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    METHOD OF MAKING A MAGNETORESISTIVE READER STRUCTURE
    31.
    发明申请
    METHOD OF MAKING A MAGNETORESISTIVE READER STRUCTURE 审中-公开
    制造磁化读取器结构的方法

    公开(公告)号：US20090266790A1

    公开(公告)日：2009-10-29

    申请号：US12110388

    申请日：2008-04-28

    申请人： Hamid Balamane ,  Jordan A. Katine ,  Jui-Lung Li ,  Neil L. Robertson

    发明人： Hamid Balamane ,  Jordan A. Katine ,  Jui-Lung Li ,  Neil L. Robertson

    IPC分类号： B44C1/22

    CPC分类号： G11B5/3163 ,  G11B5/3903

    摘要： A method of making a magnetoresistive sensor includes defining a track width of a magnetoresistive element stack of the sensor with a hard mask and photoresist. Further, processes of the method enable depositing of hard magnetic bias material on each side of the stack after the hard mask used to define the track width is removed. A separate chemical mechanical polishing (CMP) stop layer that is different from the hard mask enables subsequent creating of a planar surface via CMP to remove unwanted material on top of the sensor stack.

    摘要翻译： 制造磁阻传感器的方法包括用硬掩模和光致抗蚀剂限定传感器的磁阻元件堆的轨道宽度。 此外，该方法的过程使得在用于限定轨道宽度的硬掩模被去除之后，能够在堆叠的每一侧上沉积硬磁偏置材料。 与硬掩模不同的单独的化学机械抛光（CMP）停止层可以随后通过CMP产生平坦表面以去除传感器堆叠顶部的不需要的材料。

    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby
    32.
    发明授权
    Lift-off method for forming write pole of a magnetic write head and write pole formed thereby 失效
    用于形成磁写头和由此形成的写磁极的写极的剥离方法

    公开(公告)号：US07554764B2

    公开(公告)日：2009-06-30

    申请号：US11399820

    申请日：2006-04-07

    申请人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

    发明人： Hamid Balamane ,  Jyh-Shuey Lo ,  Yi Zheng

    IPC分类号： G11B5/147

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  Y10T29/49043

    摘要： A lift-off method for forming write pole of a magnetic write head and write pole formed thereby is disclosed. A write pole including a hard mask on a top portion of the write pole is formed. A layer of material for reinforcing sidewall fencing of the write pole is deposited. Portions of the layer of material on top of the write pole are removed while the layer of material at the sidewall fencing is left to provide support to the sidewall fencing.

    摘要翻译： 公开了一种用于形成磁写头和由此形成的写磁极的写极的剥离方法。 形成在写入极的顶部包括硬掩模的写入极。 一层用于加强写柱的侧壁围栏的材料被沉积。 除去写磁极顶部的材料层的部分，同时留下侧壁围栏处的材料层以向侧壁围栏提供支撑。

    Process to open connection vias on a planarized surface
    33.
    发明授权
    Process to open connection vias on a planarized surface 有权
    在平坦化表面上打开连接通孔的过程

    公开(公告)号：US07523550B2

    公开(公告)日：2009-04-28

    申请号：US11411555

    申请日：2006-04-25

    申请人： Amanda Baer ,  Hamid Balamane ,  Michael Feldbaum ,  Ming Jiang ,  Aron Pentek

    发明人： Amanda Baer ,  Hamid Balamane ,  Michael Feldbaum ,  Ming Jiang ,  Aron Pentek

    IPC分类号： H01K3/10

    CPC分类号： G11B5/3163 ,  G11B5/1278 ,  G11B5/3116 ,  Y10T29/49021 ,  Y10T29/49032 ,  Y10T29/49044 ,  Y10T29/49126 ,  Y10T29/49139 ,  Y10T29/49153 ,  Y10T29/49155 ,  Y10T29/49165 ,  Y10T29/49169

    摘要： A method for forming a via in an alumina protective layer on a structure such as a magnetic write head for use in perpendicular magnetic recording. A structure such as a magnetic pole, and or magnetic trailing shield, is formed over a substrate and is covered with a thick layer of alumina. The alumina layer can then be planarized by a chemical mechanical polishing process (CMP) and then a mask structure, such as a photoresist mask, is formed over the alumina layer. The mask structure is formed with an opening disposed over the contact pad. A reactive ion mill is then performed to remove portions of the alumina layer that are exposed at the opening in the mask, thereby forming a via in the alumina layer.

    摘要翻译： 在用于垂直磁记录的诸如磁写头的结构上的氧化铝保护层中形成通孔的方法。 诸如磁极和/或磁性后屏蔽的结构形成在衬底上并被厚层氧化铝覆盖。 然后可以通过化学机械抛光工艺（CMP）将氧化铝层平坦化，然后在氧化铝层上形成诸如光致抗蚀剂掩模的掩模结构。 掩模结构形成有设置在接触垫上方的开口。 然后执行反应离子研磨机以除去在掩模中的开口处暴露的部分氧化铝层，从而在氧化铝层中形成通孔。