ,  G01J3/28

CPC classification number: G01J3/45 ,  G01J3/0259 ,  G01J3/26 ,  G01J3/2823 ,  G01J3/32 ,  G01J2003/2826 ,  G01J2003/452

Abstract: Techniques for hyperspectral imaging, including a device for hyperspectral imaging including at least one tunable interferometer including a thin layer of material disposed between two or more broadband mirrors. Electrodes placed on either side of the tunable interferometer can be coupled to a voltage control circuit, and upon application of a voltage across the tunable interferometer, the distance between the mirrors can be modulated by physically altering the dimensions of the thin layer of material, which can uniformly load the broadband mirrors. Physically altering the dimensions of the thin layer of material can include one or more of deformation of a soft material, piezostrictrive actuation of a piezostrictrive material, or electrostrictive actuation of an electrostrictive material.

Abstract translation: 用于高光谱成像的技术，包括用于高光谱成像的装置，包括至少一个可调谐干涉仪，其包括设置在两个或更多个宽带镜之间的薄层材料。 放置在可调谐干涉仪两侧的电极可以耦合到电压控制电路，并且在可调谐干涉仪上施加电压时，反射镜之间的距离可以通过物理地改变薄层材料的尺寸来调节， 可以均匀地加载宽带镜。 物理上改变材料薄层的尺寸可以包括柔软材料的变形，压电致动材料的压电致动器致动或电致伸缩材料的电致伸缩致动中的一个或多个。

公开(公告)号：US20140340733A1

公开(公告)日：2014-11-20

申请号：US14450835

申请日：2014-08-04

Applicant: Dimensional Photonics International, Inc.

Inventor： Robert F. Dillon ,  Neil H.K. Judell ,  Timothy I. Fillion ,  Gurpreet Singh ,  Nathan E. Wallace

IPC: G02B26/06 ,  G01B11/24

CPC classification number: G02B26/06 ,  G01B11/2441 ,  G01B11/2527 ,  G01J3/0229 ,  G01J3/26 ,  G01J3/45 ,  G02B5/32 ,  G02B21/361 ,  G02B27/0068 ,  G02B27/0087 ,  G02B2207/117 ,  G06T2200/04 ,  G06T2200/08

Abstract: Described are a method and apparatus for high-speed phase shifting of an optical beam. A transparent plate having regions of different optical thickness is illuminated by an optical beam along a path of incidence that extends through the regions. The transparent plate can be moved or the optical beam can be steered to generate the path of incidence. The optical beam exiting the transparent plate has an instantaneous phase value according to the region in which the optical beam is incident. Advantageously, the phase values are repeatable and stable regardless of the location of incidence of the optical beam within the respective regions, and phase changes at high modulation rates are possible. The method and apparatus can be used to modulate a phase difference of a pair of coherent optical beams such as in an interferometric fringe projection system.

公开(公告)号：US08742351B2

公开(公告)日：2014-06-03

申请号：US13132064

申请日：2008-12-02

Applicant: Hisato Fukuda

Inventor： Hisato Fukuda

IPC: G01J3/42

CPC classification number: G01N21/3563 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/0216 ,  G01J3/0264 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45 ,  G01N21/276 ,  G01N2021/3595

Abstract: When a system is powered on and becomes ready for a measurement, it automatically begins to acquire an interferogram (IFG). When a new IFG is acquired, if a background (BKG) IFG is present in a memory but there is no sample IFG (S2 and S4), the new IFG is compared with the BKG-IFG and, if the two IFGs are identical, the new IFG is added to the BKG-IFG (S5, S6 and S7). When an operator sets a sample in a sample chamber and the new IFG shows a change, the IFG is stored as a sample IFG (S8). Then, a sample measurement is initiated. After that, when a new IFG is found to be identical to the sample IFG stored in the memory (S9 and S10), the new IFG is added to the sample IFG (S13). The sample measurement is completed when the number of sample IFGs stored in the memory has reached a predetermined accumulation number. Thus, the sample measurement is automatically performed, for which the operator only needs to set a sample. The workload on the operator is reduced and the measurement task can be efficiently performed.

