公开(公告)号：US07304748B2

公开(公告)日：2007-12-04

申请号：US10789328

申请日：2004-02-27

Applicant: Robert J. Rafac

Inventor： Robert J. Rafac

IPC: G01B9/02

CPC classification number: G01J1/4257 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/027 ,  G01J3/26 ,  G01J3/28 ,  G01J3/45

Abstract: A bandwidth meter method and apparatus for measuring the bandwidth of a spectrum of light emitted from a laser input to the bandwidth meter is disclosed, which may comprise an optical bandwidth monitor providing a first output representative of a first parameter which is indicative of the bandwidth of the light emitted from the laser and a second output representative of a second parameter which is indicative of the bandwidth of the light emitted from the laser; and, an actual bandwidth calculation apparatus utilizing the first output and the second output as part of a multivarible equation employing predetermined calibration variables specific to the optical bandwidth monitor, to calculate an actual bandwidth parameter. The apparatus and method may be implemented in a laser lithography light source and/or in an integrated circuit lithography tool.

Abstract translation: 公开了一种用于测量从激光输入到带宽计的发射光谱的带宽的带宽测量仪方法和装置，其可以包括光带宽监视器，其提供表示第一参数的第一输出，第一参数指示 从激光器发射的光和表示从激光器发射的光的带宽的第二参数的第二输出; 以及使用第一输出和第二输出的实际带宽计算装置作为使用光带宽监视器特有的预定校准变量的多元方程的一部分来计算实际带宽参数。 该装置和方法可以在激光光刻光源和/或集成电路光刻工具中实现。

公开(公告)号：US20060290939A1

公开(公告)日：2006-12-28

申请号：US11438864

申请日：2006-05-22

Applicant: Andrei Vakhtin ,  Daniel Kane ,  Kristen Peterson

Inventor： Andrei Vakhtin ,  Daniel Kane ,  Kristen Peterson

IPC: G01B11/02 ,  G01B9/02 ,  G01J3/45

CPC classification number: G01J3/45 ,  G01B9/02004 ,  G01B9/0201 ,  G01B9/02044 ,  G01B9/02081 ,  G01B9/02091 ,  G01B2290/45

Abstract: An apparatus and method for differential spectral interferometry comprising providing an interferometer comprising a light source; employing an element to provide a dithered relative phase shift between target and reference arms of the interferometer, detecting output from the interferometer, demodulating signals received from the detector at different multiples of the dither frequencies, generating more than one real-valued interferograms from demodulated signals, and using the real-valued interferograms to obtain the complex spectral interferogram.

Abstract translation: 一种用于差分光谱干涉测量的装置和方法，包括提供包括光源的干涉仪; 使用元件在干涉仪的目标和参考臂之间提供抖动的相对相移，检测来自干涉仪的输出，解调从抖动频率的不同倍数从检测器接收的信号，从解调信号产生多于一个的实数干涉图 ，并使用实数干涉图获得复谱干涉图。

公开(公告)号：US20060262316A1

公开(公告)日：2006-11-23

申请号：US11133968

申请日：2005-05-20

Applicant: Douglas Baney

Inventor： Douglas Baney

IPC: G01B9/02

CPC classification number: G01J3/45 ,  G01N21/1702 ,  G01N2021/1704 ,  G01N2021/399 ,  G01N2021/451

Abstract: A system of using an interferometer, in combination with a laser, and a detector to determine absorptive characteristics of a material under test. The operation of the interferometer allows for determination of the wavelength of the laser beam and for determining relative changes in the wavelength of the laser beam. A method for using a laser source and an interferometer to determine characteristics of a material under test in accordance with the present invention is also provided.

