公开(公告)号：US20020191893A1

公开(公告)日：2002-12-19

申请号：US10145219

申请日：2002-05-13

Applicant: International Business Machines Corporation

Inventor： Gian-Luca Bona ,  Michel Despont

IPC: G02B006/35

CPC classification number: G02B6/3524 ,  B81B7/04 ,  B81B2201/045 ,  G02B6/32 ,  G02B6/3526 ,  G02B6/3556 ,  G02B6/3582 ,  G02B6/3588 ,  G02B6/359 ,  G02B6/3644 ,  G02B6/3672

Abstract: Described is a device for directing an optical signal from a first optical fiber (101, 102, . . . ) along one of a plurality of selectable switching paths each terminating in a corresponding one of a plurality of second optical fibers (401, 402, . . . ) via an optical element (201, 202, . . . ), the optical element (201, 202, . . . ) being moveable by a controllable actuator (60) from a first to a second position to change the switching path of incident optical signal. The optical element (201, 202, . . . ) is slideably mounted in parallel to a first mounting plate (10) comprising a conduit (11) through which the optical signals from the first optical fiber (101, 102, . . . ) can be directed by the optical element (201, 202, . . . ) along the selected one of the switching paths to one of a plurality of conduits (21) in a second mounting plate (20) parallel to the first mounting plate (10), and further to the corresponding one of second optical fibers (401, 402, . . . ).

Abstract translation: 描述了一种用于沿着多个可选开关路径中的一个引导来自第一光纤（101,102，...）的光信号的装置，每个端接在多个第二光纤（401,402， 通过光学元件（201,202 ...），光学元件（201,202 ...）可由可控致动器（60）从第一位置移动到第二位置以改变开关 入射光信号路径。 光学元件（201,202 ...）可平滑地安装在包括导管（11）的第一安装板（10）上，来自第一光纤（101,102 ...）的光信号通过该导管 可以沿着所选择的一个切换路径将光学元件（201,202 ...）引导到平行于第一安装板（10）的第二安装板（20）中的多个导管（21）中的一个 ），并且进一步到相应的一个第二光纤（401,402 ...）。

公开(公告)号：US06495893B2

公开(公告)日：2002-12-17

申请号：US09843913

申请日：2001-04-27

Applicant: Hung-Yi Lin ,  Weileun Fang

Inventor： Hung-Yi Lin ,  Weileun Fang

IPC: H01L2982

CPC classification number: B81B3/0037 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/053

Abstract: A micro-mechanical actuator is disclosed for actuating an object in a micro-electro-mechanical system. One end of the object is flexibly connected a substrate, and another end is flexibly connected to an auxiliary lever which is further connected to an actuating force generator. The auxiliary lever receives an actuating force generated from the actuating force generator to perform a levering operation about a fulcrum. The position of the fulcrum allows an portion of the auxiliary lever connected to the object has a shift larger than a shift of another portion of the auxiliary lever connected to the actuating force generator in response to the actuating force.

公开(公告)号：US20020185699A1

公开(公告)日：2002-12-12

申请号：US10176478

申请日：2002-06-21

Applicant: REFLECTIVITY, INC., a Delaware corporation

Inventor： Jason S. Reid

IPC: H01L027/14 ,  H01L021/00

CPC classification number: B81B3/0078 ,  B81B2201/045 ,  B81B2203/0118

Abstract: MEMS devices are provided that are capable of movement due to a flexible portion formed of unique materials for this purpose. The MEMS device can have a flexible portion formed of a nitride or oxynitride of at least one transition metal, and formed of a nitride or oxynitride of at least one metalloid or near metalloid; a flexible portion formed of a single transition metal nitride or oxynitride and in the absence of any other metal or metalloid nitrides; a flexible portion formed of one or more late transition metal nitrides or oxynitrides; a flexible portion formed of a single transition metal in nitride form, and an additional metal substantially in elemental form; or a flexible portion formed of at least one metalloid nitride or oxynitride. The MEMS devices can be any device, though preferably one with a flexible portion such as an accelerometer, DC relay or RF switch, optical cross connect or optical switch, or micromirror arrays for direct view and projection displays. The flexible portion (e.g. the hinge of the micromirror) is preferably formed by sputtering a metal and/or metalloid target in nitrogen ambient so as to result in a sputtered hinge. It is also possible to form other parts of the MEMS device (e.g structural parts that do not flex).

