公开(公告)号：US20150155192A1

公开(公告)日：2015-06-04

申请号：US14541934

申请日：2014-11-14

Applicant: Brooks Automation, Inc.

Inventor： Ulysses Gilchrist ,  Michael L. Bufano ,  William Fosnight ,  Christopher Hofmeister ,  Gerarld M. Friedman

IPC: H01L21/677 ,  H01L21/673

CPC classification number: H01L21/67763 ,  H01L21/67326 ,  H01L21/67353 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/6779 ,  Y10S414/139

Abstract: A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

Abstract translation: 提供了一种基板输送装置。 该装置具有外壳和门。 壳体适于在其中形成受控的环境。 壳体具有用于在壳体中保持至少一个基板的支撑。 壳体限定衬底传送开口，衬底传送系统通过该衬底传送系统访问壳体中的衬底。 门连接到壳体以封闭壳体中的基板传送开口。 壳体具有形成快速互换元件的结构，其允许用另一个基板从设备更换基板，而不会退回基板输送系统，而与壳体中的基板负载无关。

公开(公告)号：US20140161570A1

公开(公告)日：2014-06-12

申请号：US14180876

申请日：2014-02-14

Applicant: Brooks Automation, Inc.

Inventor： Christopher Hofmeister ,  Robert T. Caveney

IPC: H01L21/67

CPC classification number: H01L21/67161 ,  H01L21/67173 ,  H01L21/67709 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  Y10S414/139

Abstract: A substrate processing apparatus is presented having a transport chamber defining substantially linear substrate transport paths, a linear array of substrate holding modules, each communicably connected to the chamber. The substrate transport has at least one transporter capable of holding and moving the substrate on more than one substantially linear substrate transport paths. The transport chamber having different transport tubes at least one of which is sealable at both ends of the transport tube and configured to hold an isolated atmosphere different from that of the transport tubes, each of the different transport tubes having one of the substrate transport paths located therein different from another of the transport paths located in another of the transport tubes, and being communicably connected to each other, where at least one of the transport tubes is configured to provide uninterrupted transit of the substrate transport through the transport tubes.

Abstract translation: 提供了一种具有限定基本上线性的基板输送路径的输送室的衬底处理装置，每个可连接到腔室的衬底保持模块的线性阵列。 衬底传输具有至少一个能够在多于一个基本上线性的衬底传送路径上保持和移动衬底的传送器。 运输室具有不同的输送管，其至少一个可在输送管的两端密封，并且构造成保持与输送管不同的隔离气氛，每个不同的输送管具有一个基板输送路径 其中不同于位于另一个输送管中的另一个输送路径，并且彼此可连通地连接，其中至少一个输送管被配置为提供基板输送通过输送管的不间断过境。

公开(公告)号：US20130230369A1

公开(公告)日：2013-09-05

申请号：US13764373

申请日：2013-02-11

Applicant: BROOKS AUTOMATION, INC.

Inventor： Christopher Hofmeister ,  Robert T. Caveney

IPC: H01L21/677

CPC classification number: H01L21/677 ,  H01L21/67161 ,  H01L21/67167 ,  H01L21/67173 ,  H01L21/67184 ,  H01L21/67709 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/67742 ,  H01L21/67766 ,  Y10S414/139

Abstract: A substrate processing apparatus including a transport chamber having an end and defining more than one substantially linear substrate transport zone where each transport zone extends longitudinally along the transport chamber between opposing walls of the transport chamber and at least one of the more than one substantially linear substrate transport zones is configured as a supply zone for enabling transport of substrates from the end and at least one of the more than one substantially linear substrate transport zones is configured as a return zone for enabling transport of substrates to the end, and at least one substrate transport located in and movably mounted to the transport chamber for transporting substrates along the more than one substantially linear substrate transport zone, where each substrate transport zone is configured to allow the at least one substrate transport to move from one transport zone to another transport zone.

Abstract translation: 一种基板处理设备，包括具有端部并且限定多于一个基本上线性的基板输送区域的输送室，其中每个输送区域沿着输送室在输送室的相对壁之间纵向延伸，并且多于一个基本上线性的基板 运输区域被配置为用于使得能够从端部传送基板的供应区域，并且多于一个的基本线性的基板输送区域中的至少一个被配置为用于使基板传送到端部的返回区域，以及至少一个基板 位于并可移动地安装到输送室的输送器，用于沿着多于一个的基本上线性的基底输送区输送基底，其中每个基底输送区被配置为允许至少一个基底输送从一个输送区移动到另一个输送区。

公开(公告)号：US20130089396A1

公开(公告)日：2013-04-11

申请号：US13625442

申请日：2012-09-24

Applicant: Brooks Automation, Inc.

Inventor： Michael L. Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert C. May

IPC: H01L21/677

CPC classification number: H01L21/67733 ,  H01L21/67017 ,  H01L21/67126 ,  H01L21/67201 ,  H01L21/67276 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67757 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775

Abstract: In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

Abstract translation: 根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分 定义旅行方向。 第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。 当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。 第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。