Abstract translation: 使用与激光器组合的干涉仪和检测器来确定被测材料的吸收特性的系统。 干涉仪的操作允许确定激光束的波长并确定激光束的波长的相对变化。 还提供了一种使用激光源和干涉仪来确定根据本发明的受试材料的特性的方法。

公开(公告)号：US20060043301A1

公开(公告)日：2006-03-02

申请号：US10510017

申请日：2003-04-03

Applicant: Werner Mantele ,  Oliver Klein ,  Christian Zscherp ,  Andreas Barth ,  Hermann Lillienfeld-Toal ,  Hellmuth Prollius ,  Frithjof Germar ,  Heribert Offermanns

Inventor： Werner Mantele ,  Oliver Klein ,  Christian Zscherp ,  Andreas Barth ,  Hermann Lillienfeld-Toal ,  Hellmuth Prollius ,  Frithjof Germar ,  Heribert Offermanns

IPC: G01N21/35 ,  G01N21/55

CPC classification number: G01N21/552 ,  G01J3/45 ,  G01J2003/425 ,  G01N21/3577 ,  G01N21/85

Abstract: The invention relates to an infrared measuring device, especially for the spectrometry of aqueous systems. Said device comprises at least one measuring unit, especially a measuring cell, also comprising at least one ATR-body and at least one infrared light source. The measuring unit contains at least one ATR-body which comprises at least two planar, substantially parallel limiting surfaces and which is transparent with respect to measuring radiation and which has an index of refraction which is greater than that of the medium which is arranged next to at least one limiting surface and which is to be examined, especially larger or equal to 1.5. The IR-measuring radiation on at least one of the planar, parallel limiting surfaces of the ATR-body can be totally reflected in an attenuated manner by at least six times.

Abstract translation: 本发明涉及一种红外测量装置，特别是用于水系统的光谱测定。 所述装置包括至少一个测量单元，特别是测量单元，还包括至少一个ATR体和至少一个红外光源。 测量单元包含至少一个ATR体，该ATR体包括至少两个平坦的基本上平行的限制表面，并且其相对于测量辐射是透明的，并且其具有大于被布置在邻近的介质的折射率 至少一个限制表面，并且要被检查，特别是大于或等于1.5。 在ATR体的至少一个平面平行限制表面上的IR测量辐射可以以衰减方式全部反射至少六次。

公开(公告)号：US07001068B2

公开(公告)日：2006-02-21

申请号：US10492889

申请日：2002-10-18

Applicant: John Howard

Inventor： John Howard

IPC: G01K11/00 ,  G01J5/00

CPC classification number: G01J5/58 ,  G01J3/45 ,  G01J5/00 ,  G01J5/0834 ,  G01J2005/583 ,  G01J2005/586

Abstract: Remote sensing of the temperature of a greybody or blackbody radiator is effected by passing its radiation (24) through a modulated infrared filter spectrometer. The infrared filter comprises, in sequence, a band pass filter (20), a first polariser (21) which polarises the radiation, an electro-optical element (22) which splits the polarised radiation into two orthogonally polarised components, and a second polariser (23). A lens (28) images the radiation leaving the second polariser onto a detector (27). The electrical signal from the detector (27) is input to a numerical analyser. The electro-optical element (22), typically comprising a birefringent crystal assembly (25) and a birefringent trim plate (26), is configured so that the net optical delay of the orthogonally polarised components passed through it is such that the recombined components are at or near a peak or trough in their interferogram. A sinusoidally varying voltage is applied to the electro-optical element to modulate the net delay of the components passed through the electro-optical element. The numerical analyser is programmed to compute the harmonic amplitude ratio (the ratio of signal amplitudes at the fundamental and second harmonic of the frequency of the modulating voltage) of the signal that it receives from the detector (27). The harmonic amplitude ratio is a function of the temperature of the radiator, which can be estimated by reference to a calibration look-up table.

