公开(公告)号：US06818959B2

公开(公告)日：2004-11-16

申请号：US10216654

申请日：2002-08-12

Applicant: Lars G. Montelius ,  Torbjorn G. I. Ling ,  Andrej Litwin

Inventor： Lars G. Montelius ,  Torbjorn G. I. Ling ,  Andrej Litwin

IPC: H01L2984

CPC classification number: B81B7/04 ,  B81B2201/0214 ,  B81B2201/0271 ,  B81B2201/036 ,  B81B2201/045 ,  B81B2203/0361 ,  B81C99/002

Abstract: An array of nanometric dimensions consisting of two or more arms, positioned side by side, wherein the arms are of such nanometric dimensions that the beams can be moved or deformed towards or away from one another by means of a low voltage applied between the beams, whereby to produce a desired optical, electronic or mechanical effect. At nanometer scale dimensions structures previously treated as rigid become flexible, and this flexibility can be engineered since it is a direct consequence of material and dimensions. Since the electrostatic force between the two arms is inversely proportional to the square of the distance, a very considerable force will be developed with a low voltage of the order of 1-5 volts, which is sufficient to deflect the elements towards or away from one another. As preferred, the bulk of the element may comprise an insulating material, and an upper conductive layer is applied on the upper surface, where the element is formed by a nanolithography method such as nanoimprint lithography (NIL). Alternatively the elements may be formed completely of conductive material, where the elements are formed by a CMOS metalization process.

Abstract translation: 由两个或更多个臂并排定位的纳米尺寸阵列，其中臂具有这样的纳米尺寸，使得梁可以通过施加在梁之间的低电压而朝向或远离彼此移动或变形， 从而产生期望的光学，电子或机械效应。 在纳米尺度上，先前被刚性处理的结构变得柔性，并且可以设计出这种灵活性，因为它是材料和尺寸的直接后果。 由于两个臂之间的静电力与距离的平方成反比，所以将以1-5伏特的低电压产生非常大的力，这足以将元件偏向或远离一个 另一个。 优选地，元件的主体可以包括绝缘材料，并且上导电层被施加在上表面上，其中元件通过纳米压印光刻（NIL）的纳米光刻方法形成。 或者，元件可以完全由导电材料形成，其中元件由CMOS金属化工艺形成。

公开(公告)号：US06792173B2

公开(公告)日：2004-09-14

申请号：US10145219

申请日：2002-05-13

Applicant: Gian-Luca Bona ,  Michel Despont

Inventor： Gian-Luca Bona ,  Michel Despont

IPC: G02B635

CPC classification number: G02B6/3524 ,  B81B7/04 ,  B81B2201/045 ,  G02B6/32 ,  G02B6/3526 ,  G02B6/3556 ,  G02B6/3582 ,  G02B6/3588 ,  G02B6/359 ,  G02B6/3644 ,  G02B6/3672

Abstract: Described is a device for directing an optical signal from a first optical fiber (101, 102, . . . ) along one of a plurality of selectable switching paths each terminating in a corresponding one of a plurality of second optical fibers (401, 402, . . . ) via an optical element (201, 202, . . . ), the optical element (201, 202, . . . ) being moveable by a controllable actuator (60) from a first to a second position to change the switching path of incident optical signal. The optical element (201, 202, . . . ) is slideably mounted in parallel to a first mounting plate (10) comprising a conduit (11) through which the optical signals from the first optical fiber (101, 102, . . . ) can be directed by the optical element (201, 202, . . . ) along the selected one of the switching paths to one of a plurality of conduits (21) in a second mounting plate (20) parallel to the first mounting plate (10), and further to the corresponding one of second optical fibers (401, 402, . . . ).

Abstract translation: 描述了一种用于沿着多个可选开关路径中的一个引导来自第一光纤（101,102，...）的光信号的装置，每个端接在多个第二光纤（401,402， 通过光学元件（201,202 ...），光学元件（201,202 ...）可由可控致动器（60）从第一位置移动到第二位置以改变开关 入射光信号路径。 光学元件（201,202 ...）可平滑地安装在包括导管（11）的第一安装板（10）上，来自第一光纤（101,102 ...）的光信号通过该导管 可以沿着所选择的一个切换路径将光学元件（201,202 ...）引导到平行于第一安装板（10）的第二安装板（20）中的多个导管（21）中的一个 ），并且进一步到相应的一个第二光纤（401,402 ...）。

公开(公告)号：US06777629B2

公开(公告)日：2004-08-17

申请号：US10156780

申请日：2002-05-08

Applicant: Spencer A. Lane ,  Krishna Jonnalagadda ,  Manes Eliacin

Inventor： Spencer A. Lane ,  Krishna Jonnalagadda ,  Manes Eliacin

IPC: B81B702

CPC classification number: B81C1/00182 ,  B81B2201/045 ,  B81B2203/0315 ,  B81C2201/0108 ,  B81C2203/0136 ,  H01H59/0009 ,  H01H2001/0073

Abstract: A meso-scale MEMS device having a movable member (51) is formed using standard printed wiring board and high density interconnect technologies and practices. In one embodiment, sacrificial material disposed about the movable member (51) is removed through openings (101, 102) as formed through a cover (91) to form a cavity (121) that retains and limits the freedom of movement of the movable member (51). The movable member can support a reflective surface (224) to thereby provide a mechanism that will support a projection display and/or image scanner (such as a bar code scanner).

