Light source tracking in optical metrology system
    361.
    发明授权
    Light source tracking in optical metrology system 有权
    光学测量系统中的光源跟踪

    公开(公告)号:US09146156B2

    公开(公告)日:2015-09-29

    申请号:US13285712

    申请日:2011-10-31

    Abstract: The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.

    Abstract translation: 本发明可以包括将诊断样本加载到样本台上,将来自设置在多轴平台上的照明源的光聚焦到诊断样本上,利用检测器收集从诊断样品的表面反射的一部分光,其中 照明源和检测器通过光学系统光学直接耦合,获取指示来自诊断样本的照明源位置漂移的一组诊断参数,通过比较所获取的诊断参数集合来确定照明源位置漂移的大小 到在先前测量的对准条件下从诊断样本获得的初始参数集合,确定照明源位置漂移的方向; 以及提供照明源位置调整参数,其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

    Optimized orthonormal system and method for reducing dimensionality of hyperspectral images
    362.
    发明授权
    Optimized orthonormal system and method for reducing dimensionality of hyperspectral images 有权
    优化的正交系统和降低高光谱图像尺度的方法

    公开(公告)号:US08948540B2

    公开(公告)日:2015-02-03

    申请号:US14090753

    申请日:2013-11-26

    Abstract: A method for reducing dimensionality of hyperspectral images includes receiving a hyperspectral image having a plurality of pixels. The method may further include establishing an orthonormal basis vector set comprising a plurality of mutually orthogonal normalized members. Each of the mutually orthogonal normalized members may be associated with one of the plurality of pixels of the hyperspectral image. The method may further include decomposing the hyperspectral image into a reduced dimensionality image, utilizing calculations performed while establishing said orthonormal basis vector set. A system configured to perform the method may also be provided.

    Abstract translation: 一种用于降低高光谱图像的维数的方法包括接收具有多个像素的高光谱图像。 该方法还可以包括建立包括多个相互正交的归一化成员的正交基矢量集合。 每个相互正交的标准化构件可以与高光谱图像的多个像素中的一个相关联。 该方法可以进一步包括利用在建立所述正交基本向量集合时执行的计算来将高光谱图像分解为降维的图像。 还可以提供被配置为执行该方法的系统。

    Interferometer having multiple scan carriages
    363.
    发明授权
    Interferometer having multiple scan carriages 有权
    干涉仪具有多个扫描架

    公开(公告)号:US08933406B2

    公开(公告)日:2015-01-13

    申请号:US13723274

    申请日:2012-12-21

    Abstract: An interferometer includes a fixed assembly including a base, a beam splitter assembly and a fixed mirror, and a movable assembly including an upper scan carriage, a lower scan carriage and a movable mirror connected to the lower scan carriage. The pair of inner bearing flexures is connected to the base and the upper scan carriage, enabling movement of the upper scan carriage relative to the base, and the pair of outer bearing flexures is connected to the upper and lower scan carriages, enabling movement of the lower scan carriage relative to the upper scan carriage. The movement of the upper and lower scan carriages enable a scan movement of the movable mirror in a scan direction restricted such that the scan movement maintains a plane containing the movable mirror parallel to planes containing the movable mirror at respective distances between the movable and fixed assemblies during the scan movement.

    Abstract translation: 干涉仪包括固定组件,其包括基座,分束器组件和固定反射镜,以及包括上扫描滑架,下扫描滑架和连接到下扫描滑架的可移动反射镜的可移动组件。 一对内轴承挠曲件连接到基座和上扫描托架,使得上扫描托架能够相对于基座移动,并且一对外轴承挠曲件连接到上扫描支架和下扫描支架, 相对于上扫描托架的下扫描托架。 上扫描支架和下扫描支架的移动使扫描方向的扫描运动受到限制,使得扫描运动将包含可移动镜的平面平行于可移动反射镜的平面保持在可移动和固定组件之间的相应距离处 在扫描运动期间。

    Detection optical system and scanning microscope
    364.
    发明授权
    Detection optical system and scanning microscope 有权
    检测光学系统和扫描显微镜

    公开(公告)号:US08885162B2

    公开(公告)日:2014-11-11

    申请号:US13669634

    申请日:2012-11-06

    Inventor: Masaharu Tomioka

    Abstract: Provided is a detection optical system that is provided with a dispersed-light detection function and that can increase the amount of detected light by enhancing the diffraction efficiency. A detection optical system is employed which includes a transmissive VPH diffraction grating that disperses fluorescence from a specimen into a plurality of wavelength bands; a rotating mechanism that rotates the VPH diffraction grating about an axial line that is perpendicular to an incident optical axis of the fluorescence from the specimen and an emission optical axis from the VPH diffraction grating; a light detection portion that detects the fluorescence from the specimen that has been dispersed by the VPH diffraction grating; and a correcting portion that corrects an incident position on the light detection portion in accordance with a displacement of the optical axis caused by the rotation of the VPH diffraction grating in synchronization with the rotating mechanism.