Abstract translation: 当系统通电并准备进行测量时，它会自动开始获取干涉图（IFG）。 当获取新的IFG时，如果背景（BKG）IFG存在于存储器中，但没有采样IFG（S2和S4），则将新的IFG与BKG-IFG进行比较，并且如果两个IFG相同， 新的IFG被添加到BKG-IFG（S5，S6和S7）。 当操作员在样品室中设置样品并且新的IFG显示改变时，IFG被存储为样品IFG（S8）。 然后，开始样本测量。 之后，当发现新的IFG与存储在存储器中的样本IFG相同（S9和S10）时，将新的IFG添加到样本IFG（S13）。 当存储在存储器中的采样IFG的数量已经达到预定的累加数时，样本测量完成。 因此，自动执行样品测量，操作者仅需要设置样品。 降低了操作员的工作量，可以有效地执行测量任务。

公开(公告)号：US20140139839A1

公开(公告)日：2014-05-22

申请号：US14165997

申请日：2014-01-28

Applicant: Si-Ware Systems

Inventor： Mostafa Medhat ,  Bassem Mortada ,  Ahmed Othman El Shater ,  Muhammed Nagy ,  Mina Gad Seif ,  Bassam A. Saadany ,  Amr N. Hafez

IPC: G01B9/02 ,  G02B26/08

CPC classification number: G01B9/02068 ,  G01B7/08 ,  G01B9/02071 ,  G01B2290/35 ,  G01J3/45 ,  G01J3/4532 ,  G01J3/4535 ,  G02B26/0841

Abstract: A Micro-Electro-Mechanical System (MEMS) interferometer provides for self-calibration of mirror positioning of a moveable mirror. The moveable mirror is coupled to a MEMS actuator having a variable capacitance. The MEMS interferometer includes a capacitive sensing circuit for determining the capacitance of the MEMS actuator at two or more known positions of the moveable mirror and a calibration module for using the actuator capacitances at the known positions to compensate for any drift in the capacitive sensing circuit.

Abstract translation: 微机电系统（MEMS）干涉仪提供可移动镜的镜像定位的自校准。 可移动镜连接到具有可变电容的MEMS致动器。 MEMS干涉仪包括用于确定MEMS致动器在可移动反射镜的两个或更多个已知位置处的电容的电容感测电路，以及用于在已知位置处使用致动器电容的校准模块来补偿电容感测电路中的任何漂移。

公开(公告)号：US08717573B1

公开(公告)日：2014-05-06

申请号：US13039254

申请日：2011-03-02

Applicant: Jason D. Mudge ,  Christopher W. Tischhauser ,  Gregory S. Feller ,  James Wes Irwin

Inventor： Jason D. Mudge ,  Christopher W. Tischhauser ,  Gregory S. Feller ,  James Wes Irwin

IPC: G01B9/02 ,  G01J3/45

CPC classification number: G01J3/45 ,  G01J3/06 ,  G01J3/4532 ,  G01J2003/067

Abstract: A tunable interferometric scanning spectrometer is provided. In one aspect of the disclosure, the interferometric scanning spectrometer splits incoming light beams among different optical paths in the spectrometer, recombines the light beams from the different optical paths to produce combined light beams, detects intensities of the combined light beams across a focal plane (e.g., with a sensor array), and calculates a spectra based on the detected intensities and a filter function that is a function of optical path difference (OPD) between the optical paths. In one aspect, the filter function varies across the focal plane. In another aspect, the spectrometer comprises a rotatable dispersive element (e.g., glass plate) in one the optical paths and/or a moveable mirror in the other optical path. In this aspect, the spectrometer may be adjusted away from zero OPD by rotation of the dispersive element and/or displacement of the mirror.

Abstract translation: 提供可调谐干涉扫描光谱仪。 在本公开的一个方面，干涉扫描光谱仪在光谱仪中分离不同光路中的入射光束，将来自不同光路的光束重新组合以产生组合光束，检测组合光束穿过焦平面的强度（ 例如，使用传感器阵列），并且基于检测到的强度和作为光路之间的光程差（OPD）的函数的滤波器函数来计算光谱。 在一个方面，滤波器功能在焦平面上变化。 在另一方面，光谱仪包括在一个光路中的可旋转色散元件（例如，玻璃板）和/或另一光路中的可移动镜。 在这方面，可以通过分散元件的旋转和/或反射镜的位移来调节光谱仪远离零OPD。