Abstract translation: 通过使其辐射（24）通过调制的红外滤光器光谱仪来实现对灰体或黑体辐射体的温度的遥感。 红外滤光器依次包括带通滤波器（20），偏振辐射的第一偏振器（21），将偏振辐射分成两个正交极化分量的电光元件（22）和第二偏振器 （23）。 透镜（28）将离开第二偏振器的辐射图像到检测器（27）上。 来自检测器（27）的电信号被输入到数字分析器。 通常包括双折射晶体组件（25）和双折射装饰板（26）的电光元件（22）被配置为使得通过它的正交极化分量的净光学延迟使得重组组分为 在它们的干涉图中的峰或谷附近。 将正弦变化的电压施加到电光元件以调节通过电光元件的部件的净延迟。 数字分析仪被编程为计算其从检测器（27）接收的信号的谐波振幅比（在调制电压的频率的基波和二次谐波处的信号幅度的比率）。 谐波振幅比是散热器的温度的函数，可以通过参考校准查找表来估计。

公开(公告)号：US06952267B2

公开(公告)日：2005-10-04

申请号：US10615321

申请日：2003-07-07

Applicant: Robert J. Rarac

Inventor： Robert J. Rarac

IPC: G01J1/42 ,  G01J3/02 ,  G01J3/28 ,  G01J3/45 ,  G01B9/02

CPC classification number: G01J1/4257 ,  G01J1/0228 ,  G01J3/02 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45

Abstract: A method and apparatus for measuring bandwidth of light emitted from a laser which may comprise: first and second wavelength sensitive optical bandwidth detectors providing, respectively, an output representative of a first parameter indicative of the bandwidth of the emitted light as measured respectively by the first and second bandwidth detectors, and an actual bandwidth calculation apparatus adapted to utilize these two outputs as part of a multivariable linear equation employing predetermined calibration variables specific to either the first or the second bandwidth detector, to calculate a first actual bandwidth parameter or a second actual bandwidth parameter. The first actual bandwidth parameter may be a spectrum full width at some percent of the maximum (“FWXM”), and the second actual bandwidth parameter may be a portion containing some percentage of the energy (“EX”). The first and second bandwidth detectors may an etalon and the outputs may be representative of a fringe width of a fringe of an optical output of the respective etalon at FWXM. The precomputed calibration variables may be derived from respective three dimensional plots representing, respectively, detector outputs in relation to a calibrating input light with known values of the first and second actual bandwidth parameters.

Abstract translation: 一种用于测量从激光器发射的光的带宽的方法和装置，其可以包括：第一和第二波长敏感光学带宽检测器，分别提供表示第一参数的输出，所述第一参数指示所发射的光的带宽，分别由第一 和第二带宽检测器，以及实际带宽计算装置，其适用于利用这两个输出作为使用特定于第一或第二带宽检测器的预定校准变量的多变量线性方程的一部分来计算第一实际带宽参数或第二实际带宽参数 带宽参数。 第一实际带宽参数可以是在最大值的一些百分比（“FWXM”）的频谱全宽，并且第二实际带宽参数可以是包含能量的一部分（“EX”）的部分。 第一和第二带宽检测器可以是标准具，并且输出可以代表FWXM处的各个标准具的光输出的边缘的边缘宽度。 预先计算的校准变量可以从相应的三维图得出，分别表示相对于具有第一和第二实际带宽参数的已知值的校准输入光的检测器输出。

公开(公告)号：US06943892B2

公开(公告)日：2005-09-13

申请号：US10763982

申请日：2004-01-23

Applicant: Winston Kong Chan

Inventor： Winston Kong Chan

IPC: G01B9/02

CPC classification number: G02B6/29346 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/26 ,  G01J3/45 ,  G01J3/4535

Abstract: An instrument including a scannable mirror employs multimode optical fibers and an optical coupler. Modal dispersion, e.g., from the multimode optical fiber, is reduced by a method employing deconvolution. The scannable mirror may employ a mirror movable in an optical waveguide or an optical fiber wound on an expandable core.