Abstract translation: 提供了由于为此目的而由独特材料形成的柔性部分能够移动的MEMS装置。 MEMS器件可以具有由至少一种过渡金属的氮化物或氮氧化物形成的柔性部分，并且由至少一种准金属或近乎准金属的氮化物或氧氮化物形成; 由单一过渡金属氮化物或氮氧化物形成并且不存在任何其它金属或准金属氮化物的柔性部分; 由一个或多个后过渡金属氮化物或氮氧化物形成的柔性部分; 由氮化物形式的单一过渡金属形成的柔性部分和基本上为元素形式的附加金属; 或由至少一种准金属氮化物或氧氮化物形成的柔性部分。 MEMS器件可以是任何器件，尽管优选地具有诸如加速度计，DC继电器或RF开关，光学交叉连接或光学开关的柔性部分或用于直视和投影显示器的微镜阵列。 柔性部分（例如微镜的铰链）优选通过在氮气环境中溅射金属和/或准金属靶以形成溅射铰链来形成。 也可以形成MEMS器件的其他部分（例如，不弯曲的结构部件）。

公开(公告)号：US20020181838A1

公开(公告)日：2002-12-05

申请号：US10025180

申请日：2001-12-19

Inventor： Shawn Jay Cunningham ,  Dana Richard DeReus ,  Victor Ramsey

IPC: G02B006/35

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: An optical MEMS device and a package include an optical through path for allowing light to pass from a first side of the package, through a substrate on which the optical MEMS device is mounted and through a second side of the package opposite the first side. The package can include first and second light-transmissive portions or apertures for allowing the light to pass. The optical MEMS device can be a shutter for selectively affecting the flow of light through the package. A plurality of optical MEMS devices may be located within a single package because the optical paths for the MEMS devices can be substantially parallel to each other.

Abstract translation: 光学MEMS器件和封装包括光学通过路径，用于允许光从封装的第一侧通过其上安装有光学MEMS器件的基板，并且穿过与第一侧相对的封装的第二侧。 封装可以包括用于允许光通过的第一和第二透光部分或孔。 光学MEMS器件可以是用于选择性地影响通过封装件的光流的快门。 多个光学MEMS器件可以位于单个封装内，因为用于MEMS器件的光路可以基本上彼此平行。

公开(公告)号：US20020171909A1

公开(公告)日：2002-11-21

申请号：US10151080

申请日：2002-05-20

Inventor： Robert L. Wood ,  Vivek Agrawal

IPC: G02B026/00

CPC classification number: G02B26/085 ,  B81B3/004 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  G02B26/0833 ,  G02B26/0841

Abstract: A MEMs structure can include a recess in a substrate, the recess having a side wall and a floor. A tail portion of a moveable reflector is on the substrate and extends beyond the side wall of the recess opposite the recess floor and is configured to rotate into the recess. A head portion of the moveable reflector extends on the substrate outside the recess.

Abstract translation: MEM结构可以包括在基板中的凹部，凹部具有侧壁和底板。 可移动反射器的尾部位于基底上并且延伸超过与凹部底部相对的凹部的侧壁，并被构造成旋转到凹部中。 可移动反射器的头部在凹部外部的基板上延伸。

公开(公告)号：US06480319B2

公开(公告)日：2002-11-12

申请号：US09917490

申请日：2001-07-28

Applicant: Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

IPC: G02B2600

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。

公开(公告)号：US06467879B1

公开(公告)日：2002-10-22

申请号：US09687096

申请日：2000-10-16

Applicant: Joel A. Kubby ,  Elliott A. Eklund ,  Peter M. Gulvin

Inventor： Joel A. Kubby ,  Elliott A. Eklund ,  Peter M. Gulvin

IPC: B41J204

CPC classification number: F04B43/043 ,  B41J2/14314 ,  B81B3/0051 ,  B81B2201/036 ,  B81B2201/045 ,  B81B2201/052 ,  B81B2203/0127 ,  B81B2203/053

Abstract: A micro-electromechanical fluid ejector having an inner structure on the bottom of the top of the membrane for isolating the conductor, and an outer structure, away from the center of the membrane, on the bottom of the top of the membrane to stop excessive flexing of the membrane leading to inter-electrode contact.

