Etch resistant wafer processing apparatus and method for producing the same
    32.
    发明授权
    Etch resistant wafer processing apparatus and method for producing the same 失效
    耐蚀刻晶片处理装置及其制造方法

    公开(公告)号:US07446284B2

    公开(公告)日:2008-11-04

    申请号:US11322809

    申请日:2005-12-30

    IPC分类号: H05B3/68 H01L23/58

    摘要: A wafer processing apparatus is fabricated by depositing a film electrode onto the surface of a base substrate, the structure is then overcoated with a protective coating film layer comprising at least one of a nitride, carbide, carbonitride or oxynitride of elements selected from a group consisting of B, Al, Si, Ga, refractory hard metals, transition metals, and combinations thereof. The film electrode has a coefficient of thermal expansion (CTE) that closely matches the CTE of the underlying base substrate layer as well as the CTE of the protective coating layer.

    摘要翻译: 通过将膜电极沉积在基底表面上来制造晶片处理装置,然后用包括氮化物,碳化物,碳氮化物或氮氧化物中的至少一种的保护涂膜层进行外涂,所述元素选自: B,Al,Si,Ga,难熔硬金属,过渡金属及其组合。 膜电极具有与下层基底层的CTE以及保护涂层的CTE密切匹配的热膨胀系数(CTE)。

    PULSED-PLASMA SYSTEM WITH PULSED REACTION GAS REPLENISH FOR ETCHING SEMICONDUCTOR STRUCTURES
    33.
    发明申请
    PULSED-PLASMA SYSTEM WITH PULSED REACTION GAS REPLENISH FOR ETCHING SEMICONDUCTOR STRUCTURES 有权
    具有脉冲反应气体的脉冲等离子体系统用于蚀刻半导体结构

    公开(公告)号:US20080206901A1

    公开(公告)日:2008-08-28

    申请号:US11678047

    申请日:2007-02-22

    IPC分类号: H01L21/3065

    摘要: A pulsed plasma system with pulsed reaction gas replenish for etching semiconductor structures is described. In an embodiment, a portion of a sample is removed by applying a pulsed plasma etch process. The pulsed plasma etch process comprises a plurality of duty cycles, wherein each duty cycle represents the combination of an ON state and an OFF state of a plasma. The plasma is generated from a reaction gas, wherein the reaction gas is replenished during the OFF state of the plasma, but not during the ON state. In another embodiment, a first portion of a sample is removed by applying a continuous plasma etch process. The continuous plasma etch process is then terminated and a second portion of the sample is removed by applying a pulsed plasma etch process having pulsed reaction gas replenish.

    摘要翻译: 描述了一种具有脉冲反应气体的脉冲等离子体系统,用于蚀刻半导体结构。 在一个实施例中,通过施加脉冲等离子体蚀刻工艺去除一部分样品。 脉冲等离子体蚀刻工艺包括多个占空比,其中每个占空比表示等离子体的导通状态和断开状态的组合。 等离子体由反应气体产生,其中反应气体在等离子体的关闭状态期间补充,而不是在ON状态下补充。 在另一个实施例中,通过施加连续的等离子体蚀刻工艺来移除样品的第一部分。 然后连续等离子体蚀刻工艺终止,通过施加具有脉冲反应气体补充的脉冲等离子体蚀刻工艺来除去样品的第二部分。

    PULSED-PLASMA SYSTEM FOR ETCHING SEMICONDUCTOR STRUCTURES
    34.
    发明申请
    PULSED-PLASMA SYSTEM FOR ETCHING SEMICONDUCTOR STRUCTURES 有权
    用于蚀刻半导体结构的脉冲等离子体系统

    公开(公告)号:US20080206900A1

    公开(公告)日:2008-08-28

    申请号:US11678041

    申请日:2007-02-22

    IPC分类号: H01L21/3065

    摘要: A pulsed plasma system for etching semiconductor structures is described. In one embodiment, a portion of a sample is removed by applying a pulsed plasma process, wherein the pulsed plasma process comprises a plurality of duty cycles. The ON state of a duty cycle is of a duration sufficiently short to substantially inhibit micro-loading in a reaction region adjacent to the sample, while the OFF state of the duty cycle is of a duration sufficiently long to substantially enable removal of a set of etch by-products from the reaction region. In another embodiment, a first portion of a sample is removed by applying a continuous plasma process. The continuous plasma process is then terminated and a second portion of the sample is removed by applying a pulsed plasma process.