Abstract translation: 包括可扫描镜的仪器采用多模光纤和光耦合器。 通过采用去卷积的方法来减少来自多模光纤的模态色散。 可扫描镜可以使用可在光波导中移动的反射镜或缠绕在可扩展芯上的光纤。

公开(公告)号：US20050073690A1

公开(公告)日：2005-04-07

申请号：US10678843

申请日：2003-10-03

Applicant: Russell Abbink ,  John Maynard ,  Trent Ridder

Inventor： Russell Abbink ,  John Maynard ,  Trent Ridder

IPC: G01J3/26 ,  G01J3/45 ,  G01J9/02 ,  G01B9/02

CPC classification number: G01J3/26 ,  G01J3/0286 ,  G01J3/45 ,  G01J9/02

Abstract: A vertical cavity surface-emitting laser (VCSEL) package useful in interferometry. The present invention comprises methods and apparatuses that allow use of multimode VCSELS, and that provide for wavelength control and stability. The present invention contemplates the use of a defined response element, such as an etalon, in combination with control of the operating environment of the VCSEL to monitor and control the output wavelength of the VCSEL.

Abstract translation: 用于干涉测量的垂直腔表面发射激光器（VCSEL）封装。 本发明包括允许使用多模VCSELS并提供波长控制和稳定性的方法和装置。 本发明考虑使用诸如标准具的定义的响应元件与VCSEL的操作环境的控制相结合来监视和控制VCSEL的输出波长。

公开(公告)号：US20040263844A1

公开(公告)日：2004-12-30

申请号：US10609223

申请日：2003-06-26

Inventor： Robert J. Rafac

IPC: G01B009/02 ,  G01J003/28

CPC classification number: G01J3/02 ,  G01J1/4257 ,  G01J3/027 ,  G01J3/28 ,  G01J3/45 ,  G01J9/00 ,  H01S3/1305 ,  H01S3/225

Abstract: An apparatus and method for controlling a laser system is disclosed which may comprise a spectrometer adapted to measure an unknown bandwidth of a spectrum of light emitted from the laser, which may comprise an optical bandwidth measuring unit adapted to provide as an output a measured parameter, which is indicative of a parameter of the unknown bandwidth of the spectrum being measured; a reported parameter computing unit adapted to compute a reported parameter of the unknown bandwidth of the spectrum being measured according to the formula: Reported Parameter (nullRPnull)nullA*(Measured Parameter (nullMPnull))nullC, wherein the RP and MP are a different type of parameter and the values of A and C are determined based upon calibration of the optical bandwidth measuring unit MP response for light of known valued of RP. The optical bandwidth measuring unit may comprise an interferometric or dispersive optical instrument, such as an etalon. RP may be, e.g., at FWXM and MP may be, e.g., FWXnullM, wherein XnullXnull. RP may be, e.g., at EX % and MP may be, e.g., at FWXM.

Abstract translation: 公开了一种用于控制激光系统的装置和方法，其可以包括适于测量从激光器发射的光谱的未知带宽的光谱仪，其可以包括光带宽测量单元，其适于提供测量参数作为输出， 其表示正被测量的频谱的未知带宽的参数; 报告参数计算单元，用于根据以下公式计算被测量的未知带宽的报告参数：报告参数（“RP”）= A *（测量参数（“MP”））+ C，其中RP 并且MP是不同类型的参数，并且基于对已知值RP的光的光学带宽测量单元MP响应的校准来确定A和C的值。 光学带宽测量单元可以包括诸如标准具的干涉式或分散光学仪器。 RP可以是例如FWXM，MP可以是例如FWX'M，其中X

公开(公告)号：US20040150830A1

公开(公告)日：2004-08-05

申请号：US10763982

申请日：2004-01-23

Inventor： Winston Kong Chan

IPC: G01B009/02

CPC classification number: G02B6/29346 ,  G01J3/0218 ,  G01J3/024 ,  G01J3/26 ,  G01J3/45 ,  G01J3/4535

Abstract: An instrument including a scannable mirror employs multimode optical fibers and an optical coupler. Modal dispersion, e.g., from the multimode optical fiber, is reduced by a method employing deconvolution. The scannable mirror may employ a mirror movable in an optical waveguide or an optical fiber wound on an expandable core.

Abstract translation: 包括可扫描镜的仪器采用多模光纤和光耦合器。 通过采用去卷积的方法来减少来自多模光纤的模态色散。 可扫描镜可以使用可在光波导中移动的反射镜或缠绕在可扩展芯上的光纤。