摘要:
According to one embodiment, a device includes an insulating layer with a first trench, a first interconnect layer in the first trench, the first interconnect layer including copper and includes a concave portion, and a first graphene sheet on an inner surface of the concave portion.
摘要:
A semiconductor device according to the present embodiment includes a diamond substrate having a surface plane inclined from a (100) plane in a range of 10 degrees to 40 degrees in a direction of ±10 degrees, and an n-type diamond semiconductor layer containing phosphorus (P) and formed above the surface plane described above.
摘要:
A semiconductor device according to an embodiment, includes a catalytic metal film, a graphene film, a contact plug, and an adjustment film. The catalytic metal film is formed above a substrate. The graphene film is formed on the catalytic metal film. The contact plug is connected to the graphene film. The adjustment film is formed in a region other than a region connected to the contact plug of a surface of the graphene film to adjust a Dirac point position in a same direction as the region connected to the contact plug with respect to a Fermi level.
摘要:
A manufacturing method of a semiconductor substrate includes the following steps: forming a first wiring layer on a substrate; forming an interlayer insulating film having a via hole on the wiring layer; forming carbon nanotubes in the via hole; performing a fluorination treatment entirely to the substrate; forming an embedded film in the via hole having the carbon nanotubes therein; and polishing the substrate to entirely flatten the substrate.
摘要:
The invention provides an oil type release agent die casting containing 70 to 98 parts by weight of a solvent having a specified flash point, 1 to 10 parts by weight of mineral oils and/or synthetic oils having a high viscosity, 15 parts by weight or less of a silicone oil, and 1 to 5 parts by weight of additives having a lubricating function, wherein the flash point of the agent is in the range of 70 to 170° C., and dynamic viscosity of the agent is 2 to 30 mm2/s or higher at 40° C., and a method for setting a mixing ratio of the solvent, a casting method, and a spraying unit for the case of using the release agent.
摘要:
According to one embodiment, a carbon nanotube assembly includes a plurality of carbon nanotubes having a length of 10 μm or less in a major axis direction assembled with a space filling rate of 30% or more.