Abstract translation: 使用标准印刷线路板和高密度互连技术和实践形成具有可移动部件（51）的中尺度MEMS器件。 在一个实施例中，围绕可移动构件（51）设置的牺牲材料通过通过盖（91）形成的开口（101,102）去除以形成空腔（121），其保持并限制可移动构件 （51）。 可移动构件可以支撑反射表面（224），从而提供将支撑投影显示和/或图像扫描器（例如条形码扫描器）的机构。

公开(公告)号：US06777258B1

公开(公告)日：2004-08-17

申请号：US10187028

申请日：2002-06-28

Applicant: James A. Hunter

Inventor： James A. Hunter

IPC: H01L2100

CPC classification number: G02B26/0833 ,  B81B2201/045 ,  B81C1/00531 ,  B81C2201/0132 ,  G02B26/0841

Abstract: In one embodiment a micro device is formed by depositing a sacrificial layer over a metallic electrode, forming a moveable structure over the sacrificial layer, and then etching the sacrificial layer with a noble gas fluoride. Because the metallic electrode is comprised of a metallic material that also serves as an etch stop in the sacrificial layer etch, charge does not appreciably build up in the metallic electrode. This helps stabilize the driving characteristic of the moveable structure. In one embodiment, the moveable structure is a ribbon in a light modulator.

Abstract translation: 在一个实施例中，通过在金属电极上沉积牺牲层来形成微器件，在牺牲层上形成可移动结构，然后用惰性气体氟化物蚀刻牺牲层。 因为金属电极由在牺牲层蚀刻中也用作蚀刻停止层的金属材料组成，所以电荷在金属电极中不会明显地积聚。 这有助于稳定可移动结构的驱动特性。 在一个实施例中，可移动结构是光调制器中的带状物。

公开(公告)号：US20040114259A1

公开(公告)日：2004-06-17

申请号：US10473532

申请日：2003-09-29

Inventor： Tohru Ishizuya ,  Keiichi Akagawa

IPC: G02B005/08

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/032 ,  B81B2201/045 ,  B81B2203/053 ,  B81B2203/055 ,  B81B2203/058

Abstract: The mirror device has a mirror 2, and a supporting mechanism which elastically supports the mirror 2 on a substrate 1 in a state in which the mirror floats from the substrate 1, so that the mirror can be inclined in an arbitrary direction. The supporting mechanism has three supporting parts 3A, 3B and 3C that mechanically connect the substrate 1 and mirror 2. Each of the supporting parts 3A, 3B and 3C has one or more plate spring parts 5 that are constructed from a thin film consisting of one or more layers. One end portion of each plate spring part 5 is connected to the substrate 1 via a leg part 9 which has a rising part that rises from the substrate 1. The other end portion of the plate spring part 5 is mechanically connected to the mirror 2 via a connecting part which has a rising part that rises from this other end portion. The mirror 2 is supported on the substrate 1 only via the plate spring part 5 of the respective 3A, 3B and 3C. As a result, compactness and mass production characteristics can be greatly improved while maintaining superior optical characteristics.

Abstract translation: 镜装置具有反射镜2和支撑机构，其以反射镜从基板1浮起的状态将基板1上的反射镜2弹性支撑，使得反射镜能够在任意方向上倾斜。 支撑机构具有机械地连接基板1和反射镜2的三个支撑部件3A，3B和3C。每个支撑部件3A，3B和3C具有一个或多个板簧部件5，该板簧部件由由一个 或更多层。 每个板簧部分5的一个端部经由腿部9连接到基板1，腿部9具有从基板1上升的上升部分。板簧部分5的另一端部通过 连接部具有从该另一端部上升的上升部。 反射镜2仅通过相应的3A，3B和3C的板簧部分5支撑在基板1上。 结果，可以在保持优异的光学特性的同时大大提高紧凑性和批量生产特性。

公开(公告)号：US06744173B2

公开(公告)日：2004-06-01

申请号：US09810333

申请日：2001-03-14

Applicant: Behrang Behin ,  Satinderpall Pannu

Inventor： Behrang Behin ,  Satinderpall Pannu

IPC: G02B2610

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers and a second comb structure having a plurality of second comb fingers, wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axis.