Abstract translation: 微机电流体喷射器，其在膜的顶部底部具有用于隔离导体的内部结构，以及远离膜的中心的外部结构，位于膜的顶部的底部以阻止过度弯曲 的膜导致电极间接触。

公开(公告)号：US20020135864A1

公开(公告)日：2002-09-26

申请号：US09843024

申请日：2001-04-25

Inventor： Chen-Wei Chiu ,  Aramais Avakian ,  Tom Tsao ,  Fukang Jiang ,  Jeff Dickson ,  Yu-Chong Tai

IPC: G02F001/29

CPC classification number: G02B6/3566 ,  B81B3/0051 ,  B81B2201/031 ,  B81B2201/045 ,  B81B2203/0118 ,  B81B2203/058 ,  B81C1/00214 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3584 ,  G02B6/3594

Abstract: An apparatus at least partially intercepts a plurality of light beams propagating along a respective plurality of beam paths. The apparatus includes a single crystal silicon substrate and an array including a plurality of modules. Each module includes a reflector comprising single crystal silicon and a reflector surface lying in a reflector plane substantially perpendicular to the substrate surface. Each module further includes a reflector support which mounts the reflector to move substantially within the reflector plane with a displacement component along the surface normal direction of the substrate surface. Each module further includes a reflector driver responsive to electrical current to selectively move the reflector between a first position and a second position.

Abstract translation: 一种装置至少部分截取沿着相应的多个光束路径传播的多个光束。 该装置包括单晶硅衬底和包括多个模块的阵列。 每个模块包括反射器，其包括单晶硅和位于基本上垂直于衬底表面的反射器平面中的反射器表面。 每个模块还包括反射器支撑件，其将反射器安装成基本上在反射器平面内，沿着基板表面的法线方向具有位移分量。 每个模块还包括响应于电流的反射器驱动器，以在第一位置和第二位置之间选择性地移动反射器。

公开(公告)号：US20020114058A1

公开(公告)日：2002-08-22

申请号：US10025188

申请日：2001-12-19

Inventor： Dana Richard DeReus ,  Shawn J. Cunningham ,  Arthur S. Morris III

IPC: G02F001/29 ,  G02B026/08 ,  G02B026/00

CPC classification number: G02B26/0866 ,  B81B3/0051 ,  B81B7/0067 ,  B81B2201/038 ,  B81B2201/045 ,  B81B2201/047 ,  B81B2203/051 ,  B81C1/00182 ,  B81C2201/019 ,  B81C2203/0109 ,  G02B6/3512 ,  G02B6/353 ,  G02B6/3548 ,  G02B6/356 ,  G02B6/3566 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3576 ,  G02B6/3578 ,  G02B6/3582 ,  G02B6/3584 ,  G02B26/0841 ,  G02B26/085 ,  G02B26/0858 ,  H01H2001/0052 ,  H01L2224/48091 ,  H01L2924/00014

Abstract: Light-Transmissive Substrate for an Optical MEMS Device. According to one embodiment of the present invention, an optical device is provided. The optical device includes a substrate having an aperture for providing a pathway for light transmission and a device attached to a surface of the substrate for interacting with light transmitted along the pathway. According to another embodiment of the present invention, an optical device is provided which includes a substrate manufactured of a light-transmissive material having surfaces coated with an anti-reflective material for providing a pathway for light transmission and a device attached to a surface of the substrate for interacting with light transmitted along the pathway.

Abstract translation: 用于光学MEMS器件的光透射衬底。 根据本发明的一个实施例，提供一种光学装置。 光学装置包括具有用于提供光透射路径的孔径的基板和附着到基板表面的装置，用于与沿着路径传输的光相互作用。 根据本发明的另一实施例，提供了一种光学装置，其包括由透光材料制成的基板，该透光材料具有涂覆有用于提供光透射路径的抗反射材料的表面，以及附接到 用于与沿着路径传输的光相互作用的衬底。

公开(公告)号：US06437902B2

公开(公告)日：2002-08-20

申请号：US09917431

申请日：2001-07-28

Applicant: Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

Inventor： Michael J. Daneman ,  Behrang Behin ,  Satinderpall S. Pannu

IPC: G02B2600

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A beam steering module and switching system. The steering module is composed of a N×M array of single axis mirrors able to rotate about a particular axis (X-axis), a second N×M array of single axis mirrors able to rotate about an axis orthogonal to that of the first N×M array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列的轴正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。