Ink-jet printing head and ink-jet printing apparatus using same
    31.
    发明授权
    Ink-jet printing head and ink-jet printing apparatus using same 有权
    喷墨打印头和使用其的喷墨打印设备

    公开(公告)号:US5984459A

    公开(公告)日:1999-11-16

    申请号:US144459

    申请日:1998-09-01

    IPC分类号: B41J2/14 B41J2/045

    摘要: An ink-jet printing head and an ink-jet printing apparatus using the same, the ink-jet head comprising a piezoelectric element, a vibrating plate constituting a part of a pressure generating chamber communicating with a nozzle aperture, a lower electrode, a piezoelectric layer, and an upper electrode, wherein said vibrating plate in an area opposite to the vicinity of at least one end in the longitudinal direction of a piezoelectric active part which is an area in which said piezoelectric layer substantially drives said vibrating plate is convex on the reverse side to said piezoelectric element.

    摘要翻译: 喷墨打印头和使用其的喷墨打印装置,喷墨头包括压电元件,构成与喷嘴孔连通的压力产生室的一部分的振动板,下电极,压电 层和上电极,其中所述振动板在与所述压电层基本上驱动所述振动板的区域中的压电有源部分的纵向方向上的至少一端附近相反的区域中是凸起的 与所述压电元件相反。

    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS
    32.
    发明申请
    LIQUID EJECTING HEAD AND LIQUID EJECTING APPARATUS 有权
    液体喷射和液体喷射装置

    公开(公告)号:US20120062655A1

    公开(公告)日:2012-03-15

    申请号:US13299693

    申请日:2011-11-18

    IPC分类号: B41J2/04

    摘要: A liquid ejecting head that includes a fluid channel formation substrate and pressure generation units. The fluid channel formation substrate is made of a silicon single crystal substrate having a crystal face orientation of. The fluid channel formation substrate has a plurality of separate flow channels that include at least pressure generation chambers demarcated by partition walls, each of the pressure generation chambers being in communication with a nozzle opening that ejects liquid drops. The fluid channel formation substrate further has a communication portion that is in communication with each of the separate flow channels. The pressure generation units are provided so as to correspond to the pressure generation chambers and generate a pressure change in the pressure generation chambers so as to cause ejection of liquid drops.

    摘要翻译: 一种液体喷射头,其包括流体通道形成基板和压力产生单元。 流体通道形成基板由具有晶面取向的硅单晶基板制成。 流体通道形成基板具有多个单独的流动通道,至少包括通过分隔壁划分的压力产生室,每个压力产生室与喷射液滴的喷嘴开口连通。 流体通道形成基板还具有与每个分离的流动通道连通的通信部分。 压力发生单元设置成对应于压力产生室,并且在压力产生室中产生压力变化,从而引起液滴喷射。

    Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
    35.
    发明授权
    Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效
    喷墨记录头,其制造方法和喷墨记录装置

    公开(公告)号:US07135121B2

    公开(公告)日:2006-11-14

    申请号:US10754712

    申请日:2004-01-12

    IPC分类号: B41J2/04 H01L21/00

    摘要: A manufacturing method of an ink-jet recording head for improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof. The manufacturing method includes the steps of: forming a passage-forming layer on a passage-forming substrate and imparting etching selectivity to a region that will be a space portion of the passage-forming layer; forming a vibration plate on the passage-forming layer and a piezoelectric element; performing anisotropic etching on the passage-forming substrate to form a penetrated portion at least to a region that will be the space portion, etching the passage-forming layer to form the space portion, and forming a pressure generating chamber opposite the space portion; and joining a nozzle plate to the passage-forming substrate.

    摘要翻译: 一种用于提高压电元件和压力发生室之间的相对位置精度的喷墨记录头的制造方法,以改善喷墨特性和稳定性。 该制造方法包括以下步骤:在通道形成基板上形成通道形成层,并且对通道形成层的空间部分的区域赋予蚀刻选择性; 在通道形成层上形成振动板和压电元件; 在所述通道形成基板上进行各向异性蚀刻,至少形成到所述空间部分的区域,蚀刻所述通道形成层以形成所述空间部分,以及形成与所述空间部分相对的压力产生室; 并将喷嘴板接合到通道形成基板。

    Method of manufacturing an ink jet recording head
    36.
    发明授权
    Method of manufacturing an ink jet recording head 失效
    制造喷墨记录头的方法

    公开(公告)号:US06910272B2

    公开(公告)日:2005-06-28

    申请号:US10745678

    申请日:2003-12-29

    摘要: A method of forming an ink jet recording head having a passage forming substrate made of a silicon monocrystalline substrate, having pressure generating chambers communicating with nozzle orifices, and having piezoelectric elements. Grooves, extending in the longitudinal direction, are formed on both sides of a region where the pressure generating chamber is to be formed in a surface of the passage forming substrate. Etching stop layers are provided to restrict the etching of the passage forming substrate. Pressure generating chambers are formed by etching out at least a vibration plate side of the passage forming substrate by an etching process so that the etching stop layers are exposed. Piezoelectric elements are formed by successively laminating a lower electrode, piezoelectric layer, and an upper electrode on the passage forming substrate.

