Semiconductor device and method for fabricating the same
    33.
    发明授权
    Semiconductor device and method for fabricating the same 有权
    半导体装置及其制造方法

    公开(公告)号:US08378335B2

    公开(公告)日:2013-02-19

    申请号:US13075591

    申请日:2011-03-30

    IPC分类号: H01L29/06

    摘要: A semiconductor device according to an embodiment, includes a catalytic metal film, a graphene film, a contact plug, and an adjustment film. The catalytic metal film is formed above a substrate. The graphene film is formed on the catalytic metal film. The contact plug is connected to the graphene film. The adjustment film is formed in a region other than a region connected to the contact plug of a surface of the graphene film to adjust a Dirac point position in a same direction as the region connected to the contact plug with respect to a Fermi level.

    摘要翻译: 根据实施例的半导体器件包括催化金属膜,石墨烯膜,接触插塞和调整膜。 催化金属膜形成在基板的上方。 在催化金属膜上形成石墨烯膜。 接触塞连接到石墨烯膜。 调整膜形成在与石墨烯膜的表面的接触插塞连接的区域以外的区域中,以相对于费米能级与连接到接触插塞的区域相同的方向调节狄拉克点位置。