Abstract translation: 多层垂直梳驱动致动器包括具有多个第一梳指的第一梳结构和具有多个第二梳指的第二梳结构，其中第一梳指和第二梳指基本相互交错。 第一和第二梳齿可以包括通过绝缘层或气隙彼此电隔离的两个或更多个堆叠的导电层。 或者，第一或第二梳齿可以仅包括一个导电层。 施加第一和第二梳齿之间的电压使得第二梳状结构相对于第一梳状结构移动。 本发明包括沿着两个轴线旋转可移动元件的2D柔性配置。

公开(公告)号：US20040061924A1

公开(公告)日：2004-04-01

申请号：US10261089

申请日：2002-09-30

Inventor： Dennis S. Greywall

IPC: G02B026/00

CPC classification number: G02B26/0841 ,  B81B2201/045 ,  B81B2203/058 ,  B81C1/00198

Abstract: A MEMS device for an optical switch may be fabricated using a single wafer, which alleviates the alignment problem associated with a two-piece prior art design. The device has a movable plate, which may act as a mirror, supported on a stationary substrate. The plate rotates with respect to the substrate in response to a voltage applied to a stationary electrode rigidly connected to the substrate. Additional movable and/or stationary electrodes may be implemented to enable bidirectional rotation of the plate. Electrodes may be arranged with respect to each other and/or the plate to form a fringe-field (FF) actuator, which may alleviate the snap-down problem associated with the prior art design. Multiple MEMS devices of the invention may be arrayed in a single integrated structure to form a linear, radial, or two-dimensional array of mirrors.

Abstract translation: 可以使用单个晶片制造用于光学开关的MEMS装置，其减轻与两件式现有技术设计相关联的对准问题。 该装置具有可移动的板，其可以用作支撑在固定基板上的反射镜。 响应于施加到刚性地连接到衬底的固定电极的电压，板相对于衬底旋转。 可以实现附加的可移动和/或固定电极以使板的双向旋转。 电极可以相对于彼此和/或板布置以形成边缘场（FF）致动器，其可以减轻与现有技术设计相关联的塌陷问题。 本发明的多个MEMS器件可以被排列成单个整体结构以形成反射镜的线性，径向或二维阵列。

公开(公告)号：US20030210849A1

公开(公告)日：2003-11-13

申请号：US10365370

申请日：2003-02-12

Inventor： Robert E. Stewart ,  Agop H. Cherbettchian ,  Samuel Fersht ,  David B. Hall

IPC: G02B006/26

CPC classification number: G02B6/358 ,  B81B3/0024 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/051 ,  B81B2203/053 ,  G02B6/3512 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3548 ,  G02B6/3576 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/0866 ,  H01H2001/0042

Abstract: A bi-stable micro-actuator is formed from a first and a second silicon-on-insulator wafer fused together at an electrical contact layer. A cover with a V-groove defines an optical axis. A collimated optical signal source in the V-groove couples an optical signal to an optical port in the V-groove. A mirror surface on a transfer member blocks or reflects the optical signal. The transfer member has a point of support at the first and second end. The mirror blocks or reflects the optical axis. An expandable structure applies a compressive force between the first and second point of support of the transfer member along a compressive axis to hold the transfer member in a bowed first state or a bowed second state. A control signal applied to a heating element in the expandable structure reduces the compressive force, switching the transfer member to a second state.

公开(公告)号：US20030210481A1

公开(公告)日：2003-11-13

申请号：US10409352

申请日：2003-04-08

Inventor： Jeffry J. Sniegowski ,  M. Steven Rodgers

IPC: G02B005/08

CPC classification number: G02B26/00 ,  B81B3/007 ,  B81B2201/045 ,  B81B2203/0109 ,  B81B2203/053 ,  B81B2203/058 ,  G02B26/0833

Abstract: Various embodiments of reinforced mirror microstructures for a surface micromachined optical system are disclosed. Multi-layered and structurally reinforced mirror microstructures are disclosed, including both two and three-layer microstructures. Adjacent structural layers in these multi-layered mirror microstructures may be structurally reinforced and interconnected by a plurality of vertically disposed columns, or by a plurality of at least generally laterally extending rails or ribs, or some combination thereof. Various embodiments of a single layered mirror microstructure with a structural reinforcement assembly that cantilevers from a lower surface thereof is also disclosed.

公开(公告)号：US06637901B2

公开(公告)日：2003-10-28

申请号：US10099466

申请日：2002-03-14

Applicant: Murray Steven Rodgers

Inventor： Murray Steven Rodgers

IPC: G02B7182

CPC classification number: G02B7/182 ,  B81B3/004 ,  B81B7/0003 ,  B81B2201/045 ,  G02B5/08

Abstract: The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with a first elevator lifter. The MEM system generally includes a first microstructure (such as a mirror) disposed in vertically spaced relation to a substrate. The positioning system generally includes an actuator assembly movably interconnected with the substrate, an elevator pivotally interconnected with the substrate and further interconnected with the microstructure, and a tether interconnecting the actuator assembly and the elevator. The first elevator lifter is provided to engage the elevator to lift/elevate the microstructure away from the substrate generally after fabrication of the MEM system and prior to utilizing the microstructure in operation of the MEM system.

Abstract translation: 本发明一般涉及用于通过将MEM系统的定位系统与第一电梯升降机接合来提升和支撑MEM系统的微结构的方法和组件。 MEM系统通常包括与衬底垂直间隔设置的第一微结构（例如反射镜）。 定位系统通常包括可移动地与衬底互连的致动器组件，与衬底枢转地互连并与微结构相互连接的电梯以及将致动器组件和电梯互连的系绳。 第一电梯升降器被设置成接合电梯，以在MEM系统的制造之后以及在MEM系统的操作中利用微结构之前，一般地将微结构提升/升高。