    摘要翻译: 一种形成具有由硅单晶衬底制成的通道形成衬底的喷墨记录头的方法,具有与喷嘴孔连通并具有压电元件的压力产生室。 在长度方向延伸的槽形成在通道形成基板的表面上形成压力发生室的区域的两侧。 提供蚀刻停止层以限制通道形成基板的蚀刻。 通过蚀刻处理使通道形成基板的至少一个振动板侧蚀刻,使得蚀刻停止层露出而形成压力发生室。 通过在通道形成基板上依次层叠下电极,压电层和上电极来形成压电元件。

    Ink-jet recording head having a vibration plate prevented from being damaged and ink-jet recording apparatus for using the same
    37.
    发明授权
    Ink-jet recording head having a vibration plate prevented from being damaged and ink-jet recording apparatus for using the same 有权
    具有防止损坏的振动板的喷墨记录头和使用它的喷墨记录装置

    公开(公告)号:US06869170B2

    公开(公告)日:2005-03-22

    申请号:US09977197

    申请日:2001-10-16

    IPC分类号: B41J2/14 B41J2/16 B41J2/045

    摘要: Provided is an ink-jet recording head that prevents a vibration plate thereof from damage attributed to drive of a piezoelectric element, and an ink-jet recording apparatus. There are provided within a region facing the pressure generating chamber, a piezoelectric active portion, and a piezoelectric non-active portions, the piezoelectric non-active portions being provided on both end portions of the piezoelectric active portion in a longitudinal direction thereof. An electrode wiring is drawn out of an upper electrode which is provided on one end portion in the longitudinal direction of the pressure generating chamber. There is also provided a protection layer on the other end portion in the longitudinal direction of the pressure generating chamber for protecting the vibration plate. Rigidity of the vibration plate is thereby increased.

    摘要翻译: 提供了防止其振动板由于压电元件的驱动而引起的损坏的喷墨记录头和喷墨记录装置。 设置在面向压力发生室的区域,压电有源部分和压电非有效部分中,压电非有效部分沿其纵向方向设置在压电有源部分的两端部分上。 从设置在压力发生室的长度方向的一个端部的上部电极引出电极配线。 在压力发生室的长度方向的另一端部还设有用于保护振动板的保护层。 因此振动板的刚度增加。

    Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus
    38.
    发明授权
    Ink-jet recording head, manufacturing method of the same and ink-jet recording apparatus 失效
    喷墨记录头,其制造方法和喷墨记录装置

    公开(公告)号:US06712456B2

    公开(公告)日:2004-03-30

    申请号:US09756292

    申请日:2001-01-09

    IPC分类号: B41J2045

    摘要: Disclosed is an ink-jet recording head improving relative positional accuracy between a piezoelectric element and a pressure generating chamber to improve ink ejection characteristics and stability thereof, capable of arraying pressure generating chambers in high density, and reducing cross talk between the pressure generating chambers. Moreover, disclosed are a manufacturing method of the same and an ink-jet recording apparatus having the ink-jet recording head built therein. The ink-jet recording head comprises: a passage-forming substrate 10 having a pressure generating chamber 11 formed therein, which communicates with a nozzle orifice; and a piezoelectric element 300 formed of a thin film and by a lithography method in a region corresponding to the pressure generating chamber 11 via a vibration plate constituting a portion of the pressure generating chamber 11. The ink-jet recording head is characterized in that a space portion 41 communicating with the pressure generating chamber 11 and having at least one surface constituted of the vibration plate is provided in the region between the passage-forming substrate 10 and the vibrating plate, the region being opposite the pressure generating chamber 11, and at least a width of the pressure generating chamber 11 close to the space portion 41, is set to be equal to a width of the space portion 41 or less, thus relative positional accuracy between the pressure generating chamber 11 and the piezoelectric element 300 is improved.

    摘要翻译: 公开了一种提高压电元件和压力发生室之间的相对位置精度的喷墨记录头,以改善喷墨特性和稳定性,能够以高密度排列压力发生室,并减少压力产生室之间的串扰。 此外,公开了其制造方法以及其中内置喷墨记录头的喷墨记录装置。喷墨记录头包括:具有形成在其中的压力发生室11的通道形成基板10, 其与喷嘴孔连通; 以及压电元件300,其通过构成压力发生室11的一部分的振动板,在与压力发生室11对应的区域中由薄膜和平版印刷法形成。喷墨记录头的特征在于, 与压力发生室11连通并且具有由振动板构成的至少一个表面的空间部分41设置在通道形成基板10和振动板之间的区域中,该区域与压力产生室11相对,并且在 靠近空间部41的压力发生室11的最小宽度被设定为等于空间部41的宽度以下,从而提高了压力发生室11与压电元件300之间的相对位置精度。

    Ink jet recording head and ink jet recorder
    40.
    发明授权
    Ink jet recording head and ink jet recorder 失效
    喷墨记录头和喷墨记录器

    公开(公告)号:US06315400B1

    公开(公告)日:2001-11-13

    申请号:US09242964

    申请日:1999-06-16

    IPC分类号: B41J2045

    摘要: The present invention relates to an ink-jet recording head and an ink-jet recording device wherein peeling, a crack etc. at the end of a piezoelectric active part can be prevented. In an ink-jet recording head provided with a diaphragm constituting a part of a pressure generating chamber communicating with a nozzle aperture and a piezoelectric element formed on the diaphragm and provided with the piezoelectric active part of the piezoelectric element in an area opposite to the pressure generating chamber, a vibration regulating part for partially regulating vibration at least in a part of the diaphragm in the vicinity of a boundary with the peripheral wall of the pressure generating chamber is provided.

    摘要翻译: 本发明涉及喷墨记录头和喷墨记录装置,其中可以防止在压电有源部分的末端处剥离,裂纹等。 在设置有构成与喷嘴孔连通的压力发生室的一部分的膜片的喷墨记录头和形成在膜片上的压电元件,并且在与压力相反的区域中设置压电元件的压电有源部分 提供了一种用于在与压力发生室的周壁的边界附近至少在隔膜的一部分中部分调节振动的振动调节部件。