    摘要翻译: 描述了用于蚀刻半导体结构的脉冲等离子体系统。 在一个实施例中,通过施加脉冲等离子体处理来去除样品的一部分,其中脉冲等离子体处理包括多个占空比。 占空比的导通状态具有足够短的持续时间,从而基本上抑制了与样品相邻的反应区域中的微负荷,同时占空比的关闭状态持续足够长,从而基本上能够去除一组 蚀刻来自反应区域的副产物。 在另一个实施方案中,通过施加连续的等离子体工艺来除去样品的第一部分。 然后连续等离子体处理被终止,并且通过施加脉冲等离子体工艺来除去样品的第二部分。

    Multiple service method and apparatus in a data only mobile telecommunication system
    35.
    发明授权
    Multiple service method and apparatus in a data only mobile telecommunication system 失效
    仅数据移动电信系统中的多业务方式和装置

    公开(公告)号:US07330487B2

    公开(公告)日:2008-02-12

    申请号:US10621395

    申请日:2003-07-18

    摘要: A method and apparatus for supporting a variety of service types in a CDMA2000 1xEV-DO mobile telecommunication system for high-speed data service in a radio communication environment. To receive multiple services according to a plurality of service types, an AT establishes a connection for the data service with a PDSN and configures a session for setting the plurality of service types having different traffic characteristics by the connection. The AT generates a plurality of service instances for the different service types according to the session configuration. It then exchanges data streams with the PDSN in a service instance corresponding to a currently provided service among the plurality of service instances.

    摘要翻译: 一种用于在无线电通信环境中用于高速数据业务的CDMA2000 1xEV-DO移动电信系统中支持各种业务类型的方法和装置。 为了根据多种服务类型接收多个服务,AT利用PDSN建立数据业务的连接,并通过连接配置会话,以设置具有不同业务特性的多种业务类型。 AT根据会话配置为不同的业务类型生成多个业务实例。 然后,它在与多个服务实例中的当前提供的服务相对应的服务实例中与PDSN交换数据流。

    POWER SUPPLY CONTROL APPARATUS AND METHOD FOR LINE CONNECTION TYPE FUEL CELL SYSTEM
    36.
    发明申请
    POWER SUPPLY CONTROL APPARATUS AND METHOD FOR LINE CONNECTION TYPE FUEL CELL SYSTEM 审中-公开
    用于线路连接型燃料电池系统的电源控制装置和方法

    公开(公告)号:US20070134528A1

    公开(公告)日:2007-06-14

    申请号:US11609254

    申请日:2006-12-11

    IPC分类号: H01M8/04 G05D11/00

    摘要: The present invention discloses a power supply apparatus and method for a line connection type fuel cell system. The power supply apparatus for the line connection type fuel cell system includes: a storing unit for pre-storing a normal region and a warning region according to an operating condition of a fuel cell and a correlation between an output voltage and an output current of the fuel cell; a detecting unit for detecting a common power current; and a control unit for detecting an operating point of the fuel cell, and outputting a control signal for varying the output current of the fuel cell on the basis of the position of the detected operating point and detection or non-detection of the common power current.

    摘要翻译: 本发明公开了一种线路连接型燃料电池系统的供电装置及方法。 线路连接型燃料电池系统的供电装置包括:根据燃料电池的运行状态预存储正常区域和警告区域的存储单元,以及输出电压与输出电流之间的相关性 燃料电池; 用于检测公共功率电流的检测单元; 以及控制单元,用于检测燃料电池的工作点,并且根据检测到的工作点的位置和公共电力电流的检测或不检测输出用于改变燃料电池的输出电流的控制信号 。

    FUEL CELL HAVING WATER TYPE RADIATING DEVICE
    37.
    发明申请
    FUEL CELL HAVING WATER TYPE RADIATING DEVICE 审中-公开
    具有水型放射性装置的燃料电池

    公开(公告)号:US20070042238A1

    公开(公告)日:2007-02-22

    申请号:US11466057

    申请日:2006-08-21

    申请人: Tae-Won KIM Hong CHOI

    发明人: Tae-Won KIM Hong CHOI

    IPC分类号: H01M8/24

    摘要: A fuel cell having a water type radiating device comprising a fuel supply unit for supplying a certain rate of fuel, a reformer for generating a hydrogen containing gas containing a hydrogen gas by receiving the fuel from the fuel supply unit, a stack unit for generating an electricity and heat according to an electrochemical reaction between the hydrogen containing gas generated from the reformer and oxygen separately supplied a water tank connected to one side of the stack unit for heating water contained therein by use of the heat generated from the stack unit, a power converter connected to one side of the stack unit for converting the electricity generated from the stack unit into an alternating current and having a plurality of radiating plates, and a forcible radiating unit for forcibly cooling the radiating plates and for heating the water contained in the water tank.