    Abstract translation: 提供了一种具有分散光检测功能并且可以通过提高衍射效率来增加检测光量的检测光学系统。 使用检测光学系统,其包括将来自样本的荧光分散到多个波长带中的透射VPH衍射光栅; 围绕垂直于来自样本的荧光的入射光轴的轴线和来自VPH衍射光栅的发射光轴旋转VPH衍射光栅的旋转机构; 光检测部,其检测由所述VPH衍射光栅分散的所述样本的荧光; 以及校正部,其根据与旋转机构同步的VPH衍射光栅的旋转引起的光轴的位移校正光检测部上的入射位置。

    Optical Module, Electronic Device, and Driving Method
    365.
    发明申请
    Optical Module, Electronic Device, and Driving Method 审中-公开
    光学模块,电子设备和驱动方法

    公开(公告)号:US20140071445A1

    公开(公告)日:2014-03-13

    申请号:US14025050

    申请日:2013-09-12

    Abstract: An optical module includes a wavelength variable interference filter having a fixed reflective film, a movable reflective film which faces the fixed reflective film with a gap between reflective films interposed therebetween, and an electrostatic actuator that changes the gap between reflective films, and a gap control unit that controls the electrostatic actuator. The gap control unit controls the electrostatic actuator on the basis of an order which is set in accordance with a wavelength to be measured, and changes the gap between the reflective films.

    Abstract translation: 光学模块包括具有固定反射膜的波长可变干涉滤光器,面对固定反射膜的可移动反射膜,其间插入反射膜之间的间隙,以及改变反射膜之间的间隙的静电致动器,以及间隙控制 控制静电执行器的单元。 间隙控制单元基于根据要测量的波长设置的顺序来控制静电致动器,并且改变反射膜之间的间隙。

    Sample Accessory for Handheld Spectrometers
    366.
    发明申请
    Sample Accessory for Handheld Spectrometers 审中-公开
    手持式光谱仪样品附件

    公开(公告)号:US20130258341A1

    公开(公告)日:2013-10-03

    申请号:US13431676

    申请日:2012-03-27

    Abstract: A sampling accessory coupled to a hand-held reflectance spectrometer provides expanded sampling area which in turn provides better signal averaging from agricultural products which are often inhomogeneous. The sampling accessory includes a sample site repositioning means and a “sample cup” having a base that is transparent to near IR wavelengths.The hand-held reflectance spectrometer includes a shutter responsive to control signals from the control circuitry. When the shutter is closed, a reference measurement may be made. When the shutter is open, a sample measurement is taken.Sample repositioning and data acquisition within the cup may be performed by several means. Fresh sample regions may be exposed through either manual or motor driven sample cup rotation. Alternatively, the sample may be vibrated to induce fresh sample exposure at the window. A further embodiment includes illumination and/or detection paths that may be altered through electrically driven steering optics.

    Abstract translation: 耦合到手持反射光谱仪的采样附件提供扩展的采样区域,其进而提供了通常不均匀的农产品的更好的信号平均。 采样附件包括样品位点重新定位装置和具有对近红外波长透明的基底的“样品杯”。 手持式反射光谱仪包括响应于来自控制电路的控制信号的快门。 当快门关闭时,可以进行参考测量。 当快门打开时,进行样品测量。 杯中的样品重新定位和数据采集可以通过几种方式进行。 新鲜的样品区域可能通过手动或电动驱动的样品杯旋转暴露。 或者,可以振动样品以在窗口处引起新鲜样品曝光。 另一实施例包括可以通过电驱动转向光学器件改变的照明和/或检测路径。

    MICROSCOPE SPECTROMETER, OPTICAL AXIS SHIFT CORRECTION DEVICE, SPECTROSCOPE AND MICROSCOPE USING SAME
    367.
    发明申请
    MICROSCOPE SPECTROMETER, OPTICAL AXIS SHIFT CORRECTION DEVICE, SPECTROSCOPE AND MICROSCOPE USING SAME 有权
    微观光谱仪,光轴校正装置,光谱仪和使用相同的显微镜

    公开(公告)号:US20130258332A1

    公开(公告)日:2013-10-03

    申请号:US13897981

    申请日:2013-05-20

    Inventor: Mitsuhiro Iga

    Abstract: A microscope spectrometer in which, when an excitation light from a light source illuminates a sample, a light emitted from the sample that enters a microscope is analyzed, may include: a first optical means that forms the light emitted from the sample as a parallel beam; a first variable bandpass filter means having a variable wavelength passband that transmits incident light, which of the parallel beam of incident light, is light of a pre-established wavelength passband; a two-dimensional array light detection means that images the light in the wavelength passband; and a control means that controls the timing of the imaging by the two-dimensional array light detection means and, in accordance with the timing, changes the wavelength passband of the first variable bandpass filter means.