    摘要翻译: 一种具有水型辐射装置的燃料电池,其包括用于提供一定速率的燃料的燃料供给单元,用于通过从燃料供应单元接收燃料来产生包含氢气的含氢气体的重整器, 根据由重整器产生的含氢气体和氧气之间的电化学反应的电和热,分别供应连接到堆叠单元的一侧的水箱,用于通过使用从堆叠单元产生的热量来加热其中所含的水, 连接到堆叠单元的一侧的转换器,用于将从堆叠单元产生的电力转换为交流电并具有多个散热板;强制辐射单元,用于强制冷却散热板并加热包含在水中的水 坦克。

    Method for forming a planarized layer of a semiconductor device
    39.
    发明授权
    Method for forming a planarized layer of a semiconductor device 有权
    用于形成半导体器件的平坦化层的方法

    公开(公告)号:US07008755B2

    公开(公告)日:2006-03-07

    申请号:US10464645

    申请日:2003-06-19

    IPC分类号: G03F7/00 G03F7/36

    摘要: In a method for forming a planarized layer on a semiconductor device having concave and convex structures, a dielectric film is formed on a semiconductor substrate; a photoresist pattern is formed to have a thickness on a portion of the dielectric film other than a convex portion greater than h/n (h and n are real numbers of one or more) to remove the convex portion of the dielectric film by a depth of approximately h. The photoresist pattern is re-flowed to have a thickness below h/n at a portion from an edge of the convex portion to a slant portion of the dielectric film. The dielectric film is etched using an etchant having a selectivity of 1:n between the photoresist pattern and the dielectric film. An edge of the photoresist pattern is made thin by re-flowing thereby minimizing a pillar, hence allowing simple, fast, planarization of the dielectric film.

    摘要翻译: 在具有凹凸结构的半导体器件上形成平坦化层的方法中,在半导体衬底上形成电介质膜; 光致抗蚀剂图案形成为具有除了大于h / n(h和n为一个或多个的实数)的凸部以外的电介质膜的一部分上的厚度,以将电介质膜的凸部去除深度 大约h。 在从凸部的边缘到电介质膜的倾斜部分的部分,光致抗蚀剂图案被重新流动以具有低于h / n的厚度。 使用在光致抗蚀剂图案和电介质膜之间具有1:n选择性的蚀刻剂来蚀刻电介质膜。 通过再流动使光致抗蚀剂图案的边缘变薄,从而使柱最小化,从而允许简单,快速地平坦化介电膜。

    Method and system for forming and transmitting/receiving neighbor base station information in a BWA communication system
    40.
    发明申请
    Method and system for forming and transmitting/receiving neighbor base station information in a BWA communication system 有权
    在BWA通信系统中形成和发送/接收邻近基站信息的方法和系统

    公开(公告)号:US20060040699A1

    公开(公告)日:2006-02-23

    申请号:US11205738

    申请日:2005-08-17

    IPC分类号: H04Q7/20

    摘要: Disclosed is a method and system for forming and transmitting to an MS a broadcast message for notifying information of neighbor BSs in a BWA communication system. The method includes scanning neighbor base stations adjacent to the serving base station, collecting information of the scanned neighbor base stations, comparing a size of the information of the scanned neighbor base stations with a size of a frame for carrying the information of the neighbor base stations constructing at least one broadcast message that includes the information of the neighbor base stations according to a result of the comparison, setting up fields of the constructed broadcast message according to information included in the constructed broadcast message and broadcasting the broadcast message including the setup fields.

    摘要翻译: 公开了一种用于向MS形成和发送用于在BWA通信系统中通知相邻BS的信息的广播消息的方法和系统。 该方法包括扫描与服务基站相邻的相邻基站,收集扫描的相邻基站的信息,将扫描的相邻基站的信息的大小与用于携带相邻基站的信息的帧的大小进行比较 根据比较结果构建包括邻近基站的信息的至少一个广播消息,根据构成的广播消息中包含的信息,建立构成的广播消息的字段,并广播包括设置字段的广播消息。