    Abstract translation: 一种显微镜光谱仪,其中当来自光源的激发光照射样品时,从进入显微镜的样品发射的光被分析,可以包括:第一光学装置,其将从样品发射的光形成为平行光束 ; 第一可变带通滤波器装置,其具有透射入射光的可变波长通带,入射光中的哪一个是预先建立的波长通带的光; 二维阵列光检测装置,其对波长通带中的光进行成像; 以及控制装置,其通过二维阵列光检测装置来控制成像的定时,并且根据该定时改变第一可变带通滤波器装置的波长通带。

    Stiffness compensation in opto-mechanical mechanisms
    368.
    发明授权
    Stiffness compensation in opto-mechanical mechanisms 有权
    光机械刚度补偿

    公开(公告)号:US08542423B2

    公开(公告)日:2013-09-24

    申请号:US12811350

    申请日:2009-01-08

    Abstract: An optical scanning or positioning mechanism has a head on which optical components are mounted and an actuator coupled to the head to cause the head to move when the actuator is actuated. There are one or more sets of flexure bearings mounted in the mechanism. The flexure bearings have a restoring torque when moved from a rest position. The bearings are coupled to the head to allow the head to move when actuated by the actuator. One or more magnets are mounted in the mechanism in a location other than in the actuator to compensate for the flexure bearings restoring torque.

    Abstract translation: 光学扫描或定位机构具有安装有光学部件的头部和联接到头部的致动器,以在致动器致动时使头部移动。 安装在机构中的一组或多组挠性轴承。 当从静止位置移动时,挠曲轴承具有恢复扭矩。 轴承联接到头部,以允许头部由致动器致动时移动。 一个或多个磁体安装在机构中除了致动器之外的位置以补偿挠曲轴承恢复转矩。

    Spectral distribution measuring device
    369.
    发明授权
    Spectral distribution measuring device 有权
    光谱分布测量装置

    公开(公告)号:US08497988B2

    公开(公告)日:2013-07-30

    申请号:US12879761

    申请日:2010-09-10

    Abstract: A spectral distribution measuring device includes an illumination unit configured to illuminate white light to a surface of an object being measured; a slit array having a plurality of slits formed in alignment at equal intervals; a linear image sensor including a light receiving face having a plurality of rectangular pixels adjacently arranged in alignment and a plurality of spectral light-irradiated areas divided in each predetermined number of neighboring pixels; a plurality of areas being measured which is set on the surface of the object being measured, and reflects the light irradiated by the illumination unit to the plurality of slits; and a diffraction unit configured to diffract and disperse reflection light which is reflected from the areas being measured and has passed through each slit, the diffraction unit being disposed such that a direction where a diffraction image expands is inclined at an angle to a direction where the light receiving face expands.

    Abstract translation: 光谱分布测量装置包括被配置为将白光照射到被测量物体的表面的照明单元; 狭缝阵列,其具有以等间隔对准地形成的多个狭缝; 线性图像传感器,其包括具有相邻排列成对的多个矩形像素的光接收面和在每个预定数量的相邻像素中划分的多个光谱光照射区域; 测量被测物体的表面上被测量的多个区域,并将照明单元照射的光反射到多个狭缝; 以及衍射单元,被配置为衍射和分散从被测量区域反射并穿过每个狭缝的反射光,所述衍射单元被设置为使得衍射图像扩展的方向与所述衍射单元的方向成一定角度倾斜, 光接收面扩大。

    LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM
    370.
    发明申请
    LIGHT SOURCE TRACKING IN OPTICAL METROLOGY SYSTEM 有权
    光学系统系统中的光源跟踪

    公开(公告)号:US20130033704A1

    公开(公告)日:2013-02-07

    申请号:US13285712

    申请日:2011-10-31

    Abstract: The present invention may include loading a diagnostic sample onto a sample stage, focusing light from an illumination source disposed on a multi-axis stage onto the diagnostic sample, collecting a portion of light reflected from a surface of the diagnostic sample utilizing a detector, wherein the illumination source and the detector are optically direct-coupled via an optical system, acquiring a set of diagnostic parameters indicative of illumination source position drift from the diagnostic sample, determining a magnitude of the illumination source position drift by comparing the acquired set of diagnostic parameters to an initial set of parameters obtained from the diagnostic sample at a previously measured alignment condition, determining a direction of the illumination source position drift; and providing illumination source position adjustment parameters configured to correct the determined magnitude and direction of the illumination source position drift to the multi-axis actuation control system of the multi-axis stage.

    Abstract translation: 本发明可以包括将诊断样本加载到样本台上,将来自设置在多轴平台上的照明源的光聚焦到诊断样本上,利用检测器收集从诊断样品的表面反射的一部分光,其中 照明源和检测器通过光学系统光学直接耦合,获取指示来自诊断样本的照明源位置漂移的一组诊断参数,通过比较所获取的诊断参数集合来确定照明源位置漂移的大小 到在先前测量的对准条件下从诊断样本获得的初始参数集合,确定照明源位置漂移的方向; 以及提供照明源位置调整参数,其被配置为校正所确定的照明源位置漂移的大小和方向到所述多轴平台的多轴致动控制系统。

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